CN100439859C - Optical fiber interference type on-line micro-displacement measuring system using fibre grating - Google Patents

Optical fiber interference type on-line micro-displacement measuring system using fibre grating Download PDF

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CN100439859C
CN100439859C CNB2007100637700A CN200710063770A CN100439859C CN 100439859 C CN100439859 C CN 100439859C CN B2007100637700 A CNB2007100637700 A CN B2007100637700A CN 200710063770 A CN200710063770 A CN 200710063770A CN 100439859 C CN100439859 C CN 100439859C
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interferometer
measurement
fiber grating
optical fiber
michelson interferometer
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谢芳
芦毅
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Beijing Jiaotong University
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Abstract

The invention discloses a micro-displacement measuring system, especially the micro-displacement measuring system applied for the online measurement. It uses the fiber grating nature and WDM technology to compose Michelson interferometer, and the interferometer contains two fibers Michelson interferometers with separate mirrors but almost overlap optical road. One interferometer is used for measurement, while another interferometer through feedback control to compensate the measurement impact for the environmental interference, thereby allowing the system to apply to on-line measurement. The invention only using the light emitted by a semiconductor laser with 1.5nm spectrum wide and 1550nm center wavelength to function the two interferometers at the same time, it not only lowers the system cost, but also conveniently implements the automatic measurement, and the feedback control circuit has no effect to the measurement with piezoelectric ceramic discharge, making the measurement continuously processing.

