CN104818531B - The method for supporting of tungsten crucible and tungsten crucible support meanss in a kind of sapphire crystallization furnace - Google Patents
The method for supporting of tungsten crucible and tungsten crucible support meanss in a kind of sapphire crystallization furnace Download PDFInfo
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Abstract
The invention discloses a kind of method for supporting of tungsten crucible in sapphire crystallization furnace and tungsten crucible support meanss, method for supporting is to set boss in the bottom of tungsten crucible, in the top surface of tungsten pallet, groove is set, set zirconium oxide husky in the groove of tungsten pallet, boss is inserted into groove and boss is contacted so that tungsten crucible is supported on tungsten pallet with the husky mutually support of zirconium oxide；Gap is left between the lateral surface of boss and the medial surface of groove, gap is left between the bottom surface of tungsten crucible and the top surface of tungsten pallet, or method for supporting is the top surface setting boss in tungsten pallet, in the bottom of tungsten crucible, groove is set, zirconium oxide piece is set in the boss of tungsten pallet, boss is inserted into groove and boss is mutually supported with zirconium oxide piece and contacted so that tungsten crucible is supported on tungsten pallet；Gap is left between the lateral surface of boss and the medial surface of groove, gap is left between the bottom surface of tungsten crucible and the top surface of tungsten pallet.The present invention can make tungsten crucible after calandria deformation, moreover it is possible to be adjusted to ensure that concentricity again.
Description
Technical field
The present invention relates to a kind of method for supporting of tungsten crucible in sapphire crystallization furnace and tungsten crucible support meanss, belong to blue precious
Stone material manufacturing equipment technical field.
Background technology
As shown in figure 1, existing sapphire crystallization furnace includes being arranged on the heater 1, support bar 2, tungsten support of furnace interior
Disk 3 and tungsten crucible 4；Tungsten pallet 3 is arranged on one end of support bar 2, and tungsten crucible 4 is arranged on tungsten pallet 3 and tungsten crucible 4 is located at
The inside of heater 1, during work, carries out heating to tungsten crucible 4 by heater 1 and promotes crystal growth.To improve the matter of crystal
Amount, needs the concentricity that tungsten crucible 4 is placed on to the center of heater 1, i.e. tungsten crucible 4 and heater 1 consistent in theory,
To ensure that in the concentricity of tungsten crucible 4 and heater 1, existing sapphire crystallization furnace be that tungsten pallet 3 first will be arranged on into heating
On the center of body 1, then by carrying out tight fit between tungsten pallet 3 and tungsten crucible 4 so as to ensureing tungsten crucible and heater
Concentricity.
In practical work process, due to in-furnace temperature may be up to 2000 more spend and process a stove time can up to 10 to
20 days or so, in this case, heater can deform in use for some time（As shown in phantom in FIG.）, at this moment tungsten
Pallet cannot ensure concentricity, it is necessary to which tungsten crucible is moved into carry out center adjustment in level with tungsten crucible, still, due to existing
Have between tungsten pallet and tungsten crucible in technology is by tight fit connection, so that tungsten crucible of the prior art can not just enter
The upward adjustment of water-filling square.
Authorization Notice No. is CN202090095U, and authorized announcement date is the Chinese utility model patent on December 28th, 2011
A kind of crucible used for growth of single-component oxide crystal is disclosed, with connected pot wall and the bottom of a pan, the pot wall is in cylindrical drum,
Its inner surface is inverted first frusto-conical surface, and outer surface is straight cylinder cylinder face；And the bottom of a pan is configured to：Its upper surface is
Inverted second frusto-conical surface or inverted sharp conical surface, its lower surface have in the location division in the bottom of a pan center and around the positioning
Inverted 3rd frusto-conical surface in portion.
In above-mentioned patent document【0021】Section and accompanying drawing 1 understand that the tungsten crucible in the patent document is to pass through
The groove and support frame of its bottom（Equivalent to tungsten pallet）Between carry out tight fit so that tungsten crucible is difficult to deviate heating system
Center.
