CN104724661A - Three-dimensional multi-layer micronano double-material micro-beam composite structure and application thereof - Google Patents
Three-dimensional multi-layer micronano double-material micro-beam composite structure and application thereof Download PDFInfo
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- CN104724661A CN104724661A CN201510119463.4A CN201510119463A CN104724661A CN 104724661 A CN104724661 A CN 104724661A CN 201510119463 A CN201510119463 A CN 201510119463A CN 104724661 A CN104724661 A CN 104724661A
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Abstract
The invention relates to a three-dimensional multi-layer micronano double-material micro-beam composite structure and application thereof. A template of a three-dimensional micronano structure is arranged, decorating materials are arranged on the surface of the template in a deposition mode, and the three-dimensional multi-layer micronano double-material micro-beam composite structure of the micronano level is obtained. High-sensitivity sensing and detecting are achieved through the three-dimensional multi-layer micronano double-material micro-beam composite structure in the follwing specific steps that 1, the three-dimensional multi-layer micronano double-material micro-beam composite structure is utilized to detect an external signal; the decorating materials are motivated by the external signal to make response, and the light, electrical and magnetic performance of the structure is changed; 2, the change of the performance of the decorating materials is tested through an instrument, and sensitive sensing and detecting of the external signal are achieved; compared with the prior art, the three-dimensional multi-layer micronano double-material micro-beam composite structure has the advantages that the sensitivity is high, and the fed back signal is analyzed easily and can be widely applied to the fields of signal detection, imaging and the like.
Description
Technical field
The present invention relates to a kind of double-material micro beam structure, especially relate to a kind of 3-dimensional multi-layered micro-nano double-material micro beam composite construction and application thereof, belong to sensor measuring field.
Background technology
Double-material micro beam structure as micromechanics class sensing system because it is simple to operate, accuracy of detection advantages of higher has application at a lot of detection field.Example is applied as with infrared acquisition, under the irradiation of infrared light, the temperature of material changes, and the bi-material forming micro-beam can produce thermal stress because having different thermal coefficient of expansions, cause structure to occur bending and deformation, utilize the principle of optical lever namely can realize high quick infrared acquisition by the deflection of measuring incidence visible light light beam.But micro-beam distortion that this optical reading method based on optical lever principle is unsuitable for large array reads.In addition, current reported micro-beam material is mostly still based on single layer structure design, and 3-dimensional multi-layered micro girder construction truly does not also have report.And, because current double-material micro beam is by the restriction of single layer designs, for reaching high-sensitive infrared response, prepared micro girder construction is generally at tens micron number magnitude, thus the spatial resolution that result in infrared acquisition is not high, limit its further developing in actual applications.
Summary of the invention
Object of the present invention is exactly provide a kind of 3-dimensional multi-layered micro-nano double-material micro beam composite construction and application thereof to overcome defect that above-mentioned prior art exists.
The present invention utilizes the 3-dimensional multi-layered fine structure with optical characteristics of nature or artificial preparation to be template, is modified, obtain the bi-material layers multilayer micro girder construction on three dimensions by physical vapour deposition (PVD) to it.For the application of infrared acquisition, due to the fuel factor of infrared light, the material causing thermal coefficient of expansion different produces different distortion, thus cause structure in the flexural deformation of two dimensional surface, this two dimension distortion carries out superposing the change that will cause the overall optical effect of system on three dimensions, thus realizes the sensitive response to infrared signal.This is not only the performance improving Infrared Detectors and provides new structure, and the signal that directly invisible infrared signal can be converted to visible ray exports, thus greatly reduces electrical noise and the noise equivalent temperature difference of system yet.
Object of the present invention can be achieved through the following technical solutions:
A kind of 3-dimensional multi-layered micro-nano double-material micro beam composite construction, to have the template of three-dimensional micro-nano structure, template surface deposits decorative material, obtains the 3-dimensional multi-layered micro-nano double-material micro beam composite construction of micro-nano magnitude.
