CN104634256B - Fiber laser single-wave self-mixing interference displacement measuring system - Google Patents
Fiber laser single-wave self-mixing interference displacement measuring system Download PDFInfo
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Abstract
The invention discloses a fiber laser single-wave self-mixing interference displacement measuring system, and belongs to the technical field of optical measuring. The system comprises a pumping source, a laser device, five optical fiber gratings, three optical fiber isolators, two detectors, an Er-doped fiber, piezoelectric ceramic, a 3dB coupler, a circulator, a collimating mirror, a wavelength division multiplexer, a variable optical attenuator, a signal processing circuit, a feedback control circuit, an A/D (analog to digital) conversion card, a computer and result output. A pair of optical fiber gratings with the same reflection wavelength is used as a laser resonator mirror to generate single-wavelength laser; the single-wavelength laser is projected to a measured object surface, reflected or scattered back to a laser cavity through a measured object to generate self-mixing interference with light in the cavity, so that displacement measuring with nano-scale resolution is realized. The system can measure a low-reflectivity object due to an amplifying effect of a gain medium in the laser cavity; output wavelength of the laser device is stabilized through feedback control, so that the measuring precision is greatly improved; the fiber laser device is not only a sensor, but also an interferometer, is simple in structure and easy to carry.
Description
Technical field
A kind of the present invention relates to field of optical measurements, more particularly to optical-fiber laser unicast self-mixed interference displacement measurement system
System.
Background technology
The existing document being close with this technology has following two：
[1]D.P.Hand,T.A.Carolan,J.S.Barton,and J.D.C.Jones.“Profile
measurement of optically rough surfaces by fiber-optic interferometry”,
Opt.Lett., Vol.18, No.16,1993, and P.1361-1363. (Optics Letters (optics letter), volume 18, the 16th
Phase, P.1361-1363)
The know-why of document [1] is as shown in Figure 1.
The light that semiconductor laser sends reaches measurement head, measurement after faraday isolator and optical fiber three-dB coupler
Head is a Feisuo interferometer, and, by fiber end face reflection as reference light, another part light is through GRIN Lens for a part of light
After focusing, project on measured surface, come back in system and interfered with reference light by measured surface reflection, interfere letter
Number detected by detector, the phase decision of interference signal is in the longitudinal direction height of measured surface measured point；Change the drive of the laser instrument
Streaming current is measured to same point with the light of four kinds of different frequencies with changing the glow frequency of laser instrument, obtains four interference
Signal, as incident light wave frequency is different, the position of four interference signals is mutually just different, adjusts driving current, makes two neighboring dry
The phase contrast pi/2 of signal is related to, by following formula, you can demodulate optical path difference D of the point, that is, complete the measurement of single-point：
In(n=1,2,3,4) be n-th interference signal intensity, c is the light velocity, and ν is incident light frequency.
Motor drives measurement head transversal scanning measured surface again, that is, complete the measurement to measured surface.
[2]Dejiao Lin,Xiangqian Jiang,Fang Xie,Wei Zhang,Lin Zhang and Ian
Bennion.“High stability multiplexed fibre interferometer and its application
On absolute displacement measurement and on-line surface metrology ", Optics
Express, Vol.12, Issue 23,2004, P.5729-5734. (Optics Express (optics is express), 2004, the
Volume 12, the 23rd phase, P.5729-5734)
The technical schematic diagram of document [2] is as shown in Figure 2.
The Michelson's interferometer that this system almost overlaps comprising two light paths.One Michelson's interferometer is using survey
Fiber grating and reference mirror on amount arm is constituted as reflecting mirror, for completing steady operation；Another Michelson's interferometer
It is to be constituted by the use of measurement mirror and reference mirror as reflecting mirror, for completing to measure work.Because the reference arm of two interferometers is altogether
With a reflecting mirror, the reference arm light path of two interferometers is completely superposed, and as the measurement arm of two interferometers almost overlaps,
So, an interferometer is stabilized, and another interferometer is also just stabilized.
