CN104985266B - Nano impression cylinder mould preparation device and preparation method - Google Patents
Nano impression cylinder mould preparation device and preparation method Download PDFInfo
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- CN104985266B CN104985266B CN201510400520.6A CN201510400520A CN104985266B CN 104985266 B CN104985266 B CN 104985266B CN 201510400520 A CN201510400520 A CN 201510400520A CN 104985266 B CN104985266 B CN 104985266B
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- drum die
- processed
- microfabricated electrodes
- drum
- speed
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23H—WORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
- B23H9/00—Machining specially adapted for treating particular metal objects or for obtaining special effects or results on metal objects
- B23H9/06—Marking or engraving
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23H—WORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
- B23H11/00—Auxiliary apparatus or details, not otherwise provided for
- B23H11/003—Mounting of workpieces, e.g. working-tables
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23H—WORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
- B23H3/00—Electrochemical machining, i.e. removing metal by passing current between an electrode and a workpiece in the presence of an electrolyte
- B23H3/04—Electrodes specially adapted therefor or their manufacture
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23H—WORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
- B23H3/00—Electrochemical machining, i.e. removing metal by passing current between an electrode and a workpiece in the presence of an electrolyte
- B23H3/10—Supply or regeneration of working media
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23H—WORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
- B23H9/00—Machining specially adapted for treating particular metal objects or for obtaining special effects or results on metal objects
- B23H9/04—Treating surfaces of rolls
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23H—WORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
- B23H2300/00—Power source circuits or energization
- B23H2300/10—Pulsed electrochemical machining
Abstract
A nano impression cylinder mould preparation device based on electrochemical micromachining comprises a rotating shaft, an electrode stand, a micromachining electrode, a moving table, spray nozzles and a high-frequency pulse power supply, wherein a cylinder mould to be machined is mounted on the rotating shaft; the micromachining electrode is mounted on the electrode stand and is opposite to the cylinder mould to be machined; the moving table is used for allowing the electrode stand to be set thereon and can realize vertical and horizontal movements; the spray nozzles are used for spraying etching liquid in the machining area of the micromachining electrode; and the high-frequency pulse power supply for loading high-frequency pulse electrical signals is arranged between the micromachining electrode and the cylinder mould to be machined. A nano impression cylinder mould preparation method employs the nano impression cylinder mould preparation device. The nano impression cylinder mould preparation device is simple in structure, lower in cost and high in machining efficiency and machining precision.
Description
Technical field
The present invention relates to be based on the micro-machined nano impression drum die preparation facilitiess of electrochemistry and preparation method.
Background technology
Drum-type nano impression belongs to one kind of novel nano stamping technique, using traditional micro- replica principle of machine die
Realize, be a kind of low cost, the continuous processing technology of high yield.The manufacture of wherein nano impression drum die is in the industrial chain
Technique, equipment, management technique require highest, the maximum bottleneck operation of fund input proportion, are restrict its development urgently to be resolved hurrily
Problem.In recent years, with the raising of MEMS technology and developing rapidly for nanotechnology, other minute manufacturing technology such as light
Carve, focused ion beam machining accuracy is improved constantly, equal nanometer embossing precision also needs equal raising, so receiving accordingly
Rice impression cylinder mould and die accuracy requires also improving constantly.
The process that at present making of metallic mold for nano-imprint is mainly used is the horizontal oxygen of electron-beam direct writing, electroforming and silicon
Change etc..Electron-beam direct writing has high resolution, and theoretical limit resolution is up to 3 nanometers.But electron-beam direct writing equipment is needed
High vacuum environment is wanted, small area plane machining is generally adapted, it is impossible to the larger impression cylinder mould of volume is prepared.Though electroforming process
Drum die preparation can be completed, but needs to make mask pattern first using other techniques；Silicon lateral oxidation process is simple, Jing
Ji, but oxidated layer thickness is difficult to control, and surface roughness is larger, is only limitted to make simple grid structure, and need tight
The shape and thickness of lattice controlling feature size.As the application of nanometer embossing constantly extends, such as high-resolution LED is holographic
Show etc., for the required precision of cylinder impressing mould is improved constantly, need the new preparation technology of exploitation badly.