The template with three-dimensional micro-nano structure comprises ortho states biological template, modification ortho states biological template and the artificial three-dimensional structure template prepared.
Described ortho states biological template is utilize sandwich construction to interfere the biological template producing schemochrome, comprises butterfly's wing, beetle, shell or plumage;
Described modification ortho states biological template refers to the ortho states biological template in addition template that obtains after modifying of physics and/or chemical method, wherein, physical method comprises ion etching, physical sputtering, thermal evaporation or electron beam deposition, and chemical method comprises chemical etching, chemical vapour deposition (CVD) or atomic layer deposition;
The three-dimensional structure template of described artificial preparation is referred to the multi-layer film structure, the photonic crystal that are obtained by manual method and copies obtained template by biological template, and wherein, manual method comprises photoetching, spin coating, copies, self assembly or selective etch.
Described deposition process comprises physical sputtering, thermal evaporation, electron beam deposition, arc-plasma plating, ion film plating, molecular beam epitaxy, chemical vapour deposition (CVD) or atomic layer deposition.
Described decorative material comprises metal, pottery, semiconductor or polymer.
An application for 3-dimensional multi-layered micro-nano double-material micro beam composite construction, the 3-dimensional multi-layered micro-nano double-material micro beam composite construction described in utilization realizes highly sensitive sensing and detection, specifically comprises the following steps:
(1) 3-dimensional multi-layered micro-nano double-material micro beam composite construction is utilized to detect external signal: decorative material excites lower generation to respond at external signal, and optical, electrical, the magnetic property that cause structure to have change;
(2) tested by the change of instrument to decorative material performance, realize the sensing sensitive to external signal and detection.
Described external signal is light, heat, electricity, magnetic, chemical signal or bio signal.
Described chemical signal is change or the change in concentration of chemical compositions;
Described bio signal is composition transfer or the concentration change of biological substance.
Decorative material excites lower generation response to comprise Volume Changes, structure change, optical property change, electrical property change or magnetic property change at external signal.
Described optical property is changed to light signal strength change or optical wavelength displacement, and wherein optical signal refers to absorb optical signal, reflected light signal or projection optical signal, and optical signal scope comprises ultraviolet light, visible ray and infrared light;
Described electrical property is changed to the change of voltage, electric current, resistance or electric capacity;
Described magnetic property is changed to the change in magnetic field intensity or direction.
Be applied as example with infrared acquisition, 3-dimensional multi-layered micro-nano double-material micro beam composite construction utilizes its layer structure to be out of shape superposition on three dimensions and causes the change of optical phenomena, reaches the object of infrared acquisition.This 3-dimensional multi-layered micro-nano double-material micro beam composite construction excites lower generation variations in temperature in infrared signal, and the bi-material causing structure to form, to the different heat expansion effect of temperature, produces the partial loop variation of structure.When local buckling is carried out superposing the change that will cause overall optical effect on three dimension scale, thus realization exports the sensitive detection of infrared signal and visible ray.
Compared with prior art, the present invention has the following advantages and beneficial effect:
(1) compare traditional individual layer double-material micro beam structure, 3-dimensional multi-layered micro-nano double-material micro beam composite construction of the present invention achieves double-material micro beam structure at three-dimensional multiple-layer stacked, substantially increases detectivity.
(2) because structure is in three-dimensional extension, two-dimensional is reduced, for the spatial resolution improving system detection further provides possibility.
(3) the present invention can accomplish the adjustability of structure and composition, for the optimization of system sensing and detection performance provides condition.
(4) sightless external signal is converted to the direct optical read-out of visible light signal, feedback signal is easily analyzed, and greatly reduces electrical noise and the noise equivalent temperature difference of system.
(5) this structure can be used for Non-energy-consumption, portable, highly sensitive acquisition of signal field, and can by its application to imaging field.
