CN104888997A - Coating apparatus - Google Patents

Coating apparatus Download PDF

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Publication number
CN104888997A
CN104888997A CN201410772887.6A CN201410772887A CN104888997A CN 104888997 A CN104888997 A CN 104888997A CN 201410772887 A CN201410772887 A CN 201410772887A CN 104888997 A CN104888997 A CN 104888997A
Authority
CN
China
Prior art keywords
substrate
coating
along
nozzle
delivery section
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN201410772887.6A
Other languages
Chinese (zh)
Other versions
CN104888997B (en
Inventor
李正植
李哲演
李南植
朴粲秀
丘璜燮
金铉济
郑熙锡
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ji Jialan Science And Technology Co Ltd
GigaLane Co Ltd
Original Assignee
Ji Jialan Science And Technology Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ji Jialan Science And Technology Co Ltd filed Critical Ji Jialan Science And Technology Co Ltd
Publication of CN104888997A publication Critical patent/CN104888997A/en
Application granted granted Critical
Publication of CN104888997B publication Critical patent/CN104888997B/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B13/00—Machines or plants for applying liquids or other fluent materials to surfaces of objects or other work by spraying, not covered by groups B05B1/00 - B05B11/00
    • B05B13/02—Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work
    • B05B13/04—Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work the spray heads being moved during spraying operation
    • B05B13/0405—Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work the spray heads being moved during spraying operation with reciprocating or oscillating spray heads
    • B05B13/041—Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work the spray heads being moved during spraying operation with reciprocating or oscillating spray heads with spray heads reciprocating along a straight line
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B1/00—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means
    • B05B1/14—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means with multiple outlet openings; with strainers in or outside the outlet opening
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B13/00—Machines or plants for applying liquids or other fluent materials to surfaces of objects or other work by spraying, not covered by groups B05B1/00 - B05B11/00
    • B05B13/02—Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work
    • B05B13/0221—Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work characterised by the means for moving or conveying the objects or other work, e.g. conveyor belts
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B15/00—Details of spraying plant or spraying apparatus not otherwise provided for; Accessories
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B9/00—Spraying apparatus for discharge of liquids or other fluent material, without essentially mixing with gas or vapour
    • B05B9/03—Spraying apparatus for discharge of liquids or other fluent material, without essentially mixing with gas or vapour characterised by means for supplying liquid or other fluent material
    • B05B9/04—Spraying apparatus for discharge of liquids or other fluent material, without essentially mixing with gas or vapour characterised by means for supplying liquid or other fluent material with pressurised or compressible container; with pump
    • B05B9/0403—Spraying apparatus for discharge of liquids or other fluent material, without essentially mixing with gas or vapour characterised by means for supplying liquid or other fluent material with pressurised or compressible container; with pump with pumps for liquids or other fluent material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D3/00—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
    • B05D3/14—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by electrical means
    • B05D3/141—Plasma treatment
    • B05D3/142—Pretreatment
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/001—General methods for coating; Devices therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
    • B05C5/0254—Coating heads with slot-shaped outlet
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
    • B05C5/027—Coating heads with several outlets, e.g. aligned transversally to the moving direction of a web to be coated

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Coating Apparatus (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)

Abstract

A coating apparatus according to the present invention includes: a coater which includes a spray unit which has multiple nozzles arranged on a substrate to spray a coating agent; and a coating feeder which horizontally moves the coater in X-axis and Y-axis directions. The multiple nozzles are arranged to be separated mutually by being arranged in X-axis and Y-axis directions. Positions of the different axis directions of the multiple nozzles, arranged in any one axis direction between the X-axis and Y-axis, are different mutually. In the arrangement of the multiple nozzles forming the spray unit by embodiments of the present invention, the positions of the multiple nozzles which are arranged in any one axis direction between the X-axis and the Y-axis are different from positions of nozzles in the other axis. Thereby multiple dotted drops do not overlap each other as in the past when a coating agent is discharged from each of the multiple nozzles and is dotted on a substrate.

Description

Plater
Technical field
The present invention relates to plater, relate more specifically to the plater that can improve coated film quality.
Background technology
On the glass cover-plate (cover glass) or surface window (window) of the electronic products such as mobile phone, MP3, display unit, coating has the functional coat films such as anti-fingerprint pad pasting.Wherein, the coating agent for the formation of anti-fingerprint pad pasting mainly uses fluorine class material.
On the treated object of above-mentioned glass cover-plate (cover glass) or surface window (window) etc., that is, plater substrate being formed functional coat film can adopt and carries out the dry coating method of coating by spraying the agent of solid fluorine coating and spray the wet type coating process of aqueous fluorine coating agent.
Dry coating device is the method fluorine coating agent of solid being carried out to substrate surface with the chemical vapour deposition (CVD) of vacuum (CVD:Chemical Vapor Deposition) method depositing.Because chemical gaseous phase depositing process is implemented in vacuum chamber, therefore, there is the limitation that operation is not easily implemented, and then cause the problem that occurs that productivity is low.
Compared to dry coating method, the process cost of wet type coating process is cheap, easily realizes the batch coating for large-area substrates, compared to dry method, has the advantage that price competitiveness is strong and productivity is good.Disclosed in KR published patent 2012-0120031, wet type plater comprises: conveyer, carries to coating procedure travel direction for making the pallet being mounted with substrate; Plasma processor, what be arranged at substrate is delivered on walking along the street footpath; Coating agent injection portion and baking oven.Wherein, come to substrate operation travel direction conveying substrate by conveyer, and this substrate is by the downside of plasma processor and after implementing Surface Treatment with Plasma, while spraying subordinate side by coating agent, its surperficial injected coating agent.Afterwards, substrate is transported to baking oven by conveyer, thus completes dry run.
On the one hand, in wet type coating process, as mentioned above, by conveyer conveying substrate, while complete coating.But because conveyer is with constant constant speed conveying substrate, there will be the difficult problem being difficult to change process conditions or be difficult to by each operation interval difference control rate.Further, conveyer drives work because of it, can independently vibrate, and the vibration of conveyer can to substrate transmission.This can become the coating agent factor of coating on substrate unevenly, causes the problem that the quality occurring coated film declines thus.
Further, coating injection portion has multiple nozzle, as shown in figure 15, and above-mentioned multiple nozzle 512 separate configuration, and along a direction arrangement.More specifically, multiple nozzle 512 is arranged along X-direction, and now, multiple nozzle 512 position is in the Y-axis direction identical.Further, when dripping painting (dotting) coating agent from multiple nozzle 512 to substrate, dripping the dropping point D be coated on substrate is roughly semi-spherical shape.Now, semi-spherical shape dropping point D with from central part to the periphery edge its highly gradually step-down shape formed drip be coated with.When with this state to substrate S coating time, can cause forming the coated film with uneven thickness.To this, in the past in order to form coated film with uniform thickness on substrate S, as shown in figure 15, being configured with multiple nozzle 512, and making dripping between adjacent nozzle 512 be coated with overlapping ranges.More specifically, for respectively from the dropping point D that 512, two nozzles are coated with, overlapped mode nozzle 512 can be configured with the edge of dropping point D.
But in this case, the expulsion pressure of each nozzle 512 can impact the painting of dripping of adjacent nozzle 512, causes the formation of coated film uneven, becomes another factor that coated film quality declines thus.
[prior art document]
[patent document]
(patent document 1) KR published patent 2012-0120031
Summary of the invention
The invention provides and can improve coated film quality and the plater that can shorten coating time period.
Further, the invention provides the plater that the transporting velocity being easy to adjustment substrate also can control coating solution coating weight equably.
Plater according to the present invention comprises: coating machine, has injection unit, and above-mentioned injection unit is provided with for the multiple nozzles to the agent of substrate spraying coating; And coating conveyer, above-mentioned coating machine is moved horizontally along X-axis and Y direction, and above-mentioned multiple nozzle is along X-axis and Y direction arrangement, and being separated from each other configuration, the position of multiple nozzles on another direction of principal axis along a direction of principal axis arrangement in above-mentioned X-axis and Y-axis is mutually different.
Plater according to the present invention comprises: basal plate conveyer, there is guide rail and substrate delivery section, above-mentioned guide rail forms along the coating procedure travel direction extension forming coated film on substrate, the top of aforesaid substrate delivery section is mounted with substrate, and moves along above-mentioned guide rail to coating procedure travel direction; Plasma processor, is arranged on above-mentioned coating procedure travel direction path, and implements Surface Treatment with Plasma to aforesaid substrate; And coating machine, carry out path is provided separately with above-mentioned plasma processor at above-mentioned coating procedure, and have injection unit, above-mentioned injection unit is provided with the multiple nozzles to the agent of substrate spraying coating.
Plater of the present invention comprises: coating machine, there is injection unit, above-mentioned injection unit is provided with for the multiple nozzles to the agent of substrate spraying coating, and multiple nozzle arranges along X-axis and Y direction respectively and is separated from each other setting, multiple nozzle is arranged to, the coating line formed respectively by the multiple nozzles arranged along the direction of principal axis in above-mentioned X-axis and Y direction is formed as with the coating line be coated with by least one nozzle on another direction of principal axis be configured in above-mentioned X-axis and Y direction, overlapping along the direction of principal axis in above-mentioned X-axis and Y direction, and make the multiple nozzles along the other direction arrangement in above-mentioned X-axis and Y direction mutually different along the axial position in above-mentioned X-axis and Y direction.
Plater of the present invention comprises: basal plate conveyer, there is guide rail and substrate delivery section, above-mentioned guide rail forms along the coating procedure travel direction extension forming coated film on substrate, the top of aforesaid substrate delivery section is mounted with substrate, and moves along above-mentioned guide rail to coating procedure travel direction; And plasma processor, be arranged on above-mentioned coating procedure travel direction path, and implement Surface Treatment with Plasma to aforesaid substrate, and above-mentioned injection unit carries out path is provided separately with above-mentioned plasma processor at above-mentioned coating procedure.
Be formed as overlapping along the direction of principal axis in above-mentioned X-axis and Y direction by the multiple nozzles coating line formed respectively and the coating line be coated with by least one nozzle on another direction of principal axis be configured in above-mentioned X-axis and Y direction that arrange along the direction of principal axis in above-mentioned X-axis and Y direction, and mutually different along the axial position in above-mentioned X-axis and Y direction along multiple nozzles of the other direction arrangement in above-mentioned X-axis and Y direction.
Plater of the present invention comprises: coating conveyer, above-mentioned coating machine is moved horizontally along X-axis and Y direction, and above-mentioned multiple nozzle is along X-axis and Y direction arrangement, and being separated from each other configuration, the position of multiple nozzles on another direction of principal axis along a direction of principal axis arrangement in above-mentioned X-axis and Y-axis is mutually different.
Be formed as overlapping along the direction of principal axis in above-mentioned X-axis and Y direction by the multiple nozzles coating line formed respectively and the coating line be coated with by least one nozzle on another direction of principal axis be configured in above-mentioned X-axis and Y direction that arrange along the direction of principal axis in above-mentioned X-axis and Y direction, and mutually different along the axial position in above-mentioned X-axis and Y direction along multiple nozzles of the other direction arrangement in above-mentioned X-axis and Y direction.