The content of the invention
Present invention is primarily targeted at being directed to the deficiencies in the prior art, there is provided one kind is based on the micro-machined nanometer of electrochemistry
Impression cylinder mould preparation facilitiess and preparation method, the apparatus structure is simple, without the need for vacuum environment, low cost, working (machining) efficiency and
Machining accuracy is high.
For achieving the above object, the present invention is employed the following technical solutions：
One kind is based on the micro-machined nano impression drum die preparation facilitiess of electrochemistry, including：
Rotary shaft, drum die to be processed can be rotated loaded in the rotary shaft under the drive of the rotary shaft
Motion；
Arc-spark stand and loaded on the microfabricated electrodes on the arc-spark stand, the microfabricated electrodes and the rolling to be processed
Cylinder mould has arranged opposite；
It is described micro- to drive for disposing the mobile station of arc-spark stand, the mobile station to realize vertically as well as horizontally
Fining-off electrode realizes required displacement；
Shower nozzle, the shower nozzle sprays etching liquid in the machining area of the microfabricated electrodes, forms Electrolyzed Processing environment；
High frequency pulse power supply, the high frequency pulse power supply the microfabricated electrodes and the drum die to be processed it
Between load the high-frequency impulse signal of telecommunication so that the etching liquid is etched on the drum die to be processed；
The microfabricated electrodes that wherein driven by the mobile station and by the rotary shaft drive it is described to be processed
Drum die is configured to move according to default coining pattern, so that the etching liquid is carved on the drum die to be processed
Lose required figure.
Preferably：
Also include reservoir, the reservoir is used for the etch liquids of recycling use in the course of processing.
The mobile station is that the Two-dimensional Position moving stage can be controlled in vertical Z-direction and water in Two-dimensional Position moving stage
Flat Y direction motion so that the microfabricated electrodes coordinate the rotation of drum die, according to the default impressing mould figure
Shape is moved, wherein the Y direction of the level is axial consistent with the rotary shaft.
The tip of the microfabricated electrodes has the radius of corner of 10~500nm.
The microfabricated electrodes are the needle-like or cylindrical electrode that tungsten, platinum or gold make.
The shower nozzle is included in symmetrically arranged two shower nozzles in both sides of the microfabricated electrodes, it is preferable that the spray
The injection flow velocity of head is 1-10ml/min.
The pulse power parameters include voltage magnitude be 1~5V, frequency be 1~500MHz, pulse width be 0.5ns~
500ns, processing electric current density value is 2~10A/cm2。
A kind of nano impression drum die preparation method using described drum die preparation facilitiess, including：
While the high-frequency impulse signal of telecommunication being loaded between the microfabricated electrodes and the drum die to be processed, control
Make the microfabricated electrodes and the drum die to be processed is moved according to default coining pattern so that the etching liquid is in institute
State and etch required figure on drum die to be processed.
Preferably：
Before level processing etching is started, the microfabricated electrodes are first made to hang down relative to the drum die to be processed
Straight-in feed, controlled by monitoring the current value between the microfabricated electrodes and the drum die to be processed it is described fine plus
The relative feed speed of work electrode and the drum die to be processed, wherein fast according to first before detecting electric current and undergoing mutation
Degree feeding, detecting after electric current undergos mutation, according to the second speed feeding less than the First Speed and with setting plus
Work electric current density is processed, and reaches the working depth needed for structure.
The First Speed is 5~10 μm/s, and the speed of the second speed is 1~10nm/s.