Accompanying drawing explanation
Fig. 1 is that 3-dimensional multi-layered micro-nano double-material micro beam composite construction and individual layer double-material micro beam structure respond to schematic diagram to external signal;
In Fig. 2, (a) is the transmission electron microscope sectional view of original butterfly wing, and (b) is the transmission electron microscope sectional view of the gold-plated butterfly wing of layer structure end;
Fig. 3 is the infrared response figure that noctilucence dodges the butterfly wing after the gold-plated modification of butterfly and original butterfly wing in vain;
Fig. 4 is the infrared response figure of butterfly wing after the gold-plated modification of sharp wing blue flash butterfly and original butterfly wing.
Detailed description of the invention
Be applied as example with infrared acquisition, this 3-dimensional multi-layered micro-nano double-material micro beam composite construction excites lower generation variations in temperature in infrared signal, and the bi-material causing structure to form, to the different heat expansion effect of temperature, produces the partial loop variation of structure.When local buckling is carried out superposing the change that will cause overall optical effect on three dimension scale, thus realization exports the sensitive detection of infrared signal and visible ray, and as shown in Fig. 1 (b), detectivity is very high.And the detection performance of individual layer double-material micro beam structure is as shown in Fig. 1 (a), detectivity is poor.
Below in conjunction with the drawings and specific embodiments, utilizing CVD method to dodge the certain thickness gold of selective deposition on the 3-dimensional multi-layered micro nano structure of butterfly (noctilucence dodges butterfly and sharp wing blue flash butterfly in vain) at two kinds is that the present invention is described in detail for example.
Embodiment 1
Can see clearly from Fig. 2 (a), composition noctilucence dodges butterfly micro-structural in vain for " Christmas tree " shape, and the lamella length of structure increases from top to bottom gradually.Butterfly's wing is had one of schemochrome facing to vapour deposition direction, and make the plane at butterfly's wing place vertical with deposition direction.Select to differ with butterfly's wing thermal coefficient of expansion larger gold as deposition materials, utilize the method deposit thickness of thermal evaporation to be the gold of 50 nanometers.Modify result and show that every Rotating fields end has optionally been plated gold copper-base alloy, as Fig. 2 (b).Butterfly's wing after modification is at room temperature carried out the detection experiment of infrared signal, response results is as shown in Fig. 3 (a), and reverberation intensity under infrared signal effect that the noctilucence after gold modification dodges butterfly butterfly wing in vain declines.
Comparative example 1
Choose ungroomed noctilucence and dodge butterfly wing in vain as comparative example, equally at room temperature carry out infrared signal detection experiment, response results is as shown in Fig. 3 (b), and reverberation intensity under infrared signal effect that the noctilucence of unmodified dodges butterfly butterfly wing is in vain constant.
Embodiment 2
With embodiment 1, the wing choosing sharp wing blue flash butterfly carries out selective modification, plates 50nm gold copper-base alloy in its layer structure skirt selectivity.Butterfly's wing after modifying at room temperature is carried out infrared signal detection experiment, and response structure is as shown in Fig. 4 (a), and reverberation intensity under infrared signal effect of the sharp wing blue flash butterfly butterfly wing after gold modification declines.
Comparative example 2
Choose ungroomed sharp wing blue flash butterfly wing as comparative example, equally at room temperature carry out infrared signal detection experiment, response results is as shown in Fig. 4 (b), and reverberation intensity under infrared signal effect of the sharp wing blue flash butterfly butterfly wing of unmodified is constant.
Above-mentioned is can understand and use invention for ease of those skilled in the art to the description of embodiment.Person skilled in the art obviously easily can make various amendment to these embodiments, and General Principle described herein is applied in other embodiments and need not through performing creative labour.Therefore, the invention is not restricted to above-described embodiment, those skilled in the art, according to announcement of the present invention, do not depart from improvement that scope makes and amendment all should within protection scope of the present invention.
