CN104891825A - Scratch-resistant temperable single-silver low-radiation coated glass - Google Patents

Scratch-resistant temperable single-silver low-radiation coated glass Download PDF

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Publication number
CN104891825A
CN104891825A CN201510236943.9A CN201510236943A CN104891825A CN 104891825 A CN104891825 A CN 104891825A CN 201510236943 A CN201510236943 A CN 201510236943A CN 104891825 A CN104891825 A CN 104891825A
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Prior art keywords
target
coating chamber
layer
filled
nickel chromium
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Pending
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CN201510236943.9A
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郭明
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JINDUICHENG LUOYANG ENERGY-SAVING GLASS Co Ltd
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JINDUICHENG LUOYANG ENERGY-SAVING GLASS Co Ltd
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Priority to CN201510236943.9A priority Critical patent/CN104891825A/en
Publication of CN104891825A publication Critical patent/CN104891825A/en
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Abstract

The invention discloses scratch-resistant temperable single-silver low-radiation coated glass, and belongs to the field of coated glass. The glass comprises a glass substrate, and the surface of the glass substrate is sequentially coated with a silicon nitride film, a nickel-chromium film, a silver film, a silicon nitride film and a carbon nitride film from bottom to top. The surface hardness of the scratch-resistant temperable single-silver low-radiation coated glass can be effectively improved on the premise that the low-radiation performance is unchanged, and tempering processing can also be performed.