Wavelength is sent for λ by semiconductor laser0Light be divided into two-way after two three-dB couplers, all the way by light
Fine optical grating reflection, another road are referenced reflecting mirror reflection.Two-way reflected light after three-dB coupler is met again and is done
Relate to, interference signal is reflected by another fiber grating after circulator, again passes by circulator, then detected by detector,
The signal that this detector is detected processes the reference arm of the dynamic piezoelectric ceramic tube regulation fibre optic interferometer of rear-guard through servo circuit
Length, makes to stablize two interfere arms of interferometer all the time in quadrature (phase contrast is pi/2), so as to realize stablizing the interference
The purpose of instrument.
The wavelength X that tunable laser sendsmVariable light is divided into two-way after two optical fiber three-dB couplers, and one
Road is turned again in interferometer by measurement mirror reflection after optical fiber self-focus lenses again, and another road is through optical fiber self-focus lenses
Turned again in interferometer by reference mirror reflection again afterwards, two-way light meets after three-dB coupler, form interference signal, this does
Signal is related to after circulator and fiber grating, is detected by detector, then measure the displacement of measurement mirror through phase analysis.
Above-mentioned two prior art exist problem and shortage be：
1st, it is difficult to measure the object of antiradar reflectivity.
2nd, measurement result is affected by light source spectral drift, and certainty of measurement is difficult to improve.
The content of the invention
The present invention constitutes laserresonator by the use of a pair of reflection wavelengths identical fiber grating (FBG) as laser mirror,
Used as pumping source, Er-doped fiber meets the Single wavelength laser of condition of resonance through tested produce as gain media to 980nm light sources
Raw reflection, feeds back to laser intracavity and intracavity light self-mixed interference, processes unicast interference signal, realizes the displacement to testee
Measurement.Laser cavity has amplification to feedback light, so the system can be measured to the object of antiradar reflectivity.Using feedback control
The optical maser wavelength of stable fiber laser instrument processed, and make temperature-compensating to fiber grating, system rejection to disturbance is improved, is adapted to online
Measurement.Optical fiber laser is both sensor and interferometer, and all -fiber light path is without the need for adjusting, simple and compact for structure, it is easy to carry.
The present invention is achieved by the following technical solutions.
A kind of optical-fiber laser unicast self-mixed interference displacement measuring system, by 980nm pumping source S1,1310nm quasiconductors swash
Light device L1, three fibre optic isolaters I1, I2, I3, Er-doped fiber F1, five fiber grating FBG11、FBG12、FBG21、FBG22、
FBG23, three-dB coupler N1, piezoelectric ceramics PZT, variable optical attenuator VOA, collimating mirror G1, circulator H1, two detector PD1,
PD2, wavelength division multiplexer WDM, signal processing circuit B1, feedback control circuit B2, A/D transition card B3, computer B4 and output knot
Fruit B5 is constituted；The light that 980nm light source S1 and 1310nm semiconductor laser L1 send is multiple through fibre optic isolater I1 and I2, wavelength-division
With being coupled to up to fiber grating FBG after device WDM and three-dB coupler N121.Fiber grating FBG21And FBG22Bragg wavelength be
1310nm laser wavelengths, therefore 980nm pump lights pass through fiber grating FBG21Reach close to FBG11。FBG11、FBG12Cloth
Glug wavelength is identical and in 1550nm wave bands, therefore forms two laser mirrors, FBG11And FBG12Between be Er-doped fiber F1,
1550nm wave band fluorescence is produced by the light stimulus of 980nm light source S1, laser cavity condition of resonance is met and in FBG11And FBG12Instead
Wave resonance in spectrum is penetrated, and gain puts variable attenuator VOA regulation loss to adjust in laser cavity more than laser being produced during loss
Er-doped fiber gain spectral shape, realizes stable single longitudinal mode output, exports laser light FBG12With close to FBG22, via
1310nm isolators I3 and collimating mirror G1, directive measured object, and penetrated by measured object anti-(dissipating) feed back to laser cavity and intracavity light oneself
Mixed interference, interference signal is via FBG11、FBG21, reach three-dB coupler N1.Signal is reached via wavelength division multiplexer WDM all the way
Isolator I1 and I2, as the effect of I1 and I2 will not produce shadow to 980nm pumping source S1 and 1310nm semiconductor lasers L1
Ring；Another road signal reaches FBG through circulator H123, because FBG23Bragg wavelength be 1310nm laser wavelengths, light
Through FBG23Detected by detector PD1.Feedback light displacement signal containing measured object, so the signal that PD1 is obtained is through signal processing
After program in circuit B1, A/D transition card B3 and computer B4 is for data processing, displacement measurement is obtained, it is defeated by result
Go out B5 outputs.