Claims (10)
1. a 3-dimensional multi-layered micro-nano double-material micro beam composite construction, is characterized in that, to have the template of three-dimensional micro-nano structure, template surface deposits decorative material, obtains the 3-dimensional multi-layered micro-nano double-material micro beam composite construction of micro-nano magnitude.
2. the 3-dimensional multi-layered micro-nano double-material micro beam composite construction of one according to claim 1, is characterized in that, the template with three-dimensional micro-nano structure comprises ortho states biological template, modification ortho states biological template and the artificial three-dimensional structure template prepared.
3. the 3-dimensional multi-layered micro-nano double-material micro beam composite construction of one according to claim 2, it is characterized in that, described ortho states biological template is utilize sandwich construction to interfere the biological template producing schemochrome, comprises butterfly's wing, beetle, shell or plumage;
Described modification ortho states biological template refers to the ortho states biological template in addition template that obtains after modifying of physics and/or chemical method, wherein, physical method comprises ion etching, physical sputtering, thermal evaporation or electron beam deposition, and chemical method comprises chemical etching, chemical vapour deposition (CVD) or atomic layer deposition;
The three-dimensional structure template of described artificial preparation is referred to the multi-layer film structure, the photonic crystal that are obtained by manual method and copies obtained template by biological template, and wherein, manual method comprises photoetching, spin coating, copies, self assembly or selective etch.
4. the 3-dimensional multi-layered micro-nano double-material micro beam composite construction of one according to claim 1, it is characterized in that, described deposition process comprises physical sputtering, thermal evaporation, electron beam deposition, arc-plasma plating, ion film plating, molecular beam epitaxy, chemical vapour deposition (CVD) or atomic layer deposition.
5. the 3-dimensional multi-layered micro-nano double-material micro beam composite construction of one according to claim 1, it is characterized in that, described decorative material comprises metal, pottery, semiconductor or polymer.
6. the application of a 3-dimensional multi-layered micro-nano double-material micro beam composite construction as claimed in claim 1, it is characterized in that, 3-dimensional multi-layered micro-nano double-material micro beam composite construction described in utilization realizes highly sensitive sensing and detection, specifically comprises the following steps:
(1) 3-dimensional multi-layered micro-nano double-material micro beam composite construction is utilized to detect external signal: decorative material excites lower generation to respond at external signal, and optical, electrical, the magnetic property that cause structure to have change;
(2) tested by the change of instrument to decorative material performance, realize the sensing sensitive to external signal and detection.
7. the application of a kind of 3-dimensional multi-layered micro-nano double-material micro beam composite construction according to claim 6, it is characterized in that, described external signal is light, heat, electricity, magnetic, chemical signal or bio signal.
8. the application of a kind of 3-dimensional multi-layered micro-nano double-material micro beam composite construction according to claim 7, it is characterized in that, described chemical signal is change or the change in concentration of chemical compositions;
Described bio signal is composition transfer or the concentration change of biological substance.
9. the application of a kind of 3-dimensional multi-layered micro-nano double-material micro beam composite construction according to claim 6, it is characterized in that, decorative material excites lower generation response to comprise Volume Changes, structure change, optical property change, electrical property change or magnetic property change at external signal.
10. the application of a kind of 3-dimensional multi-layered micro-nano double-material micro beam composite construction according to claim 9, it is characterized in that, described optical property is changed to light signal strength change or optical wavelength displacement, wherein optical signal refers to absorb optical signal, reflected light signal or projection optical signal, and optical signal scope comprises ultraviolet light, visible ray and infrared light;
Described electrical property is changed to the change of voltage, electric current, resistance or electric capacity;
Described magnetic property is changed to the change in magnetic field intensity or direction.
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| CN109916830A (en) * | 2019-03-22 | 2019-06-21 | 上海交通大学 | The method for realizing detection of gas using the dynamic process of gas adsorption desorption |
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Application publication date: 20150624 |