CN104678622A - Array substrate detection method and system - Google Patents
Array substrate detection method and system Download PDFInfo
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- CN104678622A CN104678622A CN201510137678.9A CN201510137678A CN104678622A CN 104678622 A CN104678622 A CN 104678622A CN 201510137678 A CN201510137678 A CN 201510137678A CN 104678622 A CN104678622 A CN 104678622A
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1306—Details
- G02F1/1309—Repairing; Testing
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- General Physics & Mathematics (AREA)
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- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Abstract
The invention discloses array substrate detection method and system, and is used for carrying out granule detection on an array substrate before the array substrate is subjected to pixel detection so as to avoid the damages to an adjuster caused by large granules on the array substrate. The system comprises a charge-couple device (CCD) image sensor, an adjuster, a light signal treatment device, a focusing device and an array substrate, wherein the light signal treatment device is arranged between a light source and the adjuster, and is used for conveying a light signal emitted from the light source to the adjuster, and reflecting the light signal reflected by the adjuster to a CCD; the adjuster is used for reflecting the light signal to the light signal treatment device when the granule detection is carried out in an appointed area included in the array substrate; the CCD is used for receiving the light signal reflected by the light signal treatment device, and conveying the received light signal to the focusing device; and the focusing device is used for determining whether the granule detection of the current detection area is qualified or not according to the focusing stroke of the received light signal.
Description
Technical field
The present invention relates to technical field of liquid crystal display, particularly relate to a kind of array base palte detection method and detection system.
Background technology
Existing array base palte detection method mainly contains following two kinds of modes: the first is electrical way, and the second is optical mode.Optical mode utilizes reflective type liquid crystal display device, by measuring the light intensity of reflected light, judges that whether TFT (Thin Film Transistor, the Thin Film Transistor (TFT)) device in array base palte is normal.
As shown in Figure 1, for carrying out the structural representation of the regulator (Modulator) that array (Array) substrate detects for optical mode, comprise: polarization beam apparatus 11, transparency electrode (ITO between polarization beam apparatus 11 and liquid crystal cell 13, Indium Tin Oxides) 12, liquid crystal cell 13 and colour lens 14, wherein, colour lens 14 is positioned at the lower surface of regulator.
Array base palte testing process is as follows: Modulator (regulator) and array base palte keep the distance of 50uM (being generally the colour lens distance arrays substrate 50uM of Modulator), first voltage is applied to pixels all on array base palte during detection, then the mobile Modulator in one side, checks the state of TFT.When passing through polarization beam apparatus from the light of light source transmitting, the P component in incident light directly passes through, and S component incides in liquid crystal cell after changing light path.If pixel is in normal condition, voltage so between transparency electrode and pixel is greater than span voltage, and liquid crystal molecule is by vertical orientation, and the S component incided on liquid crystal cell keeps original polarization state, through colour lens reflection, by turning back to light source after liquid crystal cell and polarization beam apparatus.If pixel occurs bad, voltage so between transparency electrode and pixel electrode is zero, to be changed by the polarization state of the S component of liquid crystal cell, incided in CCD (Charge Coupled Device, ccd image sensor) by polarization beam apparatus after colour lens reflection.
The glass chip that in TFT production run, glass breaking causes or large particle can cause scuffing to the Modulator carrying out array base palte detection; light then cause repeatability vacation bad; heavy then cause array base palte scratch or Modulator in liquid crystal leakage pollute array base palte; array base palte is caused to scrap; increase production cost, scratch reduction production cost most important so reduce Modulator.
Summary of the invention
The embodiment of the present invention provides a kind of array base palte detection method and detection system, before carrying out pixel detection in array substrate, carries out particle detection to this array base palte, causes damage to avoid the bulky grain on array base palte to regulator.
The embodiment of the present invention provides a kind of array substrate detection system, comprises Charge Coupled Device (CCD) CCD image sensor, regulator, light signal processing device, focusing mechanism and array base palte, wherein:
Described light signal processing device, is arranged between light source and regulator, for transmitting the light signal that described light source is launched to regulator; And the light signal of described regulator reflection is reflected to described CCD;
Described regulator, for when particle detection is carried out in the appointed area comprised described array base palte, to described light signal processing device reflected light signal;
Described CCD, for receiving the light signal of described light signal processing device reflection; And the light signal received is sent to described focusing mechanism;
Described focusing mechanism, for determining whether pass through the particle detection in current detection region according to the focusing stroke of the light signal received.