Description

Utilize the online micro-displacement measuring system of optical fiber interference type of fiber grating
Technical field
The present invention relates to a kind of micro-displacement measuring system, particularly relate to a kind of micro-displacement measuring system that is applicable to on-line measurement, belong to field of optical measuring technologies.
Background technology
The existing report document that is close with the technology of the present invention has following two: [1] Dejiao Lin, XiangQian jiang, Fang Xie, Wei Zhang, Lin Zhang, and Ian Bennion, " High stabilitymultiplexed fiber interferometer and its application on absolute displacementmeasurement and on-line surface metrology ", Optics Express, Vol.12, Issue 23,2004, P.5729-5734. (Optics Express, 2004, the 12nd volume, the 23rd phase, P.5729-5734) [2] Xiangqian Jiang, Dejiao Lin, Liam Blunt, Wei Zhang and Lin Zhang, " Investigation of some critical aspects of on-line surface measurement by awavelength-division-multiplexing technique ", Measurement Science and Technology, Vol.17, No.3,2006, P.483-487. (Measurement Science and Technology, 2006, the 17th rolled up, the 3rd phase, P.483-487)
The know-why of these two documents is identical, and its schematic diagram is shown in 1.
This system comprises the Michelson interferometer that two light paths almost overlap.A Michelson interferometer is to utilize fiber grating and reference mirror on the gage beam to constitute as catoptron, is used to finish steady operation; Another Michelson interferometer is to utilize measurement mirror and reference mirror to constitute as catoptron, is used to finish surveying work.Because the shared catoptron of the reference arm of two interferometers, the reference arm light path of two interferometers overlaps fully, because the gage beam of two interferometers almost overlaps, so an interferometer has been stablized, another interferometer is also stable again.
Sending wavelength by semiconductor laser is λ 0Light be divided into two-way after through two three-dB couplers, the one tunnel is reflected by fiber grating, another road is reflected by reference mirror.The two-way reflected light is through meeting once more behind the three-dB coupler and interfering, interference signal is through behind the gyroscope, reflected by another fiber grating, pass through gyroscope once more, being detected device then surveys, the signal that this detector detects is handled the length that rear drive piezoelectric ceramic tube (PZT) is regulated the reference arm of fibre optic interferometer through servo circuit, makes two interference arms stablizing interferometer be in quadrature (phase differential is a pi/2) all the time, thereby realizes stablizing the purpose of this interferometer.
The wavelength X that tunable laser is sent mVariable light is divided into two-way after through two three-dB couplers, one the tunnel through getting back in the interferometer once more by measuring mirror reflection again behind the self-focus lens, another road is through getting back in the interferometer once more by the reference mirror reflection again behind the self-focus lens, two-way light meets through behind the three-dB coupler, form interference signal, behind this interference signal process gyroscope and the fiber grating, be detected device and survey, promptly measure the displacement of measuring mirror through phase analysis again.
The problem and shortage of this technology is:
1, the light that sends with two different laser instruments of wavelength in the system acts on respectively in two Michelson interferometers, and these two light sources are respectively semiconductor laser and tunable laser.The price of tunable laser is very expensive, and this makes that the cost of system is very high.And, need the wavelength of manual adjustments tunable laser to realize measurement in the measuring process to the surface, its principle as shown in Figure 2, this practical operation is got up very time-consuming, can not realize automatic measurement.
2, it is different with the optical source wavelength that is used for stellar interferometer to be used for stablizing the light source of interferometer in the system; And what the reference arm of stellar interferometer and stable interferometer was used is same catoptron, so the light path of the reference arm of two interferometers overlaps fully.Finish tracking work continuously in order to make piezoelectric ceramic energy, when driving voltage value of reaching capacity on piezoelectric ceramics when (being supply voltage value to the maximum), need discharge to piezoelectric ceramics, when feedback control system is discharged to piezoelectric ceramics, measurement data after measurement data before the discharge and the discharge is discontinuous, must finish between twice discharge so measure.And under laboratory condition, the discharge frequency of piezoelectric ceramics is about 0.2Hz, and this will limit the application in practice of this technology.
Summary of the invention
The problem and shortage that the present invention exists at prior art and proposing.The spectrum width that only adopts a cheapness is that the semiconductor laser of 1.5nm is as light source, the light that this light source sends passes through wavelength-division multiplex technique, utilize fiber grating and chirped fiber grating, act on simultaneously and stablize in the Michelson interferometer and measure in the Michelson interferometer; Write the identical fiber grating of two parameters respectively as two catoptrons stablizing Michelson interferometer at two that measure Michelson interferometer ends of interfering arms, like this, measuring Michelson interferometer and stable Michelson interferometer has separately independently catoptron, and the gage beam of two interferometers and the light path of reference arm almost overlap but be incomplete same.Total system is with low cost, and measuring process does not need people's intervention, can realize measuring automatically; Feedback system no longer exerts an influence to measuring process to the discharge of piezoelectric ceramics, can guarantee the continual and steady of interferometer, and measurement is carried out continuously.
The present invention is achieved by the following technical solutions.
Utilize the semiconductor laser of a spectrum width 1.5nm, and utilize the characteristic of fiber grating and chirped fiber grating and wavelength-division multiplex technique to constitute independent but two the optical fiber Michelson interferometers that light path almost overlaps of two catoptrons.Two identical fiber gratings of parameter lay respectively at two ends of interfering arm of the optical fiber Michelson interferometer that is used to measure, and have constituted two optical fiber Michelson interferometers that are combined with each other that light path almost overlaps.Driving piezoelectric ceramic tube by feedback control system regulates the fiber optic interferometric arm lengths and makes two of the Michelson interferometer that constitutes as catoptron with fiber grating to interfere arms to be in quadrature (phase differential of two arms is a pi/2), like this, it is the influence that the interferometer of catoptron brings that fiber grating is given in the drift that has compensated vibration and environment temperature, can make this interferometer also can keep stable in the environment at the scene.Because this interferometer almost overlaps with the light path of the optical fiber Michelson interferometer that is used to measure,, thereby make this system can be used for on-line measurement so the optical fiber Michelson interferometer that is used to measure is also stable.
Native system makes the phase differential of two arms be increased to 2 π linearly by zero by with another piezoelectric ceramics the light path of the reference arm of measuring optical fiber Michelson interferometer being carried out linear modulation, and the initial phase difference of two arms is zero.When the light path of gage beam causes that owing to the variation of tested displacement Δ d changes, the initial phase difference of two arms will become
Figure C20071006377000071
So the variable quantity of initial phase difference is directly proportional with the variable quantity of tested displacement.
