CN104617216A - Laser heating film fixing-based electret film preparation method - Google Patents
Laser heating film fixing-based electret film preparation method Download PDFInfo
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Abstract
The invention discloses a laser heating film fixing-based electret film preparation method. The method comprises the following steps: fixing a conductive substrate layer to spin coating, spraying or scrape coating equipment, and preparing proper electret nanoparticle suspension; uniformly covering the electret suspension by adjusting spin coating speed, spraying speed or a scrape coating thickness parameter, then evaporating solvent of the electret suspension and thereby forming an electret material layer of a certain thickness on the conductive substrate layer; irradiating laser to the surface of the electret material layer by using laser heating equipment, thereby melting electret nanoparticles by using the heat produced by laser irradiation and interconnecting to prepare the electret film product. Through the method, the electret film product with superior filming performance and low probability of cracking separation can be machined on the flexible conductive substrate, and no damage is caused to the conductive substrate layer; meanwhile the method has the characteristics of convenience in operation and control, low cost, suitability for large-scale production and the like.
Description
Technical field
The invention belongs to power generating component and manufacture association area, more specifically, relate to a kind of electret film preparation method based on the solid film of LASER HEATING, obtained electret product filming performance is good, not easy to crack to come off, and can not cause damage to flexible conducting substrate.
Background technology
Electret refers to can the dielectric substance of standby storage space electric charge and dipole electric charge, and it can be used to manufacture electrostatic capacitance generator, gathers around be widely used in energy collection field.Classical modern electret is generally the form of thin polymer film, as polytetrafluoroethylene (PTFE), FEP fluorinated ethylene propylene copolymer (FEP) and polyvinylidene fluoride (PVDF) etc.
In order to for the preparation of electrostatic capacitance generator, electret film must at single Surface Machining one deck electrode; For this type of electret element device, normally processed at the enterprising column electrode of shaping electret film by the coating technique such as magnetron sputtering or vacuum thermal evaporation in prior art.But, further research finds, this kind of existing process technology be not only difficult to manipulation, with high costs, and the high ambient temperature produced in the course of processing may cause damage to base material especially conductive layer toward contact, and directly have influence on the performance of electret film on electrostatic capacitance generator and use.
Summary of the invention
For above defect or the Improvement requirement of prior art, the invention provides a kind of electret film preparation method based on the solid film of LASER HEATING, wherein by associating spin coating, spraying or the solid membrane technology of blade coating film forming and LASER HEATING perform the preparation process of electret film, and its key process parameter is studied and designed, filming performance should be able to be processed mutually outstanding on flexible conducting substrate, the electret film product of disengaging not easy to crack, and damage can not be caused to conductive base sheet material layers, possess simultaneously and be convenient to manipulation, with low cost and be suitable for the features such as large-scale production in enormous quantities.
For achieving the above object, according to the present invention, provide a kind of electret film preparation method based on the solid film of LASER HEATING, this electret film is used for electrostatic capacitance generator, and comprise the conductive base sheet material layers be laminated by flexible substrates and conductive layer, and the electret layer of processing on this conductive layer surface, it is characterized in that, the method comprises the following steps:
A conductive base sheet material layers is fixed on spin coating, spraying or blade coating equipment by (), and electret nano particle and water are configured to suspension according to the volume ratio of 30 ~ 70:100, wherein the material of electret nano particle is selected from one in following material or combination: polytetrafluoroethylene, polyvinylidene fluoride, polytrifluorochloroethylene, ethylene tetrafluoroethylene copolymer and vinylidene trifluoro-ethylene copolymer;
B () makes electret uniform suspension cover on whole conductive layer surface by adjustment spin speed, spraying rate or blade coating thickness, then at the temperature of 40 DEG C ~ 60 DEG C, evaporation process is performed to the solvent of electret suspension, formed on conductive layer surface thus and possess certain thickness electret layer, and this electret layer is formed by electret nanoparticle agglomerates;
C () adopt laser heating device to be irradiated to by laser electret layer that step (b) formed on the surface, wherein optical maser wavelength is set to 380 nanometer ~ 4.2 micron, laser power density is set to 2 watts/square centimeter ~ 120 watts/square centimeter, and sweep speed is 2 mm/second ~ 600 mm/second; In this way, utilize laser to irradiate the heat produced and make electret nano particle melt and be interconnected, form monoblock film forming thus, the electret film that comes off not easy to crack and can not producing conductive base sheet material layers damage.