Authorization Notice No. is CN201962404U, and Authorization Notice No. is that in September, 2011 Chinese utility model patent of 7 days is public
A kind of sapphire single-crystal furnace, including crucible and the support for supporting the crucible are opened, it also includes crucible tray, the crucible
The lower end of support is connected with the support, and the upper end of the crucible tray is provided with tapered boss, the bottom of the crucible be provided with
The tapered concave inward structure that the boss is engaged.
Above-mentioned patent document is by the way that the cone boss of the taper concave inward structure of crucible bottom and crucible tray upper end is carried out
Tight fit reaches higher concentricity requirement.
Between the tungsten pallet and tungsten crucible in above-mentioned two patent documents connected by tight fit thus, it is possible to find out
Connect, therefore, after heater deforms, the tungsten crucible in above-mentioned two patent documents can not carry out center in level
Position adjustment.
To sum up, the method for supporting and tungsten crucible support meanss of a kind of tungsten crucible how are designed, makes it after calandria deformation,
The concentricity for being adjusted to ensure that tungsten crucible and heater that center can also be carried out again in level is the skill for being badly in need of solving
Art problem.
The content of the invention
The technical problems to be solved by the invention are that there is provided a kind of sapphire crystallization for defect present in prior art
The method for supporting of tungsten crucible and tungsten crucible support meanss in stove, it can be after calandria deformation, moreover it is possible to carried out again in level
The concentricity for being adjusted to ensure that tungsten crucible and heater of center.
In order to solve the above technical problems, the technical solution used in the present invention is：Tungsten crucible in a kind of sapphire crystallization furnace
Method for supporting, the method for supporting be first tungsten crucible bottom set boss, groove is set on the top surface of tungsten pallet, then
Zirconium oxide is provided with groove on tungsten pallet husky, finally by the boss of tungsten crucible is inserted into the groove of tungsten pallet and
The boss of the tungsten crucible is contacted so that tungsten crucible is supported on tungsten pallet with the husky mutually support of zirconium oxide；Now, tungsten crucible is convex
Gap L 1 is left between the medial surface of the lateral surface of platform and the groove of tungsten pallet, between the bottom surface of tungsten crucible and the top surface of tungsten pallet
Also gap L 2 is left, L1 is set to 1mm to 4mm, and L2 is set to 1mm to 10mm, and support from top to bottom is smoothly followed successively by tungsten earthenware
Crucible, zirconium oxide sand and tungsten pallet or the method for supporting are that elder generation sets boss on the top surface of tungsten pallet, in the bottom of tungsten crucible
Groove is set, then zirconium oxide piece is set on the boss of tungsten pallet, tungsten crucible is inserted into finally by by the boss of tungsten pallet
In groove and the boss of the tungsten pallet is mutually supported with zirconium oxide piece and contacted so that tungsten crucible is supported on tungsten pallet；Now, tungsten
Gap L 3, bottom surface and the tungsten pallet of tungsten crucible are left between the medial surface of the lateral surface of the boss of pallet and the groove of tungsten crucible
Also gap L 4 is left between top surface, L3 is set to 1mm to 3mm, and L4 is set to 1mm to 4mm, support from top to bottom is smooth successively
For tungsten crucible, zirconium oxide piece and tungsten pallet.
It is preferred that, when zirconium oxide is set into the groove on tungsten pallet, the zirconium oxide sand uses 20 mesh extremely
The thick zirconium oxide of 200 purposes is husky, and thick zirconium oxide sand is spilt in the groove being put on tungsten pallet.
It is preferred that, when thick zirconium oxide sand is spilt in the groove being put on tungsten pallet, thick zirconium oxide is husky different in a groove
The bottom surface form spilt high-volume with the bottom surface form of the boss of tungsten crucible and the groove of tungsten pallet of position matches.
It is preferred that, smear nano zircite on the top surface of tungsten pallet.
It is preferred that, the tungsten crucible uses the tungsten crucible that a kind of the bottom of a pan thickeies, the bottom of a pan of tungsten crucible after the thickening of the bottom of a pan
Thickness is 1.1 times to 1.7 times of the bottom of a pan thickness of former tungsten crucible.