Description

A kind of damage resistant can tempering list silver low-radiation coated glass
[technical field]
The present invention relates to coated glass field, especially relating to a kind of damage resistant for building can tempering list silver low-radiation coated glass.
[background technology]
Known, one deck high IR line reflection material is deposited at glass surface, the materials such as such as argent, copper or gold, thus the infrared rays that the infrared rays in the absorption sunlight spectrum enabling glass the least possible sends with other object, due to glass self not stored energy, it is also just relatively very limited to extraradial infrared rays under the less ultrared prerequisite of absorption, and therefore this glass is called as single silver low-radiation coated glass, at present, because single silver low-radiation coated glass can while summer guarantees that light enters in buildings, near infrared ray in corresponding effective stop sunlight enters indoor, thus reach reduction room temp, the object of corresponding saving refrigeration expense, simultaneously, single silver low-radiation coated glass can also stop in winter the far infrared rays that the indoor object of own absorption sends, the heat of indoor is avoided to be dispersed into outdoor, thus reach maintenance room temp, the object of corresponding saving heat cost, therefore, the green building material that single a kind of country of silver low-radiation coated glass Chang Zuowei widelys popularize is taken as constructure screen wall glass and windowpane uses, but, find in prolonged application, although what existing single silver low-radiation coated glass outermost layer adopted is all the silicon nitride film layer that hardness is higher, but it still can not meet the demand of some high standards client in the application, and existing single silver low-radiation coated glass in the course of processing also easy because occur scratch and cause producing higher fraction defective, in addition, due to the silver film in existing single silver low-radiation coated glass easily in hot environment occur oxidation or with other substance reactions, therefore it can not tempering.
[summary of the invention]
In order to overcome the deficiency in background technology, the invention discloses a kind of damage resistant can tempering list silver low-radiation coated glass, and described glass not only effectively can improve surface hardness under the constant prerequisite of low radiance, but also can carry out tempering processing.
For achieving the above object, the present invention adopts following technical scheme:
A kind of damage resistant can tempering list silver low-radiation coated glass, and described glass comprises glass substrate, and the surface of this glass substrate is from bottom to top coated with silicon nitride film layer, nickel chromium triangle rete, silver film, nickel chromium triangle rete, silicon nitride film layer and carbonitride rete successively;
Described glass is selected under vacuum conditions when making, the method depositing six tunics at glass substrate surface by magnetron sputtering is produced, require to be evacuated to 1.2 × below 10-4Pa at coating chamber, being filled with process gas again makes coating chamber pressure-stabilisation at 0.2 to 0.5Pa, then to sputtering source power transmission, operation target starts sputtering, successively corresponding target atom or its Compound deposition is formed corresponding rete to glass substrate surface; Its concrete operations are as follows:
First coating chamber is filled with nitrogen and argon gas, and target is sial target, and at the surface deposition the first layer silicon nitride film of glass substrate, thickness is 10 to 60 nanometers; Second coating chamber is filled with argon gas, and target is nickel chromium triangle target, and silicon nitride film layer deposits second layer nickel chromium triangle film, and thickness is 1 to 20 nanometer; 3rd coating chamber is filled with argon gas, and target is silver-colored target, and nickel chromium triangle rete deposits third layer silverskin, and thickness is 5 to 20 nanometers; 4th coating chamber is filled with argon gas, and target is nickel chromium triangle target, and silver film deposits the 4th layer of nickel chromium triangle film, and thickness is 1 to 20 nanometer; 5th coating chamber is filled with nitrogen and argon gas, and target is sial target, and nickel chromium triangle rete deposits layer 5 silicon nitride film, and thickness is 10 to 50 nanometers; 6th coating chamber is filled with argon gas, and target is ceramic oxide carbon nitride target, and silicon nitride film layer deposits layer 6 carbon nitride films, and thickness is 5 to 20 nanometers.
Further, the pressure-stabilisation of coating chamber after process gas is filled with at 0.3Pa.
Owing to adopting technical scheme as above, the present invention has following beneficial effect:
Damage resistant of the present invention effectively can improve surface hardness by tempering list silver low-radiation coated glass under the constant prerequisite of low radiance, more damage resistant, thus effectively reduce the probability of work in-process appearance scuffing, improve production efficiency accordingly, add the economic return of producer; Simultaneously, described glass can also carry out tempering again after plated film, its not only can ensure not oxidized in the hot environment of silver film degree more than 700 in annealing furnace or with other substance reactions, but also the radiant ratio after can effectively ensureing tempering does not change, rete nondiscoloration.
[accompanying drawing explanation]
Fig. 1 is schematic diagram of the present invention.
In figure: 1, glass substrate; 2, silicon nitride film layer; 3, nickel chromium triangle rete; 4, silver film; 5, nickel chromium triangle rete; 6, silicon nitride film layer; 7, carbonitride rete.
[embodiment]
Can explain the present invention in more detail by the following examples, disclose object of the present invention and be intended to protect all changes and improvements in the scope of the invention, the present invention is not limited to the following examples:
By reference to the accompanying drawings 1, described damage resistant the employing of tempering list silver low-radiation coated glass from bottom to top can plate silicon nitride film layer 2, nickel chromium triangle rete 3, silver film 4, nickel chromium triangle rete 5, silicon nitride film layer 6 and carbonitride rete 7 on glass substrate 1 surface successively, namely form the structure of six tunic layers on the surface of glass substrate 1, thus the damage resistant described in forming can tempering list silver low-radiation coated glass;
When making described glass, select under vacuum conditions, the method depositing six tunics at glass substrate surface by magnetron sputtering is produced, and requires to be evacuated to 1.2 × 10 at coating chamber -4below Pa, be filled with process gas again, make coating chamber pressure-stabilisation at 0.2 to 0.5Pa, usual selection 0.3 Pa, by sputtering source power transmission, target starts sputtering, then sends into glass substrate, and corresponding target atom or its compound are deposited to successively glass substrate surface formation rete, its concrete operations are as follows:
First coating chamber is filled with nitrogen and argon gas, and target is sial target, and at the surface deposition the first layer silicon nitride film of glass substrate, thickness is 10 to 60 nanometers; Second coating chamber is filled with argon gas, and target is nickel chromium triangle target, and silicon nitride film layer deposits second layer nickel chromium triangle film, and thickness is 1 to 20 nanometer; 3rd coating chamber is filled with argon gas, and target is silver-colored target, and nickel chromium triangle rete deposits third layer silverskin, and thickness is 5 to 20 nanometers; 4th coating chamber is filled with argon gas, and target is nickel chromium triangle target, and silver film deposits the 4th layer of nickel chromium triangle film, and thickness is 1 to 20 nanometer; 5th coating chamber is filled with nitrogen and argon gas, and target is sial target, and nickel chromium triangle rete deposits layer 5 silicon nitride film, and thickness is 10 to 50 nanometers; 6th coating chamber is filled with argon gas, and target is ceramic oxide carbon nitride target, and silicon nitride film layer deposits layer 6 carbon nitride films, and thickness is 5 to 20 nanometers;
As mentioned above, completely namely generate described glass when six tunic layers all deposit, wherein: the first tunic adopts silicon nitride film to be bonding force in order to improve between rete and glass substrate; Second and four tunic adopt nickel chromium triangle film be not oxidized under the high temperature that can spend 700 in annealing furnace of the silverskin in order to ensure third layer more or with other substance reaction; Layer 5 film employing silicon nitride film is wear-resisting, corrosion resistance nature in order to improve rete; Layer 6 film employing carbon nitride films is the overall scratch resistant performance in order to significantly improve glass substrate surface rete.
Part not in the detailed description of the invention is prior art, therefore the present invention is not described in detail.

