CN104931229A - Integrated thin film sensor for measuring surface heat flow rate in hypersonic flow - Google Patents
Integrated thin film sensor for measuring surface heat flow rate in hypersonic flow Download PDFInfo
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- CN104931229A CN104931229A CN201510324489.2A CN201510324489A CN104931229A CN 104931229 A CN104931229 A CN 104931229A CN 201510324489 A CN201510324489 A CN 201510324489A CN 104931229 A CN104931229 A CN 104931229A
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Abstract
The invention discloses an integrated thin film sensor for measuring surface heat flow rate in hypersonic flow. The integrated thin film sensor includes a glass substrate which is of an integrated structure and is a flat plate, and a temperature measuring element group; each temperature measuring element comprises a metal thin film which is prepared in a certain area of the glass substrate through adopting a film plating process; adjacent metal thin films are spaced from each other by a certain distance; all the metal thin films are arranged regularly and have the same resistance-temperature characteristics; and the metal thin films are made of platinum. The sensor has highest integration, so that the accuracy of measurement data can be improved; the sensor can be in seamless cementation with a model to be tested, and therefore, deviation caused by installation can be decreased; and the sensor has been subjected to repetitive tests for many times, so that the accuracy of the sensor can be ensured. As test results indicated, the integrated thin film sensor of the invention has been subjected to 23 times of high-and-low pressure air flow scour, and the damage rate of the sensor is only 6%, and the data repeatability error of the sensor is within 5%.
Description
Technical field
The present invention relates to flow measurement technical field, particularly relate to a kind of integrated sensor measuring surface heat flow rate in hypersonic flowing.
Background technology
The design of sensor, manufacturing technology are one of links the most key in wind-tunnel calorimetric technology.The sensor measuring transient surface rate of heat flow can be divided into two large classes by principle of work: land surface pyrometer class and calorimeter class.The former utilizes surface temperature to measure the time dependent history of surface temperature of semi-infinite body, then according to heat transfer theory gauging surface rate of heat flow.The latter is that utilization thermal element absorbs the heat imported into wherein, the average ramp rate gauging surface rate of heat flow again of measuring amount thermal element.
In shock tunnel, usually adopt thin film sensor at present, measuring principle is the characteristic varying with temperature according to metallic resistance and change, and is designed and produced by the hypothesis of semiinfinite One-dimensional heat transfer.Thin film sensor is formed primarily of metallic film, backing material and lead-in wire, as shown in Figure 1.Metallic film generally select anti-oxidant, resistivity is high, the high purity metal platinum that in usable range, resistance temperature substantially linearly changes.Backing material generally selects that heat transfer coefficient is stable, coefficient of heat conductivity is low, can resistant to elevated temperatures electrically insulating material, backing material is generally processed as the glass bar that diameter is 1-3mm, at one end plated film on face.Lead-in wire is for connecting film and measure traverse line.
Traditional glass rod type thin film sensor, only can realize spot measurement, not easily realizes intensive measurement; Be strict with when mounted and flush with model surface, install inconvenience; Sensor insulation course rounds, and makes sensor be connected error with metal pattern wayward within testing requirements; Between sensor, measurement data globality is poor.
Summary of the invention
For above-mentioned technical matters, the present invention proposes the integrated sensor of surface heat flow rate in the hypersonic flowing of a kind of accurate measurement.
Technical scheme of the present invention is:
Measure an integrated thin-film sensor for surface heat flow rate in hypersonic flowing, comprising:
Substrate of glass, it is as a whole, and is a flat board; And
Temperature element group, each temperature element is included in the metallic film adopting coating process to prepare in the certain area of described substrate of glass, spaced from each other between adjacent metallic film, all metallic films are regularly arranged, and there is identical resistance-temperature characteristic, the material of described metallic film is platinum.
Preferably, in the hypersonic flowing of described measurement surface heat flow rate integrated thin-film sensor in, the distribution on the glass substrate of all metallic films forms some row, and the length direction often arranged along described substrate of glass arranges, and adjacent two metallic film spacing distances are equal; The Width that described metallic film length direction is parallel to described substrate of glass is arranged; Each metallic film two ends are smeared silver slurry and are connected with lead-in wire.
Preferably, in the hypersonic flowing of described measurement surface heat flow rate integrated thin-film sensor in, shape, the area of all metallic films are all equal with thickness.
Preferably, in the hypersonic flowing of described measurement surface heat flow rate integrated thin-film sensor in, described substrate of glass is rectangle.
Preferably, in the hypersonic flowing of described measurement surface heat flow rate integrated thin-film sensor in, the length of described substrate of glass is 50mm, 80mm or 100mm, and width is 10mm, and thickness is 0.8mm.
Preferably, in the hypersonic flowing of described measurement surface heat flow rate integrated thin-film sensor in, described substrate of glass is formed with 20-39 metallic film.