Described focusing mechanism, specifically for determining the focusing stroke of the light signal received; More described focusing stroke and the focusing stroke span preset; Determine whether the particle detection in current detection region is passed through according to comparative result.
Described focusing mechanism, specifically for when described focusing stroke is outside the focusing stroke span preset, determines not pass through the particle detection in current detection region; And when described focusing stroke is in the focusing stroke span preset, then described focusing mechanism is determined to pass through the particle detection in current detection region.
Described regulator, also for when pixel detection is carried out in the appointed area comprised described array base palte, skips the unsanctioned first area of particle detection.
Described regulator, also for when the second area passed through particle detection carries out pixel detection, to described light signal processing device reflected light signal;
Described light signal processing device, for reflecting the light signal of described regulator reflection to described CCD;
Described CCD, also for for described second area, according to whether the appointment component received in described light signal determines whether pass through the pixel detection of described second area.
The surface that described CCD receives the light signal of described regulator reflection is provided with the first polaroid, for after the light signal receiving the reflection of described light signal processing device, and all the other components in light signal described in filtering, except S component.
Described regulator, comprises polarization beam apparatus, the first transparency electrode, liquid crystal cell, the second polaroid and the second transparency electrode, wherein:
Described polarization beam apparatus, for reflection receivable to light signal in S component, through all the other components except S component;
Described first transparency electrode is between described polarization beam apparatus and liquid crystal cell, and described second transparency electrode is positioned at the lower surface of described regulator; Described first transparency electrode and the second transparency electrode are used for when carrying out particle detection to described array base palte, form electric field by applying voltage in described liquid crystal cell;
Described second polaroid between described liquid crystal cell and described second transparency electrode, for through the S component in the light signal received.
The embodiment of the present invention provides a kind of array base palte detection method based on above-mentioned array substrate detection system, comprising:
When particle detection is carried out in the appointed area comprised described array base palte, the light signal of CCD receiving optical signals treating apparatus reflection;
Described CCD sends the light signal received to focusing mechanism, makes described focusing mechanism determine whether pass through the particle detection in current detection region according to the focusing stroke of the light signal received.
Wherein, whether described focusing mechanism passes through the particle detection in current detection region specifically for determining in accordance with the following methods:
Described focusing mechanism determines the focusing stroke of described light signal according to the light signal received;
The more described focusing stroke of described focusing mechanism and the focusing stroke span preset;
Described focusing mechanism determines whether pass through the particle detection in current detection region according to comparative result.
Described focusing mechanism determines whether pass through the particle detection in current detection region, specifically comprise according to comparative result:
If described focusing stroke outside the focusing stroke span preset, is then determined not pass through the particle detection in current detection region;
If described focusing stroke in the focusing stroke span preset, is then determined to pass through the particle detection in current detection region.
The array substrate detection system that the embodiment of the present invention provides and detection method, by regulator, the light signal of reflected light is reflexed to CCD, and send the light signal received to focusing mechanism by CCD, according to the focusing stroke of the light signal received, focusing mechanism judges whether the particle detection of array substrate is passed through, in said process, particle detection is carried out by array substrate, avoid when array substrate carries out pixel detection, owing to causing damage to regulator when array base palte existing bulky grain.
Other features and advantages of the present invention will be set forth in the following description, and, partly become apparent from instructions, or understand by implementing the present invention.Object of the present invention and other advantages realize by structure specifically noted in write instructions, claims and accompanying drawing and obtain.