Plater of the present invention comprises coating conveyer, above-mentioned coating machine is moved horizontally along X-axis and Y direction, described coating conveyer comprises: basal plate conveyer, there is guide rail and substrate delivery section, above-mentioned guide rail forms along the coating procedure travel direction extension forming coated film on substrate, the top of aforesaid substrate delivery section is mounted with substrate, and moves along above-mentioned guide rail to coating procedure travel direction; And plasma processor, be arranged on above-mentioned coating procedure travel direction path, and implement Surface Treatment with Plasma to aforesaid substrate, and above-mentioned coating machine carries out path is provided separately with above-mentioned plasma processor at above-mentioned coating procedure.
When substrate drips the multiple coating agent being coated with and discharging from above-mentioned multiple nozzle, the multiple dropping points formed form interval mutually, and mutually different along above-mentioned multiple nozzle position in the Y-axis direction of X-direction arrangement.
Above-mentioned injection unit is while move horizontally along X-direction, while to the agent of substrate spraying coating, aforesaid substrate is formed with coating line, above-mentioned coating line is formed by discharging from above-mentioned multiple nozzle and dripped the dropping point be coated with continuously respectively, and formed in the mode extended along X-direction separately, be formed as overlapping along Y direction from the subregion of the coating line of each nozzle coating with at least one coating line be coated with from other nozzles along X-direction separate configuration, and the multiple nozzles arranged along above-mentioned X-direction are mutually different in the position of Y direction.
The multiple nozzles arranged along above-mentioned X-direction configure in the mode that the position in Y direction is mutually different, make the overlapping region along Y direction of above-mentioned coating line be 35% to 45%.
Be configured at the mutually different position of X-direction and be 1.3 to 1.7 times of above-mentioned overlapping area along the Y direction distance be adjacent between the center of a nozzle that configures and the center of another nozzle.
Plater of the present invention comprises multiple nozzle sets, have respectively and arrange and the above-mentioned multiple nozzle be provided separately along Y direction, above-mentioned multiple nozzle sets arranges along X-direction and is separated from each other configuration, and the above-mentioned multiple nozzle sets position in the Y-axis direction along X-direction arrangement is mutually different.
Above-mentioned multiple nozzle sets is with configuration in a zigzag.
Above-mentioned multiple nozzle sets is configured to, and makes the part by forming respectively across a nozzle sets along the coating line of a nozzle coating of two nozzle sets of the both sides separate configuration of X-direction overlapped along Y direction.
Aforesaid substrate conveyer comprises: first substrate conveyer, there is the first guide rail and first substrate delivery section, the direction extension of above-mentioned first guide rail from the region that the substrate intending forming coated film is introduced into above-mentioned injection unit position forms, the top of above-mentioned first substrate delivery section is mounted with substrate, and can move horizontally along above-mentioned first guide rail; And second substrate conveyer, there is the second guide rail and at least one substrate delivery section, above-mentioned second guide rail from formed above-mentioned coated film direction from the derivative region of substrate to above-mentioned plasma processor position extend form, the top of at least one substrate delivery section above-mentioned is mounted with substrate, and can move horizontally along above-mentioned second guide rail.
Above-mentioned first substrate delivery section is settled to form the substrate that coated film is introduced into, thus move to direction, above-mentioned plasma processor place, above-mentioned first substrate conveyer comprises: the first horizontal drive portion, arrange in the mode be connected with first substrate delivery section, provide and make above-mentioned first substrate delivery section carry out the driving force moved horizontally along above-mentioned first guide rail; And first power source, be connected with above-mentioned first horizontal drive portion, make above-mentioned first horizontal drive portion rotary work, above-mentioned first horizontal drive portion is ball-screw.
Above-mentioned first substrate delivery section comprises: a pair movable block, arranges in the mode being installed on above-mentioned a pair first guide rails respectively, and can move horizontally along above-mentioned a pair first guide rails; Substrate emplacing platform, is installed on the upside of above-mentioned movable block, lays substrate on top; And lifting drive division, be connected with aforesaid substrate emplacing platform, aforesaid substrate emplacing platform is elevated.
Aforesaid substrate emplacing platform is introducing substrate substrate in order to form coated film is introduced in region, is elevated by above-mentioned lifting drive division, thus the substrate being introduced into aforesaid substrate introducing region is placed on aforesaid substrate emplacing platform.
The present invention includes: substrate transfer part, be arranged on the horizontal movement path of above-mentioned first substrate delivery section, in order to the substrate delivery section transferring substrates to above-mentioned second substrate conveyer, support the substrate from the movement of above-mentioned first substrate delivery section; And coating support portion, be arranged on the mobile route of above-mentioned second substrate conveyer, be mounted with substrate on top thus implement coating procedure.
Above-mentioned second substrate conveyer comprises: second substrate delivery section, settles the substrate be supported on aforesaid substrate transfer part, thus substrate is moved to direction, above-mentioned injection unit place; 3rd substrate delivery section, on above-mentioned second guide rail, is arranged at the front of above-mentioned second substrate delivery section, moves horizontally along above-mentioned second guide rail, thus settles the substrate being supported in above-mentioned coating support portion, and substrate is moved to substrate lead-out area; Fixed strip, is arranged in the mode connected between above-mentioned second substrate delivery section and above-mentioned 3rd substrate delivery section; Second horizontal drive portion, to arrange with any one mode be connected in above-mentioned second substrate delivery section and the 3rd substrate delivery section, provide above-mentioned second substrate delivery section and the 3rd substrate delivery section can carry out along above-mentioned second guide rail the driving force that moves horizontally; And second power source, be connected with above-mentioned second horizontal drive portion, make above-mentioned second horizontal drive portion rotary work.
Above-mentioned second horizontal drive portion is ball-screw.
Above-mentioned second substrate delivery section and the 3rd substrate delivery section comprise: movable block, arrange in the mode being installed on above-mentioned a pair second guide rails respectively, and can move horizontally along above-mentioned a pair second guide rails; Substrate emplacing platform, is installed on the upside of above-mentioned movable block, lays substrate on top; And lifting drive division, be connected with aforesaid substrate emplacing platform, aforesaid substrate emplacing platform is elevated.
Be supported on the downside of the substrate on aforesaid substrate transfer part, by being elevated by the substrate emplacing platform of lifting drive division to above-mentioned second substrate delivery section of above-mentioned second substrate delivery section, the substrate be supported on aforesaid substrate transfer part is made to be placed in the substrate emplacing platform of above-mentioned second substrate delivery section; On the downside of the substrate being supported in above-mentioned coating support portion, by being elevated by the substrate emplacing platform of lifting drive division to above-mentioned 3rd substrate delivery section of above-mentioned 3rd substrate delivery section, the substrate being supported in above-mentioned coating support portion is made to be placed in the substrate emplacing platform of above-mentioned 3rd substrate delivery section.
Above-mentioned coating conveyer comprises: the first coating guide rail, is positioned at the upside of above-mentioned coating support portion, and above-mentioned injection unit is moved horizontally along X-direction; And the second coating guide rail, be connected with the two ends of above-mentioned first coating guide rail, extend to Y direction and form, above-mentioned first coating guide rail and injection unit are moved horizontally along Y direction.
Above-mentioned multiple nozzle comprises respectively: coating agent supply pipe, is connected with the syringe pump supplying coating agent from coating agent tank; Gas supply pipe, is connected with the flow-control portion from gas tank supply gas; And check-valves, have breaking member and spring, above-mentioned breaking member is for blocking the backflow of above-mentioned coating agent or above-mentioned gas between above-mentioned multiple nozzle and above-mentioned coating agent supply pipe, and above-mentioned spring is connected with above-mentioned breaking member.
According to embodiment of the present invention, when being configured the multiple nozzles forming injection unit, make the position of multiple nozzles on another direction of principal axis along the direction of principal axis arrangement of in X-axis and Y-axis mutually different.Thus, when discharging coating agent respectively from multiple nozzle and drip painting (dotting) to substrate, dripping the multiple dropping points be coated with can not be overlapping as in the past.
And, when with while along X-direction carry out moving horizontally injection unit and while from the mode spray-on coating agent of multiple nozzle spraying coating agent respectively time, be coated with continuously respectively from the dropping point that multiple nozzle spues, and be coated into the wire shaped extended along X-direction.Now, the coating line sprayed by each nozzle is overlapping with multiple coating line along Y direction.Thus, when making injection unit move one time along X-direction, will coated film be formed uniformly in a region, and then there is the effect that can improve coated film quality.
In the present invention, use syringe pump as the means to nozzle supply coating agent, thus, accurately can control the emitted dose of coating agent, utilize flow-control portion (MFC), the input amount of the gas to nozzle supply can be controlled.Therefore, have and can be easy to control the spray angle of coating agent and the advantage of particle size.
And, on the coating agent supply pipe to nozzle supply coating agent, check-valves is being set, can prevent when coating agent cannot be ejected from nozzle, coating agent flows into from coating agent supply pipe, thus can prevent coating agent from naturally dropping outside nozzle, or the coating agent remaining in nozzle refluxes to coating agent supply pipe.
Accompanying drawing explanation
Fig. 1 is the schematic diagram of the pith representing plater according to an embodiment of the invention in modular fashion.
Fig. 2 is the stereogram representing plater according to an embodiment of the invention.
Fig. 3 is the schematic diagram of the pith representing coating machine according to an embodiment of the invention in modular fashion.
Fig. 4 is the sectional view representing check-valves according to an embodiment of the invention.Fig. 5 is the stereogram representing injection unit according to an embodiment of the invention.
For convenience of explanation, the accompanying drawing illustrating multiple second supply pipe and the multiple gas supply pipe be connected respectively with multiple nozzle is omitted.
Fig. 6 represents according to the configuration structure of multiple nozzles of the first embodiment of the present invention and the top view of dropping point dripping painting (dotting) from multiple nozzle respectively to substrate.
Fig. 7 represents according to the configuration structure of multiple nozzles of the variation of the first embodiment and the top view of dropping point dripping painting (dotting) from multiple nozzle respectively to substrate.
Fig. 8 represents according to the configuration structure of multiple nozzles of the first embodiment of the present invention and the top view of the part of coating line that is coated with by multiple nozzle.
Fig. 9 represents the configuration structure of multiple nozzles according to a second embodiment of the present invention and drips the top view of dropping point of painting (dotting) from multiple nozzle respectively to substrate.
Figure 10 is the top view of a part for the configuration structure representing multiple nozzles according to a second embodiment of the present invention and the coating line be coated with by multiple nozzle.
Figure 11 to Figure 13 is the stereogram for illustration of the work of plater according to an embodiment of the invention.
Figure 14 changes the schematic diagram moved horizontally that mode represents injection unit according to an embodiment of the invention in mode.
