CN105006616A - Terahertz time-domain spectrum system based on ultra-wideband chip - Google Patents

Terahertz time-domain spectrum system based on ultra-wideband chip Download PDF

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CN105006616A
CN105006616A CN201510458482.XA CN201510458482A CN105006616A CN 105006616 A CN105006616 A CN 105006616A CN 201510458482 A CN201510458482 A CN 201510458482A CN 105006616 A CN105006616 A CN 105006616A
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waveguide
time
ultra
thz wave
guide
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CN105006616B (en
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陈麟
朱亦鸣
汪丹妮
魏玉明
韦鹏
蔡斌
臧小飞
庄松林
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University of Shanghai for Science and Technology
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University of Shanghai for Science and Technology
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Abstract

The invention provides a terahertz time-domain spectrum system based on an ultra-wideband chip. The system comprises a substrate and a metal layer. The metal layer is used for acquiring and conducting terahertz, and comprises a signal acquisition unit, a first mode switching part, a conducting part, a second mode switching part and a signal output part. The first mode switching part, the conducting part and the second mode switching part are of double waveguide structure. The signal acquisition part is used for acquiring the terahertz from a host device, and transmitting the terahertz to the first mode switching part for mode switching. The terahertz is changed into a surface wave. The surface wave is transmitted in the double waveguide of the conducting part, so as to form an energy band gap for filtering. The second mode switching part carries out mode switching again. The signal output part transmits the wave to a vector network analyzer for data analysis, so as to acquire the width of a band-pass band.

Description

A kind of THz wave time-domain spectral system based on ultra-wideband chip
Technical field
The invention belongs to THz wave detection field, be specifically related to a kind of THz wave time-domain spectral system based on ultra-wideband chip.
Background technology
Along with the development of modern wireless communication technique, super wide frequency technology is getting more and more people's extensive concerning in recent years.Modern communications products application is very extensive, and the frequency range that each product uses is different, and these frequency bands be used to need a kind of receive-transmit system of wideband simultaneously.
Co-planar waveguide is the important means realizing wide frequency technology.It is actual is surface plasmon resonance, is a kind of charge density oscillation eigenmodes being present in metal and dielectric interface, can excite generation by incident light through prism-coupled, grating coupling or waveguide-coupled.Based on the double-deck ultra-wideband filter of co-planar waveguide, by the waveguide by two same structures, flip vertical also superposes, and realizes widening of frequency band.
The operation principle of the double-deck ultra-wideband filter of co-planar waveguide is: incident light excites metallic film and dielectric interface to produce surface plasma excimer.Although the waveguide filter of the surface plasma excimer of waveguide-coupled and Goubau line structure have been very ripe technology at visible light wave range, but the corresponding system being operated in terahertz wave band is also seldom reported, especially the ultra-wideband filter of Goubau line and double-deck waveguiding structure did not also relate to.
Summary of the invention
In order to solve the problem, the invention provides a kind of THz wave time-domain spectral system based on ultra-wideband chip, have employed following technical scheme:
THz wave time-domain spectral system based on ultra-wideband chip provided by the invention has such technical characteristic, has: substrate and the metal level be arranged on the upper surface of substrate.This metal level comprises: signal acquisition portion, is co-planar waveguide, for obtaining THz wave from epigyny device, and is translated into accurate TEM wave mode; First mode converter section, portion is connected with signal acquisition, comprise Vivaldi antenna and the first twin-guide, Vivaldi antenna is used for the matches impedances with signal acquisition portion, first twin-guide comprise structure identical and first of symmetrical connection on waveguide and first time waveguide, two waveguides are provided with the groove that a plurality of groove depth increases gradually, for excitating surface plasmon, THz wave are converted into surface wave mode by accurate TEM wave mode; Conducting part, be connected with first mode converter section, conduct for allowing surface wave, comprise and be connected the second twin-guide with the first twin-guide, comprise structure identical and second of symmetrical connection on waveguide and second time waveguide, two waveguides are provided with the groove of a plurality of fixing groove depth, and groove depth is identical with groove depth maximum in the first twin-guide; Second patten transformation portion, symmetrical along conduct the center line of test section with first mode converter section, for THz wave to be as the criterion accurate TEM wave mode by surface wave mode conversion; And signal efferent, be connected with the second patten transformation portion, for THz wave is transferred to the next analytical equipment.