Preferably, in the hypersonic flowing of described measurement surface heat flow rate integrated thin-film sensor in, described coating process for by bombarding platinum target, makes the ion beam depositing sputtered in described substrate of glass.
The present invention compared with prior art beneficial effect is:
(1) sensor integration degree is the highest, improves measure data precision;
(2) sensor can carry out seamless cementing with model to be measured, reduces because installing the deviation caused;
(3) repeatedly replica test checking, guarantees sensor accuracy.Test findings shows, integrated thin-film sensor of the present invention, and through 23 high-low pressure airflow scourings, spoilage is only 6%, and data redundancy error is within 5%.
Accompanying drawing explanation
Fig. 1 is traditional one point sensing device;
Fig. 2 is integrated thin-film sensor of the present invention;
Fig. 3 gives application integrated thin-film sensor of the present invention to the experimental measurements (incoming flow Ma=8.0) of flat plate model.
Embodiment
For enabling above-mentioned purpose of the present invention, feature and advantage become apparent more, are described in detail the specific embodiment of the present invention below in conjunction with accompanying drawing.
Refer to Fig. 2 and Fig. 3, the invention provides a kind of integrated thin-film sensor measuring surface heat flow rate in hypersonic flowing, comprising: substrate of glass, it is as a whole, and is a flat board; And temperature element group, each temperature element is included in the metallic film adopting coating process to prepare in the certain area of described substrate of glass, spaced from each other between adjacent metallic film, all metallic films are regularly arranged, and there is identical resistance-temperature characteristic, the material of described metallic film is platinum.
The integrated thin-film sensor of the present invention's design can meet flat plate model and the measurement of surface heat flow rate having cylinder leading edge model.
For ensureing measurement data continuity, globality, all metallic films must be regularly arranged, and have identical resistance-temperature characteristic.
The manufacturing process of described sensor of the present invention comprises two parts:
(1) coating technique.Adopt dual ion sources sputter coating machine, constantly bombard with sputtering liquid to platinum target, the ion beam depositing sputtered, to substrate, forms film.Coating process mask sheet and substrate are fitted completely.
(2) curing technology.High-temperature heat treatment is carried out to the substrate of film forming, makes the atomic arrangement of film forming in substrate tightr, more have order, complete the secondary arrangement of atom, make membrane resistance value more stable.Aging time long by low temperature, extend aging time.
Must demarcate before sensor application: utilize repetitive measurement to average, demarcate the coefficient of freezing point and boiling point respectively, according to the resistance temperature linear characteristic of platinum, determine sensor coefficient.
The installation method of sensor is: sensor and model to be measured must carry out seamless cementing, with the laminating error of model to be measured at 0.1-0.2mm, front and back group connection is not more than 0.1mm, model and sensor is installed and meets requirement of experiment, data integrity is high, once tests the data volume that can obtain at double.
In hypersonic gun wind tunnel, adopt integrated sensor of the present invention, carry out repeatedly calorimetric test under different stagnation pressure condition for flat plate model.Test findings shows, integrated thin-film sensor of the present invention, and through 23 high-low pressure airflow scourings, spoilage is only 6%, and data redundancy error is within 5%.Utilize the present invention, obtain one group domestic the most detailed in plate center line rate of heat flow measurement data (measuring point quantity is about 170), as shown in Figure 3.
In order to maximum degree improves degree of integration, adopt following arrangement mode: in the hypersonic flowing of described measurement surface heat flow rate integrated thin-film sensor in, the distribution on the glass substrate of all metallic films forms some row, length direction along described substrate of glass arranges, and adjacent two metallic film spacing distances are equal; Each metallic film is elongated, and the Width that its length direction is parallel to described substrate of glass is arranged.
In order to the resistance-temperature characteristic making each metallic film keep identical, with ensure measure accuracy, in the hypersonic flowing of described measurement surface heat flow rate integrated thin-film sensor in, shape, the area of all metallic films are all equal with thickness.
Preferably, in the hypersonic flowing of described measurement surface heat flow rate integrated thin-film sensor in, described substrate of glass is rectangle, and the substrate of glass of this shape is easily processed, and can control the production cost of integrated thin-film sensor.
Preferably, in the hypersonic flowing of described measurement surface heat flow rate integrated thin-film sensor in, the length of described substrate of glass is 50mm, 80mm or 100mm, and width is 10mm, and thickness is 0.8mm.
Preferably, in the hypersonic flowing of described measurement surface heat flow rate integrated thin-film sensor in, described substrate of glass is formed with 20-39 metallic film, thus can the disposable 20-39 of recording group data (referring to Fig. 2).
Preferably, in the hypersonic flowing of described measurement surface heat flow rate integrated thin-film sensor in, described coating process for by bombarding platinum target, makes the ion beam depositing sputtered in described substrate of glass.
Although the present invention with preferred embodiment openly as above; but it is not for limiting the present invention; any those skilled in the art without departing from the spirit and scope of the present invention; possible variation and amendment can be made; therefore, the scope that protection scope of the present invention should define with the claims in the present invention is as the criterion.