Figure 15 is the schematic diagram represented for illustration of multiple nozzle arrangement structure in the past and the overlap by the dropping point of multiple nozzle arrangement structure.
Primary symbols explanation
1000: workbench 2000: plasma processor
3000: coating machine 3100: injection unit
4000: first substrate conveyer 4100: substrate introducing portion
4200: the first horizontal drive portion 4300: the first power sources
4400: the first guide rails 4500: first substrate delivery section
4600: substrate transfer part 5000: second substrate conveyer
5200: the second horizontal drive portion 5300: the second power sources
5400: the second guide rails 5500: second substrate delivery section
5600: coating support portion 5700: fixed strip
5800: the three substrate delivery section 5900: substrate lead division
Detailed description of the invention
Below, embodiments of the invention will be described in detail.But, the present invention is not limited in following middle the disclosed embodiments, but can realize with various different form, the present embodiment is only used to make of the present invention disclosing more comprehensively, more intactly understands scope of the present invention for making those skilled in the art.
The present invention is to the agent of substrate surface spraying coating to form the plater of coated film.As more specifically example, the plater of embodiments of the invention is to the device for the glass cover-plates (cover glass) of electronic product such as mobile phone, MP3, display unit or glass (glass) substrate surface spraying function film (or functional film) of surface window (window).Further, the functional membrane being sprayed at substrate surface can be anti-fingerprint pad pasting, and the coating agent for the formation of above-mentioned anti-fingerprint (ANTI-FINGERPRINT) coated film uses the liquid material of fluorine class.That is, according to plater of the present invention can be the device forming anti-fingerprint coated film on the surface that can form fingerprint.
Fig. 1 is the schematic diagram of the pith representing plater according to an embodiment of the invention in modular fashion.Fig. 2 is the stereogram representing plater according to an embodiment of the invention.Fig. 3 is the schematic diagram of the pith representing coating machine according to an embodiment of the invention in modular fashion.Fig. 4 is the sectional view representing check-valves according to an embodiment of the invention.Fig. 5 is the stereogram representing injection unit according to an embodiment of the invention.For convenience of explanation, the accompanying drawing illustrating multiple second supply pipe and the multiple gas supply pipe be connected respectively with multiple nozzle is omitted.Fig. 6 represents according to the configuration structure of multiple nozzles of the first embodiment of the present invention and the top view of dropping point dripping painting (dotting) from multiple nozzle respectively to substrate.Fig. 7 represents according to the configuration structure of multiple nozzles of the variation of the first embodiment and the top view of dropping point dripping painting (dotting) from multiple nozzle respectively to substrate.Fig. 8 represents according to the configuration structure of multiple nozzles of the first embodiment of the present invention and the top view of the part of coating line that is coated with by multiple nozzle.Fig. 9 represents the configuration structure of multiple nozzles according to a second embodiment of the present invention and drips the top view of dropping point of painting (dotting) from multiple nozzle respectively to substrate.Figure 10 is the top view of a part for the configuration structure representing multiple nozzles according to a second embodiment of the present invention and the coating line be coated with by multiple nozzle.Figure 11 to Figure 13 is the stereogram for illustration of the work of plater according to an embodiment of the invention.Figure 14 changes the schematic diagram moved horizontally that mode represents injection unit according to an embodiment of the invention in mode.
Below, about the description at front and rear, in order to coating, the direction of conveying substrate or coating travel direction are called front, and its rightabout is called rear.
With reference to Fig. 1 and Fig. 2, plater comprises according to an embodiment of the invention: workbench 1000, for implementing coating operation at an upper portion thereof; Plasma processor 2000, the coating procedure being arranged at workbench 1000 top carries out on path, comes treatment substrate S surface by generating plasma (plasma); Coating machine 3000, coating procedure travel direction is arranged along the interval, front of plasma processor 2000, has for the injection unit 3100 to the agent of substrate S spraying coating; Coating conveyer 7000, makes coating machine 3000 move horizontally along X-axis and Y direction; Basal plate conveyer 6000, is arranged at the top of workbench 1000, conveying substrate S, makes substrate S by plasma processor 2000 and coating machine 3000.And, although not shown, can also comprise baking oven (oven), above-mentioned baking oven is arranged at the outside of workbench 1000, complete the substrate S of coating for drying, above-mentioned baking oven can be such as the baking oven (dry oven) of hot air type or infrared drying formula.
Plasma processor 2000 for before coating to the coat side of substrate S, such as, carries out pretreatment to the upper face of substrate S, is with the unit on atmospheric plasma treatment substrate S surface according to the plasma processor 2000 of embodiment.This plasma processor 2000 is arranged at the top of workbench 1000, discharges or the body of wall of emitting plasma or face towards substrate S, with and the be separated by mode interval of preset distance of the upper face of workbench 1000 arrange.That is, plasma processor 2000 is arranged in the mode of preset distance of being separated by from workbench 1000 top.Thus, substrate S while being transported on the downside of plasma processor 2000, is implemented plasma treatment by basal plate conveyer 6000 successively.
Coating machine 3000, by the surperficial spraying coating agent being completed surface-treated substrate S by plasma processor 2000, forms functional membrane, such as anti-fingerprint pad pasting.As shown in Figure 1 to Figure 3, this coating machine 3000 comprises: injection unit 3100, has for the multiple nozzles 3120 to spraying coating agent on substrate S; Multiple syringe pump 3200, is connected with multiple nozzle 3120 respectively; Coating agent tank 3300, storage has coating agent; Gas tank 3400, storage has the gas for supplying respectively to multiple nozzle 3120; First coating agent supply pipe 3500, for connecting coating agent tank 3300 and multiple syringe pump 3200 respectively; Multiple second coating agent supply pipe 3600, for connecting multiple syringe pump 3200 and multiple nozzle 3120 in mode one to one respectively; Check-valves 3700, is arranged at multiple second coating agent supply pipe 3600; Multiple gas supply pipe 3800, for connecting gas tank 3400 and multiple nozzle 3120 respectively; Flow-control portion (Mass flow control:MFC) 3900, is arranged at each gas supply pipe 3800, for controlling the flow of the gas supplied to nozzle 3120.
As shown in Figure 3, syringe pump 3200 comprises syringe body 3210, has inner space; And bar 3220, forward/backward movement can be carried out in syringe body 3210.According to this syringe pump 3200, when the bar 3220 shown in (b) that make Fig. 3 retreats, be connected between syringe body 3210 and the first coating agent supply pipe 3500, the coating agent of coating agent tank 3300 supplies in syringe body 3210 through the first coating agent supply pipe 3500.Afterwards, as shown in (c) of Fig. 3, when making bar 3220 advance, be connected between syringe body 3210 and the second coating agent supply pipe 3600, the coating agent of said syringe body 3210 inside is discharged to the outside of said syringe body 3210, and moves to nozzle 3120 through above-mentioned second coating agent supply pipe 3600.
Check-valves 3700, by the connection between control second coating agent supply pipe 3600 and nozzle 3120, supplies the coating agent provided by syringe pump 3200, the coating agent residue at the end of preventing coating or gas backstreaming to nozzle 3120.As shown in Figure 4, this check-valves 3700 has inner space, comprising: body 3710, is provided with the inflow entrance 3711h for making coating agent flow into and the outlet 3712h for being discharged to nozzle 3120 direction by above-mentioned coating agent; Breaking member 3720, is arranged at body 3710 inner, can moves along inflow entrance 3711h and outlet 3712h direction; And spring 3730, be arranged at body 3710 inner, one end is connected with breaking member 3720, and the other end is connected with the inwall of outlet 3712h periphery.Wherein, compared to inflow entrance 3711h and outlet 3712h, breaking member 3720 has larger diameter, and its shape can be such as bulk or spherical.
Below, by the course of work of this check-valves 3700 of brief description.First, by making syringe pump 3200 be connected with the second coating agent supply pipe 3600, the coating agent of above-mentioned syringe pump 3200 is carried to nozzle 3120 direction.Now, the power to nozzle 3120 direction is transferred by coating agent, as shown in (a) of Fig. 4, the breaking member 3720 blocking inflow entrance 3711h moves side downwards, and open above-mentioned inflow entrance 3711h, by the power putting on breaking member 3720, spring 3730 shrinks to outlet 3712h direction.Thus, coating agent is inner through the body 3710 of check-valves 3700, and after being discharged by outlet 3712h, supply to nozzle 3120, now, when passing through gas supply pipe 3800 to nozzle 3120 inner supply gas, coating agent is discharged from nozzle 3120 and is sprayed to substrate S.On the contrary, at the end of coating procedure, work and the gas supply of syringe pump 3200 will be stopped.Now, owing to there is not the power putting on spring 3730 direction, as shown in (b) of Fig. 4, attempt restorable elastic force by spring 3730, above-mentioned spring 3730 is unfolded to direction, breaking member 3720 place.Thus, the breaking member 3720 being supported in spring 3730 moves to inflow entrance 3711h, and blocks inflow entrance 3711h.Thus, under the state in order to stop coating procedure stopping syringe pump 3200 and gas supply, the coating agent that remains in nozzle 3120 can be blocked and gas refluxes to syringe pump 3200 direction.
As shown in Figure 5, injection unit 3100 comprises: multiple nozzle 3120, for substrate S surface spraying coating agent; And nozzle support portion 3110, for supporting multiple nozzle 3120 regularly, move horizontally along coating conveyer 7000.Nozzle support portion 3110 comprises: fixed part 3111, extends and forms, and be connected with coating conveyer 7000 along above-below direction; And nozzle support component 3112, be connected with the bottom of fixed part 3111, be fixedly installed multiple nozzle 3120, and above-mentioned multiple nozzle 3120 is separated from each other.Certainly, nozzle support portion 3110 is not limited to above-mentioned shape and structure, can arrange multiple nozzle 3120, also can carry out numerous variations, makes it possible to be connected with coating conveyer 7000.
Further, injection unit 3100 can move to Z axis (plane orthogonal formed with X-axis and Y-axis) direction, namely can be elevated.For this reason, fixed part 3111 can be provided with the elevation driving unit for making along Z-direction lifting or slip.
As shown in Figure 5, to be fixedly installed multiple injection nozzle 3120 along the mode of the through nozzle support component of above-below direction 3112, and multiple injection nozzle 3120 is separated from each other setting.Further, as shown in Figure 3, multiple nozzle 3120 is connected with gas supply pipe 3800 with the second coating agent supply pipe 3600 separately.Thus, by the work of syringe pump 3200, coating agent is supplied to nozzle 3120 by the second coating agent supply pipe 3600, and by the gas supplied from gas supply pipe 3800 to nozzle 3120, the coating agent in nozzle 3120 sprays to substrate S.