As further preferably, the material of described flexible substrates is selected from one in following material or combination: paper, polyethylene, polypropylene, poly-ethylene-propylene copolymers, polyimides, polyethylene terephthalate, PEN; Described conductive layer is made up of the one in gold, silver, copper, aluminium, carbon, conducting metal oxide or conducting polymer compound or combination.
As further preferably, in step (b), described spin speed is set between 500 revs/min to 10000 revs/min, and the thickness of described electret layer is between 10 microns to 200 microns.
As further preferably, in step (b), when adopting spraying operation, described spraying rate is preferably in 10-100 gram/minute, and the thickness of described electret layer is between 10 microns to 200 microns.
As further preferably, in step (b), when adopting blade coating operation, adjustment blade coating thickness makes the thickness of electret layer be between 10 microns to 200 microns.
As further preferably, in step (c), described optical maser wavelength is set to 600 nanometer ~ 1800 nanometers, and laser power density is set to 20 watts/square centimeter ~ 50 watts/square centimeter, and sweep speed is 30 mm/second ~ 200 mm/second.
As further preferably, described electrostatic capacitance generator is preferably flexible electrostatic electric capacity generator.
In general, the above technical scheme conceived by the present invention compared with prior art, mainly possesses following technological merit:
1, the preparation process of electret film is performed by associating spin coating, spraying or blade coating film forming and the solid membrane technology of LASER HEATING, compared with prior art can avoid manipulation magnetron sputtering loaded down with trivial details, with high costs or vacuum thermal evaporation technology, and the solid film of LASER HEATING accurately can control temperature and the position of heating, and electret nano particle group can be melted well be bonded together, and damage can not be produced to compliant conductive substrate layer;
2, by the key process parameter in above-mentioned technological process as the research of the type of suspension and charge ratio, evaporating temperature and laser processing performance parameter and design, test shows to form the excellent electret film of monoblock filming performance, wherein electret layer is not easy to crack comes off, and can be applicable to the purposes of electrostatic capacitance generator well;
3, possess according to preparation method of the present invention advantages such as being convenient to manipulation, low cost and low energy consumption, and compared with prior art can significantly improve the overall performance of electret film, quality of forming film is obtained effectively control, be convenient to scale manufacturing in enormous quantities, be thus particularly useful for the application that mechanical energy is converted to the equipment of electric energy by electrostatic capacitance generator and so on.
Accompanying drawing explanation
Fig. 1 is the process chart according to the electret film preparation method based on the solid film of LASER HEATING of the present invention;
Fig. 2 is spin-coated as example to illustrate the process environments figure according to electret film preparation method of the present invention;
Fig. 3 is the process chart adopting the solid membrane technology of LASER HEATING for exemplary display.
In all of the figs, identical Reference numeral is used for representing identical element or structure, wherein:
1-flexible conducting substrate 2-electret film 3-laser heating device 4-to be further processed machines electret film
Embodiment
In order to make object of the present invention, technical scheme and advantage clearly understand, below in conjunction with drawings and Examples, the present invention is further elaborated.Should be appreciated that specific embodiment described herein only in order to explain the present invention, be not intended to limit the present invention.In addition, if below in described each execution mode of the present invention involved technical characteristic do not form conflict each other and just can mutually combine.
