CN104994673B - In a kind of generation air ambient under atmospheric pressure homogeneous plasma brush apparatus and method - Google Patents
In a kind of generation air ambient under atmospheric pressure homogeneous plasma brush apparatus and method Download PDFInfo
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- CN104994673B CN104994673B CN201510366025.8A CN201510366025A CN104994673B CN 104994673 B CN104994673 B CN 104994673B CN 201510366025 A CN201510366025 A CN 201510366025A CN 104994673 B CN104994673 B CN 104994673B
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- atmospheric pressure
- discharging chamber
- air ambient
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Abstract
The invention discloses a kind of device for producing air ambient plasma brush, it includes discharge portion and supply part：The discharge portion includes the discharging chamber being made of two blocks of dielectric-slabs and two medium tubes and two electrodes being separately positioned in two medium tubes；The gas supply part is tapped at the port of described discharging chamber one end, for providing working gas for the discharging chamber.The invention also discloses the production method of air ambient plasma brush, its method are as follows：（1）Start supply part, the working gas of certain flow is provided to discharging chamber；（2）Increase the voltage of two interelectrode additional AC powers, make to produce aura dielectric barrier discharge in discharging chamber, then the voltage peak of two interelectrode additional AC powers and the output frequency of AC power are adjusted, makes homogeneous plasma brush under atmospheric pressure of the other port generation of discharging chamber in air ambient.
Description
Technical field
It is uniform etc. under atmospheric pressure in specifically a kind of generation air ambient the present invention relates to lower temperature plasma technology
The apparatus and method of gas ions brush.
Background technology
Atmospheric pressure plasma is with a wide range of applications in fields such as industry, medical treatment, environmental protections, such as can be used for material
Expect preparation, surface treatment, material etches, sewage disposal, wound sterilizing, and industrial waste gas desulphurization denitration processing etc..Greatly
Atmospheric pressure plasma can usually be produced using the methods of corona discharge, arc discharge and dielectric barrier discharge.Corona discharge produces
Raw plasma is only occurred near point electrode, small volume, limits its application in industrial aspect.Arc discharge produces
Raw plasma gas temperature is high, easily damages pending heat-sensitive material, and usually requires water cooling plant and match.
And atmospheric pressure plasma caused by aura dielectric barrier discharge has preferable uniformity, relatively low gas temperature, higher
Electron temperature and the features such as moderate electron density, thus as obtaining the conventional means of atmospheric pressure plasma.
On the other hand, atmospheric pressure plasma is applied in wider scope, how to be obtained in open environment big
Air pressure homogeneous plasma is just particularly important.Now both at home and abroad, plasma torch or gliding arc discharge usually are utilized
Obtain the homogeneous plasma in air ambient.The plasma that patent of invention such as Publication No. CN103079329A is reported
Spray gun, but plasma plume caused by the spray gun is cylindrical, its diameter is smaller（About several millimeters, are up to one li
Rice or so）, it is unfavorable for large area material process in industry.And gliding arc discharge（Such as the invention of Publication No. CN101778526A
Patent）Gas temperature is usually thousands of K, in use, easily damages pending thermo-sensitive material, even needs to match somebody with somebody sometimes
Cover water cooling plant to use, and the plasma plume power consumption of its generation unit volume is big in discharge process.
Plasma plume caused by both the above mode is above subject to because of some characteristics that its own possesses in application
Some limitations, therefore, notice is transferred to the research of aura dielectric barrier discharge above by researcher.But how to be situated between using aura
The plasma plume that matter barrier discharge produces in air ambient is the problem of one that researcher is faced is difficult to overcome, as public affairs
The number of opening is described in the patent of invention of CN204014246U, and the low temperature plasma that dielectric barrier discharge produces can only be in less gas
Produced in gap, this can undoubtedly limit the scale of pending material, while also limit its application range.Patent
Although ZL201210128206.3 discloses the device and method that wide arc gap homogenous atmospheric-pressure discharge is produced under a kind of low-voltage, lead to
The aura dielectric barrier discharge that gas generates wide arc gap in the flowing of discharging chamber is crossed, but electric discharge is still limited in two electrodes
Between region.Therefore, the atmospheric pressure homogeneous plasma that large scale how is obtained in open environment just seems particularly
It is important.
The content of the invention
An object of the present invention, which is to provide, a kind of can produce in air ambient homogeneous plasma brush under atmospheric pressure
Device, to solve the problems, such as that existing dielectric barrier discharge device can not produce plasma brush under the atmospheric pressure in air ambient.
The second object of the present invention is to provide a kind of method for producing homogeneous plasma brush under atmospheric pressure in air ambient,
To solve the problems, such as in air ambient caused by existing method that plasma brush temperature is excessive under atmospheric pressure, power consumption is high.
