CN104942661A - Magneto-rheological polish grinding head and device suitable for plane optical part - Google Patents
Magneto-rheological polish grinding head and device suitable for plane optical part Download PDFInfo
- Publication number
- CN104942661A CN104942661A CN201510385822.0A CN201510385822A CN104942661A CN 104942661 A CN104942661 A CN 104942661A CN 201510385822 A CN201510385822 A CN 201510385822A CN 104942661 A CN104942661 A CN 104942661A
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- China
- Prior art keywords
- mrf
- bistrique
- field generating
- magnet
- magneto
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
- B24B1/005—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes using a magnetic polishing agent
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B13/00—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
- B24B13/0018—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor for plane optical surfaces
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B13/00—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
- B24B13/01—Specific tools, e.g. bowl-like; Production, dressing or fastening of these tools
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
Abstract
The invention relates to the technical field of precise optical polishing, in particular to a magneto-rheological polish grinding head and device suitable for a plane optical part. The magneto-rheological polish grinding head mainly comprises an installation plate and a plurality of magnetic field generation units fixed to the front face of the installation plate. Each magnetic field generation unit is composed of two magnets attracted together, and Bingham bodies are produced on the surface of a splicing gap of every two corresponding magnets through magneto-rheological fluid. The magneto-rheological polish grinding head and device are simple in structure, convenient to use and practical; by arranging the magnetic field generation units, the contact area of a workpiece and protrusions of the Bingham bodies during magneto-rheological polishing is greatly enlarged; all the Bingham bodies are consistent in magnetic field uniformity, the large-area rapid magneto-rheological polishing can be achieved, and machining efficiency is greatly improved.
Description
Technical field
The present invention relates to precision optics polishing technical field, particularly relate to a kind of the MRF bistrique and the device that are applicable to planar wave part.
Background technology
The demand for development optical element of modern shortwave optics, high light optics, electronics and membrane science should have high reflectance, high surface figure accuracy, low roughness and high strength, therefore very harsh to the requirement of optical element surface, if surface is without distortion of lattice defect, substantially there is not residual stress, extremely low surface roughness (Ra≤1nm), pollute without exogenous impurity, high geometric accuracy and substrate surface should have crystal orientation etc. accurately.Need a large amount of planar wave parts in large-scale especially high power device, this kind of optical effect correction quality of bearing high power laser light load proposes very harsh requirement.
Technique of Magnetorheological Finishing electromagnetism and fluid dynamic theory is combined and is applied to a kind of technology of optical manufacturing.Magnetorheological process technology is presently more satisfactory high-precision optical part process technology, and its maximum advantage is the problem that there is not tool wear, and machining accuracy is high; Be easy to realize computer control; Its polishing tool utilizes the special characteristics of magnetic rheological body, can not produce sub-surface breakdown, fundamentally can solve Problems existing in finishing method in the past, meet the demand for development of development to optical element of modern science and technology.
Existing Technique of Magnetorheological Finishing may be used for the processing of planar wave part, and the crudy on optical element surface can reach a very high quality.Chinese patent CN101579833B discloses high efficiency controllable multiple wheel head magnetic rheology buffing device, its field generator for magnetic is made up of a ring shielding device and the controlled electromagnet unit of at least 1 independence, each controlled field region is with annular spread, rotarily drive these serial small abrasive noses and absorption surface burnishing by buff spindle and polishing disk, realize the efficient polishing of controlled many bistriques to workpiece.Chinese patent ZL200910052609.2 discloses high efficiency controllable multiple wheel head magnetic rheology buffing device, adopts the circumference field structure of monocycle or many rings, adopts array arrangement to realize the processing of different purposes workpiece simultaneously.
As everyone knows, improve the polishing efficiency of planar wave part, the Main Means of MRF comprises: improve speed of related movement, the Bingham body area of increasing magnetic field and increase and absorption surface.Above-mentioned MRF grinding head device can both realize the surface finish of flat work pieces, there is certain novelty, but there is certain application restriction in these techniques, these technology are difficult to expand the area with absorption surface Bingham body projection, namely allow to expand certain scope to, its uniformity can be subject to certain restriction, and it adopts electromagnetism generation magnetic field structure to want increasing magnetic field to be also very difficult.