Fig. 1 is the process chart according to the electret film preparation method based on the solid film of LASER HEATING of the present invention.As shown in fig. 1, this electret film is used for the use of electrostatic capacitance generator, and comprise the conductive base sheet material layers be for example laminated by flexible substrates and conductive layer, and the electret layer of processing on this conductive layer surface, method of the present invention mainly comprises following operating procedure:
First, above-mentioned conductive base sheet material layers is fixed on spin coating, spraying or blade coating equipment, and electret nano particle and water are configured to suspension according to the volume ratio of 30 ~ 70:100, wherein the material of electret nano particle is selected from one in following material or combination: polytetrafluoroethylene, polyvinylidene fluoride, polytrifluorochloroethylene, ethylene tetrafluoroethylene copolymer and vinylidene trifluoro-ethylene copolymer;
Then, electret uniform suspension is made to cover on whole conductive layer surface by adjustment spin speed, spraying rate or blade coating thickness parameter, then at the temperature of 40 DEG C ~ 60 DEG C, evaporation process is performed to the solvent of electret suspension, formed on conductive layer surface thus and possess certain thickness electret layer, and this electret layer is formed by electret nanoparticle agglomerates;
Then, laser heating device is adopted laser to be irradiated to formed electret layer on the surface, wherein as crucial processing characteristics parameter, optical maser wavelength is set to 380 nanometer ~ 4.2 micron, laser power density is set to 2 watts/square centimeter ~ 120 watts/square centimeter, and sweep speed is 2 mm/second ~ 600 mm/second; In this way, due to high-energy centrality and the controllability of laser facula self, laser can be utilized to irradiate the heat produced makes electret nano particle melt and be interconnected, form monoblock film forming, the electret film come off not easy to crack thus, and heating-up temperature and position can accurately be controlled, damage can not be produced to conductive base sheet material layers.
Below for the present invention performs some specific embodiments of above-mentioned process, and embody some key process parameters wherein with this.
Embodiment 1
Add the charge ratio of 30 liters of polytetrafluoroethylene according to every 100 premium on currency, polytetrafluorethylenano nano particle is added to configuration in water and obtain suspension; And adopt brown paper to carry out obtained conductive base sheet material layers as flexible substrates, copper as conductive layer; Above-mentioned conductive base sheet material layers is fixed on spin-coating equipment, then with the mode dripped to it surface also namely the surface of conductive layer apply above-mentioned suspension;
The spin speed of spin-coating equipment is set as 2000 revs/min, formed on the surface in conductive base sheet material layers be uniformly distributed, the overall suspension layers covered; Then at the temperature of 40 DEG C, perform evaporation process, remove the water in suspension thus and begin to take shape the electret layer that thickness is 50 microns, wherein electret layer is formed by above-mentioned electret nanoparticle agglomerates;
Then, adopt laser heating device laser to be irradiated to above-mentioned electret layer on the surface, the optical maser wavelength wherein as critical processing parameters is set to 380 nanometers, laser power density is 20 watts/square centimeter, and laser scanning speed is by 50 mm/second; In the process, heating-up temperature and heating location are subject to accurate control, make the electret film film forming that obtains on flexible conducting substrate intact, not easy to crackly come off, simultaneously not easy damaged flexible conducting substrate.
Embodiment 2
Add the charge ratio of 50 liters of vinylidene trifluoro-ethylene copolymers according to every 100 premium on currency, vinylidene trifluoro-ethylene copolymer nano particle is added to configuration in water and obtain suspension; And adopt polypropylene to carry out obtained conductive base sheet material layers as flexible substrates, gold as conductive layer; Above-mentioned conductive base sheet material layers is fixed on spin-coating equipment, then with the mode dripped to it surface also namely the surface of conductive layer apply above-mentioned suspension;
The spin speed of spin-coating equipment is set as 500 revs/min, formed on the surface in conductive base sheet material layers be uniformly distributed, the overall suspension layers covered; Then at the temperature of 60 DEG C, perform evaporation process, remove the water in suspension thus and begin to take shape the electret layer that thickness is 80 microns, wherein electret layer is formed by above-mentioned electret nanoparticle agglomerates;
Then, adopt laser heating device laser to be irradiated to above-mentioned electret layer on the surface, the optical maser wavelength wherein as critical processing parameters is set to 600nm, laser power density is 50 watts/cm2, and laser scanning speed is by 30mm/s; In the process, heating-up temperature and heating location are subject to accurate control, make the electret film film forming that obtains on flexible conducting substrate intact, not easy to crackly come off, simultaneously not easy damaged flexible conducting substrate.
