CN105006616B - A kind of THz wave time-domain spectral system based on ultra-wideband chip - Google Patents
A kind of THz wave time-domain spectral system based on ultra-wideband chip Download PDFInfo
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Abstract
The THz wave time-domain spectral system based on ultra-wideband chip that the present invention provides a kind of, with substrate and metal layer, metal layer is for obtaining and conducting THz wave, including signal acquisition portion, first mode converter section, conducting part, second mode converter section and signal output section, first mode converter section, conducting part, second mode converter section is twi guide structure, signal acquisition portion is used to obtain THz wave from epigyny device, and THz wave is passed into first mode converter section and carries out mode conversion, become surface wave, surface wave transmits in the twin-guide in conducting part, band gap is formed to be filtered, mode conversion is carried out again through second mode converter section again, vector network analyzer is finally passed to by signal output section and carries out data analysis, obtain the width with passband.
Description
Technical field
The invention belongs to THz wave detection fields, and in particular to a kind of THz wave time domain frequency based on ultra-wideband chip
Spectra system.
Background technique
With the development of modern wireless communication technique, super wide frequency technology gets more and more people's extensive concerning in recent years.It is modern
For communication products using extremely wide, the frequency range that each product uses is different, to need a kind of width using these frequency bands simultaneously
The receive-transmit system of frequency.
Co-planar waveguide is the important means for realizing wide frequency technology.It is really surface plasmon resonance, is to exist
It, can be by incident light through prism-coupled, grating coupling in a kind of charge density oscillation eigen mode of metal and dielectric interface
It closes or waveguide coupling generates to excite.Ultra-wideband filter based on co-planar waveguide double-layer structure, by by two identical structures
Waveguide, flip vertical is simultaneously superimposed, and realizes the broadening of frequency band.
The working principle of the ultra-wideband filter of co-planar waveguide double-layer structure is：Incident light excites metallic film and dielectric
Interface generates surface plasma excimer.Although the waveguide filter and Goubau line knot of the surface plasma excimer of waveguide coupling
Structure has been a very mature technology in visible light wave range, but work is also seldom reported in the corresponding system of terahertz wave band, especially
It is that the ultra-wideband filter of Goubau line and the double-deck waveguiding structure is not related to also.
Summary of the invention
To solve the above-mentioned problems, the present invention provides a kind of THz wave time-domain spectral system based on ultra-wideband chip
System uses following technical solution：
THz wave time-domain spectral system provided by the invention based on ultra-wideband chip has such technical characteristic, tool
Have：Substrate and the metal layer being set on the upper surface of substrate.The metal layer includes：Signal acquisition portion is co-planar waveguide, uses
In obtaining THz wave from epigyny device, and it is translated into quasi- TEM wave mode；First mode converter section, with signal acquisition
Portion's connection, including Vivaldi antenna and the first twin-guide, Vivaldi antenna is used for and the impedance in signal acquisition portion matches,
First twin-guide include structure it is identical and symmetrically connect first on waveguide and the first lower waveguide, be provided in two waveguides multiple
The groove that several groove depths are gradually increased is used for excitating surface plasmon, converts table by quasi- TEM wave mode for THz wave
Surface wave mode；Conducting part is connect with first mode converter section, for allowing surface wave to conduct, including is connect with the first twin-guide
Two twin-guides, it is identical including structure and symmetrically connect second on waveguide and the second lower waveguide, two waveguides be provided with multiple
The groove of several fixed groove depths, groove depth are identical as maximum groove depth in the first twin-guide；Second mode converter section, with first mode
Converter section along conduction test section center line it is symmetrical, for by THz wave by surface wave mode convert subject to quasi- TEM wave mould
Formula；And signal output section is connected with second mode converter section, for THz wave to be transferred to the next analytical equipment.
THz wave time-domain spectral system provided by the invention based on ultra-wideband chip, can also have such spy
It levies, further includes：Vector network analyzer is connected respectively with signal acquisition portion and signal output section by two probes, is used for
Transmitting and detection terahertz wave signal.