Summary of the invention
For the deficiency that prior art exists, the object of the present invention is to provide a kind of Bingham body and workpiece uniform contact area is large, working (machining) efficiency the is high MRF bistrique being applicable to planar wave part and device.
For achieving the above object, the present invention can be achieved by the following technical programs:
A kind of MRF bistrique being applicable to planar wave part, comprise installing plate and several are fixed on the field generating unit in installing plate front, described field generating unit is made up of the two blocks of magnet be mutually attached together, and magnetic flow liquid produces Bingham body on the surface in two pieces of magnet splicing gaps.Adopt two pieces of magnet adsorptions to form a unit together, utilize the feature that there is a natural attraction between the sexes in magnetic field, by wherein the N pole of one block of magnet and the S pole of another block magnet form same, such combination, after interpolation magnetic flow liquid, because two blocks of magnet are all that the magnetic field intensity of N pole or S pole is maximum, the magnetic line of force follows the mode of beeline distribution from N pole to S pole, the major part magnetic line of force can form a closed loop from the N pole of first magnet to the S pole of second magnet, namely the locus on surface, junction, two faces produces stable high-intensity magnetic field, can at two pieces of magnet bound fraction gaps place, especially slit surfaces space forms protruding Bingham body, this is be difficult to realize on electromagnet.
Further, described magnet is permanent magnet, adopts permanent magnet as field generating unit, can ensure the uniformity of unit magnetic field intensity like this.
Further, described magnet is square, cuboid, cylinder, torus or irregular body, and its magnetic pole strength is continuous level or discontinuous plane.
Further, because magnetic pole strength is continuous level or discontinuous plane, the Bingham body that described field generating unit produces is connection or interrupted.
Further, described installing plate adopts permeability magnetic material, and described field generating unit by magnetic-adsorption on a mounting board.
Further, be provided with the limited block being fixed on installing plate front between described adjacent two field generating units, the width of described limited block is equal with the spacing of adjacent two field generating units, prevents field generating unit from moving.
Further, described MRF bistrique also comprises sealing ring, telecontrol equipment contiguous block, bearing block, clutch shaft bearing and connecting axle, described telecontrol equipment contiguous block is connected with the back side of installing plate by sealing ring, described bearing block is fixedly connected with telecontrol equipment contiguous block, installing plate, described clutch shaft bearing is fixedly mounted in bearing block, and described connecting axle is arranged in clutch shaft bearing.
A kind of magnetorheological finishing device, comprise described MRF bistrique, support, rotary main shaft, belt drive system, motor and reductor system and workpiece plate, described motor and reductor system and workpiece plate are fixedly mounted on support, described rotary main shaft is arranged on support by the second bearing, described MRF bistrique is fixedly connected with rotary main shaft, described motor and reductor system are rotated by belt drive system driven rotary main shaft, and then driving MRF bistrique to rotate, described workpiece plate is arranged on the below of MRF bistrique.
Structure of the present invention is simple, convenient and practical, by arranging some field generating units, greatly be increased in the area of absorption surface Bingham body projection in MRF, and the magnetic field homogeneity of each Bingham body is consistent, the quick MRF of large area can be realized, substantially increase working (machining) efficiency, be particularly useful for planar wave part.