Coating conveyer 7000 is for making coating machine 3000 carry out the unit moved horizontally along X-axis and Y direction, with reference to Fig. 2, comprise: the first coating guide rail 7100, at coating procedure travel direction, be provided separately in the front of plasma processor 2000 and this plasma processor 2000, and extended along the direction that the throughput direction with substrate S intersects; A pair second coating guide rails 7200, are arranged at the two ends of the first coating guide rail 7100 respectively, extend form along the throughput direction of substrate S or the bearing of trend of basal plate conveyer 6000; Support portion 7300, to make the mode be connected between workbench 1000 top and the second coating guide rail 7200 arrange, and supports the second coating guide rail 7200; First coating movable block 7400, to make the mode be connected between nozzle support portion 3110 and the first coating guide rail 7100 arrange, and moves horizontally along above-mentioned first coating guide rail 7100; Second coating movable block 7500, is installed on the two ends of the first coating guide rail 7100, and moves horizontally along the second coating guide rail 7200.
Wherein, the direction of the extension of the first coating guide rail 7100 can be X-direction, and the direction that the second coating guide rail 7200 extends can be Y direction.Further, the first coating guide rail 7100 and the second coating guide rail 7200 can be such as line slideway.Thus, injection unit 3100 moves horizontally along the first coating guide rail 7100 to X-direction, moves horizontally along the second coating guide rail 7200 to Y direction.
Below, be described to the configuration of the multiple nozzles according to the first embodiment of the present invention.Now, in order to the configuration structure of the multiple nozzles 3120 shown in key diagram 6 and Fig. 8, multiple nozzle Reference numeral is added to 3121a, 3121b, 3121c, 3122a, 3122b, 3122c, 3123a, 3123b, 3123c, 3124a, 3124b, 3124c and is described.
With reference to Fig. 6 and Fig. 8, multiple nozzle 3120 along X-axis and Y direction arrangement, and is separated from each other configuration.If illustrate more specifically, then in the same position of X-direction, three nozzles are separated from each other along Y direction and arrange, and above-mentioned three nozzles of so configuration are called " nozzle sets ".Said nozzle group configures in the mode arranged along X-direction, such as, for having, four nozzle sets be made up of three nozzles are (following, become first jet group to the 4th nozzle sets 3121, 3122, 3123, 3124), below for convenience of explanation, respectively by three of first jet group 3121 nozzle 3121a, 3121b, 3121c is called that first jet is to the 3rd nozzle 3121a, 3121b, 3121c, by three of second nozzle group 3122 nozzle 3122a, 3122b, 3122c is called that the 4th nozzle is to the 6th nozzle 3122a, 3122b, 3122c, by three nozzle 3123a of the 3rd nozzle sets 3123, 3123b, 3123c is called that the 7th nozzle is to the 9th nozzle 3123a, 3123b, 3123c, by three nozzle 3124a of the 4th nozzle sets 3124, 3124b, 3124c is called that the tenth nozzle is to the 12 nozzle 3124a, 3124b, 3124c.
First jet group separately arranges to the 4th nozzle sets 3121,3122,3123,3124 along X-direction, now, first jet group to the 4th nozzle sets 3121,3122,3123,3124 with (zigzag) morphologic arrangement in a zigzag.In other words, the first jet of the formation respectively group along X-direction arrangement is different to nozzle 3121a, 3121b, 3121c, 3122a, 3122b, 3122c, 3123a, 3123b, 3123c, 3124a, 3124b, 3124c position in the Y-axis direction of the 4th nozzle sets 3121,3122,3123,3124.More particularly, the first jet of first jet group 3121 to the 4th nozzle of the 3rd nozzle 3121a, 3121b, 3121c and second nozzle group 3122 to the 7th nozzle of the 6th nozzle 3122a, 3122b, 3122c, the 3rd nozzle sets 3123 to the 9th nozzle 3123a, 3123b, 3123c, the 4th nozzle sets 3124 the tenth nozzle mutually different to the position of each comfortable Y direction of the 12 nozzle 3124a, 3124b, 3124c.If from each nozzle 3121a, 3121b, 3121c, 3122a, 3122b, 3122c, 3123a, 3123b, 3123c, 3124a, 3124b, center (C) position of 3124c is described, the first jet of first jet group 3121 is to the 3rd nozzle 3121a, 3121b, 3121c, 4th nozzle of second nozzle group 3122 is to the 6th nozzle 3122a, 3122b, 3122c, 7th nozzle of the 3rd nozzle sets 3123 is to the 9th nozzle 3123a, 3123b, 3123c, tenth nozzle of the 4th nozzle sets 3124 is to the 12 nozzle 3124a, 3124b, center (C) position in the Y direction of 3124c is mutually different.
Therefore, on the position that the first jet forming first jet group 3121 is corresponding to the space between the 3rd nozzle 3121a, 3121b, 3121c, configuration is in order to form the 4th nozzle of second nozzle group 3122 to the 6th nozzle 3122a, 3122b, 3122c, on the position that the 4th nozzle forming second nozzle group 3122 is corresponding to the space between the 6th nozzle 3122a, 3122b, 3122c, configure to form the 7th nozzle of the 3rd nozzle sets 3123 to the 9th nozzle 3123a, 3123b, 3123c.Similarly, on the position that the 7th nozzle of formation the 3rd nozzle sets 3123 is corresponding to the space between the 9th nozzle 3123a, 3123b, 3123c, configure to form the tenth nozzle of the 4th nozzle sets 3124 to the 12 nozzle 3124a, 3124b, 3124c.For this, if be described by more specifically example, then at the preset distance place of the X-direction corresponding with the space formed between the first jet 3121a of first jet group 3121 and second nozzle 3121b, the five nozzle 3122b of configuration in order to form second nozzle group 3122, at the preset distance place of the X-direction corresponding with the space between second nozzle 3121b and the 3rd nozzle 3121c, configure the 6th nozzle 3122c, the 4th nozzle 3122a is at the preset distance place of the X-direction corresponding with the space between the tenth nozzle 3124a and the 11 nozzle 3124b.
And, at the preset distance place of the X-direction corresponding with the space formed between the 4th nozzle 3122a of second nozzle group 3122 and the 5th nozzle 3122b, the seven nozzle 3123a of configuration in order to form the 3rd nozzle sets 3123,8th nozzle 3123b is at the preset distance place of the X-direction corresponding with the space between the 5th nozzle 3122b and the 6th nozzle 3122c, and the 9th nozzle 3123c is at the preset distance place of the X-direction corresponding with the space between second nozzle 3121b and the 3rd nozzle 3121c.
Below, will omit about the explanation of the concrete configuration of other nozzles, as mentioned above, be arranged to make nozzle X-direction, in order to form other nozzle sets multiple nozzles between the structure in space.
When discharging coating agent separately by multiple nozzle 3121a, 3121b, 3121c, 3122a, 3122b, 3122c, 3123a, 3123b, 3123c, 3124a, 3124b, 3124c and drip painting (dotting) or spray on substrate S, as shown in Figure 6, to specify shape, such as dripping with drop shape is coated on substrate S, drips the multiple dropping point D be coated with and lays respectively on the position of the respective nozzle of thereon.That is, drip the multiple dropping point D be coated on substrate S to be separated from each other along X-axis and Y direction and to arrange.Now, the multiple dropping point D along X-axis and Y direction arrangement can not be overlapping.This be due to, form respectively first jet group to the 4th nozzle sets 3121,3122,3123,3124 multiple nozzle 3121a, 3121b, 3121c, 3122a, 3122b, 3122c, 3123a, 3123b, 3123c, 3124a, 3124b, 3124c the position of Y direction or its center (C) position not identical, they are with configuration in a zigzag.
If the injection unit 3100 of multiple nozzle 3121a, 3121b, 3121c, 3122a, 3122b, 3122c, 3123a, 3123b, 3123c, 3124a, 3124b, the 3124c with this configuration structure is moved horizontally along X-direction by coating conveyer 7000, then can drip continuously and be coated with multiple dropping point D on substrate S, and then be coated into wire shaped.Further, the diameter being dripped the dropping point D of painting by each nozzle 3121a, 3121b, 3121c, 3122a, 3122b, 3122c, 3123a, 3123b, 3123c, 3124a, 3124b, 3124c on substrate S is greater than the diameter of each nozzle 3121a, 3121b, 3121c, 3122a, 3122b, 3122c, 3123a, 3123b, 3123c, 3124a, 3124b, 3124c.Therefore, when making injection unit 3100 move horizontally along X-direction, multiple dropping point D is formed continuously along X-direction, and then forms coating line, and now, as shown in Figure 8, coating line occurs partly overlapping along Y direction.Such as, overlapping along Y direction by the subregion of the 7th coating line L7 sprayed with the 7th nozzle 3123a by the 3rd nozzle sets 3123 by the subregion of the first coating line L1 that sprays by the first jet 3122a of first jet group 3121, other subregions of the first coating line L1 are overlapping along Y direction by the subregion of the 11 coating line L11 sprayed with the 11 nozzle 3124b by the 4th nozzle sets 3124.If lift another example, although not shown, then overlapping along Y direction by the subregion of the 8th coating line sprayed with the 8th nozzle 3123b by the 3rd nozzle sets 3123 by the subregion of the second coating line that sprays by the second nozzle 3121b of first jet group 3121, other subregions of the first coating line L1 are overlapping along Y direction by the subregion of the 11 coating line L11 sprayed with the 12 nozzle 124c by the 4th nozzle sets 3124.As another example, overlapping along Y direction by the subregion of the 7th coating line sprayed with the 7th nozzle 3123a by the 3rd nozzle sets 3123 by the subregion of the 4th coating line that sprays by the 4th nozzle 3122a of second nozzle group 3122, other subregions of the 4th coating line are overlapping along Y direction by the subregion of the tenth coating line sprayed with the tenth nozzle 3124a by the 4th nozzle sets 3124.
Below, though undeclared respectively with by the 3rd nozzle 3121c, the 5th nozzle to the 12 nozzle (3122b, 3122c, 3123a, 3123b, 3123c, 3124a, 3124b, 3124c) and by spray the 3rd coating line, the 5th coating line is to the equitant coating line of the 12 coating line, but it is except above-mentioned 3rd coating line, the 5th coating line to the 3rd coating line and the tenth coating line at the two ends except being present in axle in the 12 coating line, overlapping along Y direction with two coating lines respectively.
Thus, when making injection unit 3100 move one time along X-direction, for a region, uniform coated film can be formed, and then there is the effect that can improve coated film quality.
As mentioned above, in the present invention, by each nozzle 3121a, 3121b, 3121c, 3122a, 3122b, 3122c, 3123a, 3123b, 3123c, 3124a, 3124b, 3124c spraying and formed coating line subregion and by other nozzles 3121a configured along X-direction interval, 3121b, 3121c, 3122a, 3122b, 3122c, 3123a, 3123b, 3123c, 3124a, 3124b, at least one coating line in the coating line of 3124c spraying is formed in an overlapping arrangement along Y direction, preferably, overlapping area between one coating line and another coating line is 35% to 45% of the width of a coating line, be more preferably 40%.