Invention additionally discloses a kind of tungsten crucible support meanss, including tungsten crucible, tungsten pallet and support bar, the tungsten pallet
Bottom surface is arranged on one end of support bar, and the other end of support bar is arranged on furnace bottom, is set in the bottom of the tungsten crucible
There is boss, set fluted on the top surface of tungsten pallet, zirconium oxide is provided with the groove of tungsten pallet husky；By by tungsten crucible
Boss be inserted into the groove of tungsten pallet and the boss of the tungsten crucible is contacted so that tungsten crucible branch with the husky mutually support of zirconium oxide
Support now, leaves gap, tungsten earthenware on tungsten pallet between the medial surface of the lateral surface of the boss of tungsten crucible and the groove of tungsten pallet
Also gap is left between the bottom surface of crucible and the top surface of tungsten pallet or boss is set on the top surface of tungsten pallet, in the bottom of tungsten pallet
Groove is set, zirconium oxide piece is set on the boss of tungsten pallet；By the way that the boss of tungsten pallet is inserted into the groove of tungsten crucible
And the groove of the tungsten crucible is mutually supported with zirconium oxide piece and contacted so that tungsten crucible is supported on tungsten pallet；Now, tungsten pallet
Gap is left between the medial surface of the lateral surface of boss and the groove of tungsten crucible, between the bottom surface of tungsten crucible and the top surface of tungsten pallet
Also gap is left.
It is preferred that, the boss is conical boss, and the groove is cylindrical grooves.
It is preferred that, locating piece is provided with furnace bottom, zirconia brick is provided with the locating piece, the support bar
It is in contact in other end insertion zirconia brick and with locating piece.
It is preferred that, the support bar is solid cylinder, and support bar groove is provided with one end of the support bar.
It is preferred that, support bar groove is also provided with the other end of the support bar.
The beneficial effects of the present invention are：By the invention enables tungsten crucible can calandria deformation after, in level again
The concentricity for being adjusted to ensure that tungsten crucible and heater of secondary carry out center；Tungsten crucible is not direct with tungsten pallet in the present invention
Contact, so as to will not occur the phenomenon that tungsten crucible and tungsten pallet are mutually bonded, when taking pot, directly slings taking-up i.e. by tungsten crucible
Can, it is to avoid occur the phenomenon that tungsten crucible is damaged caused by percussion；By forming level side to tungsten crucible between boss and groove
Upward position limiting structure so that tungsten crucible will not be contacted when occurring and running pot phenomenon with heater, it is to avoid stove is short-circuited
Phenomenon it also avoid the crystal phenomenon Nian Jie with tungsten crucible simultaneously；Thick oxygen can be replaced with nano zircite sand by structure design
Change zirconium sand, reduce and remove the husky difficulty of zirconium, improve production efficiency and avoid because husky using Vehicle Processing or grinding removal zirconium
And cause tungsten crucible to damage the generation of phenomenon, reduce production cost；, can by the control spilt high-volume to thick zirconium oxide sand
Alleviate a part because of the unstable phenomenon of tungsten crucible caused by tungsten crucible or the deformation of tungsten pallet；By thickening the bottom of a pan, energy
Avoid the generation of phenomenon of turning over flower in tungsten crucible.
Brief description of the drawings
Fig. 1 is the structural representation in stove in the prior art at tungsten crucible；
Cross section structure diagrams of the Fig. 2 for the tungsten crucible support meanss in the embodiment of the present invention 1 along support bar axial direction；
Fig. 3 is the mplifying structure schematic diagram in A portions in Fig. 2；
Cross section structure diagrams of the Fig. 4 for the tungsten crucible support meanss in the embodiment of the present invention 2 along support bar axial direction；
Fig. 5 is the mplifying structure schematic diagram in B portions in Fig. 4；
In figure：1. heater, 2. support bars, 3. tungsten pallets, 4. tungsten crucibles, 5. boss, 6. grooves, 7. oxidations
Zirconium is husky, and 8. heat-insulated lower screens, 9. nano zircites, 10. furnace bottoms, 11. locating pieces, 12. zirconia bricks, 13. support bars are recessed
Groove, 14. zirconium oxide pieces.