Accompanying drawing explanation
Accompanying drawing described herein is used to provide a further understanding of the present invention, forms a part of the present invention, and schematic description and description of the present invention, for explaining the present invention, does not form inappropriate limitation of the present invention.In the accompanying drawings:
Fig. 1 is in prior art, the structural representation of regulator;
Fig. 2 is in the embodiment of the present invention, the structural representation of array substrate detection system;
Fig. 3 is in the embodiment of the present invention, the structural representation of Modulator;
Fig. 4 is in the invention process, does not apply schematic diagram during voltage between two electrodes of Modulator;
Fig. 5 a is in the embodiment of the present invention, and array substrate carries out the first light signal transmission schematic diagram during particle detection;
Fig. 5 b is in the embodiment of the present invention, and array substrate carries out the second light letter transmission schematic diagram during particle detection;
Fig. 6 a is in the embodiment of the present invention, array base palte does not exist focusing stroke determination schematic diagram during bulky grain;
Fig. 6 b is in the embodiment of the present invention, array base palte exists focusing stroke determination schematic diagram during bulky grain;
Fig. 7 is in the embodiment of the present invention, and array substrate carries out structural representation during pixel detection;
Fig. 8 is in the embodiment of the present invention, the implementing procedure schematic diagram of array base palte detection method.
Embodiment
In order to avoid array substrate detect time, the bulky grain that array base palte exists causes damage to regulator, and the embodiment of the present invention provides a kind of array substrate detection system and detection method.
Before array substrate carries out pixel detection, need regulator (Modulator) to move to 50um place above array base palte, this process is called Gap.In order to avoid the bulky grain (as the glass chip in TFT production run or some other large particle) on array base palte causes damage to regulator, in the embodiment of the present invention, before Gap (when the distance namely between regulator and array base palte is greater than 50um), first array substrate carries out particle detection, after only having particle detection to pass through, just pixel detection is carried out to array substrate.
Below in conjunction with Figure of description, the preferred embodiments of the present invention are described, be to be understood that, preferred embodiment described herein is only for instruction and explanation of the present invention, be not intended to limit the present invention, and when not conflicting, the embodiment in the present invention and the feature in embodiment can combine mutually.
As shown in Figure 2, be the structural representation of the array substrate detection system that the embodiment of the present invention provides, comprise CCD21, regulator 22, focusing mechanism 23, array base palte 24 and light signal processing device 25, wherein:
Light signal processing device 25, is arranged between light source and regulator 22, for transmitting the light signal that light source is launched to regulator 22; And to the light signal that CCD21 Reflective regulation device 22 reflects;
Regulator 22, when particle detection is carried out in the appointed area for comprising in array substrate 24, to light signal processing device 25 reflected light signal;
CCD 21, for the light signal that receiving optical signals treating apparatus 25 reflects; And the light signal received is sent to focusing mechanism 23;
Focusing mechanism 23, for determining whether pass through the particle detection in current detection region according to the focusing stroke of the light signal received.
In order to accurately determine the focusing stroke of the reflected light of incident light, in the embodiment of the present invention, provide a kind of Modulator.
As shown in Figure 3, the structural representation of the Modulator provided for the embodiment of the present invention.Comprise polarization beam apparatus 31, first transparency electrode 32, liquid crystal cell 33, second polaroid 34 and the second transparency electrode 35, wherein:
Polarization beam apparatus 31, for reflection receivable to light signal in S component, through all the other components except S component;
First transparency electrode 32 is between polarization beam apparatus 31 and liquid crystal cell 33, and the second transparency electrode 35 is positioned at the lower surface (namely near the one side that array is basic) of regulator 22; First transparency electrode 32 and the second transparency electrode 35, for when array substrate carries out particle detection, form electric field by applying voltage in liquid crystal cell 33;
Second polaroid 34 between liquid crystal cell 33 and the second transparency electrode 35, for through the S component in the light signal received.
Preferably, when specifically implementing, polarization beam apparatus 32 is half-reflection and half-transmission type, and for the incident light that light source is launched, polarization beam apparatus 32 allows all the other components except the S component of light signal to pass through, and the S component in reflected light signal.
Compared with existing Modulator, the Modulator that the embodiment of the present invention provides increases the transparent ito film of one deck conduction at lower surface, and original colour lens is replaced with the polaroid (only through the polarized light of specifying component) of half-reflection and half-transmission.
During concrete enforcement, in the embodiment of the present invention, increase one deck polaroid on the surface of CCD receiving optical signals, this polaroid is used for all the other components in the light signal that receives of filtering, except S component, that is, the S component in light signal is only had can to send focalizer to by CCD.