Overlapping area between this coating line changes along with and standoff distance between the nozzle be configured on the mutually different position in X-direction and another nozzle adjacent along Y direction.More specifically, this area changes along with and the standoff distance be configured between the center of the nozzle on the mutually different position of X-direction and the center of another nozzle adjacent along Y direction.Further, the width of the coating line sprayed by a nozzle sprays pressure and changes along with the viscosity of the internal diameter of nozzle, standoff distance between substrate and nozzle, coating agent and gas.
Therefore, the width of coating line sprays pressure for the state of setting with the viscosity and gas that suppose the internal diameter of nozzle, standoff distance between substrate and nozzle, coating agent and is described.Such as, in an embodiment, 12 times to 13 times that the width (or diameter of dropping point) of coating line substrate S formed is nozzle inside diameter.
And, be configured to 1.3 times to 1.7 times of the width (or overlapping area) of overlapping region (A) along the adjacent and distance be configured between the center of a nozzle of the mutually different position of X-direction and the center of another nozzle of Y direction, be more preferably 1.5 times.
With reference to Fig. 8, if be more specifically described, standoff distance B between the center of the then center of the first jet 3121a of first jet group 3121 and the 11 nozzle 3124b of the 4th nozzle sets 3124 is 1.3 times to 1.7 times of the width (or overlapping area) of overlapping region A, is more preferably 1.5 times.
So, in an embodiment of the present invention, by adjustment along Y direction the adjacent and standoff distance B be configured between the center of a nozzle of the mutually different position of X-direction and the center of another nozzle, make the overlapping area between a coating line and another coating line be 35% to 45% of the width of a coating line, be more preferably 40%.As mentioned above, the adjustment of this overlapping area can be sprayed pressure along with the viscosity of the internal diameter of nozzle, standoff distance between substrate and nozzle, coating agent and gas and change.Thus, one that the internal diameter of nozzle, standoff distance between substrate and nozzle, the viscosity of coating agent and gas sprays in pressure if change, also can make the standoff distance between substrate from nozzle, change along the adjacent and standoff distance be configured between the center of a nozzle of the mutually different position of X-direction and the center of another nozzle of Y direction.
Therefore, when dripping coating layer agent, not overlapping dropping point D, and utilize overlapping coating line method, neither by the impact of adjacent nozzle, the height of the dropping point D of semi-spherical shape can be solved again from the central part problem that edge is more and more lower to the periphery, and then can for a region, form uniform coated film, make the effect with the quality improving coated film.
In above-mentioned first embodiment shown in Fig. 6, be illustrated with first jet group 3121, second nozzle group 3122, the 3rd nozzle sets 3123, configuration that the order of the 4th nozzle sets 3124 is carried out successively.But be not limited to this, the order of first jet group to the 4th nozzle sets 3121,3122,3123,3124 can be changed.Such as, shown in Fig. 7, can be configured according to the order of first jet group 3121, the 3rd nozzle sets 3123, second nozzle group 3122, the 4th nozzle sets 3124.Now, identical with the distance between the 3rd nozzle sets 3123 with the first jet group 3121 according to the first embodiment shown in Fig. 6 according to the distance between the first jet group 3121 of variation and the 3rd nozzle sets 3123, between first jet group 3121 and the 3rd nozzle sets 3123, other nozzle sets are not set.Further, the standoff distance between the 3rd nozzle sets 3123 and second nozzle group 3122 can be identical with the distance between first jet group 3121 and the 3rd nozzle sets 3123, between the 3rd nozzle sets 3123 and the 4th nozzle sets 3124, configure second nozzle group 3122.Thus, the size according to the X-direction of the injection unit 3100 of variation is greater than the first embodiment, is approximately 2 times.
Above, to injection unit 3100, there is first jet group to the situation of the 4th nozzle sets 3121,3122,3123,3124 to be illustrated.But be not limited to this, nozzle sets 3121,3122,3123,3124 can have less than four or more.
Further, the second embodiment as shown in Figure 9, can arrange two first jet groups to the 4th nozzle sets 3121,3122,3123,3124.Namely, have with first jet group to the 4th nozzle sets 3121,3122,3123, the 5th nozzle sets of 3124 identical configuration structures to the 8th nozzle sets 3125,3126,3127,3128, along X-direction intervening gaps configuration first jet group to the 8th nozzle sets 3121,3122,3123,3124,3125,3126,3127,3128.
Now, to the 12 nozzle sets 3125,3126,3127,3128, to separate along X-direction, the mode of arrangement is arranged the 8th nozzle sets, and now, the 8th nozzle sets is arranged to the 12 nozzle sets 3125,3126,3127,3128 with zigzag.In other words, the 5th nozzle sets formed respectively along X-direction arrangement is different in the position of Y direction to nozzle 3125a, 3125b, 3125c, 3126a, 3126b, 3126c, 3127a, 3127b, 3127c, 3128a, 3128b, 3128c of the 8th nozzle sets 3125,3126,3127,3128.More specifically, the 13 nozzle of the 5th nozzle sets 3125 is different to the position of each comfortable Y direction of the 24 nozzle 3128a, 3128b, 3128c to the 22 nozzle of the 21 nozzle 3127a, 3127b, 3127c, the 8th nozzle sets 3128 to the 19 nozzle of the 18 nozzle 3126a, 3126b, 3126c, the 7th nozzle sets 3127 with the 16 nozzle of the 6th nozzle sets 3126 to the 15 nozzle 3125a, 3125b, 3125c.From each nozzle 3125a, 3125b, 3125c, 3126a, 3126b, 3126c, 3127a, 3127b, 3127c, 3128a, 3128b, center (C) position of 3128c, 13 nozzle of the 5th nozzle sets 3125 is to the 15 nozzle 3125a, 3125b, 3125c, 16 nozzle of the 6th nozzle sets 3126 is to the 18 nozzle 3126a, 3126b, 3126c, 19 nozzle of the 7th nozzle sets 3127 is to the 21 nozzle 3127a, 3127b, 3127c, 22 nozzle of the 8th nozzle sets 3128 is to the 24 nozzle 3128, 3128b, 3128c is mutually different in center (C) position of Y direction.
Therefore, when 13 nozzle is discharged coating agent separately to the 24 nozzle 3125a, 3125b, 3125c, 3126a, 3126b, 3126c, 3127a, 3127b, 3127c, 3128a, 3128b, 3128c and drips painting (dotting) or spray on substrate S, as shown in Figure 9, to specify shape, such as dripping with drop shape is coated on substrate S, drips the multiple dropping point D be coated with and lays respectively on the position of the respective nozzle of thereon.That is, drip the multiple dropping point D be coated on substrate S and be separated from each other arrangement along X-axis and Y direction.Now, the multiple dropping point D along X-axis and Y direction arrangement can not be overlapping.This be due to, respectively form the 5th nozzle sets to the 8th nozzle sets 3125,3126,3127,3128 multiple nozzle 3125a, 3125b, 3125c, 3126a, 3126b, 3126c, 3127a, 3127b, 3127c, 3128a, 3128b, 3128c the position of Y direction or its center (C) position not identical, they are with configuration in a zigzag, make position each other different.
And, according to the second embodiment, the first jet forming first jet group 3121 is identical in the position of Y direction to the 15 nozzle 3125a, 3125b, 3125c with the 13 nozzle of formation the 5th nozzle sets 3125 to the 3rd nozzle 3121,3121b, 3121c, and the 4th nozzle forming second nozzle group 3122 is identical in the position of Y direction to the 18 nozzle 3126a, 3126b, 3126c with the 16 nozzle of formation the 6th nozzle sets 3126 to the 6th nozzle 3122a, 3122b, 3122c.And, the 7th nozzle forming the 3rd nozzle sets 3123 is identical in the position of Y direction to the 21 nozzle 3127a, 3127b, 3127c with the 19 nozzle of formation the 7th nozzle sets 3127 to the 9th nozzle 3123a, 3123b, 3123c, and the tenth nozzle forming the 4th nozzle sets 3124 is identical in the position of Y direction to the 24 nozzle 3128a, 3128b, 3128c with the 22 nozzle of formation the 8th nozzle sets 3128 to the 12 nozzle 3124a, 3124b, 3124c.
Thus, the subregion of the first coating line L1 be coated with by the first jet 3121a of first jet group 3121 is overlapping with the 7th coating line L7 and the 19 coating line L19, and other regions of the first coating line L1 are overlapping with the 11 coating line L11 and the 23 coating line L23.Further, meanwhile, the first coating line L1 is overlapping with the Zone Full of the 13 coating line L13 sprayed by the 13 nozzle 3125a.So, in a second embodiment, for the coating line be coated with by nozzle, except being present in the 3rd coating line at the two ends of Y-axis, the tenth coating line, the 15 coating line and the 22 coating line, overlapping with five coating lines respectively.Therefore, when moving one time along X-axis, compared to the injection unit 3100 according to the first embodiment, injection unit 3100 according to the second embodiment can form thicker coated film, further, when forming the coated film of same thickness, there is the effect of the mobile number of times that can reduce along X-axis.
Basal plate conveyer 6000 is the unit carried to operation travel direction by substrate S, and pallet T settles substrate S, basal plate conveyer 6000 delivery tray T.Basal plate conveyer 6000 provide support in fact and carry out carrying to as if pallet T, but for convenience of explanation, to be described using " substrate " as object.
Basal plate conveyer 6000 is arranged at the top of workbench 1000, extends to form, with to plasma processor 2000 and injection unit 3100 conveying substrate S.That is, basal plate conveyer 6000 extends on the top of workbench 1000 and forms, and extends to the region guided into by the substrate S completing Surface Treatment with Plasma and coating procedure outside workbench 1000 from the region that substrate S is introduced into.
Basal plate conveyer 6000 comprises: first substrate conveyer 4000, extends to the front end of injection unit 3100 and conveying substrate S, to make it by the downside of plasma processor 2000 from the region that substrate S is introduced into; And second substrate conveyer 5000, extend to the derivative region of substrate S and conveying substrate S, to make it by the downside of injection unit 3100 from first substrate conveyer 4000.
First substrate conveyer 4000 comprises: substrate introducing portion 4100, is arranged at the rear of the plasma processor on coating procedure travel direction, for the substrate S that temporary support is introduced into; First horizontal drive portion 4200, the region extension the region be introduced into from substrate S to injection unit 3100 forms; First power source 4300, is connected with the first horizontal drive portion 4200, for running above-mentioned first horizontal drive portion 4200; A pair first guide rails 4400, the both sides along the first horizontal drive portion 4200 are arranged abreast; First substrate delivery section 4500, arrange in the mode be connected with the first horizontal drive portion 4200 and the first guide rail 4400, the driving by the first horizontal drive portion 4200 moves horizontally along the first guide rail 4400; Substrate transfer part 4600, finishes receiving the substrate S of plasma treatment from first substrate delivery section 4500 and provides support.
Substrate introducing portion 4100 comprises: a pair support component 4110, mutually arranges abreast in the direction, both sides in the first horizontal drive portion 4200; And multiple roller 4120, be arranged at a pair support component 4110 respectively, and have pallet T on top, above-mentioned pallet is for supporting the substrate S be introduced in order to coating.Wherein, the pallet T being mounted with substrate S is placed on multiple roller 4120.