THz wave time-domain spectral system based on ultra-wideband chip provided by the invention, such feature can also be had, also comprise: vector network analyzer, be connected with signal acquisition portion and signal efferent respectively by two probes, for launching and detection terahertz wave signal.
THz wave time-domain spectral system based on ultra-wideband chip provided by the invention, such feature can also be had: co-planar waveguide comprises middle its central band and is arranged in its central band both sides and the earth strip be spaced in intervals with center band, two notches between middle its central band and earth strip, respectively as the Energy Transfer port of signal acquisition portion and signal receiving portion, are connected with the probe of vector network analyzer.
THz wave time-domain spectral system based on ultra-wideband chip provided by the invention, can also have such feature: Vivaldi antenna comprises open circuit chamber, the line of rabbet joint and exponential line, and the first twin-guide extends along the line of rabbet joint to the second twin-guide place.
THz wave time-domain spectral system based on ultra-wideband chip provided by the invention, can also have such feature: the width of Energy Transfer port is 50 μm, and the spacing between middle its central band and earth strip is 4.7 μm, and the height of earth strip is 50 ~ 100 μm.
THz wave time-domain spectral system based on ultra-wideband chip provided by the invention, such feature can also be had: on first, waveguide is obtained by first time waveguide flip vertical, contact with first time guide symmetry and connect, on second, waveguide is obtained by second time waveguide flip vertical, contacts connect with second time guide symmetry.
THz wave time-domain spectral system based on ultra-wideband chip provided by the invention, can also have such feature: substrate is made up of any one material in quartz, polyethylene terephthalate and polyimides.
Invention effect and effect
The invention provides a kind of THz wave time-domain spectral system based on ultra-wideband chip, the double-deck waveguide-coupled superposed by flip vertical, excitating surface plasmon, realizes ultra-wideband filtering.Compared with traditional individual layer waveguide filter, the present invention uses the double-deck waveguide-coupled of high efficiency of transmission, makes frequency spectrum widen twice in a simple manner, solves the problem of the communications field to the demand of wideband, for the scientific research in later stage lays the foundation.Meanwhile, the THz wave time-domain spectral system based on ultra-wideband chip provided by the invention also has structure advantage that is simple, that easily realize.
Accompanying drawing explanation
Fig. 1 is the structural representation of the THz wave time-domain spectral system based on ultra-wideband chip of the present invention;
Fig. 2 is the structural representation of ultra-wideband chip of the present invention;
Fig. 3 is the structural representation of the metal level of ultra-wideband chip of the present invention;
Fig. 4 is the bandpass width comparison diagram of the THz wave time-domain spectral system based on twin-guide in the present invention and the THz wave time-domain spectral system based on single waveguide.
Embodiment
Below in conjunction with accompanying drawing, the specific embodiment of the present invention is described.
Fig. 1 is the structural representation of the THz wave time-domain spectral system based on ultra-wideband chip of the present embodiment.
As shown in Figure 1, the THz wave time-domain spectral system 100 based on ultra-wideband chip comprises vector network analyzer 200 and ultra-wideband chip 300.Vector network analyzer 200 is connected with the Energy Transfer port of ultra-wideband chip 300 with probe 202 respectively by probe 201, for launching and detection terahertz wave signal.
Fig. 2 is the structural representation of the present embodiment ultra-wideband chip.
As shown in Figure 2, ultra-wideband chip 300 is made up of substrate 10 and metal level 20.Metal level 20 is adhered to over the substrate 10 by photoetching and plated film.