As shown in Figure 4, in the invention process, between two transparency electrodes, do not apply schematic diagram during voltage.Due to no-voltage between two transparency electrodes, the S component incided on liquid crystal cell will be changed by liquid crystal layer rear polarizer state, after arriving liquid crystal cell, after liquid crystal molecule reflection, due to by the polaroid of regulator, and the polaroid continuation reflection arrival polarization beam apparatus of device cannot be conditioned.
During concrete enforcement, particle detection is carried out in the appointed area that can comprise according to following process array substrate: before Gap, apply voltage between two of Modulator transparency electrodes, make to form uniform electric field between two transparency electrodes, under electric field action, liquid crystal molecule is by vertical orientation, the S component incided on liquid crystal cell keeps original polarization state, polarized light arrives array base palte by liquid crystal layer, polarization beam apparatus is arrived after reflection, light signal processing device is arrived after polarization beam apparatus reflection, again after light signal processing device reflection, arrive CCD, other components of polaroid filtering on CCD surface, retain S component and enter CCD, and send focalizer to by CCD.When carrying out particle detection for array substrate, the transmittance process of light signal is as follows: the light signal launched from light source (for convenience of description, incident light is referred to as) in the embodiment of the present invention, incident light arrives the polarization beam apparatus 31 of regulator 22 after light signal processing device 25, due to the S component in polarization beam apparatus 31 reflected light signal, allow all the other components except S component through, namely after incident light arrives polarization beam apparatus 31, reflection only comprises the first light signal of S component, first light signal continues to propagate in regulator 22, through the first transparency electrode, liquid crystal cell, second polaroid (only transmitting the S component in the first light signal), second transparency electrode, arrive array base palte 24, the first light signal that array base palte reflection receivable arrives, for convenience of description, the first light signal after reflection is called the second light signal, second light signal is successively through the second transparency electrode.Second polaroid (only transmitting the S component in the second light signal), liquid crystal cell, the first transparency electrode arrive polarization beam apparatus, polarization beam apparatus reflects the S component in the second light signal, suppose to be referred to as the 3rd light signal, after 3rd light signal arrives light signal processing device, reflect through light signal processing device, arrive CCD, by the first polaroid filtering all the other components except S component being arranged at CCD surface, CCD is entered through S component, CCD sends the S component received to focalizer, is determined the focusing stroke of the light signal received by focalizer.As shown in Figure 5 a, for array base palte not existing optical signal transmission schematic diagram during bulky grain (being greater than the particle of 50um).
As shown in Figure 5 b, be optical signal transmission schematic diagram when array base palte exists bulky grain (being greater than the particle of 50um).Optical signal transmission schematic diagram when itself and array base palte not existing bulky grain (being greater than the particle of 50um) is similar, and difference is, when there is bulky grain, light signal is reflected when arriving bulky grain.Because the transmission range of light signal is different, therefore, in the embodiment of the present invention, whether focusing mechanism can pass through according to the particle detection of the focusing stroke determination array substrate of light signal.
Preferably, focusing mechanism 13 may be used for after the light signal receiving CCD transmission, first determine the focusing stroke of light signal, compare the focusing stroke determined and the focusing stroke span preset, according to comparative result, whether the particle detection in current detection region is passed through.
Concrete, focusing mechanism 13 can comprise autofocus sensor and corresponding camera, focal length due to camera is fixing, in order to make imaging clearly, Modulator and array base palte must be made to maintain a certain distance, when array base palte there being bulky grain, distance between Modulator and bulky grain does not meet the condition of blur-free imaging, therefore, need Modulator to raise corresponding height, namely need to increase focusing stroke.As shown in Figure 6 a, for array base palte not existing focusing stroke determination schematic diagram during bulky grain, as shown in Figure 6 b, it is focusing stroke determination schematic diagram when array base palte existing bulky grain.