Embodiment
Further details of elaboration is done to technical scheme with specific embodiment below in conjunction with the accompanying drawings.
Embodiment 1：As shown in Figures 2 and 3, in a kind of sapphire crystallization furnace tungsten crucible method for supporting, the support side
Method is first to set boss 5 in the bottom of tungsten crucible 4, and groove 6, then the groove on tungsten pallet 3 are set on the top surface of tungsten pallet 3
Zirconium oxide sand 7 is set in 6, is inserted into finally by by the boss 5 of tungsten crucible 4 in the groove 6 of tungsten pallet 3 and the tungsten crucible 4
Boss 5 mutually support and contacted so that tungsten crucible 4 is supported on tungsten pallet 3 with zirconium oxide sand 7；Now, the boss 5 of tungsten crucible 4
Gap L 1 is left between the medial surface of the groove 6 of lateral surface and tungsten pallet 3, between the bottom surface of tungsten crucible 4 and the top surface of tungsten pallet 3
Also gap L 2 is left, support from top to bottom is smoothly followed successively by tungsten crucible 4, zirconium oxide sand 7 and tungsten pallet 3.L1 be set to 1mm,
2.5mm or 4mm, L2 are set to 1mm, 5mm or 10mm.After support is good, the distance between bottom surface of boss 5 to the bottom surface of groove 6 is 1mm
It is less than the distance between the lateral surface of tungsten crucible 4 and the medial surface of outer hot body 1 to 6mm, wherein L1.Using said structure so that
Adjustment gap, after processing a stove heat body and deforming, tungsten earthenware are left between the boss of tungsten crucible and the groove of tungsten pallet
Crucible can easily move the adjustment for carrying out center in the horizontal direction, to ensure the concentricity of tungsten crucible and heater.
In addition, in two documents in the introduction, tungsten pallet is directly contacted with the groove side of tungsten crucible bottom, by
It can be moved at high temperature in the atom of the surface of solids, so as to cause to process after a stove, tungsten crucible can be bonded with tungsten pallet
Together, when taking pot, if very firmly be bonded between tungsten crucible and tungsten pallet, just have to be tapped with flitch, with tungsten earthenware
Crucible uses the increase of stove number, and the crystal grain of tungsten crucible grows up, and the fracture strength of material is substantially reduced, and tungsten crucible is very when tapping
Easily it is broken, causes the damage of tungsten crucible, and the tungsten crucible in the present embodiment is not contacted directly with tungsten pallet, so that will not
Occur the phenomenon that tungsten crucible and tungsten pallet are mutually bonded, when taking pot, tungsten crucible directly sling into taking-up, it is to avoid generation because
Tap the phenomenon for causing tungsten crucible to damage.In the prior art, the top surface of some tungsten pallets and the bottom surface of tungsten crucible are all planes
, tungsten crucible is directly placed on tungsten pallet, can so occur to run pot phenomenon, because tungsten crucible is provided in inside heater,
In the event of running pot phenomenon, tungsten crucible is run to if being in contact with heater, will result in the short circuit of whole stove while can also
The situation for causing crystal to glue pot is produced, and in the present embodiment, by being formed between boss and groove to tungsten crucible in horizontal direction
Position limiting structure, even if tungsten crucible occur run pot, the distance for the L1 that at most can only also run, and gap L 1 be less than tungsten crucible outside
The distance between medial surface of face and outer hot body, so that tungsten crucible will not be contacted when occurring and running pot phenomenon with heater,
Avoid stove and be short-circuited phenomenon while it also avoid the crystal phenomenon Nian Jie with tungsten crucible.