In the present embodiment, the material of metal level 20 is gold, thickness d 1for 500nm.Substrate 10 is made up of any one material in quartz, polyethylene terephthalate (PEN) and polyimides of substrate, thickness d 2it is 200 μm.
Fig. 3 is the structural representation of the metal level of the ultra-wideband chip of the present embodiment.
As shown in Figure 3, metal level 20 comprise be linked in sequence signal acquisition portion 1, first mode converter section 2, conducting part 3, second patten transformation portion 4 and signal efferent 5.Signal acquisition portion 1 for obtaining input terahertz wave signal from vector network analyzer 200, and is translated into accurate TEM wave mode; THz wave, for excitating surface plasmon, is converted into surface wave mode by accurate TEM wave mode by first mode converter section 2; Conducting part 3 is for conduction surfaces ripple; Second patten transformation portion 4 is for being as the criterion THz wave TEM wave mode by surface wave mode conversion; Signal efferent 5 is connected with vector network analyzer 200 by probe 202, and THz wave is transferred to vector network analyzer 200.
Fig. 2 is the end view of Fig. 3, and as shown in FIG. 1 to 3, signal acquisition portion 1 and signal efferent 5 are co-planar waveguide, comprises middle its central band 11 and is arranged in its central band 11 both sides and is spaced in intervals two earth strips 12 of g with its central band 11.
Two notches between middle its central band 11 and earth strip 12, respectively as the Energy Transfer port of signal acquisition portion 1 and signal efferent 5, are connected with the probe 201 of vector network analyzer and probe 202.Signal acquisition portion 1 is connected with SMA connector by probe 201, and then obtains input letter by SMA connector from coaxial cable; The complete terahertz wave signal of detection is transferred to vector network analyzer 200 by probe 202 by signal efferent 5, carries out interpretation of result.
In the present embodiment, the height h of middle its central band 11 is 50 μm, and thickness is metal layer thickness d 1twice.Twice with height centered by the height of earth strip 12, thickness is identical with the thickness of metal level.The height g of Energy Transfer port is 4.7 μm, to ensure the impedance matching of port 50 Ω.
First mode converter section 2 is connected with the Energy Transfer port in signal acquisition portion 1, is drawn by the classical exponential equation of Vivaldi antenna.Comprise Vivaldi antenna 21 and the first twin-guide 22, Vivaldi antenna 21 for the matches impedances with signal acquisition portion 1, the first twin-guide 22 comprise that the identical and symmetric contact of structure connects first on waveguide 221 and first time waveguide 222.
First time waveguide 222 is obtained by waveguide 221 flip vertical on first, the two is provided with the groove that a plurality of groove depth increases gradually, for excitating surface plasmon, THz wave is converted into highly sensitive surface wave mode by the accurate TEM wave mode that sensitivity is low, ensures wide band efficient excitation.
Conducting part 3 is the second twin-guide, to comprise on second waveguide 31 and second time waveguide, 32, first time waveguide 32 and is obtained by waveguide 31 flip vertical on first equally.Two waveguides are respectively arranged with groove 311 and the groove 321 of a plurality of fixing groove depth h, groove 311 and groove 321 groove depth identical with groove depth maximum in the first twin-guide 22, to control the transmission frequency of THz wave.On second, waveguide 31 and second time waveguide 32 are connected by the form that the interval between groove and groove is closely relative, form the second twin-guide.In the present embodiment, the groove depth h of the second twin-guide further groove is 50 μm, and the bottom of bottom land distance metal level is spaced apart 0.1h.
Second patten transformation portion 4 is symmetrical along the center line of conducting part 3 with first mode converter section 2, comprise the 3rd twin-guide 41 that depth of groove reduces gradually and the Vivaldi antenna 42 be connected with the 3rd twin-guide, for THz wave being as the criterion TEM wave mode by surface wave mode conversion.3rd twin-guide 41 is made up of waveguide 411 on the 3rd and the 3rd time waveguide 412, unique being distinguished as of waveguide 221 in waveguide 411 and first on 3rd: on first, the degree of depth of waveguide 221 further groove increases gradually, and on the 3rd, the degree of depth of waveguide 411 further groove reduces gradually.The difference of the 3rd time waveguide 412 and first time waveguide 222 is also like this.
