CN104613949B - Gyroscope system and orthogonal coupling for it and the compensation device being electrically coupled - Google Patents
Gyroscope system and orthogonal coupling for it and the compensation device being electrically coupled Download PDFInfo
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- CN104613949B CN104613949B CN201510099113.6A CN201510099113A CN104613949B CN 104613949 B CN104613949 B CN 104613949B CN 201510099113 A CN201510099113 A CN 201510099113A CN 104613949 B CN104613949 B CN 104613949B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C25/00—Manufacturing, calibrating, cleaning, or repairing instruments or devices referred to in the other groups of this subclass
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Abstract
The present invention proposes a kind of gyroscope system and orthogonal coupling for it and the compensation device being electrically coupled, and compensation device includes：Orthogonal coupling compensating module is located in gyro sensor chip and is connected with gyroscope gauge outfit, is compensated for error caused by the machinery orthogonal coupling terms that are subject to gyro sensor chip, including：First charge-sensitive amplifiers and the first gain amplifier；Compensating module is electrically coupled in gyro sensor chip and is connected with gyroscope gauge outfit, the error produced for the parasitic capacitance between the drive feedback electrode and sensing detection electrode to gyroscope gauge outfit is compensated, wherein, being electrically coupled compensating module includes：Buffer and the second gain amplifier.The present invention is compensated to being electrically coupled item caused by machinery orthogonal coupling terms caused by gyroscope instrument head manufacturing technique and parasitic capacitance, eliminates this two interference to useful signal.
Description
Technical Field
The invention relates to the technical field of gyroscope systems, in particular to a gyroscope system and a compensation device for orthogonal coupling and electric coupling of the gyroscope system.
Background
In a gyroscope system, on one hand, due to the deviation of a gyroscope head manufacturing process, a sensing branch of a gyroscope sensor chip is influenced by a mechanical orthogonal coupling term; on the other hand, because the gyroscope head and the package of the gyroscope head and the integrated circuit have a parasitic capacitance Cp between the driving feedback electrode and the sensing detection electrode, the output voltage signal of the driving feedback can be coupled to the sensing branch circuit due to the influence of the capacitance.
The two non-ideal coupling effects of the orthogonal coupling term and the electric coupling term can generate interference on useful signals and influence the overall dynamic range and noise performance of the gyroscope system.
Disclosure of Invention
The object of the present invention is to solve at least one of the technical drawbacks mentioned.
Therefore, the invention aims to provide a compensation device for orthogonal coupling and electric coupling of a gyroscope system and the gyroscope system with the compensation device, which can compensate mechanical orthogonal coupling terms caused by a head manufacturing process and electric coupling terms caused by parasitic capacitance and eliminate the interference of the two terms on useful signals.
To achieve the above object, an embodiment of an aspect of the present invention provides a compensation apparatus for orthogonal coupling and electrical coupling of a gyroscope system, including: the device comprises an orthogonal coupling compensation module and an electric coupling compensation module, wherein the orthogonal coupling compensation module is positioned in a gyroscope sensor chip in a gyroscope system, is connected with a gyroscope head of the gyroscope system and is used for compensating errors caused by mechanical orthogonal coupling terms received by the gyroscope sensor chip, and the orthogonal coupling compensation module comprises: the input end of the first charge-sensitive amplifier is connected with the driving detection electrode of the gyroscope gauge outfit and outputs a first signal, and the output end of the first charge-sensitive amplifier is connected to the first variable gain amplifier of the gyroscope sensor chip; the input end of the first gain amplifier is connected to the output end of the first charge sensitive amplifier, and the first signal is amplified by a preset first gain to generate an orthogonal coupling term error compensation signal; the electric coupling compensation module is positioned in a gyroscope sensor chip in a gyroscope system, is connected with a gyroscope head of the gyroscope system, and is used for compensating errors generated by parasitic capacitance between a driving feedback electrode and a sensing detection electrode of the gyroscope head, wherein the electric coupling compensation module comprises: the input end of the buffer is connected to the second variable gain amplifier of the gyroscope sensor chip, and the output end of the buffer is connected to the driving feedback electrode of the gyroscope gauge outfit and outputs a second signal; and the input end of the second gain amplifier is connected to the output end of the buffer, and the second signal is amplified by a preset second gain to generate an electric coupling term error compensation signal.
In one embodiment of the present invention, further comprising: the input end of the second charge sensitive amplifier is connected to the sensing detection electrode of the gyroscope header, the first adder and the second adder, the input end of the first adder is connected to the output end of the second gain amplifier and the output end of the second charge sensitive amplifier, and the input end of the second adder is respectively connected to the output end of the first gain amplifier and the output end of the first adder, and is used for adding the quadrature coupling term error compensation signal and the electric coupling term error compensation signal to the quadrature coupling term error signal and the electric coupling term error signal and outputting a compensated sensing branch signal.
In an embodiment of the present invention, the compensated sense branch signal Vsm is represented by the following formula:
Vsm＝Vsig+kq1*A*sin(wt)+ke1*Vdp*cos(wt)+Nq*kq*Kd*A*sin(wt)+Ne*ke*Vdp*cos(wt)，
vsig is a useful signal, Vsig is 0, Kq1 a sin (wt) is an orthogonal coupling term error signal, ke1 Vdp cos (wt) is an electrical coupling term error signal, Nq Kq Kd a sin (wt) is an orthogonal coupling term error compensation signal, Ne ke Vdp cos (wt) is an electrical coupling term error compensation signal, a is an amplitude of a driving mode of the gyro head, w is a vibration frequency, and Kq1 and ke1 are coupling coefficients when the gyro system is in a stationary state.