THz wave time-domain spectral system provided by the invention based on ultra-wideband chip, can also have such spy
Sign：Co-planar waveguide includes center band and positioned at center band two sides and the counterpoise grounding that is spaced in intervals with center band, center band
The energy transmission port and vector net of two notches between counterpoise grounding respectively as signal acquisition portion and signal receiving portion
The probe of network analyzer connects.
THz wave time-domain spectral system provided by the invention based on ultra-wideband chip, can also have such spy
Sign：Vivaldi antenna includes open circuit chamber, the line of rabbet joint and exponential line, and the first twin-guide is along the line of rabbet joint to extending at the second twin-guide.
THz wave time-domain spectral system provided by the invention based on ultra-wideband chip, can also have such spy
Sign：The width of energy transmission port is 50 μm, and the spacing between center band and counterpoise grounding is 4.7 μm, and the height of counterpoise grounding is 50
~100 μm.
THz wave time-domain spectral system provided by the invention based on ultra-wideband chip, can also have such spy
Sign：Waveguide is obtained by the first lower waveguide flip vertical on first, is connected with the first lower guide symmetry, and waveguide is by the on second
Two lower waveguide flip verticals obtain, and connect with the second lower guide symmetry.
THz wave time-domain spectral system provided by the invention based on ultra-wideband chip, can also have such spy
Sign：Substrate is made of any one material in quartz, polyethylene terephthalate and polyimides.
Invention action and effect
The THz wave time-domain spectral system based on ultra-wideband chip that the present invention provides a kind of, is superimposed by flip vertical
The double-deck waveguide coupling, excitating surface plasmon, realize ultra-wideband filtering.Compared with traditional single layer waveguide filter,
The present invention is coupled with the waveguide of high efficiency of transmission bilayer, has widened frequency spectrum twice, solves communication neck
The problem of demand of the domain to wideband, lays the foundation for the scientific research in later period.Meanwhile it is provided by the invention based on ultra-wideband
The THz wave time-domain spectral system of chip also has the advantages that structure is simple, easy to accomplish.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the THz wave time-domain spectral system of the invention based on ultra-wideband chip；
Fig. 2 is the structural schematic diagram of ultra-wideband chip of the invention；
Fig. 3 is the structural schematic diagram of the metal layer of ultra-wideband chip of the invention；
Fig. 4 is THz wave time-domain spectral system based on twin-guide in the present invention and the THz wave led based on unicast
The bandpass width comparison diagram of time-domain spectral system.
Specific embodiment
Illustrate a specific embodiment of the invention below in conjunction with attached drawing.
Fig. 1 is the structural schematic diagram of the THz wave time-domain spectral system based on ultra-wideband chip of the present embodiment.
As shown in Figure 1, the THz wave time-domain spectral system 100 based on ultra-wideband chip includes vector network analyzer
200 and ultra-wideband chip 300.Vector network analyzer 200 by probe 201 and probe 202 respectively with ultra-wideband chip 300
Energy transmission port connection, for emitting and detecting terahertz wave signal.
Fig. 2 is the structural schematic diagram of the present embodiment ultra-wideband chip.
As shown in Fig. 2, ultra-wideband chip 300 is made of substrate 10 and metal layer 20.Metal layer 20 passes through photoetching and plated film
It is attached on substrate 10.
In the present embodiment, the material of metal layer 20 is gold, thickness d1For 500nm.Substrate 10 is by substrate by quartz, polyphenyl two
Any one material in formic acid glycol ester (PEN) and polyimides is made, thickness d2It is 200 μm.
Fig. 3 is the structural schematic diagram of the metal layer of the ultra-wideband chip of the present embodiment.
