CN105021324A - Micro mechanical pressure sensor - Google Patents
Micro mechanical pressure sensor Download PDFInfo
- Publication number
- CN105021324A CN105021324A CN201510419147.9A CN201510419147A CN105021324A CN 105021324 A CN105021324 A CN 105021324A CN 201510419147 A CN201510419147 A CN 201510419147A CN 105021324 A CN105021324 A CN 105021324A
- Authority
- CN
- China
- Prior art keywords
- unit
- pick
- pressure sensor
- mechanical pressure
- micro mechanical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Measuring Fluid Pressure (AREA)
Abstract
The invention provides a micro mechanical pressure sensor. The micro mechanical pressure sensor comprises a fixed structure (1), a mass block (2) which moves relative to the fixed structure (1), a detecting device (3) used for detecting the displacement of the mass block (2) relative to the fixed structure (1), a driving device (8) for driving the mass block (2) to move relative to the fixed structure (1), and a control device (4) used for controlling the detecting device (3) to output signals and providing input signals for the driving device (8). With the micro mechanical pressure sensor provided by the invention, real-time tracking and measurement of pressure can be realized. The micro mechanical pressure sensor of the invention has the advantages of simple structure, convenience in implementation, low power consumption and easiness in realizing integrated design.
Description
Technical field:
The present invention relates to a kind of silicon micropressure sensor, particularly a kind of micro mechanical pressure sensor.
Background technology:
Silicon micro-mechanical resonate pressure transducer based on micro electro mechanical system (MEMS) technology is one of pressure transducer that current precision is the highest, long-time stability are best, the characteristic dimension of this sensor is generally micron or sub-micrometer scale, employing silicon micro-machining technology manufactures, by detecting the natural frequency indirect inspection pressure of silicon micro mechanical sensitive resonant device or vibrating membrane, the digital signal that is as the criterion exports, be applicable to long-distance transmissions, Signal sampling and processing is convenient.Owing to working in mechanical resonant state, its precision is mainly by the impact of sensor mechanism characteristic, and therefore its signal to noise ratio (S/N ratio) is high, and antijamming capability is strong, stable performance.In many decades in the past, along with the progress of MEMS manufacturing process, the improvement of structural design and support circuit, resonance type pressure sensor obtains further raising in combination property.
Most of resonance type pressure sensor core body is made up of presser sensor diaphragm and a micro electromechanical structure comprising movable mass block.
When ambient pressure acts on sensitive diaphragm, sensitive diaphragm deforms, and displacement transfer to micro electromechanical structure makes the natural frequency of structure change, just can detected pressures by the frequency detecting this micro electromechanical structure.
In order to detect the frequency of micro electromechanical structure, needing certain pressure transducer to vibrate to make micro electromechanical structure, its natural frequency can be tested by the Vibration Condition testing micro electromechanical structure.
Document " soup Zhang Yang; Fan Shangchun; Cai Chenguang. a kind of novel silicon resonance type microsensor frequency characteristics measurement system, instrumental technique and sensor, 2009; supplementary issue; pp.239-240 " in, propose a kind of open-loop test system, utilize microprocessor to change the drive singal of frequency, and record the detection data of each Frequency point, the important parameter such as natural frequency and quality factor of sensor just can be obtained by analysis detecting data.This implementation method is fairly simple, but the single test duration is longer, cannot realize the real-time measurement of pressure.
Document " Li Haijuan; Zhou Haomin. Closed-loop system of silicon resonant pressure micro-sensor; BJ University of Aeronautics & Astronautics's journal; 2005, Vol.31, no.3; pp.332-335 " in, for the sensor construction of resistance heat excitation, piezovesistive detection, propose a kind of pressure transducer adopting phaselocked loop and frequency splitting technology, utilize phaselocked loop output as the drive singal of sensor.Adopt complicated structure in this way, and the noise of phaselocked loop can be introduced, affect the precision of sensor.
Summary of the invention:
The object of the present invention is to provide a kind of micro mechanical pressure sensor simple and reliable for structure.
For achieving the above object, the present invention adopts following technical scheme to be achieved:
A kind of micro mechanical pressure sensor, the mass comprising fixed sturcture and can move relative to this fixed sturcture, for the pick-up unit of Detection job block relative to fixed sturcture displacement, for driving mass generation relative to the drive unit of fixed sturcture displacement, output signal and the control device that input signal is provided to drive unit for controlling pick-up unit.
The present invention further improves and is, pick-up unit comprises charge amplifier or trans-impedance amplifier.
The present invention further improves and is, when pick-up unit comprises charge amplifier, this charge amplifier comprises operational amplifier and feedback condenser, and feedback condenser is configured between operational amplifier input and output; When pick-up unit comprises trans-impedance amplifier, this trans-impedance amplifier comprises operational amplifier and feedback resistor, and feedback resistor is configured between operational amplifier input and output.