Accompanying drawing explanation
Fig. 1 is the overall structure schematic diagram of MRF bistrique of the present invention;
Fig. 2 is the part-structure schematic diagram of MRF bistrique of the present invention;
Fig. 3 is the structural representation of field generating unit of the present invention and Bingham body;
The magnet arrangement of Fig. 4 to be magnetic pole strength be continuous level;
The magnet arrangement of Fig. 5 to be one of them magnetic pole strength be discontinuous plane;
Fig. 6 is splicing gap is field generating unit structure that is continuous, intermittently straight line;
Fig. 7 is splicing gap is field generating unit structure that is continuous, intermittently circular arc line segment;
Fig. 8 splices the field generating unit structure that gap is continuous, interrupted irregular line segment;
Fig. 9 is splicing gap is continuous, interrupted circular field generating unit structure;
Figure 10 is the structural representation of magnetorheological finishing device of the present invention;
In figure: 1-MRF bistrique, 11-installing plate, 12-field generating unit, 121-magnet, 13-Bingham body, 14-limited block, 15-sealing ring, 16-telecontrol equipment contiguous block, 17-bearing block, 18-clutch shaft bearing, 19-connecting axle, 2-support, 3-rotary main shaft, 4-belt drive system, 5-motor and reductor system, 6-workpiece plate, 7-workpiece.
Detailed description of the invention
Below in conjunction with accompanying drawing and detailed description of the invention, the present invention is further illustrated:
As shown in Fig. 1 ~ 2, the MRF bistrique being applicable to planar wave part of the present invention, mainly comprise installing plate 11 and field generating unit 12, installing plate 11 adopts permeability magnetic material, field generating unit 12 is made up of the two blocks of magnet 121 be mutually attached together, several field generating units 12 rely on the magnetic adsorptive power of self to be fixed on the front of installing plate 11, the arrangement mode of field generating unit 12, to be arranged as the best according to rule, also can adopt rambling mode to arrange.Preferably, magnet 121 adopts permanent magnet, ensures that the magnetic field homogeneity of each Bingham body 13 is consistent.As shown in Figure 3, the surface that magnetic flow liquid splices gap at two blocks of magnet 121 produces Bingham body 13.
In actual applications, installing plate 11 size can be accomplished very large, can be infinitely great in theory, the dimension limit of present machining can be reached, therefore MRF bistrique 1 size also can increase to infinity, so just greatly be increased in the area of absorption surface Bingham body 13 projection in MRF, and the magnetic field homogeneity of each Bingham body 13 is consistent, can realize the quick MRF of large area.
MRF bistrique 1 also comprises limited block 14, sealing ring 15, telecontrol equipment contiguous block 16, bearing block 17, clutch shaft bearing 18 and connecting axle 19.Limited block 14 to be located between adjacent two field generating units and to be fixed on installing plate 11 front, and concrete, the width of limited block 14 is equal with the spacing of adjacent two pieces of field generating units 12, prevents field generating unit 12 from moving.Telecontrol equipment contiguous block 16 is connected with the back side of installing plate 11 by sealing ring 15, bearing block 17 is fixedly connected with by screw with telecontrol equipment contiguous block 16, installing plate 11, clutch shaft bearing 18 is fixedly mounted in bearing block 17, and connecting axle 19 is arranged in clutch shaft bearing 18.Sealing ring 15 plays preventing pollution thing and enters the effect that installing plate 11 pollutes field generating unit 12, and connecting axle 10 may be fixedly attached on support 2, and then reaches the spacing object of restriction installing plate 11 vertical direction.Telecontrol equipment contiguous block 16 can couple together with the kinematic driving unit of equipment, whole MRF bistrique 1 can be driven like this to carry out rotating or rectilinear motion, after adding magnetic flow liquid, due to the existence of motion, can shearing force be formed, reach the effect of polishing.
Preferably, magnet 121 is square, cuboid, cylinder, torus or irregular body, its magnetic pole strength is continuous level or discontinuous plane, and magnet 121 is not limited to certain particular form, as long as can make field generating unit 12 produce the magnetic field of strength of stability and then make magnetic flow liquid form the Bingham body of stable and uniform.
As shown in Figure 4, magnet can be square, cuboid, cylinder, torus and irregular body, and N magnetic pole strength and S magnetic pole strength are for being connected plane.
As shown in Figure 5, magnet can be square, cuboid, cylinder, torus and irregular body, and N magnetic pole strength or S magnetic pole strength are discontinuous plane.