FBG21And FBG22Two reflecting mirror of F-P interferometers is constituted, Optical Fiber Winding is in piezoelectric ceramics PZT in F-P interferometric cavities
On, the optical coupling sent from 1310nm semiconductor laser L1 is entered after system, acts on FBG21And FBG22For the F-P of reflecting mirror
In interferometer, interference signal is extremely similar to the signal of two-beam interference, after three-dB coupler (N1), all the way via wavelength-division
Multiplexer WDM reaches isolator I1 and I2, as the effect of I1 and I2 will not be swashed to 980nm pumping source S1 and 1310nm quasiconductor
Light device L1 produces impact；Another road signal reaches FBG through circulator H123, because FBG23Reflectance up to 100%, flashlight quilt
FBG23Detected by detector PD2 after reflection, after feedback control circuit B2 process, its output signal is added in pressure to the signal for obtaining
On electroceramics PZT, drive piezoelectric ceramics PZT to adjust fiber lengths in F-P interferometric cavities, make F-P interferometers stable in orthogonal points
(phase contrast), that is, stabilize F-P interferometric cavities long.Reason FBG11And FBG12The laser cavity of composition is in this F-P interferometric cavity
It is interior, and laser mirror FBG11And FBG12Close to F-P interferometer mirrors FBG21And FBG22, so laser cavity length is stablized, together
When make substrate with minus thermal-expansion coefficient in the present system, fiber grating FBG is bonded on substrate makes FBG's as temperature-compensating
Bragg wavelength is stable, so that the wavelength stabilized laser of laser cavity output.
Further, preferably, using a pair of reflection wavelength identical fiber grating FBG11And FBG12As laser
Hysteroscope, Er-doped fiber F1 produce 1550nm Single wavelength laser, project on testee, Jing testees as gain media
Reflection is scattered back laser cavity, with laser intracavity light self-mixed interference, obtains interference signal and realizes displacement measurement.
Further, as a kind of preferred version, the signal detected using PD2 after feedback control circuit B2 process,
Output signal drives piezoelectric ceramics PZT, adjusts fiber grating FBG21And FBG22Fiber lengths in the F-P interferometric cavities of composition, surely
Determine F-P interferometric cavities long, indirect stabilization laser chamber is long, while make substrate with minus thermal-expansion coefficient, by light linear light
Grid are bonded on substrate makes fiber grating bragg wavelength stable as temperature-compensating, makes laser cavity produce wavelength stabilized laser.
Beneficial effects of the present invention mainly have four：
1. the present invention produces Single wavelength laser projections by the use of a pair of reflection wavelength identical fiber gratings as laser mirror
To on measured surface, Jing measured objects are reflected back laser intracavity, and feedback light produces self-mixed interference with intracavity light, so as to realize differentiating
Displacement measurement of the rate for nanometer scale.
2. the present invention is put using the light that the gain media in the laser cavity of optical fiber laser feeds back to intracavity to measured object
It is big to act on, realize the measurement to antiradar reflectivity object.
3. the present invention is long using the chamber of the method stable fiber laser instrument of feedback control compensation light path, with this stable laser
The wavelength of output light-wave or frequency, are greatly improved the certainty of measurement of measurement result.
4. in the present invention, optical fiber laser itself integrates sensor and interferometer, and all -fiber light path is tied without the need for adjusting
Structure is simply compact to be easy to carry about with one.