Beneficial effects of the present invention have：
Using the present invention based on the micro-machined nano impression drum die preparation facilitiess of electrochemistry, Jing tests, can obtain
Minimum process live width up to 100nm level, it is suitable with electron-beam direct writing machining accuracy, and cost is far below electron-beam direct writing
Process equipment.It is embodied as：Electrochemical etching precision can be greatly improved using the high-frequency impulse signal of telecommunication, the nanometer for obtaining is processed
The mould and die accuracy that impression cylinder mould is obtained with electron-beam direct writing processing is suitable, far above electroforming and silicon lateral oxidation precision；If
Standby low cost, the microfabricated electrodes needed for the present invention are easily prepared with existing processing technology, for example, are readily available sophisticated circle
Needle electrode of the angular radius less than 30nm；The simple structure of equipment, without the need for high-power electron beam and high vacuum environment, can realize big
The mould processing of volume, processing cost is extremely low.
Description of the drawings
Fig. 1 is an embodiment of the present invention based on the micro-machined nano impression drum die preparation facilitiess structure of electrochemistry
Schematic diagram；
Fig. 2 is the mplifying structure schematic diagram of the local A of microfabricated electrodes and drum die in an embodiment of the present invention.
Specific embodiment
Embodiments of the present invention are elaborated below.It is emphasized that what the description below was merely exemplary,
Rather than in order to limit the scope of the present invention and its application.
Referring to Fig. 1 and Fig. 2, in one embodiment, a kind of drum die system based on high-frequency impulse electrochemistry micro etch
Standby device, wherein, drum die 8 to be processed is fixed in rotary shaft 2, and drum die 8 is constructed from a material that be electrically conducting, drum die
8 material can be conductive nickel or silicon.Microfabricated electrodes 4 are clamped on arc-spark stand 5, and arc-spark stand 5 is clamped in movement
On platform 6, the positive and negative end of high frequency pulse power supply 3 is connected on the drum die 8 and microfabricated electrodes 4 of conduction.It is micro-
The vicinity of fining-off electrode 4 is provided with shower nozzle 7, and shower nozzle 7 sprays etching liquid, formed in the machining area of the microfabricated electrodes
Electrolyzed Processing environment.Preferably, in symmetrically arranged two shower nozzles 7 in both sides of microfabricated electrodes 4.Preferably, drum die
Preparation facilitiess can also include the reservoir 1 for reclaiming circulation etching solution 9.
During work, can be vertically movable by PC control mobile station, machined electrode 4 vertically feeds to drum die 8, together
When open high frequency pulse power supply 3 apply high-frequency pulse signal between the surface of microfabricated electrodes 4 and drum die 8, pass through
Current detecting equipment, monitors the current value between microfabricated electrodes 4 and drum die 8, controls the feed speed of machined electrode.It is complete
Into after feeding, by the motion of vertical Z-direction and the motion of horizontal Y-direction of PC control machined electrode 4 or mobile station 6, coordinate
The rotary motion of drum die 8 or rotary shaft 2, moves according to default coining pattern, completes the etching of conductive layer on drum die
Processing.
Microfabricated electrodes 4 can be the conductive needle-like for making such as tungsten, platinum, gold or cylindrical electrode, microfabricated electrodes 4
Can be obtained by electrochemical corrosion, mechanical lapping, spark machined or nanowire growth.Preferably, the tip of microfabricated electrodes 4
Radius of corner is 10~500nm.
Preferably, the flow velocity of the etching solution injection is 1-10ml/min.
Preferably, the voltage peak of high-frequency pulse signal during lithography be 1~5V, frequency be 1~500MHz, pulse
Width is 0.5ns~500ns.
Illustrate the preparation method of the present invention with exemplary embodiment below.
The present embodiment adopts tungsten electrode electrochemical etching nano impression cylinder nickel mould, technique specifically to may include following step
Suddenly：
1) by be processed, the clamping of drum die 8 is in rotary shaft 2 and is positioned, wherein the conductive material of drum die
For metallic nickel, drum length 500mm, outside diameter 300mm.
2) electrochemical corrosive process is adopted, tungsten tip 4, needle point tip radius of corner is prepared on the tungsten filament of diameter 0.3mm
For 100nm, and by its clamping on arc-spark stand 5.