As shown in Figure 6, two blocks of magnet 121 are attached together, and form a field generating unit 12, after adding magnetic flow liquid, splice gap surface energy enough produce uniform Bingham body 13 projection at two blocks of magnet 121.Carry out top view, adopt two pieces of magnetic pole strengths to be square or the cuboid magnet of continuous level, splicing gap can be continuous linear; A magnetic pole strength or two magnetic pole strengths are square or the cuboid magnet of discontinuous plane, and splicing gap is interrupted straight line.
As shown in Figure 7, the gap adopting two pieces of magnet splicings of respective shapes to produce is continuous or interrupted circular arc line segment.
As shown in Figure 8, the gap adopting two pieces of magnet splicings of respective shapes to produce is continuous or interrupted irregular line segment.
As shown in Figure 9, the gap adopting two pieces of magnet splicings of respective shapes to produce is continuous or interrupted circle.
As shown in Figure 10, a kind of magnetorheological finishing device, comprises MRF bistrique 1, support 2, rotary main shaft 3, belt drive system 4, motor and reductor system 5 and workpiece plate 6.Motor and reductor system 5 and workpiece plate 6 are fixedly mounted on support 2, and workpiece 7 is fixedly mounted on workpiece plate 6, and rotary main shaft 3 is arranged on support 2 by the second bearing.MRF bistrique 1 is fixed by screws on rotary main shaft 3, and motor and reductor system 5 are rotated by belt drive system 4 driven rotary main shaft 3, and then drives MRF bistrique 1 to rotate, and workpiece plate 6 is arranged on the below of MRF bistrique 1.After interpolation magnetic flow liquid, workpiece 7 can form Bingham body 13 with the gap location of MRF bistrique 1, and after interpolation polishing fluid, Bingham body 13 drives polishing fluid to form shear removal to glass surface, finally reaches the object of MRF.
For a person skilled in the art, according to above technical scheme and design, other various corresponding change and distortion can be made, and all these change and distortion all should belong within the protection domain of the claims in the present invention.
Claims (8)
1. one kind is applicable to the MRF bistrique of planar wave part, it is characterized in that: comprise installing plate and several are fixed on the field generating unit in installing plate front, described field generating unit is made up of the two blocks of magnet be mutually attached together, and magnetic flow liquid produces Bingham body on the surface in two pieces of magnet splicing gaps.
2. the MRF bistrique being applicable to planar wave part according to claim 1, is characterized in that: described magnet is permanent magnet.
3. the MRF bistrique being applicable to planar wave part according to claim 2, it is characterized in that: described magnet is square, cuboid, cylinder, torus or irregular body, its magnetic pole strength is continuous level or discontinuous plane.
4. the MRF bistrique being applicable to planar wave part according to claim 3, is characterized in that: the Bingham body that described field generating unit produces is connection or interrupted.
5. the MRF bistrique being applicable to planar wave part according to claim 1, is characterized in that: described installing plate adopts permeability magnetic material, and described field generating unit by magnetic-adsorption on a mounting board.
6. the MRF bistrique being applicable to planar wave part according to claim 5, it is characterized in that: be provided with the limited block being fixed on installing plate front between described adjacent two field generating units, the width of described limited block is equal with the spacing of adjacent two field generating units.
7. the MRF bistrique being applicable to planar wave part according to claim 6, it is characterized in that: described MRF bistrique also comprises sealing ring, telecontrol equipment contiguous block, bearing block, clutch shaft bearing and connecting axle, described telecontrol equipment contiguous block is connected with the back side of installing plate by sealing ring, described bearing block is fixedly connected with telecontrol equipment contiguous block, installing plate, described clutch shaft bearing is fixedly mounted in bearing block, and described connecting axle is arranged in clutch shaft bearing.