Claims (2)

1. a damage resistant can tempering list silver low-radiation coated glass, described glass comprises glass substrate (1), it is characterized in that: the surface of described glass substrate (1) is from bottom to top coated with silicon nitride film layer (2), nickel chromium triangle rete (3), silver film (4), nickel chromium triangle rete (5), silicon nitride film layer (6) and carbonitride rete (7) successively; Described glass is selected under vacuum conditions when making, the method depositing six tunics at glass substrate surface by magnetron sputtering is produced, require to be evacuated to 1.2 × below 10-4Pa at coating chamber, being filled with process gas again makes coating chamber pressure-stabilisation at 0.2 to 0.5Pa, then to sputtering source power transmission, operation target starts sputtering, successively corresponding target atom or its Compound deposition is formed corresponding rete to glass substrate surface; Its concrete operations are as follows:
First coating chamber is filled with nitrogen and argon gas, and target is sial target, and at the surface deposition the first layer silicon nitride film of glass substrate, thickness is 10 to 60 nanometers; Second coating chamber is filled with argon gas, and target is nickel chromium triangle target, and silicon nitride film layer deposits second layer nickel chromium triangle film, and thickness is 1 to 20 nanometer; 3rd coating chamber is filled with argon gas, and target is silver-colored target, and nickel chromium triangle rete deposits third layer silverskin, and thickness is 5 to 20 nanometers; 4th coating chamber is filled with argon gas, and target is nickel chromium triangle target, and silver film deposits the 4th layer of nickel chromium triangle film, and thickness is 1 to 20 nanometer; 5th coating chamber is filled with nitrogen and argon gas, and target is sial target, and nickel chromium triangle rete deposits layer 5 silicon nitride film, and thickness is 10 to 50 nanometers; 6th coating chamber is filled with argon gas, and target is ceramic oxide carbon nitride target, and silicon nitride film layer deposits layer 6 carbon nitride films, and thickness is 5 to 20 nanometers.
2. damage resistant according to claim 1 can tempering list silver low-radiation coated glass, it is characterized in that: be filled with the pressure-stabilisation of coating chamber after process gas at 0.3Pa.
CN201510236943.9A 2015-05-12 2015-05-12 Scratch-resistant temperable single-silver low-radiation coated glass Pending CN104891825A (en)

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107365089A (en) * 2017-09-08 2017-11-21 蚌埠玻璃工业设计研究院 A kind of low radiation coated glass
CN109824277A (en) * 2019-04-15 2019-05-31 中建材光电装备(太仓)有限公司 A kind of superhard navy blue can temperable di-silver low-emissivity coated glass
WO2019157799A1 (en) * 2018-02-13 2019-08-22 江苏奥蓝工程玻璃有限公司 Method for preparing low-radiation coated glass
CN111072291A (en) * 2020-01-06 2020-04-28 青岛锦绣前程节能玻璃有限公司 Colorful single-silver LOW-E coated glass and preparation method thereof
CN116282963A (en) * 2022-10-28 2023-06-23 咸宁南玻节能玻璃有限公司 Coated glass with protective layer and preparation method thereof

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005110939A2 (en) * 2004-05-05 2005-11-24 Saint-Gobain Glass France Substrate with a stack having thermal properties
CN201817409U (en) * 2010-09-28 2011-05-04 林嘉宏 Low-emitting glass capable of being tampered and processed in different places
CN201817405U (en) * 2010-09-01 2011-05-04 林嘉宏 Low-radiation glass with the ability of being processed in different places
CN102350833A (en) * 2011-07-19 2012-02-15 上海耀华皮尔金顿玻璃股份有限公司 Novel energy-saving toughened three-silver-layer low-radiation coated glass
CN102615877A (en) * 2012-03-29 2012-08-01 江苏奥蓝工程玻璃有限公司 Low-radiation coated glass capable of being toughened off line and production method thereof

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005110939A2 (en) * 2004-05-05 2005-11-24 Saint-Gobain Glass France Substrate with a stack having thermal properties
WO2005110939A3 (en) * 2004-05-05 2006-01-12 Saint Gobain Substrate with a stack having thermal properties
CN201817405U (en) * 2010-09-01 2011-05-04 林嘉宏 Low-radiation glass with the ability of being processed in different places
CN201817409U (en) * 2010-09-28 2011-05-04 林嘉宏 Low-emitting glass capable of being tampered and processed in different places
CN102350833A (en) * 2011-07-19 2012-02-15 上海耀华皮尔金顿玻璃股份有限公司 Novel energy-saving toughened three-silver-layer low-radiation coated glass
CN102615877A (en) * 2012-03-29 2012-08-01 江苏奥蓝工程玻璃有限公司 Low-radiation coated glass capable of being toughened off line and production method thereof

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107365089A (en) * 2017-09-08 2017-11-21 蚌埠玻璃工业设计研究院 A kind of low radiation coated glass
WO2019157799A1 (en) * 2018-02-13 2019-08-22 江苏奥蓝工程玻璃有限公司 Method for preparing low-radiation coated glass
CN109824277A (en) * 2019-04-15 2019-05-31 中建材光电装备(太仓)有限公司 A kind of superhard navy blue can temperable di-silver low-emissivity coated glass
CN111072291A (en) * 2020-01-06 2020-04-28 青岛锦绣前程节能玻璃有限公司 Colorful single-silver LOW-E coated glass and preparation method thereof
CN116282963A (en) * 2022-10-28 2023-06-23 咸宁南玻节能玻璃有限公司 Coated glass with protective layer and preparation method thereof

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Application publication date: 20150909