The method that the THz wave time-domain spectral system based on ultra-wideband chip of the present embodiment realizes broadband logical is: first, co-planar waveguide 1 obtains input terahertz wave signal by probe 201 from vector network analyzer 200, and it is passed to first mode converter section 2 with the form of accurate TEM ripple; Then, first mode converter section 2 excitating surface plasma excimer, is converted to highly sensitive surface wave by accurate TEM ripple low for sensitivity and by surface wave transmission to conducting part 3; And then THz wave is fixed in the groove array of groove depth at the second twin-guide and propagated, form band gap, form band resistance thus, the ripple of a certain frequency range is filtered, and the ripple of a certain frequency range passes through, and this frequency range is band passband; Finally, surface wave is changed by the second patten transformation portion 4 the TEM ripple that is as the criterion, and is transferred to the Energy Transfer port of signal efferent 5, after vector network analyzer detects port signal, detect the cut-off frequency that its band is logical, thus determine the frequency bandwidth of band pass filter.
In the present embodiment, the mode that in twin-guide, the preferred Striking symmetry of upper and lower waveguide connects, the width now with passband is maximum.Certainly, also can there is the displacement superposed of certain level and vertical direction in upper and lower waveguide, and namely waveguide is with the form be slightly staggered superposition up and down, but bandpass width can reduce along with the increase of the degree of being staggered.
Fig. 4 is the bandpass width comparison diagram of the THz wave time-domain spectral system based on twin-guide in the present embodiment and the THz wave time-domain spectral system based on single waveguide.
As shown in Figure 4, the incident Terahertz wave frequency of two kinds of spectrum systems is 2THz, the frequency bandwidth logical based on the THz wave time-domain spectral system band of single waveguide is 0 ~ 0.8THz, the frequency bandwidth logical based on the THz wave time-domain spectral system band of twin-guide is 0 ~ 1.6THz, is the twice of single Waveguide frequency-band width.
The effect of embodiment and effect
Present embodiments provide a kind of THz wave time-domain spectral system based on ultra-wideband chip, the double-deck waveguide-coupled superposed by flip vertical, excitating surface plasmon, realizes ultra-wideband filtering.Compared with traditional individual layer waveguide filter, the present invention uses the double-deck waveguide-coupled of high efficiency of transmission, makes frequency spectrum widen twice in a simple manner, solves the problem of the communications field to the demand of wideband, for the scientific research in later stage lays the foundation.Meanwhile, the THz wave time-domain spectral system based on ultra-wideband chip that the present embodiment provides also has structure advantage that is simple, that easily realize.
The invention is not restricted to the scope of embodiment; to those skilled in the art; as long as various change to limit and in the spirit and scope of the present invention determined in described claim; these changes are apparent, and all innovation and creation utilizing the present invention to conceive are all at the row of protection.

Claims (8)

1., based on a THz wave time-domain spectral system for ultra-wideband chip, it is characterized in that having:
Substrate; And
Metal level, is arranged on the upper surface of described substrate,
Wherein, described metal level comprises:
Signal acquisition portion is co-planar waveguide, for obtaining described THz wave from epigyny device, and is translated into accurate TEM wave mode;
First mode converter section, is connected with described signal acquisition portion, comprises Vivaldi antenna and the first twin-guide,
Described Vivaldi antenna is used for the matches impedances with described signal acquisition portion, described first twin-guide comprise structure identical and first of symmetrical connection on waveguide and first time waveguide, on described first, waveguide and first time waveguide are provided with the groove that a plurality of groove depth increases gradually, for excitating surface plasmon, described THz wave is converted into surface wave mode by accurate TEM wave mode;
Conducting part, is connected with described first mode converter section, for allowing described surface wave conduct, comprising and being connected the second twin-guide with described first twin-guide, described second twin-guide comprise structure identical and second of symmetrical connection on waveguide and second time waveguide,
On described second, waveguide and described second time waveguide are provided with the groove of a plurality of fixing groove depth, and described fixing groove depth is identical with groove depth maximum in described first twin-guide;
Second patten transformation portion, symmetrical along the center line of described conducting part with described first mode converter section, for described THz wave is converted to described accurate TEM wave mode by described surface wave mode; And
Signal efferent, is connected with described second patten transformation portion, for described THz wave is transferred to the next analytical equipment.