What an object of the present invention was realized in：
In a kind of generation air ambient under atmospheric pressure homogeneous plasma brush device, it includes discharge portion and supply
Part：
The discharge portion includes the discharging chamber being made of two blocks of dielectric-slabs and two medium tubes and is separately positioned on institute
Two electrodes in two medium tubes, the both ends sealing of the medium tube are stated, the electrode passes through conducting wire and AC power respectively
High-voltage output end connected with ground terminal；The gas supply part is tapped at the port of described discharging chamber one end, for being put to be described
Electric cavity provides working gas；
Wherein, the dielectric-slab and the medium tube are insulating materials.
A kind of device for producing homogeneous plasma brush under atmospheric pressure in air ambient of the present invention, the gas supply part
Divide and be made of air accumulator and the gas piping being connected on air accumulator, the another of the gas piping terminates at the discharging chamber
The port of one end；The working gas stored in the air accumulator is inert gas or the mixed gas of inert gas and air.
A kind of device for producing homogeneous plasma brush under atmospheric pressure in air ambient of the present invention, the insulation material
Expect for glass, quartz or polytetrafluoroethylene (PTFE).
A kind of device for producing homogeneous plasma brush under atmospheric pressure in air ambient of the present invention, the electrode are
Conduction liquid or bar-shaped metal.
Preferably, the bar-shaped metal material is tungsten, copper or iron.
A kind of device for producing homogeneous plasma brush under atmospheric pressure in air ambient of the present invention, the discharge cavity
Body is rectangle or trapezoidal along the section of plane where two medium tube axis.Such as discharging chamber section is rectangle, then
Described discharging chamber one end is air inlet, and the other end is gas outlet；Such as discharging chamber section is trapezoidal, then with the electric discharge
The relatively narrow one end of cavity is air inlet, and wider one end is gas outlet.
In the present invention, the thickness of the discharging chamber is consistent with the medium pipe outside diameter, and the thickness of the discharging chamber exists
0.1 ~ 5mm, the port width of the discharging chamber is in 0.2mm ~ 65mm, and the length of the discharging chamber is in 10 ~ 150mm.
In the present invention, the inert gas is helium, neon or argon gas.
What the second object of the present invention was realized in：
The method that homogeneous plasma brush under the atmospheric pressure in air ambient is produced using claim 1 described device, its
Method is as follows：
（1）Start supply part, the working gas of certain flow is provided to discharging chamber；
（2）Increase the voltage of two interelectrode additional AC powers, make to produce aura dielectric barrier discharge in discharging chamber,
Then the voltage peak of two interelectrode additional AC powers and the output frequency of AC power are adjusted, makes the another of discharging chamber
Homogeneous plasma brush under the atmospheric pressure in air ambient is produced at port.
The method of homogeneous plasma brush, the working gas under atmospheric pressure in generation air ambient of the present invention
For the mixed gas of inert gas or inert gas and air.
The method of homogeneous plasma brush, the working gas under atmospheric pressure in generation air ambient of the present invention
Flow between the L/min of 0.1 L/min ~ 30.
The method of homogeneous plasma brush, the AC power under atmospheric pressure in generation air ambient of the present invention
Voltage between the kV of 1.0 kV ~ 30, the reference frequency output of the AC power is between 50Hz ~ 14MHz.
In the method for the present invention, the reference frequency output of the AC power is preferably between 50Hz ~ 13.56MHz.
Apparatus structure provided by the invention is simple, of low cost, and unit volume plasma brush is produced using the device
Small power consumption, and plasma brushing tool has the advantage that caused by the present invention：
（1）Temperature is low, without water cooling, does not damage pending thermo-sensitive material；
（2）Without resistance current limliting, the thermal losses of resistance is avoided, unit volume plasma plume small power consumption is produced, in work
Industry using it is upper advantageously；
（3）The plasma of generation is in the air ambient on the outside of discharging chamber, without limitation on the ruler of pending material
Degree, expands application range；
The present invention is by using stick electrode（The conducting liquid or metal being fitted into dielectric tube）Strengthen outside gas outlet
Side electric field, making to slide into the plasma discharge on the outside of gas outlet will not terminate immediately, so as to be formed in air ambient uniform
Atmospheric pressure plasma brush.In air ambient caused by the present invention under atmospheric pressure homogeneous plasma brush material prepare,
The fields such as surface treatment, material etches, sewage disposal, sterilizing are with a wide range of applications, it is for promoting plasma
The preparation of body material, surface treatment, material etches, film growth, sewage disposal, at wound disinfection, and industrial waste gas desulphurization denitration
The applications such as reason will have great importance.
Brief description of the drawings
Fig. 1 is the overall structure diagram that the present invention produces homogeneous plasma brush device under atmospheric pressure.