Embodiment 3
Add the charge ratio of 45L polyvinylidene fluoride according to every 100L water, polyvinylidene fluoride nano particle is added to configuration in water and obtain suspension; And adopt poly-ethylene-propylene copolymers to carry out obtained conductive base sheet material layers as flexible substrates, aluminium as conductive layer; Above-mentioned conductive base sheet material layers is fixed on spin-coating equipment, then with the mode dripped to it surface also namely the surface of conductive layer apply above-mentioned suspension;
The spin speed of spin-coating equipment is set as 200 revs/min, formed on the surface in conductive base sheet material layers be uniformly distributed, the overall suspension layers covered; Then at the temperature of 50 DEG C, perform evaporation process, remove the water in suspension thus and begin to take shape the electret layer that thickness is 15 microns, wherein electret layer is formed by above-mentioned electret nanoparticle agglomerates;
Then, adopt laser heating device laser to be irradiated to above-mentioned electret layer on the surface, the optical maser wavelength wherein as critical processing parameters is set to 1800nm, laser power density is 35 watts/cm
2, laser scanning speed is by 100mm/s; In the process, heating-up temperature and heating location are subject to accurate control, make the electret film film forming that obtains on flexible conducting substrate intact, not easy to crackly come off, simultaneously not easy damaged flexible conducting substrate.
Embodiment 4
Add the charge ratio of 30L ethylene tetrafluoroethylene copolymer according to every 100L water, ethylene tetrafluoroethylene copolymer nano particle is added to configuration in water and obtain suspension; And adopt polyethylene terephthalate to carry out obtained conductive base sheet material layers as flexible substrates, carbon as conductive layer; Above-mentioned conductive base sheet material layers is fixed on spin-coating equipment, then with the mode dripped to it surface also namely the surface of conductive layer apply above-mentioned suspension;
The spin speed of spin-coating equipment is set as 6000 revs/min, formed on the surface in conductive base sheet material layers be uniformly distributed, the overall suspension layers covered; Then at the temperature of 50 DEG C, perform evaporation process, remove the water in suspension thus and begin to take shape the electret layer that thickness is 200 microns, wherein electret layer is formed by above-mentioned electret nanoparticle agglomerates;
Then, adopt laser heating device laser to be irradiated to above-mentioned electret layer on the surface, the optical maser wavelength wherein as critical processing parameters is set to 2000 nanometers, laser power density is 80 watts/square centimeter, and laser scanning speed is by 600 mm/second; In the process, heating-up temperature and heating location are subject to accurate control, make the electret film film forming that obtains on flexible conducting substrate intact, not easy to crackly come off, simultaneously not easy damaged flexible conducting substrate.
Embodiment 5
Add the charge ratio of 30 liters of polytrifluorochloroethylene according to every 100 premium on currency, polytrifluorochloroethylene nano particle is added to configuration in water and obtain suspension; And adopt polyethylene terephthalate to carry out obtained conductive base sheet material layers as flexible substrates, conducting metal oxide as conductive layer; Above-mentioned conductive base sheet material layers is fixed on spin-coating equipment, then with the mode dripped to it surface also namely the surface of conductive layer apply above-mentioned suspension;
The spin speed of spin-coating equipment is set as 10000 revs/min, formed on the surface in conductive base sheet material layers be uniformly distributed, the overall suspension layers covered; Then at the temperature of 60 DEG C, perform evaporation process, remove the water in suspension thus and begin to take shape the electret layer that thickness is 10 microns, wherein electret layer is formed by above-mentioned electret nanoparticle agglomerates;
Then, adopt laser heating device laser to be irradiated to above-mentioned electret layer on the surface, the optical maser wavelength wherein as critical processing parameters is set to 600 nanometers, laser power density is 2 watts/square centimeter, and laser scanning speed is by 30 mm/second; In the process, heating-up temperature and heating location are subject to accurate control, make the electret film film forming that obtains on flexible conducting substrate intact, not easy to crackly come off, simultaneously not easy damaged flexible conducting substrate.