Description of the drawings
Fig. 1 is the schematic diagram of prior art literature [1]；
Fig. 2 is the schematic diagram of prior art literature [2]；
Fig. 3 is principle of the invention figure.
Specific embodiment
Below in conjunction with the accompanying drawings 3 and specific embodiment the invention will be further described.
As shown in figure 3, a kind of optical-fiber laser unicast self-mixed interference displacement measuring system, by 980nm pumping source S1,
1310nm semiconductor laser L1, three fibre optic isolaters I1, I2, I3, Er-doped fiber F1, five fiber grating FBG11、
FBG12、FBG21、FBG22、FBG23, three-dB coupler N1, piezoelectric ceramics PZT, variable optical attenuator VOA, collimating mirror G1, circulator
H1, two detectors PD1 and PD2, wavelength division multiplexer WDM, signal processing circuit B1, feedback control circuit B2, A/D transition cards
B3, computer B4 and output result B5 composition.This measuring system utilizes a pair of reflection wavelength identical fiber grating FBG11With
FBG12Used as laser mirror, Er-doped fiber feeds back to intracavity and intracavity as gain media, the laser unicast Jing measured object for sending
Light self-mixed interference, the interference signal of generation is demodulated to obtain measured object displacement measurement.Fiber grating FBG in system11、
FBG12Bragg wavelength is identical and in 1550nm wave bands, fiber grating FBG21、FBG22And FBG23Bragg wavelength it is identical, and
For 1310nm semiconductor laser wavelengths.FBG11And FBG12Between be Er-doped fiber, FBG11Reflectance is 95%, FBG12Reflection
Rate is 5%, FBG21And FBG22Reflectance be 4%, FBG23Reflectance be 100%.
The light that 980nm light source S1 and 1310nm semiconductor laser L1 send is multiple through fibre optic isolater I1 and I2, wavelength-division
With being coupled to up to fiber grating FBG after device WDM and three-dB coupler N121.Fiber grating FBG21And FBG22Bragg wavelength be
1310nm laser wavelengths, therefore 980nm pump lights pass through fiber grating FBG21Reach close to FBG11。FBG11、FBG12Cloth
Glug wavelength is identical and in 1550nm wave bands, therefore forms two laser mirrors, FBG11And FBG12Between be Er-doped fiber F1,
1550nm wave band fluorescence is produced by the light stimulus of 980nm light source S1, laser cavity condition of resonance is met and in FBG11、FBG12Instead
Wave resonance in spectrum is penetrated, and gain puts variable attenuator VOA regulation loss to adjust in laser cavity more than laser being produced during loss
Er-doped fiber gain spectral shape, realizes stable single longitudinal mode output, exports laser light FBG12With close to FBG22, via
1310nm isolators I3 and collimating mirror G1, directive measured object, and penetrated by measured object anti-(dissipating) feed back to laser cavity and intracavity light oneself
Mixed interference, interference signal is via FBG11、FBG21, reach three-dB coupler N1.Signal is reached via wavelength division multiplexer WDM all the way
Isolator I1 and I2, as the effect of I1 and I2 will not produce shadow to 980nm pumping source S1 and 1310nm semiconductor lasers L1
Ring；Another road signal reaches FBG through circulator H122, because FBG22Bragg wavelength be 1310nm laser wavelengths, light
Through FBG23Detected by detector PD1.Feedback light displacement signal containing measured object, so the signal that PD1 is obtained is through signal processing
After program in circuit B1, A/D transition card B3 and computer B4 is for data processing, displacement measurement is obtained, it is defeated by result
Go out B5 outputs.