Fig. 2 is the cross-sectional view that the present invention produces the discharging chamber of homogeneous plasma brush device under atmospheric pressure.
Fig. 3 is the plasma brush instance graph that embodiment 2 produces.
Fig. 4 is the high speed video figure for the plasma brush that embodiment 2 produces.
Fig. 5 is the instance graph for the plasma brush that embodiment 4 produces.
In figure：1st, dielectric-slab, 2, medium tube, 3, discharging chamber, 4, electrode, 5, conducting wire, 6, AC power, 7, air accumulator,
8th, gas volume flow gauge, 9, plasma brush.
Embodiment
The device of the invention and method are further elaborated below by specific embodiment, but do not limited in any form
Present disclosure.
Embodiment 1
The present invention produces the structure of the device of homogeneous plasma brush under atmospheric pressure as shown in Figure 1 and Figure 2, it is by discharge part
Divide, supply part and support circuit form.
Discharge portion includes discharging chamber 3 and electrode 4 is formed.Specifically, discharging chamber 3 is by two blocks of dielectric-slabs 1 and sets
Put the penetrating trapezoidal cavity that two medium tubes 2 between two blocks of dielectric-slabs 1 collectively constitute；The thickness of dielectric-slab 1
For 1 mm, the both ends of medium tube 2 seal, its outside diameter is 2 mm, internal diameter is 1 mm, the thickness of the trapezoidal discharging chamber 3 formed
For 2 mm.In addition, the air scoop width of discharging chamber 3 is 10 mm, gas outlet width is 25 mm, air inlet is apart from gas outlet 70
mm.Electrode 4 is arranged in medium tube 2, it is connected with the high-voltage output end and ground terminal of AC power 6 respectively by conducting wire 5.It is situated between
Scutum 1 and medium tube 2 are made of quartz；Electrode 4 is made of copper wire, its diameter is equal to 2 internal diameter of medium tube, is 1 mm.
Supply part is by storing working gas（Argon gas）Air accumulator 7 and the gas piping structure that is connected on air accumulator 7
Into another air inlet for terminating at discharging chamber 3 of gas piping（At the port of i.e. relatively narrow one end）, set on gas piping
There is a gas volume flow gauge 8.
6 part of support circuit, that is, conducting wire 5 and AC power.
Embodiment 2
The method that homogeneous plasma brush under atmospheric pressure in air ambient is produced using the device in embodiment 1, specific behaviour
It is as follows to make step：
（1）Start supply part, for output argon gas to discharging chamber, the volume flow for adjusting argon gas is 4L/min；
（2）Increase by two interelectrode additional AC supply voltages to 3.5 kV, make to produce the resistance of aura medium in discharging chamber
Gear electric discharge, then adjusts the voltage peak of two interelectrode additional AC powers and the output frequency of AC power, when outer power-up
When voltage crest value is higher than 8kV, output frequency is 65kHz, formed outside the port of discharging chamber under the atmospheric pressure in air ambient
Even plasma brush.
Fig. 3 is the instance graph of formed plasma brush（Time for exposure 1ms）, 9 width of plasma brush that is formed
For 2cm, length 1cm.After testing, plasma brush temperature caused by the present embodiment is at 38 DEG C~70 DEG C.
Fig. 4 is the high speed video result of the plasma brush formed in Fig. 3（Every 10 microsecond of photo lithography）, different
The position of discharge wire is changing during time delay, and can be seen that the slip of aura dielectric barrier discharge silk in discharging chamber
Journey, and glow discharge silk slide out on the outside of gas outlet after lasting discharge process.Indicate formed in discharge process it is uniform
Plasma plume is formed by the aura dielectric barrier discharge silk slided.
Embodiment 3
Similar with the structure of the device in embodiment 1 in the present embodiment, it is by discharge portion, supply part and support circuit
Composition, difference lies in discharging chamber is total to by two blocks of dielectric-slabs and two medium tubes being arranged between two blocks of dielectric-slabs for it
With a penetrating rectangular cavities of composition, the thickness of the rectangular discharge cavity formed is 2 mm, air inlet and outlet mouth width
It for 16 mm, air inlet apart from gas outlet is 70 mm that degree, which is, and remainder is identical with described in embodiment 1.
Embodiment 4
The method that homogeneous plasma brush under atmospheric pressure in air ambient is produced using the device in embodiment 3, specific behaviour
It is as follows to make step：
（1）Start supply part, for output argon gas to discharging chamber, the volume flow for adjusting argon gas is 4.5 L/min；
（2）Increase by two interelectrode additional AC supply voltages to 4 kV, make to produce aura dielectric impedance in discharging chamber
Electric discharge, then adjusts the voltage peak of two interelectrode additional AC powers and the output frequency of AC power, works as applied voltage
When peak value is higher than 8.5 kV, output frequency is 70 kHz, the air in air ambient is formed on the outside of the gas outlet of discharging chamber
Depress homogeneous plasma brush.