8. a magnetorheological finishing device, it is characterized in that: comprise the arbitrary described MRF bistrique of claim 1 ~ 7, support, rotary main shaft, belt drive system, motor and reductor system and workpiece plate, described motor and reductor system and workpiece plate are fixedly mounted on support, described rotary main shaft is arranged on support by the second bearing, described MRF bistrique is fixedly connected with rotary main shaft, described motor and reductor system are rotated by belt drive system driven rotary main shaft, and then drive MRF bistrique to rotate, described workpiece plate is arranged on the below of MRF bistrique.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510385822.0A CN104942661B (en) | 2015-06-30 | 2015-06-30 | A kind of MRF bistrique and device suitable for planar wave part |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510385822.0A CN104942661B (en) | 2015-06-30 | 2015-06-30 | A kind of MRF bistrique and device suitable for planar wave part |
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| Publication Number | Publication Date |
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| CN104942661A true CN104942661A (en) | 2015-09-30 |
| CN104942661B CN104942661B (en) | 2017-08-25 |
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| CN201510385822.0A Expired - Fee Related CN104942661B (en) | 2015-06-30 | 2015-06-30 | A kind of MRF bistrique and device suitable for planar wave part |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109048506A (en) * | 2018-08-10 | 2018-12-21 | 太原理工大学 | A kind of magneto liquid-magnetic abrasive tool surface finishing device and method |
| CN110722428A (en) * | 2019-10-23 | 2020-01-24 | 中国科学院光电技术研究所 | Magnetorheological sub-aperture polishing device suitable for large-aperture optical element |
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| JPH10244451A (en) * | 1997-03-03 | 1998-09-14 | Nikon Corp | Polishing tool and polishing method using it |
| CN201026589Y (en) * | 2006-12-31 | 2008-02-27 | 广东工业大学 | Magnetorheological device for grinding and polishing plane surface |
| CN101559571A (en) * | 2009-03-11 | 2009-10-21 | 清华大学 | Method and device for polishing magnetic field auxiliary flexible rotary brush for optical element |
| CN103072069A (en) * | 2012-12-19 | 2013-05-01 | 广东工业大学 | Magneto-rheological effect viscoelastic clamping electroceramic substrate flexible grinding and polishing device and method |
| CN104308672A (en) * | 2014-10-27 | 2015-01-28 | 白素华 | Rotary magnetorheological finishing wheel device |
| CN205057684U (en) * | 2015-06-30 | 2016-03-02 | 深圳市智博高科光电装备有限公司 | Magnetic current becomes polish grinding head and device suitable for plane optical element |
-
2015
- 2015-06-30 CN CN201510385822.0A patent/CN104942661B/en not_active Expired - Fee Related
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10244451A (en) * | 1997-03-03 | 1998-09-14 | Nikon Corp | Polishing tool and polishing method using it |
| CN201026589Y (en) * | 2006-12-31 | 2008-02-27 | 广东工业大学 | Magnetorheological device for grinding and polishing plane surface |
| CN101559571A (en) * | 2009-03-11 | 2009-10-21 | 清华大学 | Method and device for polishing magnetic field auxiliary flexible rotary brush for optical element |
| CN103072069A (en) * | 2012-12-19 | 2013-05-01 | 广东工业大学 | Magneto-rheological effect viscoelastic clamping electroceramic substrate flexible grinding and polishing device and method |
| CN104308672A (en) * | 2014-10-27 | 2015-01-28 | 白素华 | Rotary magnetorheological finishing wheel device |
| CN205057684U (en) * | 2015-06-30 | 2016-03-02 | 深圳市智博高科光电装备有限公司 | Magnetic current becomes polish grinding head and device suitable for plane optical element |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109048506A (en) * | 2018-08-10 | 2018-12-21 | 太原理工大学 | A kind of magneto liquid-magnetic abrasive tool surface finishing device and method |
| CN109048506B (en) * | 2018-08-10 | 2020-10-23 | 太原理工大学 | Permanent magnet type liquid magnetic grinding tool surface finishing processing device and method |
| CN110722428A (en) * | 2019-10-23 | 2020-01-24 | 中国科学院光电技术研究所 | Magnetorheological sub-aperture polishing device suitable for large-aperture optical element |
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| CN104942661B (en) | 2017-08-25 |
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