When zirconium oxide sand 7 is set into the groove 6 on tungsten pallet 3, it is thick that the zirconium oxide sand 7 uses 20 purposes
Zirconium oxide is husky, and thick zirconium oxide sand is spilt in the groove 6 being put on tungsten pallet 3, herein, it would however also be possible to employ 40 mesh, 90 mesh,
120 mesh, 160 mesh or the thick zirconium oxide of 200 purposes are husky.In the prior art, meeting between the top surface of the bottom surface of tungsten crucible and tungsten pallet
Scribble nano zircite（I.e. thin zirconium oxide is husky）Isolated, when process taken after a stove pot when, nano zircite sand can be bonded
On the bottom surface of tungsten crucible and it is bonded very firm, it is difficult to which the husky bottom surface from tungsten crucible of nano zircite is removed, it is necessary to adopt
With the method for Vehicle Processing or grinding, production process if doing so can be caused to complicate, reduce production efficiency and in Vehicle Processing or
Operation difficulty is very big in grinding, slightly imprudence, will result in the damage of tungsten crucible, adds production cost, and in this implementation
Nano zircite sand replaced with into thick zirconium oxide in example husky, so when taking pot, be bonded in tungsten crucible bottom surface is exactly slightly to aoxidize
Zirconium is husky, is found by applicant's test of many times, and thick zirconium oxide is husky very loosely be bonded between tungsten crucible bottom surface, insecure, only
Go to tap that thick zirconium oxide is husky aspect efficiently can just get rid of thick zirconium oxide sand from the bottom surface of tungsten crucible very much with hair clasp, reduce
Remove the husky difficulty of zirconium, improve production efficiency and avoid because removed using Vehicle Processing or grinding zirconium it is husky cause tungsten crucible
The generation of the phenomenon of damage, reduces production cost.In addition, directly nano zircite sand can not be changed into the prior art
Thick zirconium oxide is husky, because for heat-insulation and heat-preservation, can be also provided with the support bar 2 below tungsten pallet 3 it is heat-insulated under
Screen 8, thin zirconium oxide sand is smeared up again after nano zircite is mixed with dispersion liquid, and nano zircite sand can be bonded at tungsten support
On disk, it will not drop downwards, and thick zirconium oxide sand is directly to be sprinkled with, if directly that thin zirconium oxide is husky in the prior art
Change thick zirconium oxide into husky, spilling the thick zirconium oxide sand put can drop to downwards on heat-insulated lower screen, cause the damage of heat-insulated lower screen, this reality
Apply by setting groove on tungsten pallet in example, thick zirconium oxide sand is spilt and put in a groove, can avoid because thick zirconium oxide sand falls
Fall and cause the phenomenon of the damage of heat-insulated lower screen to occur.
When thick zirconium oxide sand is spilt in the groove 6 being put on tungsten pallet 3, thick zirconium oxide sand diverse location in groove 6
The bottom surface form spilt high-volume with the bottom surface form of the boss 5 of tungsten crucible 4 and the groove 6 of tungsten pallet 3 match.When processing
After one stove or many stoves, tungsten crucible or tungsten pallet are possible to deform, and cause bottom surface or the tungsten pallet of the boss of tungsten crucible
The bottom surface of groove rugged form occurs so that tungsten crucible occurs tungsten crucible not after being supported on tungsten pallet
Stable phenomenon, in the present embodiment, because thick zirconium oxide sand is sand-like thing, can also be carried out when being spilled into groove
Regulation, slightly will spill zirconium oxide sand, in the bottom surface of tungsten crucible less in the downwardly projecting position in the bottom surface of the boss of tungsten crucible
The bottom surface position protruding upward for spilling some or the groove in tungsten pallet upwards is spilt more recessed the position less, in tungsten pallet
The bottom surface of groove is spilt more the position recessed down, can alleviate a part by above-mentioned regulation because tungsten crucible or tungsten support
The unstable phenomenon of tungsten crucible caused by disk deformation.
Nano zircite 9 is coated with the top surface of tungsten pallet 3, is that one layer of nano oxygen is coated with the edge of groove 6
Change zirconium 9, this is a safeguard procedures, i.e., just in case the bottom of tungsten crucible deforms, the bottom surface of tungsten crucible is possible to meeting and tungsten
The top surface contact of pallet, the nano zircite at this moment smeared here just can be by between the top surface of the bottom surface of tungsten crucible and tungsten pallet
Isolated, it is to avoid it is bonded.