As shown in figure 3, metal layer 20 include be linked in sequence signal acquisition portion 1, first mode converter section 2, conducting part 3,
Second mode converter section 4 and signal output section 5.Signal acquisition portion 1 is used to obtain input too from vector network analyzer 200
Hertz wave signal, and it is translated into quasi- TEM wave mode；First mode converter section 2 is used for excitating surface plasmon, will too
Hertz wave is converted into surface wave mode by quasi- TEM wave mode；Conducting part 3 is used for conduction surfaces wave；Second mode converter section 4 is used for
By THz wave by surface wave mode convert subject to TEM wave mode；Signal output section 5 passes through probe 202 and vector network analysis
Instrument 200 connects, and THz wave is transferred to vector network analyzer 200.
Fig. 2 is the side view of Fig. 3, and as shown in FIG. 1 to 3, signal acquisition portion 1 and signal output section 5 are coplanar wave
It leads, two counterpoise groundings 12 of g is spaced in intervals including center band 11 and positioned at 11 two sides of center band and with center band 11.
Two notches between center band 11 and counterpoise grounding 12 are respectively as signal acquisition portion 1 and signal output section 5
The connection of the probe 201 and probe 202 of energy transmission port and vector network analyzer.Signal acquisition portion 1 passes through probe 201
It is connected with SMA connector, and then input letter is obtained from coaxial cable by SMA connector；Signal output section 5 passes through probe
202, which will test the terahertz wave signal finished, is transferred to vector network analyzer 200, carries out interpretation of result.
In the present embodiment, the height h of center band 11 is 50 μm, with a thickness of metal layer thickness d1Twice.Counterpoise grounding 12
Twice centered on height with height, thickness is identical as the thickness of metal layer.The height g of energy transmission port is 4.7 μm, to protect
Demonstrate,prove the impedance matching of 50 Ω of port.
First mode converter section 2 is connected with the energy transmission port in signal acquisition portion 1, is referred to by the classics of Vivaldi antenna
Number equation is drawn.Including Vivaldi antenna 21 and the first twin-guide 22, Vivaldi antenna 21 is used for and signal acquisition portion 1
Impedance matches, and the first twin-guide 22 includes that structure is identical and waveguide 221 and the first lower wave on the first of symmetric contact connection
Lead 222.
First lower waveguide 222 is obtained by 221 flip vertical of waveguide on first, and the two is provided with a plurality of groove depths and gradually increases
Big groove is used for excitating surface plasmon, converts sensitivity by the low quasi- TEM wave mode of sensitivity for THz wave
High surface wave mode guarantees wide band efficient excitation.
Conducting part 3 is the second twin-guide, including waveguide 31 and the second lower waveguide 32 on second, the first lower waveguide 32 are same
It is obtained by 31 flip vertical of waveguide on first.The groove 311 of a plurality of fixed groove depth h and recessed is respectively arranged in two waveguides
Slot 321, groove 311 and 321 groove depth of groove are identical as maximum groove depth in the first twin-guide 22, to control the biography of THz wave
Defeated frequency.Waveguide 31 and the second lower waveguide 32 are connected by the opposite form that is spaced closely together between groove and groove on second
It connects, forms the second twin-guide.In the present embodiment, the groove depth h of the second twin-guide further groove is 50 μm, bottom of the slot bottom apart from metal layer
0.1h is divided between end.
Second mode converter section 4 is symmetrical along the center line of conducting part 3 with first mode converter section 2, including depth of groove
The third twin-guide 41 being gradually reduced and the Vivaldi antenna 42 connected with the third twin-guide, for by THz wave by
TEM wave mode subject to surface wave mode conversion.Third twin-guide 41 is made of waveguide 412 under waveguide 411 in third and third,
Waveguide 221 is uniquely distinguished as in waveguide 411 and first in third：The depth of 221 further groove of waveguide gradually increases on first, and
The depth of 411 further groove of waveguide is gradually reduced in third.Waveguide 412 and the difference of the first lower waveguide 222 are also such under third.