The present invention further improves and is, when pick-up unit comprises charge amplifier, also comprises phase shifter in control device.
The present invention further improves and is, pick-up unit is capacitively of coupled connections by its test side and mass; Drive unit its be capacitively of coupled connections by drive end and mass.
The present invention further improves and is, control device is for controlling the amplitude of pick-up unit output signal, comprise the rectifier, low-pass filter and the variable gain amplifier that connect successively, wherein, pick-up unit exports and connects rectifier input and variable gain amplifier input end, variable gain amplifier output terminal connecting drive device input end.
The present invention further improves and is, also comprises reading device, and the input end of this reading device is connected with the output of pick-up unit, or is connected with the output of drive unit, or is connected with the output of control device.
The present invention further improves and is, this reading device comprises comparer, for changing the output signal of reading device into square wave voltage signal.
The present invention further improves and is, input signal and the output signal of pick-up unit, control device and drive unit are respectively single-ended signal, or is the double-end signal of differential type.
Relative to prior art, the present invention has following beneficial effect:
During micro mechanical pressure sensor work provided by the invention, the driving AC signal that drive unit produces is carried on its drive end, capacitively between drive end and mass to be of coupled connections, be carried in the vibration that the driving AC signal on drive end will drive mass to produce horizontal direction, the coupling capacitance made between its test side with mass is exchanged change by this vibration, and pick-up unit is for detecting the coupling capacitance of this change and being changed into the voltage exchanging change; The voltage that pick-up unit exports is input to the process carrying out amplitude and phase place in control device, treated alternating voltage as control device output and be input in drive unit, drive unit further can amplify process to alternating voltage, and this alternating voltage is just carried on drive end as the output of drive unit afterwards.
Further, the rectifier that control device comprises, low-pass filter and variable gain amplifier are for the treatment of the amplitude of alternating voltage, and phase shifter is for the treatment of the phase place of alternating voltage.
This shows that micro mechanical pressure sensor provided by the invention forms a closed circuit, and this closed circuit operationally can form a self-oscillatory system, the oscillation amplitude of this self oscillatory system can be controlled by control device, and frequency is controlled by the micro electromechanical structure comprising movable mass block.
When sensor is used for test pressure, pressure can cause the natural frequency of micro electromechanical structure to change, and the oscillation frequency of this self oscillatory system is determined by the natural frequency of micro electromechanical structure, therefore the vibration frequency of system will follow its frequency automatically, realizes the real-time measurement of pressure.
In sum, a kind of micro mechanical pressure sensor provided by the invention can realize the real-time follow-up of sensor to pressure.And structure of the present invention is comparatively simple, and realize more convenient, power consumption is lower, is easy to realize Integration Design.
Accompanying drawing illustrates:
Fig. 1 is the structured flowchart of the embodiment of the present invention 1.
Fig. 2 is the structured flowchart of the embodiment of the present invention 2.
Embodiment:
Below in conjunction with drawings and Examples, the present invention is described in further detail.
Embodiment 1:
Figure 1 shows that first embodiment of micro mechanical pressure sensor of the present invention, the mass 2 comprising fixed sturcture 1 and can move relative to fixed sturcture 1, for the pick-up unit 3 of Detection job block 2 relative to fixed sturcture 1 displacement, for driving mass 2 to produce drive unit 8 relative to fixed sturcture 1 displacement, output signal and the control device 4 that input signal is provided to drive unit 8 for controlling pick-up unit 3; Wherein, drive unit 8 is connected with fixed sturcture 1 by drive end 12, and pick-up unit 3 is connected with fixed sturcture 1 by test side 9, and mass 2 forms single-ended variable capacitance 11 and variable capacitance 10 with drive end 12 and test side 9 respectively.Control device 4 comprises rectifier 5, low-pass filter 6 and variable gain amplifier 7.In this example, pick-up unit 3 is made up of trans-impedance amplifier, not containing phase shifter in control device 4.The input of reading device 13 is connected with the output of control device 4.The output of reading device 13 is square wave voltage signal.
Embodiment 2
Figure 2 shows that second embodiment of micro mechanical pressure sensor of the present invention, the mass 2 comprising fixed sturcture 1 and can move relative to fixed sturcture 1, for the pick-up unit 3 of Detection job block 2 relative to fixed sturcture 1 displacement, for driving mass 2 to produce drive unit 8 relative to fixed sturcture 1 displacement, output signal and the control device 4 that input signal is provided to drive unit 8 for controlling pick-up unit 3; Wherein, drive unit 8 is connected with fixed sturcture 1 with drive end 12b by two drive end 12a, pick-up unit is connected with fixed sturcture 1 with test side 9b by two test side 9a, mass 2 forms variable capacitance 11a and the variable capacitance 11b of differential type respectively with drive end 12a and drive end 12b, namely variable capacitance 11a and variable capacitance 11b changes in the opposite direction.Mass 2 forms variable capacitance 10a and the variable capacitance 10b of differential type respectively with test side 9a and test side 9b, namely variable capacitance 10a and variable capacitance 10b changes in the opposite direction.