First horizontal drive portion 4200 is arranged between a pair support component 4110, and one end is connected with the first power source 4300.The first horizontal drive portion 4200 according to embodiment is ball-screw, and the first power source 4300 can be the motor that ball-screw is rotated.
A pair first guide rails 4400 are provided separately the both sides in the first horizontal drive portion 4200, and extend along the bearing of trend in the first horizontal drive portion 4200 and form.Further, a pair first guide rails 4400 are between a pair support component 4110 forming substrate introducing portion 4100.That is, the standoff distance between a pair first guide rails 4400 is less than the standoff distance between a pair support component 4400.Can be such as line slideway according to the first guide rail 4400 of embodiment.
First substrate delivery section 4500 settles substrate S on top, and moves horizontally along the first guide rail 4400, and substrate S is moved horizontally on the downside of the plasma processor 2000 of release or emitting plasma.First substrate delivery section 4500 according to embodiment comprises: a pair movable block 4520, goes forward side by side line slip in the top being arranged on a pair first guide rails 4400 respectively; Substrate emplacing platform 4510, is positioned at the upside of a pair movable block 4520, lays the pallet T for supporting substrate S; Fixed part 4530, for connecting between movable block 4520 and substrate emplacing platform 4510; And lifting drive division 4540, being arranged at movable block 4520 and substrate emplacing platform 4510, being elevated for making substrate emplacing platform 4510.
A pair movable block 4520 of first substrate delivery section 4500 comprises: attaching parts 4550, arrange in the mode extended along the direction corresponding with above-mentioned first guide rail 4400 in the upside of the first guide rail 4400, its development length is shorter than the first guide rail 4400, for connecting between a pair movable block 4520; And horizontal translational components (not shown), so that the mode be connected between attaching parts 4550 and the first horizontal drive portion 4200 is arranged, and move horizontally along the first horizontal drive portion 4200.
Certainly, attaching parts 4550 and the first horizontal drive portion 4200 are not limited to this, can use and movable block 4520 can be made to carry out the various means moved horizontally.
The substrate emplacing platform 4510 of first substrate delivery section 4500 makes substrate S by the unit of plasma processor 2000 as in order to implement plasma treatment to substrate S surface, arranges in the mode be connected with movable block 4520 by lifting drive division 4540 and fixed part 4530.The upside of a pair movable block 4520 is laid respectively at according to the substrate emplacing platform 4510 of embodiment.
Certainly, substrate emplacing platform 4510 is not limited to above-mentioned structure and shape, can move horizontally, can implement various change by movable block 4520 along the first guide rail 4400, makes to lay substrate S on top.
Substrate is placed in substrate emplacing platform 4510 by the lifting drive division 4540 of first substrate delivery section 4500, and in order to be transmitted to substrate transfer part 4600 by settled substrate S, aforesaid substrate emplacing platform 4510 is elevated.According to the combining structure that the lifting drive division 4540 of embodiment can be cylinder and piston.
The fixed part 4530 of first substrate delivery section 4500 plays when being elevated drive division 4540 and working the positioning action preventing substrate emplacing platform 4510 from moving left and right.
Certainly, lifting drive division 4540 and fixed part 4530 are not limited to this, can use the various unit that substrate emplacing platform 4510 can be made to be elevated.
Substrate transfer part 4600 is arranged on the horizontal movement path of first substrate delivery section 4500, receives the substrate S through plasma treatment and provides temporary support.This substrate transfer part 4600 comprises: a pair support component 4610, has substrate S in upper support; And fixed part 4620, respectively a pair support component 4610 is fixed on the top of workbench 1000.A pair support component 4610 lays respectively at the respective outside of a pair first guide rails 4400, extends and extends, be shorter in length than the first guide rail 4400 along the first guide rail 4400 bearing of trend.Now, the interval between a pair support component 4610 is greater than the interval between a pair substrate emplacing platform 4510 forming first substrate delivery section 4500.That is, compared to the substrate emplacing platform 4510 of first substrate delivery section 4500, the support component 4610 of substrate transfer part 4600 is positioned at opposite exterior lateral sides.
Second substrate conveyer 5000 comprises: the second horizontal drive portion 5200, forms from the derivative region of substrate S completing coating procedure to the region extension between plasma processor 2000; Second power source 5300, is connected with the second horizontal drive portion 5200, and above-mentioned second horizontal drive portion 5200 is run; A pair second guide rails 5400, the both sides along the second horizontal drive portion 5200 are arranged abreast; Second substrate delivery section 5500, can carry along the second guide rail 5400; 3rd substrate delivery section 5800, is arranged at the front of second substrate delivery section 5500, arranges, and can carry along the second guide rail 5400 in the mode be connected with the second horizontal drive portion 5200 and the second guide rail 5400; Fixed strip 5700, for connecting second substrate delivery section 5500 and the 3rd substrate delivery section 5800; Coating support portion 5600, finishes receiving the substrate S of coating procedure from second substrate delivery section 5500 and provides support, and implements substrate S coating procedure on top; Substrate lead division 5900, is arranged at the front of coating conveyer 7000, by supporting the substrate S having completed coating, substrate S is drawn.
Second horizontal drive portion 5200 is positioned at the front of plasma processor 2000, and extends from coating conveyer 7000 to substrate S lead-out area and form.Further, the second horizontal drive portion 5200 between a pair second guide rails 5400, and forms along the extension of coating procedure travel direction.The second horizontal drive portion 5200 according to embodiment is ball-screw, and the second power source 5300 can be the motor that ball-screw is rotated.
A pair second guide rails 5400 are separately arranged along the both sides in the second horizontal drive portion 5200 respectively, and extend along the bearing of trend in the second horizontal drive portion 5200.Be such as line slideway according to the second guide rail 5400 of embodiment.
Make substrate S be placed in the top of second substrate delivery section 5500, move horizontally along the second guide rail 5400, substrate S is moved horizontally to the downside of injection unit 3100.According to the second substrate delivery section 5500 of embodiment, there is the structure similar to aforesaid first substrate delivery section 4500.That is, second substrate delivery section 5500 comprises: a pair movable block 5520, goes forward side by side line slip in the top being arranged on a pair second guide rails 5400 respectively; Substrate emplacing platform 5510, is positioned at the upside of a pair movable block 5520, lays the pallet T for supporting substrate S; Fixed part 5530, for connecting between movable block 5520 and substrate emplacing platform 5510; And lifting drive division 5540, being arranged at movable block 5520 and substrate emplacing platform 5510, being elevated for making substrate emplacing platform 5510.
This second substrate delivery section 5500 is connected with the 3rd substrate delivery section 5800 by fixed strip 5700, and moves by the 3rd moving horizontally of substrate delivery section 5800.
A pair movable block 5520 of second substrate delivery section 5500 comprises attaching parts 5550, direction in the upside of the second guide rail 5400 along corresponding with above-mentioned second guide rail 5400 is extended, development length is shorter than the second guide rail 5400, for connecting between a pair movable block 5520.
Attaching parts 5550 comprise fixed strip 5700, and above-mentioned fixed strip 5700 is connected with the 3rd substrate delivery section 5800.
Attaching parts 5550 and fixed strip 5700 are not limited to this, can use and movable block 5520 can be made to carry out the various unit moved horizontally.
The substrate emplacing platform 5510 of second substrate delivery section 5500 carries out through the substrate of Surface Treatment with Plasma the unit that moves horizontally as making to coating machine 3000, arrange in the mode be connected with movable block 5520 by lifting drive division 5540 and fixed part 5530.The upside of a pair movable block 5520 is laid respectively at according to the substrate emplacing platform 5510 of embodiment.
Certainly, substrate emplacing platform 5510 is not limited to above-mentioned structure and shape, can move horizontally, and can implement various change by movable block 5520 along the second guide rail 5400, makes to lay substrate S on top.
Substrate is placed in substrate emplacing platform 5510 by the lifting drive division 5540 of second substrate delivery section 5500, and in order to be transmitted to coating support portion 5600 by settled substrate S, aforesaid substrate emplacing platform 5510 is elevated.According to the combining structure that the lifting drive division 5540 of embodiment can be cylinder and piston.
The fixed part 5530 of second substrate delivery section 5500 plays when being elevated drive division 5540 and working the positioning action preventing substrate emplacing platform 5510 from moving left and right.
Certainly, lifting drive division 5540 and fixed part 5530 are not limited to this, can use the various means that substrate emplacing platform 5510 can be made to be elevated.
Coating support portion 5600 is arranged on the horizontal movement path of second substrate delivery section 5500 and the 3rd substrate delivery section 5800, receives the substrate S through plasma treatment and provides temporary support.This coating support portion 5600 comprises: a pair support component 5610, has substrate S in upper support; And fixed part 5620, respectively a pair support component 5610 is fixed on the top of workbench 1000.A pair support component 5610 lays respectively at the respective outside of a pair second guide rails 5400, extends and forms, be shorter in length than the second guide rail 5400 along the second guide rail 5400 bearing of trend.Now, the interval between a pair support component 5610 is greater than the interval between a pair substrate emplacing platform 5510 forming second substrate delivery section 5500.That is, compared to the substrate emplacing platform 5510 of second substrate delivery section 5500, the support component 5610 of coating support portion 5600 is positioned at opposite exterior lateral sides.
3rd substrate delivery section 5800 moves on the downside of the support component 5610 of coating support portion 5600 along the second guide rail 5400, after the substrate S be supported on coating support portion 5610 is placed in top, moves horizontally along substrate lead division 5900 direction.This 3rd substrate delivery section 5800 has the structure identical with above-mentioned first substrate delivery section 4500.That is, the 3rd base plate transfer portion 5800 comprises: a pair movable block 5820, goes forward side by side line slip in the top being arranged on a pair second guide rails 5400 respectively; Substrate emplacing platform 5810, is positioned at the upside of a pair movable block 5820, lays the pallet T for supporting substrate S; Fixed part 5830, for connecting between movable block 5820 and substrate emplacing platform 5810; And lifting drive division 5840, being arranged at movable block 5820 and substrate emplacing platform 5810, being elevated for making substrate emplacing platform 5810.
A pair movable block 5820 in the 3rd base plate transfer portion 5800 comprises attaching parts 5850, direction in the upside of the second guide rail 5400 along corresponding with above-mentioned second guide rail 5400 is extended, development length is shorter than the second guide rail 5400, for connecting between a pair movable block 5820; And horizontal translational components (not shown), so that the mode be connected between attaching parts 5850 and the second horizontal drive portion 5200 is arranged, and move horizontally along the second horizontal drive portion 5200.
Attaching parts 5850 comprise fixed strip 5700, and above-mentioned fixed strip 5700 is connected with the 3rd substrate delivery section 5800.
Certainly, attaching parts 5850 and fixed strip 5700 are not limited to this, can use and movable block 5820 can be made to carry out the various unit moved horizontally.