2. the THz wave time-domain spectral system based on ultra-wideband chip according to claim 1, is characterized in that, also comprise:
Vector network analyzer, is connected with described signal acquisition portion and described signal efferent respectively by two probes, for launching and detecting described terahertz wave signal.
3. the THz wave time-domain spectral system based on ultra-wideband chip according to claim 2, is characterized in that:
Wherein, described co-planar waveguide comprises middle its central band and is arranged in described its central band both sides and the earth strip be spaced in intervals with described center band,
Two notches between described middle its central band and described earth strip, respectively as the Energy Transfer port of described signal acquisition portion and described signal efferent, are connected with the probe of described vector network analyzer.
4. the THz wave time-domain spectral system based on ultra-wideband chip according to claim 3, is characterized in that:
Wherein, the width of described Energy Transfer port is 50 μm, and the spacing between described middle its central band and described earth strip is 4.7 μm, and the height of described earth strip is 50 ~ 100 μm.
5. the THz wave time-domain spectral system based on ultra-wideband chip according to claim 1, is characterized in that:
Wherein, on described first, waveguide is obtained by described first time waveguide flip vertical, contacts connect with described first time guide symmetry.
6. the THz wave time-domain spectral system based on ultra-wideband chip according to claim 1, is characterized in that:
Wherein, on described second, waveguide is obtained by described second time waveguide flip vertical, contacts connect with described second time guide symmetry.
7. the THz wave time-domain spectral system based on ultra-wideband chip according to claim 1, is characterized in that:
Wherein, described Vivaldi antenna comprises open circuit chamber, the line of rabbet joint and exponential line, and described first twin-guide extends along the described line of rabbet joint to described second twin-guide place.
8., according to claim 1 based on the THz wave time-domain spectral system of ultra-wideband chip, it is characterized in that:
Wherein, described substrate is made up of any one material in quartz, polyethylene terephthalate and polyimides.
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CN107681258A (en) * 2017-08-04 2018-02-09 上海交通大学 Using the low section broad-band antenna of the miniaturization high efficiency uhf band of SPP structures
CN108631028A (en) * 2018-03-22 2018-10-09 南京航空航天大学 Broadband band-pass filter based on Equivalent Surface plasmon and its working method
CN109031255A (en) * 2018-09-30 2018-12-18 清华大学 The experimental provision of Terahertz radar scattering imaging
CN109444091A (en) * 2018-10-11 2019-03-08 上海理工大学 A kind of detection method of Terahertz edible oil detection chip and edible oil
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CN107425282A (en) * 2017-07-20 2017-12-01 东南大学 It is a kind of to determine frequency beam scanning leaky-wave antenna and its beam sweeping method
CN107425282B (en) * 2017-07-20 2019-11-12 东南大学 It is a kind of to determine frequency beam scanning leaky-wave antenna and its beam sweeping method
CN107681258A (en) * 2017-08-04 2018-02-09 上海交通大学 Using the low section broad-band antenna of the miniaturization high efficiency uhf band of SPP structures
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CN109444091A (en) * 2018-10-11 2019-03-08 上海理工大学 A kind of detection method of Terahertz edible oil detection chip and edible oil
CN110011007A (en) * 2019-03-20 2019-07-12 南京航空航天大学 Bandstop filter based on artificial surface plasmon transmission line

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