3) etching solution 9 is injected in the fluid circulation system of injector head 7, the formula of the etching solution is as follows：
NaNO3 100g/L
NaCl 100g/L
4) drum die to be processed 8 and machined electrode 4 are connected respectively the positive pole and negative pole of high frequency pulse power supply 3.
5) controlling switch of injector head 7 is opened, the position of injector head is adjusted so as to is needed immediately below the liquid jet to electrode
The region of processing, adjusts flow parameter, reaches 2ml/min.
6) high frequency pulse power supply 3 is opened, pulse signal parameter is set, put between nickel mould and machined electrode.Specifically
Pulse signal parameter is：Voltage magnitude is 3V, and frequency is 20MHz, and pulse width is 10ns.
7) fed towards nickel drum die 8 along vertical Z direction by PC control microfabricated electrodes 4, feed speed is 8
μm/s。
8) when current value occurs step mutation upwards between microfabricated electrodes 4 and drum die 8, by electrode feed speed
It is reduced to process velocity 6nm/s.Adjustment pulse power magnitude of voltage makes processing electric current density reach 5A/cm to 3.5V2, make processing electricity
Pole is processed downwards with the speed of 6nm/s.At the same time by the horizontal Y motion of PC control microfabricated electrodes 4, rolling is coordinated
The rotary motion speed of cylinder mould tool 8, moves according to default coining pattern, when working depth needed for reaching structure, stops vertical
The feeding of direction Z.The horizontal movement speed of wherein microfabricated electrodes 4 is obtained by graphics processing program calculation, drum die 8
Rotary motion speed be fixed as 3 × 10-5r/min。
9) microfabricated electrodes 4 reset, and take out drum die 8, and cleaning, drying completes the processing of drum die.
Above content is with reference to concrete/preferred embodiment further description made for the present invention, it is impossible to recognized
Being embodied as of the fixed present invention is confined to these explanations.For general technical staff of the technical field of the invention,
Without departing from the inventive concept of the premise, it can also make some replacements or modification to the embodiment that these have been described,
And these are substituted or variant should all be considered as belonging to protection scope of the present invention.
Claims (10)
1. it is a kind of to be based on the micro-machined nano impression drum die preparation facilitiess of electrochemistry, it is characterised in that to include：
Rotary shaft, drum die to be processed can be rotated loaded in the rotary shaft under the drive of the rotary shaft；
Arc-spark stand and loaded on the microfabricated electrodes on the arc-spark stand, the microfabricated electrodes and the cylinder mould to be processed
Tool arranged opposite；
For disposing the mobile station of arc-spark stand, the mobile station to realize vertically as well as horizontally, with drive it is described it is fine plus
Work electrode realizes required displacement；
Shower nozzle, the shower nozzle sprays etching liquid in the machining area of the microfabricated electrodes, forms Electrolyzed Processing environment；
High frequency pulse power supply, the high frequency pulse power supply adds between the microfabricated electrodes and the drum die to be processed
The high-frequency impulse signal of telecommunication is carried, so that the etching liquid is etched on the drum die to be processed；
The microfabricated electrodes for wherein being driven by the mobile station and the cylinder described to be processed driven by the rotary shaft
Mould is configured to move according to default coining pattern, so that the etching liquid is etched on the drum die to be processed
Required figure；
Before level processing etching is started, the microfabricated electrodes are first made vertically to enter relative to the drum die to be processed
Give, the microfabrication electricity is controlled by monitoring the current value between the microfabricated electrodes and the drum die to be processed
The relative feed speed of pole and the drum die to be processed, wherein entering according to First Speed before detecting electric current and undergoing mutation
Give, the processing electricity detecting after electric current undergos mutation, according to the second speed feeding less than the First Speed and to set
Current density is processed, and reaches the working depth needed for structure.
2. drum die preparation facilitiess as claimed in claim 1, it is characterised in that also including reservoir, the reservoir is used
The etch liquids of recycling use in the course of processing.