The substrate emplacing platform 5810 of the 3rd substrate delivery section 5800, as the unit carried the substrate through coating process, is arranged in the mode be connected with movable block 5820 by lifting drive division 5840 and fixed part 5830.The upside of a pair movable block 5820 is laid respectively at according to the substrate emplacing platform 5810 of embodiment.
Certainly, substrate emplacing platform 5810 is not limited to above-mentioned structure and shape, can move horizontally, and can implement various change by movable block 5820 along the second guide rail 5400, makes to lay substrate S on top.
Substrate S is placed in substrate emplacing platform 5810 by the lifting drive division 5840 of the 3rd substrate delivery section 5800, and in order to by settled substrate S to the transmission of substrate lead-out area, aforesaid substrate emplacing platform 5810 is elevated.The lifting drive division 5840 of embodiment can be the combining structure of cylinder and piston.
The fixed part 5830 of the 3rd substrate delivery section 5800 plays when being elevated drive division 5840 and working the positioning action preventing substrate emplacing platform 5810 from moving left and right.
Certainly, lifting drive division 5840 and fixed part 5830 are not limited to this, can use the various means that substrate emplacing platform 5810 can be made to be elevated.
The substrate that substrate lead division temporary support is transferred to substrate lead-out area by the 3rd substrate delivery section, and make substrate guide the outside of workbench into.Wherein, in the outside of substrate lead division, can baking oven be set, from the derivative substrate of substrate lead division, baking oven can be loaded and carry out drying.Substrate lead division comprises: a pair support component 5910, mutually arranges abreast in the direction, both sides of the second guide rail 5400; Multiple connection strap 5920, separately for connecting between a pair support component 5910, is separated from each other setting in the mode arranged along the bearing of trend of above-mentioned a pair support component 5910; And multiple roller 5930, be arranged on multiple connection strap 5920 respectively, be mounted with pallet on top.
Below, with reference to Fig. 1 to Figure 13, the work of plater is according to an embodiment of the invention described.
First, plan is placed on pallet T at the substrate S of top spray-on coating film, above-mentioned pallet T is placed on multiple rollers 4120 of substrate introducing portion 4100.Further, run the lifting drive division 4540 of first substrate delivery section 4500, make substrate emplacing platform 4510 increase, make the upside of the multiple rollers 4120 being positioned at substrate introducing portion 4100.Thus, the pallet T be placed on multiple rollers 4120 of substrate introducing portion 4100 is placed in the substrate emplacing platform 4510 of first substrate delivery section 4500.
Further, utilize the first power source 4300 to run the first horizontal drive portion 4400, first substrate delivery section 4500 is moved horizontally along coating procedure travel direction.Now, as shown in figure 11, first substrate delivery section 4500 through the downside of plasma processor 2000, and is moved horizontally to the front of plasma processor 2000 or the position of substrate transfer part 4600.More specifically, when utilizing the first power source 4300 to run the first horizontal drive portion 4200, the horizontal translational components be connected with the attaching parts 4550 of first substrate delivery section 4500 moves along the first horizontal drive portion 4200, thus, the movable block 4520 of first substrate delivery section 4500 moves along with the first guide rail 4400.Now, first substrate delivery section 4500 moves horizontally in the mode on the downside of plasma processor 2000, by discharged by above-mentioned plasma processor 2000 or the plasma of radiation to carry out surface treatment.
As mentioned above, during implementing plasma treatment to a substrate S surface, first, through the substrate S of plasma treatment, to be placed in the state of coating support portion 5600, coating procedure can be implemented by coating machine 3000.Below, will be described in detail to coating procedure.
Undertaken moving horizontally by first substrate delivery section 4500 and complete the substrate S of plasma treatment, as shown in figure 11, being in the state of the position of the substrate transfer part 4600 being moved horizontally to the front being positioned at plasma processor 2000.
When terminating the plasma treatment for a substrate S surface, as shown in figure 12, the aforesaid substrate S be placed in first substrate delivery section 4500 is placed in substrate transfer part 4600.For this reason, utilize the lifting drive division 4540 of first substrate delivery section 4500, substrate emplacing platform 4510 is declined, to make its position lower than the support component 4610 of substrate transfer part 4600, substrate S is supported on the support component 4610 of substrate transfer part 4600 thus.
Then, second substrate delivery section 5500 and the 3rd substrate delivery section 5800 are moved, and the substrate S be placed in substrate transfer part 4600 is moved, as shown in figure 13, substrate S is placed on coating support portion 5600, by through coating and the substrate S be placed on coating support portion 5600 be placed on substrate lead division 5900.For this reason, as shown in figure 12, second substrate delivery section 5500 and the 3rd substrate delivery section 5800 are retreated, makes above-mentioned second substrate delivery section 5500 be positioned at the position of substrate transfer part 4600, and make above-mentioned 3rd substrate delivery section 5800 be positioned at the position of coating support portion 5600.In order to run above-mentioned second substrate delivery section 5500 and the 3rd substrate delivery section 5600, drive the second power source 5300 and the second horizontal drive portion 5200.Thus, the horizontal translational components (not shown) be connected with the attaching parts 5850 of the 3rd substrate delivery section 5800 moves horizontally along the second horizontal drive portion 5200 to direction, place, coating support portion 5600, now, the movable block 5820 of the 3rd substrate delivery section 5800 moves horizontally along the second guide rail 5400 to direction, place, coating support portion 5600.And, in the present invention, the 3rd substrate delivery section 5800 is connected by fixed strip 5700 with second substrate delivery section 5500, therefore, 3rd substrate delivery section 5800 is transported to the power of coating support portion 5600, is transmitted to second substrate delivery section 5500 by fixed strip 5700.Therefore, second substrate delivery section 5500 moves horizontally along the second guide rail 5400 to substrate transfer part 4600.
When second substrate delivery section 5500 is transferred to substrate transfer part 4600, and when the 3rd substrate delivery section 5800 is transferred to coating support portion 5600, substrate S is made to be placed in second substrate delivery section 5500 and the 3rd substrate delivery section 5800 respectively.For this reason, run the lifting drive division 5540 of second substrate delivery section 5500, and when making substrate emplacing platform 5510 be positioned at the position higher than the support component 4610 of substrate transfer part 4600, substrate S is placed on the substrate emplacing platform 5510 of second substrate delivery section 5500.Further, when the lifting drive division 5840 of operation the 3rd substrate delivery section 5800, and when making substrate emplacing platform 5810 be positioned at the position higher than the support component 5610 of coating support portion 5600, substrate S is placed on the substrate emplacing platform 5810 of the 3rd substrate delivery section 5800.
And, inverted running second power source 5300 and the second horizontal drive portion 5200 again, second substrate delivery section 5500 is moved horizontally to the position of coating support portion 5600, and the 3rd substrate delivery section 5800 is moved horizontally to the position of substrate lead division 5900.Afterwards, second substrate emplacing platform 5510 and substrate emplacing platform 5810 are declined, as shown in figure 13, the substrate S of second substrate emplacing platform 5110 is placed on coating support portion 5600, and the substrate S of the 3rd substrate emplacing platform 5810 is placed on substrate lead division 5900.Drawn after the substrate S be placed on substrate lead division 5900 moves in outward direction by multiple roller 5930.Further, the baking oven that derivative substrate S moves into place outside workbench 1000 carries out drying, or natural drying.Certainly, drying mode is not limited to this, can arrange other baking oven, by manpower or other mechanism by after being transported to baking oven through the substrate S of coating, can carry out drying in above-mentioned baking oven.
When substrate S is placed in coating support portion 5600, utilizes coating machine 3000 to the spraying coating agent of substrate S surface, such as, spray the fluorine type coating agent being used for anti-fingerprint pad pasting, form coated film.Be described as follows further with reference to Figure 14, first, injection unit 3100 along coating conveyer 7000 the first coating guide rail 7100 and move horizontally to X-direction, while to the surperficial spraying coating agent of substrate S, form coated film.Afterwards, in order to injection unit 3100 is transported to next coating area, injection unit 3100 is made to carry out the movement of preset distance along the second coating guide rail 7200 to Y direction.Further, again move horizontally along the first coating guide rail 7100 to X-direction, while to the agent of substrate S spraying coating, form coated film.That is, injection unit 3100 carries out moving horizontally forming coated film along the first coating guide rail 7100 and the second coating guide rail 7200 respectively, and as shown in figure 14, the motion track of injection unit 3100 can be carry out repeatedly with " own " shape.
Injection unit has multiple nozzle 3120:3121a, 3121b, 3121c, 3122a, 3122b, 3122c, 3123a, 3123b, 3123c, 3124a, 3124b, 3124c, as shown in Fig. 6 and Fig. 8, the position being arranged in the position of Y direction or its center (C) according to multiple nozzle 3121a, 3121b, 3121c, 3122a, 3122b, 3122c, 3123a, 3123b, 3123c, 3124a, 3124b, 3124c of the first embodiment is not identical.Namely, form first jet group respectively not identical in the position of the position of Y direction or its center (C) to multiple nozzle 3121a, 3121b, 3121c, 3122a, 3122b, 3122c, 3123a, 3123b, 3123c, 3124a, 3124b, 3124c of the 4th nozzle sets 3121,3122,3123,3124, and with configuration in a zigzag, to make it have mutually different position.Therefore, when discharging coating agent respectively by multiple nozzle 3121a, 3121b, 3121c, 3122a, 3122b, 3122c, 3123a, 3123b, 3123c, 3124a, 3124b, 3124c and drip painting (dotting) to substrate S, as shown in Figure 6, drip be coated with multiple dropping point D not overlapping.
And, when while make injection unit 3100 move horizontally along X-direction, while when distinguishing spraying coating agent from multiple nozzle 3121a, 3121b, 3121c, 3122a, 3122b, 3122c, 3123a, 3123b, 3123c, 3124a, 3124b, 3124c, spray dropping point D continuously respectively from multiple nozzle 3121a, 3121b, 3121c, 3122a, 3122b, 3122c, 3123a, 3123b, 3123c, 3124a, 3124b, 3124c, and then be coated into the wire shaped extended along X-direction.Now, by in the coating line that each nozzle 3121a, 3121b, 3121c, 3122a, 3122b, 3122c, 3123a, 3123b, 3123c, 3124a, 3124b, 3124c spray, except the coating line sprayed by the 3rd nozzle 3121c and the tenth nozzle 3124a, overlapping along Y direction with two coating lines respectively.And, preferably, by injection unit 3100 to be carried out the movement of preset distance along Y direction, make to carry out moving horizontally and the coating line sprayed by the tenth nozzle 3124a of up-to-date formation is overlapping with the coating line sprayed by the 3rd nozzle 3124a formed when X-direction once moves along X-direction, make the coating line that sprays by the 3rd nozzle 3121c and the tenth nozzle 3124a also overlapping along Y direction with two coating lines.Thus, when injection unit 3100 is once moved along X-direction, uniform coated film can be formed for a region, and then there is the effect that can improve coated film quality.