The tungsten crucible 4 uses the tungsten crucible 4 that a kind of the bottom of a pan thickeies, and the bottom of a pan thickness of tungsten crucible is after the thickening of the bottom of a pan
1.1 times, 1.4 times or 1.7 times of the bottom of a pan thickness of former tungsten crucible.Operationally, in tungsten crucible it some times happens that phenomenon of turning over flower, i.e.,
In the seeding stage, crystalloid solution can be in crucible interior circulation, so as to there is active force generation, this active force can cause tungsten crucible
Slight skew or vibrations so that solution circulation is unstable, produces turbulent flow（Bubbling）So that seeding is difficult or can not succeed
Seeding.The present embodiment is that this problem is solved by thickening the bottom of a pan, is proved by test of many times, and the bottom of a pan of tungsten crucible is added
Thickness arrives above range, can be very good to solve phenomenon of turning over flower.
Test data is as shown in the table：
| The bottom of a pan thickness of conventional tungsten crucible | The phenomenon of turning over flower of conventional tungsten crucible | The bottom of a pan thickness of tungsten crucible after thickening | The phenomenon of turning over flower of tungsten crucible after thickening | The bottom of a pan thickeies multiple |
| 22 | Have | 37.4 | Nothing | 1.7 |
| 40 | Have | 56 | Nothing | 1.4 |
| 45 | Have | 49.5 | Nothing | 1.1 |
As shown in Figures 2 and 3, invention additionally discloses a kind of tungsten crucible support meanss, including tungsten crucible 4, tungsten pallet 3 and branch
Strut 2, the bottom surface of the tungsten pallet 3 is arranged on one end of support bar 2, and the other end of support bar 2 is arranged on furnace bottom 10,
The bottom of the tungsten crucible 4 is provided with boss 5, fluted 6 are set on the top surface of tungsten pallet 3, in the groove 6 of tungsten pallet 3
In be provided with zirconium oxide sand 7；By by the boss 5 of tungsten crucible 4 be inserted into the groove 6 of tungsten pallet 3 and the tungsten crucible 4 it is convex
Platform 5 is mutually supported with zirconium oxide sand 7 to be contacted so that tungsten crucible 4 is supported on tungsten pallet 3, now, the outside of the boss 5 of tungsten crucible 4
Gap L 1 is left between the medial surface of the groove 6 of face and tungsten pallet 3, is also stayed between the bottom surface of tungsten crucible 4 and the top surface of tungsten pallet 3
There is gap L 2.Bottom recesses are provided with the bottom surface of tungsten pallet 3, one end of support bar 2 is fastened in the bottom recesses of tungsten pallet 3
One end of support bar 2 is connected with tungsten pallet 3.
The boss 5 is cylinder boss, and the groove 6 is cylindrical grooves.Herein, boss 5 can also be set to
Conical boss, groove 6 remains as cylindrical grooves（Not shown in figure）, compared with columned boss, boss is set to circle
Boss is bored, one is that can easily facilitate insertion, and two be that can save a part of material, three be when pot, the outside of boss are run in generation
When face is in contact with the medial surface of groove, because the lateral surface of conical boss is inclined-plane, when it is in contact with the medial surface of groove
Be the equal of the contact between face and point, significantly more efficient tungsten crucible can so be carried out spacing.
Locating piece 11 is provided with furnace bottom 10 and positioned at the center of heater 1, is set on the locating piece 11
Have in zirconia brick 12, the other end insertion zirconia brick 12 of the support bar 2 and be in contact with locating piece 11.Pass through positioning
Support bar 2 is arranged on the center of heater 1 by block 11, to be further ensured that the concentricity of tungsten crucible and heater.
The support bar 2 is solid cylinder, and support bar groove 13 is provided with one end of the support bar 2.Prior art
In support bar be hollow tubular body, under the long term of furnace high-temperature working environment, support bar is possible to occur curved
Song, after support bar bending to a certain extent, serious inclination can occur for tungsten pallet, cause tungsten crucible stably can not fall in tungsten
On pallet, so support bar can only be scrapped, in the present embodiment, hollow tubular body is changed to solid, leaves behind support bar
The space of end avoids heat loss, so sets the intensity for strengthening support bar, is avoided that support bar bends.