Claims (7)
1. measure an integrated thin-film sensor for surface heat flow rate in hypersonic flowing, it is characterized in that, comprising:
Substrate of glass, it is as a whole, and is a flat board; And
Temperature element group, each temperature element is included in the metallic film adopting coating process to prepare in the certain area of described substrate of glass, spaced from each other between adjacent metallic film, all metallic films are regularly arranged, and there is identical resistance-temperature characteristic, the material of described metallic film is platinum.
2. the integrated thin-film sensor measuring surface heat flow rate in hypersonic flowing as claimed in claim 1, it is characterized in that, the distribution on the glass substrate of all metallic films forms some row, the length direction often arranged along described substrate of glass arranges, and adjacent two metallic film spacing distances are equal; Each metallic film is elongated, and the Width that its length direction is parallel to described substrate of glass is arranged.
3. the integrated thin-film sensor measuring surface heat flow rate in hypersonic flowing as claimed in claim 2, it is characterized in that, shape, the area of all metallic films are all equal with thickness.
4. the integrated thin-film sensor measuring surface heat flow rate in hypersonic flowing as claimed in claim 2, it is characterized in that, described substrate of glass is rectangle.
5. the integrated thin-film sensor measuring surface heat flow rate in hypersonic flowing as claimed in claim 4, it is characterized in that, the length of described substrate of glass is 50mm, 80mm or 100mm, and width is 10mm, and thickness is 0.8mm.
6. the integrated thin-film sensor measuring surface heat flow rate in hypersonic flowing as claimed in claim 5, is characterized in that, described substrate of glass is formed with 20-39 metallic film.
7. the integrated thin-film sensor measuring surface heat flow rate in hypersonic flowing as claimed in claim 1, is characterized in that, described coating process is by bombarding platinum target, makes the ion beam depositing sputtered in described substrate of glass.
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116593122A (en) * | 2023-07-19 | 2023-08-15 | 中国航空工业集团公司沈阳空气动力研究所 | Multi-parameter film sensing structure on model surface and preparation method thereof |
| CN117871027B (en) * | 2024-03-11 | 2024-05-07 | 中国航空工业集团公司沈阳空气动力研究所 | Columnar heat flow sensor and array preparation method thereof |
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| FR2660432A1 (en) * | 1990-04-03 | 1991-10-04 | Onera (Off Nat Aerospatiale) | Heat flow (thermal flux) sensor for high temperatures, and method for its production |
| JPH11326077A (en) * | 1998-05-14 | 1999-11-26 | Mitsubishi Heavy Ind Ltd | Heat flux measuring gauge |
| CN102749148A (en) * | 2012-07-13 | 2012-10-24 | 中国航天空气动力技术研究院 | Manufacture method for membrane resistance thermometer |
| CN104458191A (en) * | 2014-12-10 | 2015-03-25 | 中国航天空气动力技术研究院 | Miniature thin film platinum resistor heat flux transducer and manufacturing method thereof |
| CN104458046A (en) * | 2014-12-10 | 2015-03-25 | 中国航天空气动力技术研究院 | Platinum film resistor manufacturing method |
| CN204286741U (en) * | 2014-12-10 | 2015-04-22 | 中国航天空气动力技术研究院 | The platinum resistance heat flux sensor of serpentine film |
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2015
- 2015-06-12 CN CN201510324489.2A patent/CN104931229A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2660432A1 (en) * | 1990-04-03 | 1991-10-04 | Onera (Off Nat Aerospatiale) | Heat flow (thermal flux) sensor for high temperatures, and method for its production |
| JPH11326077A (en) * | 1998-05-14 | 1999-11-26 | Mitsubishi Heavy Ind Ltd | Heat flux measuring gauge |
| CN102749148A (en) * | 2012-07-13 | 2012-10-24 | 中国航天空气动力技术研究院 | Manufacture method for membrane resistance thermometer |
| CN104458191A (en) * | 2014-12-10 | 2015-03-25 | 中国航天空气动力技术研究院 | Miniature thin film platinum resistor heat flux transducer and manufacturing method thereof |
| CN104458046A (en) * | 2014-12-10 | 2015-03-25 | 中国航天空气动力技术研究院 | Platinum film resistor manufacturing method |
| CN204286741U (en) * | 2014-12-10 | 2015-04-22 | 中国航天空气动力技术研究院 | The platinum resistance heat flux sensor of serpentine film |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN116593122A (en) * | 2023-07-19 | 2023-08-15 | 中国航空工业集团公司沈阳空气动力研究所 | Multi-parameter film sensing structure on model surface and preparation method thereof |
| CN117871027B (en) * | 2024-03-11 | 2024-05-07 | 中国航空工业集团公司沈阳空气动力研究所 | Columnar heat flow sensor and array preparation method thereof |
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Application publication date: 20150923 |