Claims (25)

1. a plater, wherein, comprising:
Coating machine, has injection unit, and described injection unit is provided with for the multiple nozzles to the agent of substrate spraying coating; And
Coating conveyer, makes described coating machine move horizontally along X-axis and Y direction,
Described multiple nozzle along X-axis and Y direction arrangement, and is separated from each other configuration,
The position of multiple nozzles on another direction of principal axis along a direction of principal axis arrangement in described X-axis and Y-axis is mutually different.
2. a plater, wherein, comprising:
Basal plate conveyer, there is guide rail and substrate delivery section, described guide rail forms along the coating procedure travel direction extension forming coated film on substrate, and the top of described substrate delivery section is mounted with substrate, and moves along described guide rail to coating procedure travel direction;
Plasma processor, is arranged on described coating procedure travel direction path, and implements Surface Treatment with Plasma to described substrate; And
Coating machine, carry out path is provided separately with described plasma processor at described coating procedure, and have injection unit, described injection unit is provided with the multiple nozzles to the agent of substrate spraying coating,
Described basal plate conveyer comprises:
First substrate conveyer, there is the first guide rail and first substrate delivery section, the direction extension of described first guide rail from the region that the substrate intending forming coated film is introduced into described injection unit position forms, the top of described first substrate delivery section is mounted with substrate, and can move horizontally along described first guide rail;
Second substrate conveyer, there is the second guide rail and at least one substrate delivery section, described second guide rail from formed described coated film direction from the derivative region of substrate to described plasma processor position extend form, the top of at least one substrate delivery section described is mounted with substrate, and can move horizontally along described second guide rail.
3. a plater, wherein, comprising:
Coating machine, has injection unit, and described injection unit is provided with for the multiple nozzles to the agent of substrate spraying coating,
Multiple nozzle arranges along X-axis and Y direction respectively and is separated from each other setting,
Multiple nozzle is arranged to, make multiple nozzles coating line formed respectively and the coating line be coated with by least one nozzle on another direction of principal axis be configured in described X-axis and Y direction by arranging along the direction of principal axis in described X-axis and Y direction be formed as overlapping along the direction of principal axis in described X-axis and Y direction, and make the multiple nozzles along the other direction arrangement in described X-axis and Y direction mutually different along the axial position in described X-axis and Y direction.
4. plater according to claim 1, wherein, comprising:
Basal plate conveyer, there is guide rail and substrate delivery section, described guide rail forms along the coating procedure travel direction extension forming coated film on substrate, and the top of described substrate delivery section is mounted with substrate, and moves along described guide rail to coating procedure travel direction; And
Plasma processor, is arranged on described coating procedure travel direction path, and implements Surface Treatment with Plasma to described substrate,
Described injection unit carries out path is provided separately with described plasma processor at described coating procedure.
5. plater according to claim 4, wherein, be formed as overlapping along the direction of principal axis in described X-axis and Y direction by the multiple nozzles coating line formed respectively and the coating line be coated with by least one nozzle on another direction of principal axis be configured in described X-axis and Y direction that arrange along the direction of principal axis in described X-axis and Y direction, and mutually different along the axial position in described X-axis and Y direction along multiple nozzles of the other direction arrangement in described X-axis and Y direction.
6. plater according to claim 2, wherein, comprising:
Coating conveyer, makes described coating machine move horizontally along X-axis and Y direction,
Described multiple nozzle along X-axis and Y direction arrangement, and is separated from each other configuration,
The position of multiple nozzles on another direction of principal axis along a direction of principal axis arrangement in described X-axis and Y-axis is mutually different.
7. plater according to claim 6, wherein, be formed as overlapping along the direction of principal axis in described X-axis and Y direction by the multiple nozzles coating line formed respectively and the coating line be coated with by least one nozzle on another direction of principal axis be configured in described X-axis and Y direction that arrange along the direction of principal axis in described X-axis and Y direction, and mutually different along the axial position in described X-axis and Y direction along multiple nozzles of the other direction arrangement in described X-axis and Y direction.
8. plater according to claim 3, wherein, comprising:
Coating conveyer, makes described coating machine move horizontally along X-axis and Y direction,
Described coating conveyer comprises:
Basal plate conveyer, there is guide rail and substrate delivery section, described guide rail forms along the coating procedure travel direction extension forming coated film on substrate, and the top of described substrate delivery section is mounted with substrate, and moves along described guide rail to coating procedure travel direction; And
Plasma processor, is arranged on described coating procedure travel direction path, and implements Surface Treatment with Plasma to described substrate,
Described coating machine carries out path is provided separately with described plasma processor at described coating procedure.
9. the plater according to any one in claim 1 to 8, wherein, when substrate drips the multiple coating agent being coated with and discharging from described multiple nozzle, the multiple dropping points formed form interval mutually, and mutually different along described multiple nozzle position in the Y-axis direction of X-direction arrangement.
10. plater according to claim 9, wherein,
Described injection unit while move horizontally along X-direction, to the agent of substrate spraying coating,
Be formed with coating line on the substrate, described coating line is formed by discharging from described multiple nozzle and dripped the dropping point be coated with continuously respectively, and is formed in the mode extended along X-direction separately,
Be formed as overlapping along Y direction from the subregion of coating line of each nozzle coating with at least one coating line be coated with from other nozzles along X-direction separate configuration, and the multiple nozzles arranged along described X-direction are mutually different in the position of Y direction.
11. platers according to claim 10, wherein, the multiple nozzles arranged along described X-direction configure in the mode that the position in Y direction is mutually different, make the overlapping region along Y direction of described coating line be 35% to 45%.
12. platers according to claim 11, wherein, are configured at the mutually different position of X-direction and are 1.3 to 1.7 times of described overlapping area along the Y direction distance be adjacent between the center of a nozzle that configures and the center of another nozzle.
13. platers according to claim 9, wherein,
Comprise multiple nozzle sets, have respectively and arrange and the described multiple nozzle be provided separately along Y direction,
Described multiple nozzle sets arranges along X-direction and is separated from each other configuration,
Described multiple nozzle sets position in the Y-axis direction along X-direction arrangement is mutually different.
14. platers according to claim 13, wherein, described multiple nozzle sets is with configuration in a zigzag.
15. platers according to claim 14, wherein, described multiple nozzle sets is configured to, and makes the part by forming respectively across a nozzle sets along the coating line of a nozzle coating of two nozzle sets of the both sides separate configuration of X-direction overlapped along Y direction.
16. platers according to any one in claim 2,4 to 8, wherein,
Described basal plate conveyer comprises:
First substrate conveyer, there is the first guide rail and first substrate delivery section, the direction extension of described first guide rail from the region that the substrate intending forming coated film is introduced into described injection unit position forms, the top of described first substrate delivery section is mounted with substrate, and can move horizontally along described first guide rail;
Second substrate conveyer, there is the second guide rail and at least one substrate delivery section, described second guide rail from formed described coated film direction from the derivative region of substrate to described plasma processor position extend form, the top of at least one substrate delivery section described is mounted with substrate, and can move horizontally along described second guide rail.
17. platers according to claim 16, wherein, described first substrate delivery section is settled to form the substrate that coated film is introduced into, thus moves to direction, described plasma processor place,
Described first substrate conveyer comprises:
First horizontal drive portion, is arranged in the mode be connected with first substrate delivery section, provides and makes described first substrate delivery section carry out the driving force moved horizontally along described first guide rail; And
First power source, is connected with described first horizontal drive portion, makes described first horizontal drive portion rotary work,
Described first horizontal drive portion is ball-screw.
18. platers according to claim 17, wherein, described first substrate delivery section comprises:
Movable block, is arranged in the mode being installed on described first guide rail respectively, and can move horizontally along described first guide rail;
Substrate emplacing platform, is installed on the upside of described movable block, lays substrate on top; And
Lifting drive division, is connected with described substrate emplacing platform, described substrate emplacing platform is elevated.
19. platers according to claim 18, wherein, described substrate emplacing platform is introducing substrate substrate in order to form coated film is introduced in region, be elevated by described lifting drive division, thus the substrate being introduced into described substrate introducing region is placed on described substrate emplacing platform.
20. platers according to claim 19, wherein, comprising:
Substrate transfer part, is arranged on the horizontal movement path of described first substrate delivery section, in order to the substrate delivery section transferring substrates to described second substrate conveyer, supports the substrate from the movement of described first substrate delivery section; And
Coating support portion, is arranged on the mobile route of described second substrate conveyer, is mounted with substrate thus implements coating procedure on top.
21. platers according to claim 20, wherein,
Described second substrate conveyer comprises:
Second substrate delivery section, settles the substrate be supported on described substrate transfer part, thus substrate is moved to direction, described injection unit place;
3rd substrate delivery section, on described second guide rail, is arranged at the front of described second substrate delivery section, moves horizontally along described second guide rail, thus settles the substrate being supported in described coating support portion, and substrate is moved to substrate lead-out area;
Fixed strip, is arranged in the mode connected between described second substrate delivery section and described 3rd substrate delivery section;
Second horizontal drive portion, to arrange with any one mode be connected in described second substrate delivery section and the 3rd substrate delivery section, provide described second substrate delivery section and the 3rd substrate delivery section can carry out along described second guide rail the driving force that moves horizontally; And
Second power source, is connected with described second horizontal drive portion, makes described second horizontal drive portion rotary work,
Described second horizontal drive portion is ball-screw.
22. platers according to claim 21, wherein, described second substrate delivery section and the 3rd substrate delivery section comprise:
Movable block, is arranged in the mode being installed on described second guide rail respectively, and can move horizontally along described second guide rail;
Substrate emplacing platform, is installed on the upside of described movable block, lays substrate on top; And
Lifting drive division, is connected with described substrate emplacing platform, described substrate emplacing platform is elevated.
23. platers according to claim 22, wherein,
Be supported on the downside of the substrate on described substrate transfer part, by being elevated by the substrate emplacing platform of lifting drive division to described second substrate delivery section of described second substrate delivery section, the substrate be supported on described substrate transfer part is made to be placed in the substrate emplacing platform of described second substrate delivery section
On the downside of the substrate being supported in described coating support portion, by being elevated by the substrate emplacing platform of lifting drive division to described 3rd substrate delivery section of described 3rd substrate delivery section, the substrate being supported in described coating support portion is made to be placed in the substrate emplacing platform of described 3rd substrate delivery section.
24. platers according to claim 20, wherein, described coating conveyer comprises:
First coating guide rail, is positioned at the upside of described coating support portion, and described injection unit is moved horizontally along X-direction; And
Second coating guide rail, is connected with the two ends of described first coating guide rail, extends and forms, described first coating guide rail and injection unit are moved horizontally along Y direction to Y direction.
25. platers according to claim 9, wherein, described multiple nozzle comprises respectively:
Coating agent supply pipe, is connected with the syringe pump supplying coating agent from coating agent tank;
Gas supply pipe, is connected with the flow-control portion from gas tank supply gas; And
Check-valves, has breaking member and spring, and described breaking member is for blocking the backflow of described coating agent or described gas between described multiple nozzle and described coating agent supply pipe, and described spring is connected with described breaking member.
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