Embodiment 6
Add the charge ratio of 50 liters of polyvinylidene fluoride according to every 100 premium on currency, polyvinylidene fluoride nano particle is added to configuration in water and obtain suspension; And adopt polypropylene to carry out obtained conductive base sheet material layers as flexible substrates, carbon as conductive layer; Above-mentioned conductive base sheet material layers is fixed on spin-coating equipment, then with the mode dripped to it surface also namely the surface of conductive layer apply above-mentioned suspension;
The spin speed of spin-coating equipment is set as 1000 revs/min, formed on the surface in conductive base sheet material layers be uniformly distributed, the overall suspension layers covered; Then at the temperature of 45 DEG C, perform evaporation process, remove the water in suspension thus and begin to take shape the electret layer that thickness is 80 microns, wherein electret layer is formed by above-mentioned electret nanoparticle agglomerates;
Then, adopt laser heating device laser to be irradiated to above-mentioned electret layer on the surface, the optical maser wavelength wherein as critical processing parameters is set to 4200 nanometers, laser power density is 120 watts/square centimeter, and laser scanning speed is by 600 mm/second; In the process, heating-up temperature and heating location are subject to accurate control, make the electret film film forming that obtains on flexible conducting substrate intact, not easy to crackly come off, simultaneously not easy damaged flexible conducting substrate.
Embodiment 7
Add the charge ratio of 40 liters of ethylene tetrafluoroethylene copolymers according to every 100 premium on currency, ethylene tetrafluoroethylene copolymer nano particle is added to configuration in water and obtain suspension; And adopt PEN to carry out obtained conductive base sheet material layers as flexible substrates, carbon as conductive layer; Above-mentioned conductive base sheet material layers is fixed on spin-coating equipment, then with the mode dripped to it surface also namely the surface of conductive layer apply above-mentioned suspension;
The spin speed of spin-coating equipment is set as 2000 revs/min, formed on the surface in conductive base sheet material layers be uniformly distributed, the overall suspension layers covered; Then at the temperature of 50 DEG C, perform evaporation process, remove the water in suspension thus and begin to take shape the electret layer that thickness is 200 microns, wherein electret layer is formed by above-mentioned electret nanoparticle agglomerates;
Then, adopt laser heating device laser to be irradiated to above-mentioned electret layer on the surface, the optical maser wavelength wherein as critical processing parameters is set to 1450 nanometers, laser power density is 80 watts/square centimeter, and laser scanning speed is by 45 mm/second; In the process, heating-up temperature and heating location are subject to accurate control, make the electret film film forming that obtains on flexible conducting substrate intact, not easy to crackly come off, simultaneously not easy damaged flexible conducting substrate.
Embodiment 8
Add the charge ratio of 30 liters of polytetrafluoroethylene according to every 100 premium on currency, polytetrafluorethylenano nano particle is added to configuration in water and obtain suspension; And adopt brown paper to carry out obtained conductive base sheet material layers as flexible substrates, copper as conductive layer; Above-mentioned conductive base sheet material layers is fixed on spraying equipment;
The spraying rate of spraying equipment is set as 50 gram/minute, formed on the surface in conductive base sheet material layers be uniformly distributed, the overall suspension layers covered; Then at the temperature of 40 DEG C, perform evaporation process, remove the water in suspension thus and begin to take shape the electret layer that thickness is 50 microns, wherein electret layer is formed by above-mentioned electret nanoparticle agglomerates;
Then, adopt laser heating device laser to be irradiated to above-mentioned electret layer on the surface, the optical maser wavelength wherein as critical processing parameters is set to 380 nanometers, laser power density is 20 watts/square centimeter, and laser scanning speed is by 50 mm/second; In the process, heating-up temperature and heating location are subject to accurate control, make the electret film film forming that obtains on flexible conducting substrate intact, not easy to crackly come off, simultaneously not easy damaged flexible conducting substrate.
Embodiment 9
Add the charge ratio of 30 liters of polytetrafluoroethylene according to every 100 premium on currency, polytetrafluorethylenano nano particle is added to configuration in water and obtain suspension; And adopt brown paper to carry out obtained conductive base sheet material layers as flexible substrates, copper as conductive layer; Above-mentioned conductive base sheet material layers is fixed on blade coating equipment;
By adjusting the blade coating thickness parameter of blade coating equipment, formed on the surface in conductive base sheet material layers be uniformly distributed, the overall suspension layers covered; Then at the temperature of 40 DEG C, perform evaporation process, remove the water in suspension thus and begin to take shape the electret layer that thickness is 50 microns, wherein electret layer is formed by above-mentioned electret nanoparticle agglomerates;
Then, adopt laser heating device laser to be irradiated to above-mentioned electret layer on the surface, the optical maser wavelength wherein as critical processing parameters is set to 380 nanometers, laser power density is 20 watts/square centimeter, and laser scanning speed is by 50 mm/second; In the process, heating-up temperature and heating location are subject to accurate control, make the electret film film forming that obtains on flexible conducting substrate intact, not easy to crackly come off, simultaneously not easy damaged flexible conducting substrate.