FBG21And FBG22Into two reflecting mirror of F-P interferometers, in F-P interferometric cavities Optical Fiber Winding on piezoelectric ceramics PZT,
The optical coupling sent from 1310nm semiconductor laser L1 is entered after system, acts on FBG21And FBG22F-P for reflecting mirror interferes
In instrument, interference signal is extremely similar to the signal of two-beam interference, after three-dB coupler, all the way via wavelength division multiplexer WDM
Isolator I1 and I2 is reached, as the effect of I1 and I2 will not be produced to 980nm pumping source S1 and 1310nm semiconductor lasers L1
It is raw to affect；Another road signal reaches FBG through circulator H122, because FBG23, up to 100%, flashlight is by FBG for reflectance23Reflection
Detected by detector PD2 afterwards, after feedback control circuit B2 process, its output signal is added in piezoelectric ceramics to the signal for obtaining
On PZT, drive piezoelectric ceramics PZT to adjust fiber lengths in F-P interferometric cavities, make F-P interferometers stable in orthogonal points (phase contrast), that is, stabilize F-P interferometric cavities long.Reason FBG11And FBG12The laser cavity of composition is in this F-P interferometric cavity, and laser
Hysteroscope FBG11And FBG12Close to F-P interferometer mirrors FBG21And FBG22, so laser cavity length is stablized, while at this being
Make substrate with minus thermal-expansion coefficient in system, fiber grating FBG is bonded on substrate makes the Bradley lattice wave of FBG as temperature-compensating
It is long stable, so that the wavelength stabilized laser of laser cavity output.
Displacement h causes phase change A φ：
Have
Because of phase ambiguity, there is Δ φ<π is constrained,
So
Phase measurement resolution up to 0.01 °, λ in 1550nm wave bands, so, Δ h resolution is better than 0.1nm.
Realization in order to demonstrate the invention, describes above-mentioned instantiation, but other changes of the present invention and repaiies
Change, it will be apparent to those skilled in the art that, appointing in the range of essence of the present invention without disclosure and basic principle
What modification/change imitates conversion to belong to the claims of the present invention.
Claims (4)
1. a kind of optical-fiber laser unicast self-mixed interference displacement measuring system, it is characterised in that be by 980nm pumping sources (S1),
1310nm semiconductor lasers (L1), three fibre optic isolaters I1, I2, I3, Er-doped fiber (F1), five fiber grating FBG11、
FBG12、FBG21、FBG22、FBG23, three-dB coupler (N1), piezoelectric ceramics (PZT), variable optical attenuator (VOA), collimating mirror
(G1), circulator (H1), two detectors PD1, PD2, wavelength division multiplexer (WDM), signal processing circuit (B1), feedback control electricity
Road (B2), A/D transition cards (B3), computer (B4) and output result (B5) composition；980nm pumping sources (S1) and 1310nm partly lead
The light that body laser (L1) sends is coupled after fibre optic isolater I1, I2, wavelength division multiplexer (WDM) and three-dB coupler (N1)
Reach fiber grating FBG21；Fiber grating FBG21With fiber grating FBG22Bragg wavelength be 1310nm laser wavelengths, because
This 980nm pump light passes through fiber grating FBG21Reach close to fiber grating FBG11；Two fiber grating FBG11、FBG12's
Bragg wavelength is identical and in 1550nm wave bands, therefore forms two laser mirrors, two fiber grating FBG11、FBG12Between
Be Er-doped fiber (F1), 1550nm wave band fluorescence is produced by the light stimulus of 980nm pumping sources (S1), meet laser cavity resonance bar
Part and in fiber grating FBG11、FBG12Wave resonance in reflectance spectrum, gain produce laser more than when being lost, through fiber grating
FBG12With close to fiber grating FBG22, via 1310nm isolators I3 and collimating mirror (G1), directive measured object, and by tested
Thing is anti-/ and scattering feeds back to laser cavity and intracavity light self-mixed interference, and interference signal is via fiber grating FBG11、FBG21, reach
Three-dB coupler (N1)；Signal reaches isolator I1, I2 via wavelength division multiplexer (WDM) all the way, due to the work of isolator I1, I2
With impact will not be produced on 980nm pumping sources (S1) and 1310nm semiconductor lasers (L1)；Another road signal is through circulator
(H1) reach fiber grating FBG22, because fiber grating FBG23Bragg wavelength is 1310nm laser wavelengths, and light passes through light