The method that the THz wave time-domain spectral system based on ultra-wideband chip of the present embodiment realizes wideband band logical is：It is first
First, co-planar waveguide 1 obtains input terahertz wave signal by probe 201 from vector network analyzer 200, and by it with standard
The form of TEM wave passes to first mode converter section 2；Then, 2 excitating surface plasmon of first mode converter section, will
The low quasi- TEM wave of sensitivity is converted to the surface wave of high sensitivity and by surface wave transmission to conducting part 3；In turn, THz wave
It is propagated in the groove array of the fixed groove depth of the second twin-guide, forms band gap, band resistance is consequently formed, so that a certain frequency
The wave of section is filtered, and the wave of a certain frequency range passes through, which is band passband；Finally, surface wave is converted by second mode
TEM wave subject to the conversion of portion 4, and is transferred to the energy transmission port of signal output section 5, vector network analyzer to port signal into
After row detection, the cutoff frequency of its band logical is detected, so that it is determined that the frequency bandwidth of bandpass filter.
In the present embodiment, the mode that the preferred Striking symmetry of waveguide connects up and down in twin-guide, at this time with the width of passband
It is maximum.Certainly, there may also be the displacement superposed of certain horizontal and vertical direction for upper and lower waveguide, i.e., upper and lower waveguide is with slightly phase
Wrong form superposition, but bandpass width can reduce with the increase for the degree of being staggered.
Fig. 4 is THz wave time-domain spectral system based on twin-guide in the present embodiment and the Terahertz led based on unicast
The bandpass width comparison diagram of wave time-domain spectral system.
As shown in figure 4, the frequency of the incident THz wave of two kinds of spectrum systems is 2THz, the Terahertz led based on unicast
The frequency bandwidth of wave time-domain spectral system band logical is 0~0.8THz, the THz wave time-domain spectral system band logical based on twin-guide
Frequency bandwidth be 0~1.6THz, be twice of unicast pilot bandwidth degree.
The action and effect of embodiment
A kind of THz wave time-domain spectral system based on ultra-wideband chip is present embodiments provided, it is folded by flip vertical
The double-deck waveguide coupling added, excitating surface plasmon realize ultra-wideband filtering.With traditional single layer waveguide filter phase
Than the present invention is coupled with the waveguide of high efficiency of transmission bilayer, has widened frequency spectrum twice, solves communication
The problem of demand of the field to wideband, lays the foundation for the scientific research in later period.Meanwhile it is provided in this embodiment based on super
The THz wave time-domain spectral system of wideband chip also has the advantages that structure is simple, easy to accomplish.
The present invention is not limited to the ranges of specific embodiment, for those skilled in the art, as long as respectively
Kind of variation in the spirit and scope of the present invention that the claim limits and determines, these variations be it will be apparent that
All are using the innovation and creation of present inventive concept in the column of protection.
Claims (6)
1. a kind of THz wave time-domain spectral system based on ultra-wideband chip, which is characterized in that have：
Substrate；And
Metal layer is set on the upper surface of the substrate,
Wherein, the metal layer includes：
Signal acquisition portion is co-planar waveguide, for obtaining the THz wave from epigyny device, and is translated into quasi- TEM wave
Mode；
First mode converter section is connect with the signal acquisition portion, including Vivaldi antenna and the first twin-guide,
The Vivaldi antenna is used for and the impedance in the signal acquisition portion matches, and first twin-guide includes structure phase
With and symmetrically connect first on waveguide and the first lower waveguide, be provided in waveguide and the first lower waveguide on described first
The groove that a plurality of groove depths are gradually increased is used for excitating surface plasmon, and the THz wave is turned by quasi- TEM wave mode
Turn to surface wave mode；
Conducting part is connect with the first mode converter section, for allowing the surface wave to conduct, including with first twin-guide
Connect the second twin-guide, second twin-guide include structure it is identical and symmetrically connect second on waveguide and the second lower wave
It leads,
Waveguide and the second lower waveguide are provided with the groove of a plurality of fixed groove depths, the fixed groove depth on described second
It is identical as maximum groove depth in first twin-guide；
Second mode converter section, symmetrical along the center line of the conducting part with the first mode converter section, being used for will be described
THz wave is converted to the quasi- TEM wave mode by the surface wave mode；And
Signal output section connects for co-planar waveguide with the second mode converter section, for the THz wave to be transferred to down
Position analytical equipment,
Waveguide is obtained by the described first lower waveguide flip vertical on described first, is connected with the described first lower guide symmetry,
Waveguide is superimposed to form the double-deck waveguide with the described first lower waveguide on described first,
Waveguide is obtained by the described second lower waveguide flip vertical on described second, is connected with the described second lower guide symmetry,
Waveguide is superimposed to form the double-deck waveguide with the described second lower waveguide on described second,
The co-planar waveguide includes center band and is spaced in intervals positioned at the center band two sides and with the center band
Counterpoise grounding, two notches between the center band and the counterpoise grounding are respectively as the signal acquisition portion and the signal
The energy transmission port of output section.