Realize measurement by the variable quantity of measuring initial phase difference to displacement.
Beneficial effect of the present invention mainly contains two:
1, in the measuring system of the present invention only with the semiconductor laser of the cheapness of a spectrum width 1.5nm centre wavelength 1550nm, the light that this laser instrument sends passes through wavelength-division multiplex technique, act on simultaneously stablize in the interferometer and stellar interferometer in, this not only makes the cost of measuring system reduce more than 50%, and system realizes automatic measurement easily.
2, the present invention utilizes the identical fiber grating of a pair of parameter as the catoptron of stablizing interferometer, and stablizing Michelson interferometer and measuring Michelson interferometer has separately independently catoptron; Because the operation wavelength of two interferometers all comes from same laser instrument, the operation wavelength of two interferometers much at one, so, the piezoelectric ceramics discharge can not influence measuring process, measurement data after measurement data before the discharge and the discharge is continuous, this feasible measurement can be carried out continuously, makes measuring system have practical value.
Description of drawings
Fig. 1 is the complete schematic of prior art;
Fig. 2 is the realization surface measurement schematic diagram of prior art;
Fig. 3 is principle of the invention figure;
Fig. 4 is that the discharge of piezoelectric ceramics among the present invention does not influence the continuous key diagram of measurement.
Embodiment
Below in conjunction with the drawings and specific embodiments the present invention is further described.
As shown in Figure 3, spectrum width is that the light that sends of 1550nm semiconductor laser LD is divided into two-way after through single-mode fiber 3dB-coupling mechanism 1, gyroscope 1 and 3dB-coupling mechanism 2 for 1.5nm centre wavelength, arrive fiber grating FBG1 and FBG2 respectively, the parameter of FBG1 and FBG2 is identical, the bragg wavelength of their reflections is also identical, they are 0.1nm with the reflected back spectrum width, the light of centre wavelength 1549nm.The light of all the other spectrum will behind self-focus lens (GRIN) collimation, become parallel beam by FBG1 and FBG2, arrive respectively and measure catoptron and reference mirror, by measuring the reflection of catoptron and reference mirror, reenter in the interferometer again, meet and living the interference at coupling mechanism 2.Interference signal is detected device PD3 through gyroscope 3 with FBG3 (FBG3 is identical with the reflection wavelength of FBG1 and FBG2) and surveys.When testee is subjected to displacement, the phase place of interference signal will change.If testee is at longitudinal direction (perpendicular to measured surface) displacement d, so, the phase changing capacity of corresponding interference signal is:
Figure C20071006377000081
λ is an incident light wave length in the formula.By equation (1) as long as demodulate the phase changing capacity of interference signal as can be known
Figure C20071006377000082
Through data processing, can measure testee at longitudinal direction displacement d.For this reason, system adds periodic sawtooth voltage to the piezoelectric ceramics PZT2 in the reference path, periodically the light path of linear regulation reference path.Regulate the amplitude and the reference path light path of sawtooth voltage, make periodic sawtooth voltage and interference signal with the cycle same-phase.When testee when longitudinal direction has displacement, the phase place of sawtooth voltage and the phase place of this interference signal are just different, measure the phase differential between the two, pass through data processing after, promptly obtain the shift value of testee at longitudinal direction.Shown in Figure 3, the self-focus lens of gage beam in the stellar interferometer is changed into GRIN Lens (GRIN), can measure the surface, its transversal displacement is realized with stepper motor.
According to the fiber grating characteristic, when a broadband spectral incided a fiber grating, the wavelength that fiber grating will satisfy bragg condition reflected, and other wavelength sees through.The wavelength that satisfies bragg condition is:
λ Bragg=2n effΛ(2)
N in the formula EffBe the optical fiber effective refractive index, Λ is the grating cycle of fiber grating.
(parameter FBG3) is identical for FBG1, FBG2, the identical wavelength of they reflections for three fiber gratings using in the measuring system.Fiber grating in the system will reflect the 1549nm wavelength.FBG1 and FBG2 are write on as far as possible near the position of optical fiber self-focus lens (GRIN), make by FBG1 and FBG2 be the optical fiber Michelson interferometer that constitutes of catoptron with the measurement loop in the light path of Michelson interferometer as often as possible overlap.
The light that is reflected by FBG1 and FBG2 meets and interferes at coupling mechanism 2, and one road interference signal of coupling mechanism 2 is detected device PD1 and surveys through gyroscope 1 and gyroscope 2 and chirped fiber grating CFBG4; Another road interference signal process gyroscope 3 from coupling mechanism 2 comes out is reflected by FBG3, passes through gyroscope 3 once more, is detected device PD2 and surveys.The signal that detector PD1 and PD2 detect is handled through feedback control system, act on the piezoelectric ceramic tube PZT1 as feedback signal, an arm of fibre optic interferometer is wrapped on the PZT1, regulate the length of optical fiber according to the big or small PZT1 of feedback signal, with this light path of regulating this light path, make two arms of fiber grating Michelson interferometer be in quadrature (phase place of interference signal is always pi/2) all the time.This just to having realized real-Time Compensation because temperature drift and ambient vibration equal to disturb the additional optical distance that brings to the fiber grating Michelson interferometer, makes the fiber grating Michelson interferometer that strong antijamming capability be arranged.The major part of the light path of the measurement Michelson interferometer in the light path of this fiber grating Michelson interferometer and the measurement loop almost overlaps, as long as the fiber grating Michelson interferometer has been stablized, the Michelson interferometer of measuring in the loop is also stable.The operating frequency range of this feedback control system is 0~5kHz, that is to say that this feedback control system can revise and compensate the undesired signal of 0~5kHz, make the Michelson interferometer of measuring in the loop accurately carry out surveying work, be suitable for on-line measurement.
(its reflection wavelength is 1.549.2~1552nm.) because the effect of chirped fiber grating CFBG4, make that measuring interference signal can not arrive detector PD1, and stablize interference signal because the reflection of FBG3 does not arrive PD3, so just the signal of the signal of stellar interferometer and stable interferometer has been separated.
The discharge that further specifies piezoelectric ceramics among the present invention below is to measuring not influence, and two of stellar interferometer brachiums are respectively as shown in Figure 4:
L 1=l 11+l 12
L 2=l 21+l 22
Interfere the optical path difference of arm to be for two of stellar interferometer:
Δ m=L 2-L 1=(l 21-l 11)+(l 22-l 12)(3)
Corresponding phase differential is:
Figure C20071006377000102
Figure C20071006377000103
From equation (4) as can be known, the effective value of phase differential is decided by second of equation (4), and with first it doesn't matter, so piezoelectric ceramics discharge can not bring influence to measurement result.
Above-mentioned instantiation has been described in realization in order to demonstrate the invention.But other variations of the present invention and modification it will be apparent to those skilled in the art that, do not have the essence and any modification/variation in the cardinal rule scope of disclosure or imitate conversion all to belong to claim protection domain of the present invention in the present invention.