To sum up, spin coating, spraying and blade coating film forming, the solid film of LASER HEATING and electret preparation technology combine by the present invention, develop a kind of novel, cheap and simple, be suitable for the electret film technique of extensive Application and preparation, and the electret film film forming obtained on flexible conducting substrate is intact, not easy to crackly comes off, thus be suitable for preparing flexible electrostatic electric capacity generator, for mechanical energy being converted to the application scenario of electric energy.
Those skilled in the art will readily understand; the foregoing is only preferred embodiment of the present invention; not in order to limit the present invention, all any amendments done within the spirit and principles in the present invention, equivalent replacement and improvement etc., all should be included within protection scope of the present invention.
Claims (6)
1. the electret film preparation method based on the solid film of LASER HEATING, this electret film is used for electrostatic capacitance generator, and comprise the conductive base sheet material layers be laminated by flexible substrates and conductive layer, and the electret layer of processing on this conductive layer surface, it is characterized in that, the method comprises the following steps:
A conductive base sheet material layers is fixed on spin coating, spraying or blade coating equipment by (), and electret nano particle and water are configured to suspension according to the volume ratio of 30 ~ 70:100, wherein the material of electret nano particle is selected from one in following material or combination: polytetrafluoroethylene, polyvinylidene fluoride, polytrifluorochloroethylene, ethylene tetrafluoroethylene copolymer and vinylidene trifluoro-ethylene copolymer;
B () makes electret uniform suspension cover on whole conductive layer surface by adjustment spin speed, spraying rate or blade coating thickness parameter, then at the temperature of 40 DEG C ~ 60 DEG C, evaporation process is performed to the solvent of electret suspension, formed on conductive layer surface thus and possess certain thickness electret layer, and this electret layer is formed by electret nanoparticle agglomerates;
C () adopt laser heating device to be irradiated to by laser electret layer that step (b) formed on the surface, wherein optical maser wavelength is set to 380 nanometer ~ 4.2 micron, laser power density is set to 2 watts/square centimeter ~ 120 watts/square centimeter, and sweep speed is 2 mm/second ~ 600 mm/second; In this way, utilize laser to irradiate the heat produced and make electret nano particle melt and be interconnected, form monoblock film forming thus, the electret film that comes off not easy to crack and can not producing conductive base sheet material layers damage.
2. electret film preparation method as claimed in claim 1, it is characterized in that, the material of described flexible substrates is preferably selected from one in following material or combination: paper, polyethylene, polypropylene, poly-ethylene-propylene copolymers, polyimides, polyethylene terephthalate, PEN; Described conductive layer is made up of the one in gold, silver, copper, aluminium, carbon, conducting metal oxide or conducting polymer compound or combination.
3. electret film preparation method as claimed in claim 1 or 2, it is characterized in that, in step (b), described spin speed is preferably set between 500 revs/min to 10000 revs/min, and the thickness of described electret layer is between 10 microns to 200 microns.
4. electret film preparation method as claimed in claim 1 or 2, it is characterized in that, in step (b), when adopting spraying operation, described spraying rate is preferably in 10-100 gram/minute, and the thickness of described electret layer is between 10 microns to 200 microns.
5. electret film preparation method as claimed in claim 1 or 2, is characterized in that, in step (b), when adopting blade coating operation, adjustment blade coating thickness makes the thickness of electret layer be between 10 microns to 200 microns.
6. the electret film preparation method as described in claim 1-3 any one, it is characterized in that, in step (c), described optical maser wavelength is preferably set to 600 nanometer ~ 1800 nanometers further, laser power density is set to 20 watts/square centimeter ~ 50 watts/square centimeter further, and sweep speed is set as 30 mm/second ~ 200 mm/second further.
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