Control device 4 comprises rectifier 5, low-pass filter 6 and variable gain amplifier 7 and phase shifter 14.In this example, pick-up unit 3 is made up of charge amplifier, also comprises phase shifter in control device 4.The input of reading device 13 is connected with the output of control device 4.The output of reading device 13 is square wave voltage signal.
Claims (9)
1. a micro mechanical pressure sensor, it is characterized in that, the mass (2) comprising fixed sturcture (1) and can move relative to this fixed sturcture (1), for the pick-up unit (3) of Detection job block (2) relative to fixed sturcture (1) displacement, for driving mass (2) generation relative to the drive unit (8) of fixed sturcture (1) displacement, output signal and the control device (4) that input signal is provided to drive unit (8) for controlling pick-up unit (3).
2. micro mechanical pressure sensor according to claim 1, is characterized in that, pick-up unit (3) comprises charge amplifier or trans-impedance amplifier.
3. micro mechanical pressure sensor according to claim 2, it is characterized in that, when pick-up unit (3) comprises charge amplifier, this charge amplifier comprises operational amplifier and feedback condenser, and feedback condenser is configured between operational amplifier input and output; When pick-up unit (3) comprises trans-impedance amplifier, this trans-impedance amplifier comprises operational amplifier and feedback resistor, and feedback resistor is configured between operational amplifier input and output.
4. the micro mechanical pressure sensor according to Claims 2 or 3, is characterized in that, when pick-up unit (3) comprises charge amplifier, also comprises phase shifter (14) in control device (4).
5. micro mechanical pressure sensor according to claim 1, is characterized in that, pick-up unit (3) is capacitively of coupled connections by its test side (9) and mass (2); Drive unit (8) its be capacitively of coupled connections by drive end (12) and mass (2).
6. micro mechanical pressure sensor according to claim 1, it is characterized in that, the amplitude that control device (4) outputs signal for controlling pick-up unit (3), comprise the rectifier (5), low-pass filter (6) and the variable gain amplifier (7) that connect successively, wherein, pick-up unit (3) exports and connects rectifier (5) input end and variable gain amplifier (7) input end, variable gain amplifier (7) output terminal connecting drive device (8) input end.
7. micro mechanical pressure sensor according to claim 1, it is characterized in that, also comprise reading device (10), the input end of this reading device (10) is connected with the output of pick-up unit (3), or be connected with the output of drive unit (8), or be connected with the output of control device (4).
8. micro mechanical pressure sensor according to claim 7, is characterized in that, this reading device (10) comprises comparer, for changing the output signal of reading device (10) into square wave voltage signal.
9. micro mechanical pressure sensor according to claim 1, it is characterized in that, input signal and the output signal of pick-up unit (3), control device (4) and drive unit (8) are respectively single-ended signal, or are the double-end signal of differential type.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510419147.9A CN105021324A (en) | 2015-07-16 | 2015-07-16 | Micro mechanical pressure sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510419147.9A CN105021324A (en) | 2015-07-16 | 2015-07-16 | Micro mechanical pressure sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN105021324A true CN105021324A (en) | 2015-11-04 |
Family
ID=54411462
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510419147.9A Pending CN105021324A (en) | 2015-07-16 | 2015-07-16 | Micro mechanical pressure sensor |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN105021324A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107255535A (en) * | 2017-05-31 | 2017-10-17 | 广西医科大学 | A kind of vibrating wire sensor frequency measuring method, device and equipment |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5417120A (en) * | 1993-06-07 | 1995-05-23 | Allied-Signal Inc. | Vibrating beam force transducer with automatic drive control |
| CN1796952A (en) * | 2004-12-24 | 2006-07-05 | 清华大学 | Force sensor based on Micro-Nano composite structure |
| CN101860338A (en) * | 2010-06-03 | 2010-10-13 | 西北工业大学 | Closed-loop driving circuit for micromechanical resonance structure |
| CN102809450A (en) * | 2012-08-09 | 2012-12-05 | 厦门大学 | Silicon micro resonant type pressure sensor and manufacturing method thereof |
| CN103222002A (en) * | 2010-11-19 | 2013-07-24 | 惠普发展公司，有限责任合伙企业 | Circuit and method for reading a resistive switching device in an array |