Claims (2)

1, a kind of interference type on-line micro-displacement measuring system that utilizes fiber grating, it is characterized in that: it comprises measures loop and feedback control loop, and it is made up of a semiconductor laser LD, 3dB-coupling mechanism, optical fiber gyroscope, fiber grating (FBG), chirped fiber grating, detector, self-focus lens or GRIN Lens (GRIN), measurement catoptron and reference mirror, piezoelectric ceramics (PZT), feedback control circuit, oscillograph, A/D transition card, signal generator, computing machine; Utilize the semiconductor laser of a spectrum width for 1.5nm, individual mirrors, light path almost overlap but incomplete same optical fiber Michelson interferometer to utilize two of fiber grating characteristic and wavelength-division multiplex technique formations to have separately; Two identical fiber gratings of parameter lay respectively at two ends of interfering arms of an optical fiber Michelson interferometer that is used to measure, and are that catoptron has constituted another again and is used for stable optical fiber Michelson interferometer with these two fiber gratings; The light path of these two interferometers almost overlaps but is incomplete same; Regulate the length of the reference arm of interferometer by feedback control circuit drive pressure electroceramics, make with the fiber grating is that two of the optical fiber Michelson interferometer of catoptron interfere arms to be in quadrature, promptly the phase differential of two arms is a pi/2, like this, to give fiber grating be the influence that the Michelson interferometer of catoptron brings with regard to having compensated ambient vibration and temperature drift, reached the purpose of stablizing this interferometer; Because the light path of two interferometers almost overlaps,, thereby make this system can be used for on-line measurement again so another optical fiber Michelson interferometer that is used to measure is also stable; By piezoelectric ceramics the reference arm of measuring Michelson interferometer is modulated, the phase differential of two arms that makes this interferometer is by 2 π that are increased to of zero line, and the initial phase difference of two arms is zero; When the light path of gage beam caused the variation of Δ d owing to the variation of tested displacement, the initial phase difference of two arms was changed to
Figure C2007100637700002C1
λ is the emission wavelength of laser instrument, and the variable quantity of initial phase difference is directly proportional with the variable quantity of tested displacement, realizes measurement to displacement by the variable quantity of measuring initial phase difference.
2, a kind of interference type on-line micro-displacement measuring system that utilizes fiber grating according to claim 1, it is characterized in that: utilize wavelength-division multiplex technique and utilize the long characteristic of fiber grating reflection cloth loudspeaker lattice wave to constitute two optical fiber Michelson interferometers that are combined with each other, an interferometer is finished steady operation, another interferometer is finished surveying work, thereby makes system be applicable to on-line measurement.
CNB2007100637700A 2007-02-09 2007-02-09 Optical fiber interference type on-line micro-displacement measuring system using fibre grating Expired - Fee Related CN100439859C (en)

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