Fig. 5 is the instance graph of formed plasma brush, and the plasma brush width formed is 16 mm, length about 10
mm。
The value of voltage, frequency and the volumetric flow of gas mentioned in embodiment 2 and embodiment 4 is only directed to embodiment 1 respectively
The device parameter being previously mentioned with embodiment 3 is applicable in, in specific implementation process the design parameter situation of view apparatus can increase or
Reduce voltage and frequency, volumetric flow of gas.
Claims (8)
1. a kind of device for producing homogeneous plasma brush under atmospheric pressure in air ambient, it is characterized in that, include discharge portion
With supply part：
The discharge portion includes the discharging chamber being made of two blocks of dielectric-slabs and two medium tubes and is separately positioned on described two
Two electrodes in root medium tube, the both ends sealing of the medium tube, the electrode pass through conducting wire and the height of AC power respectively
Press output and ground connection；The gas supply part is tapped at the port of described discharging chamber one end, for for the discharge cavity
Body provides working gas；The discharging chamber is trapezoidal, the electric discharge along the section of plane where two medium tube axis
The relatively narrow one end of cavity is air inlet, and wider one end is gas outlet；
Wherein, the dielectric-slab and the medium tube are insulating materials, and the working gas is inert gas.
2. in a kind of generation air ambient according to claim 1 under atmospheric pressure homogeneous plasma brush device, its
Be characterized in, the supply part is made of air accumulator and the gas piping that is connected on air accumulator, the gas piping it is another
Terminate at the port of described discharging chamber one end.
3. in a kind of generation air ambient according to claim 1 under atmospheric pressure homogeneous plasma brush device, its
It is characterized in, the insulating materials is glass, quartz or polytetrafluoroethylene (PTFE).
4. in a kind of generation air ambient according to claim 1 under atmospheric pressure homogeneous plasma brush device, its
It is characterized in, the electrode is conduction liquid or bar-shaped metal.
5. the method for homogeneous plasma brush under the atmospheric pressure in air ambient is produced using claim 1 described device, its
It is characterized in, its method is as follows：
（1）Start supply part, the working gas of certain flow is provided to discharging chamber；
（2）Increase the voltage of two interelectrode additional AC powers, make to produce aura dielectric barrier discharge in discharging chamber, then
The voltage peak of two interelectrode additional AC powers and the output frequency of AC power are adjusted, makes the another port of discharging chamber
Homogeneous plasma brush under atmospheric pressure of place's generation in air ambient.
6. the method for homogeneous plasma brush under the atmospheric pressure produced in air ambient according to claim 5, it is special
Sign is that the working gas is inert gas or the mixed gas of inert gas and air.
7. the method for homogeneous plasma brush under the atmospheric pressure produced in air ambient according to claim 5, it is special
Sign is, the flow of the working gas is between the L/min of 0.1 L/min ~ 30.
8. the method for homogeneous plasma brush under the atmospheric pressure produced in air ambient according to claim 5, it is special
Sign is, the voltage of the AC power between the kV of 1.0 kV ~ 30, the reference frequency output of the AC power 50Hz ~
Between 14MHz.
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| CN201510366025.8A CN104994673B (en) | 2015-06-29 | 2015-06-29 | In a kind of generation air ambient under atmospheric pressure homogeneous plasma brush apparatus and method |
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| CN201510366025.8A CN104994673B (en) | 2015-06-29 | 2015-06-29 | In a kind of generation air ambient under atmospheric pressure homogeneous plasma brush apparatus and method |
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| CN104994673B true CN104994673B (en) | 2018-04-17 |
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Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105792495B (en) * | 2016-05-03 | 2018-11-06 | 河北大学 | A kind of device and method generating atmospheric pressure homogeneous plasma brush |
| CN105848399B (en) * | 2016-05-19 | 2018-08-14 | 北京交通大学 | A kind of glow discharge jet plasma generating structure |
| CN109392231A (en) * | 2018-11-15 | 2019-02-26 | 西安交通大学 | One kind not producing ozoniferous cold plasma generating device |
| CN111954360A (en) * | 2020-09-18 | 2020-11-17 | 云南电网有限责任公司电力科学研究院 | Large-area cold plasma generating device and method based on mixed gas |
| CN114269058B (en) * | 2021-11-25 | 2023-07-28 | 河北大学 | Device and method for generating large-scale flaky plasma plume on water surface |
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| US20070116891A1 (en) * | 2005-11-22 | 2007-05-24 | The Regents Of The University Of California | Plasma brush apparatus and method |
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