| CN103281042A (en) * | 2013-05-16 | 2013-09-04 | 成都凯天电子股份有限公司 | Remote transmission IEPE type charge amplifier |
| CN103592061A (en) * | 2013-07-12 | 2014-02-19 | 西北工业大学 | High precision silicon micro resonant pressure transducer interface circuit |
| CN104764559A (en) * | 2015-03-20 | 2015-07-08 | 西北工业大学 | Closed-loop control circuit of silicon resonant pressure sensor and realization method thereof |
-
2015
- 2015-07-16 CN CN201510419147.9A patent/CN105021324A/en active Pending
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5417120A (en) * | 1993-06-07 | 1995-05-23 | Allied-Signal Inc. | Vibrating beam force transducer with automatic drive control |
| CN1796952A (en) * | 2004-12-24 | 2006-07-05 | 清华大学 | Force sensor based on Micro-Nano composite structure |
| CN101860338A (en) * | 2010-06-03 | 2010-10-13 | 西北工业大学 | Closed-loop driving circuit for micromechanical resonance structure |
| CN103222002A (en) * | 2010-11-19 | 2013-07-24 | 惠普发展公司，有限责任合伙企业 | Circuit and method for reading a resistive switching device in an array |
| CN102809450A (en) * | 2012-08-09 | 2012-12-05 | 厦门大学 | Silicon micro resonant type pressure sensor and manufacturing method thereof |
| CN103281042A (en) * | 2013-05-16 | 2013-09-04 | 成都凯天电子股份有限公司 | Remote transmission IEPE type charge amplifier |
| CN103592061A (en) * | 2013-07-12 | 2014-02-19 | 西北工业大学 | High precision silicon micro resonant pressure transducer interface circuit |
| CN104764559A (en) * | 2015-03-20 | 2015-07-08 | 西北工业大学 | Closed-loop control circuit of silicon resonant pressure sensor and realization method thereof |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107255535A (en) * | 2017-05-31 | 2017-10-17 | 广西医科大学 | A kind of vibrating wire sensor frequency measuring method, device and equipment |
| CN107255535B (en) * | 2017-05-31 | 2019-05-21 | 广西医科大学 | A kind of vibrating wire sensor frequency measuring method, device and equipment |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN103822623B (en) | A kind of oscillatory type silicon micromechanical gyro quadrature error closed loop compensation circuit | |
| CN110108266B (en) | Gyro real-time automatic closed-loop mode matching method based on mechanical VCO phase-locked loop | |
| CN103364593B (en) | Sensor circuit and method for testing MEMS (micro electro mechanical system) sensor | |
| CN102519444B (en) | The AGC self-sustained oscillation driving circuit of micro-solid mode gyroscope | |
| FI125238B (en) | Improved oscillating gyroscope | |
| CN104567849B (en) | A kind of silicon micro mechanical linearly coupled formula gyro and its bandwidth broadning method | |
| CN106885563B (en) | Micro-mechanical gyroscope closed-loop driving circuit capable of preventing electric oscillation | |
| CN104535057A (en) | Silicon micro mechanical vibrating gyroscope and orthoronal error rigidity correction method | |
| CN101799479A (en) | The vibration compensation that is used for speed probe | |
| CN110482479B (en) | Simplified MEMS multi-ring resonance gyroscope self-adaptive closed-loop control method | |
| CN103134484A (en) | Circuit and method for regulating detecting end resonant frequency of capacitor type micro-electromechanical systems (MEMS) gyroscope | |
| CN110108299A (en) | A kind of online self-calibration system of silicon micromechanical gyroscope constant multiplier | |
| CN105571612A (en) | Automatic testing method for key parameters of MEMS gyroscope structure | |
| CN102353384A (en) | Measuring method and system for bandwidth and scale factors of micromechanical gyro | |
| CN102607546B (en) | Orthogonal error processing method for micromechanical gyroscope and device | |
| CN108761134A (en) | A kind of linearisation output detecting method of weak coupling resonant transducer | |
| CN113155664B (en) | High-sensitivity weak gas detection device and detection method thereof | |
| CN109029409A (en) | Parameter amplification method and its device in a kind of tunable grid structure micromechanical gyro | |
| CN105021324A (en) | Micro mechanical pressure sensor | |
| CN1866747B (en) | Digital phase-locked closed-loop of resistance vibration pickup type silicon micromechanical resonant sensor | |
| CN117629163A (en) | MEMS gyroscope mode matching method and angular velocity reading method based on dual-mode simultaneous excitation | |
| CN107436144A (en) | The automatic circuit for eliminating gyroscope quadrature error | |
| CN105043922A (en) | Two-parameter detection device and method for quartz crystal microbalance | |
| CN101984557B (en) | MEMS filter module working based on resonance theory | |
| CN103592061B (en) | High precision silicon micro resonant pressure transducer interface circuit |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| WD01 | Invention patent application deemed withdrawn after publication | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20151104 |