Support bar groove 13 is also provided with the other end of the support bar 2, it is to reduce heat so to set main purpose
Conduction, it is to avoid heat heavy losses after one end abrasion of a period of time support bar 2 is produced, can invert support bar 2 simultaneously
Come over, be connected and be continuing with tungsten pallet 3 using the other end of support bar 2, and without changing new support bar 2, improve
The service life of support bar 2, reduces production cost.
Embodiment 2：As shown in Fig. 4 and Fig. 5, compared with Example 1, difference is：The method for supporting is first to exist
Boss 5 is set on the top surface of tungsten pallet 3, groove 6 is set in the bottom of tungsten crucible 4, then oxygen is set on the boss 5 of tungsten pallet 3
Change zirconium piece 14, finally by by the boss 5 of tungsten pallet 3 be inserted into the groove 6 of tungsten crucible 4 and the tungsten pallet 3 boss 5 with
Zirconium oxide piece 14 mutually supports contact make it that tungsten crucible 4 is supported on tungsten pallet 3；Now, the lateral surface of the boss 5 of tungsten pallet 3 with
Gap L 3 is left between the medial surface of the groove 6 of tungsten crucible 4, between also being left between the bottom surface of tungsten crucible 4 and the top surface of tungsten pallet 3
Gap L4, support from top to bottom is smoothly followed successively by tungsten crucible 4, zirconium oxide piece 14 and tungsten pallet 3.L3 be set to 1mm, 2mm or
3mm, L4 are set to 1mm, 2.5mm or 4mm.After support is good, the distance between boss bottom surface to groove floor is 1mm to 4mm, its
Middle L3 is less than the distance between the lateral surface of tungsten crucible 4 and the medial surface of outer hot body 1.
A kind of tungsten crucible support meanss are also disclosed in the present embodiment, compared with the tungsten crucible support meanss in embodiment 1, different
Part is：A kind of tungsten crucible support meanss, including tungsten crucible 4, tungsten pallet 3 and support bar 2, the bottom surface of the tungsten pallet 3 is set
Put on one end of support bar 2, the other end of support bar 2 is arranged on furnace bottom 10, and boss is set on the top surface of tungsten pallet 3
5, groove 6 is set in the bottom of tungsten crucible 4, zirconium oxide piece 14 is set on the boss 5 of tungsten pallet 3；By by the convex of tungsten pallet 3
Platform 5 is inserted into the groove 6 of tungsten crucible 4 and the boss 5 of the tungsten pallet 3 is mutually supported with zirconium oxide piece 14 and contacted so that tungsten crucible
4 are supported on tungsten pallet 3；Now, left between the medial surface of the groove 6 of the lateral surface of the boss 5 of tungsten pallet 3 and tungsten crucible 4
Gap L 3, gap L 4 is also left between the bottom surface of tungsten crucible 4 and the top surface of tungsten pallet 3.
To sum up, by the way that the invention enables tungsten crucible center can be carried out again in level after calandria deformation
It is adjusted to ensure that the concentricity of tungsten crucible and heater；Tungsten crucible is not contacted directly with tungsten pallet in the present invention, so as to will not send out
The phenomenon that raw tungsten crucible is mutually bonded with tungsten pallet, when taking pot, directly sling taking-up by tungsten crucible, it is to avoid occurs because striking
Hit the phenomenon for causing tungsten crucible to damage；By, to the position limiting structure in tungsten crucible formation horizontal direction, making between boss and groove
Tungsten crucible will not be contacted when occurring and running pot phenomenon with heater, it is to avoid stove is short-circuited phenomenon while it also avoid crystalline substance
The body phenomenon Nian Jie with tungsten crucible；Nano zircite sand can be replaced with by thick zirconium oxide sand by structure design, removal is reduced
The husky difficulty of zirconium, improves production efficiency and avoids existing because causing tungsten crucible to damage using Vehicle Processing or grinding removal zirconium sand
The generation of elephant, reduces production cost；By the way that to the husky control spilt high-volume of thick zirconium oxide, a part can be alleviated because tungsten earthenware
The unstable phenomenon of tungsten crucible caused by crucible or the deformation of tungsten pallet；By thickening the bottom of a pan, it is avoided that in tungsten crucible that magic flower shows
The generation of elephant.