2. the THz wave time-domain spectral system according to claim 1 based on ultra-wideband chip, which is characterized in that also wrap
It includes：
Vector network analyzer is connected with the signal acquisition portion and the signal output section respectively by two probes, is used
In emitting and detect the terahertz wave signal.
3. the THz wave time-domain spectral system according to claim 2 based on ultra-wideband chip, it is characterised in that：
Wherein, the energy transmission port is connected with the probe of the vector network analyzer.
4. the THz wave time-domain spectral system according to claim 3 based on ultra-wideband chip, it is characterised in that：
Wherein, the width of the energy transmission port is 50 μm, and the spacing between the center band and the counterpoise grounding is 4.7 μ
M, the height of the counterpoise grounding are 50~100 μm.
5. the THz wave time-domain spectral system according to claim 1 based on ultra-wideband chip, it is characterised in that：
Wherein, the Vivaldi antenna includes open circuit chamber, the line of rabbet joint and exponential line, first twin-guide along the line of rabbet joint to
Extend at second twin-guide.
6. the THz wave time-domain spectral system based on ultra-wideband chip according to claim 1, it is characterised in that：
Wherein, the substrate is made of any one material in quartz, polyethylene terephthalate and polyimides.
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| CN201811472761.1A CN109473757B (en) | 2015-07-30 | 2015-07-30 | Broadband transmission line chip |
| CN201510458482.XA CN105006616B (en) | 2015-07-30 | 2015-07-30 | A kind of THz wave time-domain spectral system based on ultra-wideband chip |
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| CN107425282B (en) * | 2017-07-20 | 2019-11-12 | 东南大学 | It is a kind of to determine frequency beam scanning leaky-wave antenna and its beam sweeping method |
| CN107681258B (en) * | 2017-08-04 | 2020-01-07 | 上海交通大学 | Small-sized high-efficiency UHF frequency band low-profile broadband antenna adopting SPP structure |
| CN108631028B (en) * | 2018-03-22 | 2023-04-25 | 南京航空航天大学 | Broadband band-pass filter based on equivalent surface plasmon polaritons and working method thereof |
| CN109031255A (en) * | 2018-09-30 | 2018-12-18 | 清华大学 | The experimental provision of Terahertz radar scattering imaging |
| CN109444091A (en) * | 2018-10-11 | 2019-03-08 | 上海理工大学 | A kind of detection method of Terahertz edible oil detection chip and edible oil |
| CN110011007B (en) * | 2019-03-20 | 2020-11-06 | 南京航空航天大学 | Band elimination filter based on artificial surface plasmon transmission line |
| CN114696874A (en) * | 2020-12-31 | 2022-07-01 | 华为技术有限公司 | Terahertz carrier wave transmitting device and receiving device |
| CN114696873A (en) * | 2020-12-31 | 2022-07-01 | 华为技术有限公司 | Terahertz carrier wave transmitting device and receiving device |
| CN114325312A (en) * | 2021-12-20 | 2022-04-12 | 锐石创芯(深圳)科技股份有限公司 | Chip testing device, chip testing system and data acquisition method |
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| CN109473757A (en) | 2019-03-15 |
| CN109473757B (en) | 2020-03-10 |
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