Based on above-mentioned principle, in the embodiment of the present invention, suppose that the distance between Modulator and array base palte is H, when if then focused, the span of stroke L is H≤L<H+l, determine to focus successfully, otherwise, determine to focus unsuccessfully wherein, l<50um.Preferably, when specifically implementing, l can determine for allowing the maximum gauge of the particle that array base palte exists.Such as, if the maximum gauge allowing the particle that array base palte exists is 30um, then l can be set to 30um.If fruit is focused successfully, namely stroke is focused within the focusing stroke span preset, illustrate that the particle detection that the current detection region of array substrate is carried out is passed through, if focus unsuccessfully, namely focus stroke outside the focusing stroke span preset, illustrate that the particle detection that the current detection region of array substrate is carried out is not passed through.
During concrete enforcement, before array substrate carries out pixel detection, by the region not by particle detection being pre-set the region not carrying out detecting, like this, Modulator is when array substrate carries out pixel detection, the unsanctioned region of particle detection can be skipped, only the region that particle detection is passed through is detected, prevent from causing damage to Modulator.
During concrete enforcement, after the particle detection completing array substrate, the optical detection mode array substrate that prior art can be adopted to provide carries out pixel detection, and the array substrate detection system array substrate that also can provide based on the embodiment of the present invention carries out pixel detection.
As shown in Figure 7, the array substrate detection system array substrate provided for utilizing the embodiment of the present invention carries out the schematic diagram of pixel detection, first Modulator is moved to distance arrays surface 50um place, voltage is applied to pixels all on array base palte, then the mobile Modulator in one side, checks TFT state.Concrete, when passing through polarization beam apparatus from the light of light source transmitting, all the other components except S component in incident light directly pass through.S component incides in liquid crystal cell after changing light path, if pixel be in normal condition (as be numbered in Fig. 71 light signal travel path shown in), voltage so between the first transparency electrode and pixel is greater than threshold voltage, liquid crystal molecule is by vertical orientation, the S component incided on liquid crystal cell keeps original polarization state, reach after array base palte through the second polaroid and transparency electrode and reflect, again successively by the second transparency electrode, second polarized light piece, liquid crystal cell, polarization beam apparatus, light signal processing device enters CCD, and (communication process of light signal is identical with above-mentioned Fig. 5 a, here repeat no more).If pixel occur bad (as be numbered 2 in Fig. 7 optical signaling paths shown in), voltage so between transparency electrode and pixel electrode is zero, to be changed by the polarization state of the S component of liquid crystal cell, light signal after changing cannot through the second polaroid, but by the second polarized light piece reflectance-transmittance polarization beam apparatus, as shown in Figure 7, cannot enter in CCD.Whether therefore, can pass through according to the pixel detection of the S component determination array substrate current region whether received in light signal, if can receive, then pixels illustrated is good, otherwise pixels illustrated is bad.
It should be noted that, when array substrate carries out pixel detection, without the need to carrying out above-mentioned focus process.
Based on same inventive concept, array base palte detection method is additionally provided in the embodiment of the present invention, the principle of dealing with problems due to said method is similar to array substrate detection system, and therefore the enforcement of said method see the enforcement of system, can repeat part and repeat no more.
As shown in Figure 8, be the implementing procedure schematic diagram of the array base palte detection method that the embodiment of the present invention provides, comprise:
S81, when particle detection is carried out in the appointed area that array substrate comprises, CCD receiving optical signals treating apparatus reflection light signal;
S82, CCD send the light signal received to focusing mechanism, make focusing mechanism determine whether pass through the particle detection in current detection region according to the focusing stroke of the light signal received.
During concrete enforcement, focusing mechanism can determine whether pass through the particle detection in current detection region according to following steps:
Step one, focusing mechanism determine the focusing stroke of described light signal according to the light signal received;
The more described focusing stroke of step 2, focusing mechanism and the focusing stroke span preset;
Step 3, focusing mechanism determine whether pass through the particle detection in current detection region according to comparative result.
Wherein, in step 3, if focusing stroke is outside the focusing stroke span preset, then determine not pass through the particle detection in current detection region; If focusing stroke in the focusing stroke span preset, is then determined to pass through the particle detection in current detection region.
Although describe the preferred embodiments of the present invention, those skilled in the art once obtain the basic creative concept of cicada, then can make other change and amendment to these embodiments.So claims are intended to be interpreted as comprising preferred embodiment and falling into all changes and the amendment of the scope of the invention.