Above example is used for illustrative purposes only, rather than limitation of the present invention, about the technology people of technical field
Member without departing from the spirit and scope of the present invention, can also make a variety of changes or convert, therefore all equivalent
Technical scheme should also belong to protection scope of the present invention, and protection scope of the present invention should be limited by each claim.
Claims (9)
1. the method for supporting of tungsten crucible in a kind of sapphire crystallization furnace, it is characterised in that：The method for supporting is first in tungsten crucible
Bottom boss is set, groove is set on the top surface of tungsten pallet, then to be provided with zirconium oxide in the groove on tungsten pallet husky, most
Afterwards by the boss of tungsten crucible being inserted into the groove of tungsten pallet and the boss of the tungsten crucible connects with the husky mutually support of zirconium oxide
Touch and make it that tungsten crucible is supported on tungsten pallet；Now, the medial surface of the groove of the lateral surface of the boss of tungsten crucible and tungsten pallet it
Between leave gap, also leave gap between the bottom surface of tungsten crucible and the top surface of tungsten pallet, support from top to bottom order is followed successively by
Tungsten crucible, zirconium oxide sand and tungsten pallet；When zirconium oxide is set into the groove on tungsten pallet, what the zirconium oxide sand was used
It is that the thick zirconium oxide of 20 mesh to 200 purposes is husky, thick zirconium oxide sand is spilt in the groove being put on tungsten pallet.
2. method for supporting according to claim 1, it is characterised in that：When thick zirconium oxide sand is spilt be put into it is recessed on tungsten pallet
When in groove, the husky diverse location in a groove of thick zirconium oxide spill high-volume with the bottom surface form of the boss of tungsten crucible and tungsten pallet
The bottom surface form of groove matches.
3. method for supporting according to claim 1, it is characterised in that：Nano zircite is smeared on the top surface of tungsten pallet.
4. method for supporting according to claim 1, it is characterised in that：The tungsten crucible uses what a kind of the bottom of a pan thickeied
Tungsten crucible, the bottom of a pan thickness of tungsten crucible is 1.1 times to 1.7 times of the bottom of a pan thickness of former tungsten crucible after the bottom of a pan thickeies.
5. a kind of tungsten crucible support meanss, including tungsten crucible, tungsten pallet and support bar, the bottom surface of the tungsten pallet is arranged on support
On one end of bar, the other end of support bar is arranged on furnace bottom, it is characterised in that：It is provided with the bottom of the tungsten crucible convex
Platform, sets fluted on the top surface of tungsten pallet, zirconium oxide is provided with the groove of tungsten pallet husky；By by the convex of tungsten crucible
Platform is inserted into the groove of tungsten pallet and the boss of the tungsten crucible is contacted so that tungsten crucible is supported on the husky mutually support of zirconium oxide
On tungsten pallet, now, gap is left between the medial surface of the lateral surface of the boss of tungsten crucible and the groove of tungsten pallet, tungsten crucible
Gap is also left between the top surface of bottom surface and tungsten pallet；When zirconium oxide is set into the groove on tungsten pallet, the oxidation
Zirconium sand uses the thick zirconium oxide sand of 20 mesh to 200 purposes, and thick zirconium oxide sand is spilt in the groove being put on tungsten pallet.
6. tungsten crucible support meanss according to claim 5, it is characterised in that：The boss is conical boss, described recessed
Groove is cylindrical grooves.
7. tungsten crucible support meanss according to claim 5, it is characterised in that：Locating piece is provided with furnace bottom, in institute
State and zirconia brick is provided with locating piece, be in contact in the other end insertion zirconia brick of the support bar and with locating piece.
8. tungsten crucible support meanss according to claim 7, it is characterised in that：The support bar is solid cylinder, in institute
State and be provided with one end of support bar support bar groove.
9. tungsten crucible support meanss according to claim 8, it is characterised in that：In the other end of the support bar
It is provided with support bar groove.
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