3. drum die preparation facilitiess as claimed in claim 1, it is characterised in that the mobile station is Two-dimensional Position moving stage, institute
State Two-dimensional Position moving stage can the controlled Y direction in vertical Z-direction and level move so that the microfabricated electrodes
Coordinate the rotation of drum die, move according to the default impressing mould figure, wherein the Y direction of the level and the rotation
The axial direction of rotating shaft is consistent.
4. drum die preparation facilitiess as described in any one of claims 1 to 3, it is characterised in that the microfabricated electrodes
The needle-like made for tungsten, platinum or gold or cylindrical electrode.
5. drum die preparation facilitiess as described in any one of claims 1 to 3, it is characterised in that the microfabricated electrodes
Tip have 10~500nm radius of corner.
6. drum die preparation facilitiess as described in any one of claims 1 to 3, it is characterised in that the shower nozzle is included in institute
State symmetrically arranged two shower nozzles in both sides of microfabricated electrodes.
7. drum die preparation facilitiess as claimed in claim 6, it is characterised in that the injection flow velocity of the shower nozzle is 1-
10ml/min。
8. drum die preparation facilitiess as described in any one of claims 1 to 3, it is characterised in that the high frequency pulse power supply
Parameter include voltage magnitude be 1~5V, frequency be 1~500MHz, pulse width be 0.5ns~500ns, processing electric current density value
For 2~10A/cm2。
9. a kind of nano impression drum die system of the drum die preparation facilitiess using as described in any one of claim 1 to 8
Preparation Method, it is characterised in that include：
While loading the high-frequency impulse signal of telecommunication between the microfabricated electrodes and the drum die to be processed, institute is controlled
State microfabricated electrodes and the drum die to be processed is moved according to default coining pattern so that the etching liquid is treated described
Required figure is etched on making roller mould；
Before level processing etching is started, the microfabricated electrodes are first made vertically to enter relative to the drum die to be processed
Give, the microfabrication electricity is controlled by monitoring the current value between the microfabricated electrodes and the drum die to be processed
The relative feed speed of pole and the drum die to be processed, wherein entering according to First Speed before detecting electric current and undergoing mutation
Give, the processing electricity detecting after electric current undergos mutation, according to the second speed feeding less than the First Speed and to set
Current density is processed, and reaches the working depth needed for structure.
10. drum die preparation method as claimed in claim 9, it is characterised in that the First Speed is 5~10 μm/s,
The second speed is 1~10nm/s.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510400520.6A CN104985266B (en) | 2015-07-09 | 2015-07-09 | Nano impression cylinder mould preparation device and preparation method |
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| CN201510400520.6A CN104985266B (en) | 2015-07-09 | 2015-07-09 | Nano impression cylinder mould preparation device and preparation method |
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| CN104985266B true CN104985266B (en) | 2017-05-17 |
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| CN108149282A (en) * | 2017-12-20 | 2018-06-12 | 广东工业大学 | A kind of substrate surface metallization molding micro-mould manufacturing method of jet flow electroforming |
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| CN1053852C (en) * | 1992-12-16 | 2000-06-28 | 国营江南光学仪器厂 | Generating electrospark precision machining equipment |
| CN100496840C (en) * | 2007-07-06 | 2009-06-10 | 中国石油大学(华东) | Machining apparatus for composite slitted sieve pipe |
| JP5360675B2 (en) * | 2008-10-10 | 2013-12-04 | 株式会社ニコン | Display element manufacturing method and display element manufacturing apparatus |
| JP2012208140A (en) * | 2011-03-29 | 2012-10-25 | Fujifilm Corp | Electron beam exposure system and electron beam exposure method |
| CN102513623A (en) * | 2011-12-29 | 2012-06-27 | 北京理工大学 | Novel metal microdefect electric pulse erosion device |
| CN103252541A (en) * | 2013-05-06 | 2013-08-21 | 南京航空航天大学 | Device and method for manufacturing large-length-diameter-ratio nanoscale shafts |
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