Obviously, those skilled in the art can carry out various change and modification to the present invention and not depart from the spirit and scope of the present invention.Like this, if these amendments of the present invention and modification belong within the scope of the claims in the present invention and equivalent technologies thereof, then the present invention is also intended to comprise these change and modification.
Claims (10)
1. an array substrate detection system, is characterized in that, comprises Charge Coupled Device (CCD) CCD image sensor, regulator, light signal processing device, focusing mechanism and array base palte, wherein:
Described light signal processing device, is arranged between light source and regulator, for transmitting the light signal that described light source is launched to regulator; And the light signal of described regulator reflection is reflected to described CCD;
Described regulator, for when particle detection is carried out in the appointed area comprised described array base palte, to described light signal processing device reflected light signal;
Described CCD, for receiving the light signal of described light signal processing device reflection; And the light signal received is sent to described focusing mechanism;
Described focusing mechanism, for determining whether pass through the particle detection in current detection region according to the focusing stroke of the light signal received.
2. the system as claimed in claim 1, is characterized in that,
Described focusing mechanism, specifically for determining the focusing stroke of the light signal received; More described focusing stroke and the focusing stroke span preset; Determine whether the particle detection in current detection region is passed through according to comparative result.
3. system as claimed in claim 2, is characterized in that,
Described focusing mechanism, during specifically for determining that described focusing stroke is outside the focusing stroke span preset, determines not pass through the particle detection in current detection region; And when described focusing stroke is within the focusing stroke span preset, then determine to pass through the particle detection in current detection region.
4. the system as claimed in claim 1, is characterized in that,
Described regulator, also for when carrying out pixel detection to described array base palte, skips the unsanctioned first area of particle detection.
5. the system as claimed in claim 1, is characterized in that,
Described regulator, also for when the second area passed through particle detection carries out pixel detection, to described light signal processing device reflected light signal;
Described light signal processing device, for reflecting the light signal of described regulator reflection to described CCD;
Described CCD, also for for described second area, according to whether the appointment component received in described light signal determines whether pass through the pixel detection of described second area.
6., as power requires the system as described in 1, it is characterized in that,
The surface that described CCD receives the light signal of described regulator reflection is provided with the first polaroid, for after the light signal receiving the reflection of described light signal processing device, and all the other components in light signal described in filtering, except S component.
7. the system as described in claim as arbitrary in claim 1 ~ 6, is characterized in that, described regulator, comprises polarization beam apparatus, the first transparency electrode, liquid crystal cell, the second polaroid and the second transparency electrode, wherein:
Described polarization beam apparatus, for reflection receivable to light signal in S component, through all the other components except S component;
Described first transparency electrode is between described polarization beam apparatus and liquid crystal cell, and described second transparency electrode is positioned at the lower surface of described regulator; Described first transparency electrode and the second transparency electrode are used for when carrying out particle detection to described array base palte, form electric field by applying voltage in described liquid crystal cell;
Described second polaroid between described liquid crystal cell and described second transparency electrode, for through the S component in the light signal received.
8., based on an array base palte detection method for the arbitrary array substrate detection system of claim 1 ~ 7, it is characterized in that, comprising:
When particle detection is carried out in the appointed area comprised described array base palte, the light signal of CCD receiving optical signals treating apparatus reflection;
Described CCD sends the light signal received to focusing mechanism, makes described focusing mechanism determine whether pass through the particle detection in current detection region according to the focusing stroke of the light signal received.
9. method as claimed in claim 8, it is characterized in that, whether described focusing mechanism passes through the particle detection in current detection region specifically for determining in accordance with the following methods:
Described focusing mechanism determines the focusing stroke of described light signal according to the light signal received;
The more described focusing stroke of described focusing mechanism and the focusing stroke span preset;
Described focusing mechanism determines whether pass through the particle detection in current detection region according to comparative result.
10. method as claimed in claim 9, it is characterized in that, described focusing mechanism determines whether pass through the particle detection in current detection region, specifically comprise according to comparative result:
If described focusing stroke outside the focusing stroke span preset, is then determined not pass through the particle detection in current detection region;
If described focusing stroke in the focusing stroke span preset, is then determined to pass through the particle detection in current detection region.
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