Fine grating FBG23Detected by detector PD1；Feedback light displacement signal containing measured object, so the signal that detector PD1 is obtained is passed through
After program in signal processing circuit (B1), A/D transition cards (B3) and computer (B4) is for data processing, displacement measurement is obtained
As a result, exported by output result (B5)；Fiber grating FBG21、FBG22Two reflecting mirror of F-P interferometers is constituted, in F-P interferometric cavities
Optical Fiber Winding on piezoelectric ceramics (PZT), enter after system, acts on by the optical coupling sent from 1310nm semiconductor lasers (L1)
Fiber grating FBG21、FBG22For, in the F-P interferometers of reflecting mirror, interference signal is extremely similar to the signal of two-beam interference, Jing
After crossing three-dB coupler (N1), isolator I1, I2 is reached via wavelength division multiplexer (WDM) all the way, due to the work of isolator I1, I2
With impact will not be produced on 980nm pumping sources (S1) and 1310nm semiconductor lasers (L1)；Another road signal is through circulator
(H1) reach fiber grating FBG23, because fiber grating FBG23, up to 100%, flashlight is by fiber grating FBG for reflectance23Reflection
Detected by detector PD2 afterwards, after feedback control circuit (B2) process, its output signal drives piezoelectric ceramics to the signal for obtaining
(PZT) fiber lengths in F-P interferometric cavities are adjusted, makes F-P interferometers stable in orthogonal points (phase contrast), that is, stabilize F-P
Interferometric cavity is long, so laser cavity length is also stablized, while make substrate with minus thermal-expansion coefficient in the present system, and by light
Fine grating FBG is bonded on substrate makes its bragg wavelength stable as temperature-compensating, so that the optical maser wavelength of laser cavity output is steady
It is fixed.
2. a kind of optical-fiber laser unicast self-mixed interference displacement measuring system according to claim 1, it is characterised in that：Profit
With a pair of reflection wavelength identical fiber grating FBG11、FBG12Single wavelength laser is produced as laser mirror, measured object is projected
On body, Jing measured objects reflect or are scattered back in laser cavity, with intracavity light self-mixed interference, realize the position that resolution is nanometer scale
Shift measurement.
3. a kind of optical-fiber laser unicast self-mixed interference displacement measuring system according to claim 1, it is characterised in that：Profit
After feedback control circuit (B2) process, output signal drives piezoelectric ceramics to the signal detected with detector (PD2)
(PZT) fiber lengths in F-P interferometric cavities, are adjusted, stable F-P interferometric cavities are long, that is, stabilize the ripple of laser instrument output light-wave
Long or frequency, is greatly improved the certainty of measurement of measurement result.
4. a kind of optical-fiber laser unicast self-mixed interference displacement measuring system according to claim 1, it is characterised in that：Light
Fibre laser itself integrates sensor and interferometer, and all -fiber light path is without the need for adjusting.
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| CN105300290B (en) * | 2015-09-28 | 2017-11-14 | 北京交通大学 | A kind of low coherence interference absolute distance measurement system differentiated based on wave number |
| GB201603305D0 (en) * | 2016-02-25 | 2016-04-13 | Isis Innovation | Method of designing an interferometer |
| CN105823757B (en) * | 2016-03-10 | 2019-04-19 | 哈尔滨工程大学 | A kind of high-precision liquid refractive index measuring instrument and its measurement method using the realization of optical fiber white light interference principle |
| CN109932050B (en) * | 2016-04-20 | 2021-06-08 | 安徽大学 | Different-side coupling type microcavity chip type laser self-mixing vibration, displacement and speed sensing system |
| EP3401634A1 (en) * | 2017-05-12 | 2018-11-14 | Taylor Hobson Limited | Distance measuring assembly for determining the distance to an object |
| CN109900212A (en) * | 2019-04-02 | 2019-06-18 | 北方民族大学 | The consistent formula displacement sensor of Novel light path |
| CN111504176B (en) * | 2020-04-30 | 2021-03-30 | 浙江大学 | Large optical path closed-loop measurement system based on two-stage actuator structure |
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