In still another embodiment of the present invention, when a condition for canceling the quadrature coupling term error compensation signal and the electric coupling term error compensation signal is satisfied, gain coefficients of the first gain amplifier and the second gain amplifier satisfy the following relationship:
Nq＝-kq1/(kq*kd)，Ne＝-ke1/ke。
another embodiment of the present invention also provides a gyroscope system, including: the gyroscope gauge head, the gyroscope sensor chip and the compensation device for orthogonal coupling and electrical coupling of the gyroscope system in the embodiment are located in the gyroscope sensor chip.
According to the compensation device for orthogonal coupling and electric coupling of the gyroscope system and the gyroscope system, the orthogonal coupling item compensation module and the electric coupling item compensation module are introduced between the gyroscope gauge head and the gyroscope sensor chip, the mechanical orthogonal coupling item caused by the gauge head manufacturing process and the electric coupling item caused by parasitic capacitance are compensated, and the interference of the two items on useful signals is eliminated, so that the influence on the whole dynamic range and the noise performance of the gyroscope system is avoided, and the whole performance of the gyroscope system is improved.
Additional aspects and advantages of the invention will be set forth in part in the description which follows and, in part, will be obvious from the description, or may be learned by practice of the invention.
Drawings
The above and/or additional aspects and advantages of the present invention will become apparent and readily appreciated from the following description of the embodiments, taken in conjunction with the accompanying drawings of which:
FIG. 1 is a block diagram of a compensation arrangement for quadrature and electrical coupling of a gyroscope system in accordance with an embodiment of the present invention;
fig. 2 is a circuit diagram of a compensation arrangement for quadrature and electrical coupling of a gyroscope system in accordance with an embodiment of the invention.
Detailed Description
Reference will now be made in detail to embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to the same or similar elements or elements having the same or similar function throughout. The embodiments described below with reference to the drawings are illustrative and intended to be illustrative of the invention and are not to be construed as limiting the invention.
As shown in fig. 1, a compensation apparatus 10 for orthogonal coupling and electrical coupling of a gyroscope system according to an embodiment of the present invention includes an orthogonal coupling compensation module 1 and an electrical coupling compensation module 2, where the orthogonal coupling compensation module 1 and the electrical coupling compensation module 2 are located in a gyroscope sensor chip 30 of the gyroscope system and connected to a gyroscope head 20 of the gyroscope system.
Due to the manufacturing process variations of the gyro-head 20, the sensing branch of the gyro sensor chip 30 may be affected by the mechanical quadrature coupling term. If the amplitude of the meter head driving mode is a and the vibration frequency is w, the quadrature coupling term after passing through the first charge-sensitive amplifier (CSA) of the sensing branch is: kq1 a sin (wt), where kq1 is the coupling coefficient. The quadrature coupling terms cause interference with the useful signals in the gyroscope system. For this purpose, the orthogonal coupling compensation module 1 is used to compensate for an error caused by a mechanical orthogonal coupling term received by the gyro sensor chip 30.
Referring to fig. 2, the quadrature coupling compensation module 1 includes: a first charge sensitive amplifier 11 and a first gain amplifier 12. The input end of the first charge-sensitive amplifier 11 is connected to the driving detection electrode Cdm of the gyroscope header 20, and outputs a first signal Kd × a × sin (wt), where Kd is a gain coefficient from voltage to displacement. The output of the first charge sensitive amplifier 11 is connected to a first variable gain amplifier 31 of the gyro sensor chip 30. The input terminal of the first gain amplifier 12 is connected to the output terminal of the first charge sensitive amplifier 11, and the first signal Kd x a x sin (wt) is amplified by a predetermined first gain Nq x kq to generate the quadrature coupling term error compensation signal Nq x kq Kd x a sin (wt).
The orthogonal coupling compensation module 1 is introduced into a driving detection electrode Cdm of the gyroscope head 20 to compensate the orthogonal coupling term, that is, an orthogonal coupling term error compensation signal is introduced into a sensing branch circuit to eliminate the orthogonal coupling term error signal.
On the other hand, in the package of the gyro head 20 and the gyro head 20 with the integrated circuit, a parasitic capacitance Cp exists between the driving feedback electrode Cdf and the sensing detection electrode Csm. Due to the influence of the parasitic capacitance Cp, the output voltage signal of the driving feedback may be coupled to the sensing branch, and assuming that the driving feedback signal Vdf is Vdp cos (wt), the electric coupling term after passing through the second charge sensitive amplifier of the sensing branch is: ke1 Vdp cos (wt), wherein ke1 is the coupling coefficient.
For this purpose, the electric coupling compensation module 2 is employed for compensating an error caused by the parasitic capacitance Cp between the driving feedback electrode Cdf and the sensing detection electrode Csm of the gyro-head 20.
Referring to fig. 2, the electric coupling compensation module 2 includes a buffer 21 and a second gain amplifier 22. Specifically, the buffer 21 has an input end connected to the second variable gain amplifier 32 of the gyro sensor chip 30, and an output end connected to the driving feedback electrode Cdf of the gyro meter head 20, and outputs the second signal Vdp × cos (wt). The input terminal of the second gain amplifier 22 is connected to the output terminal of the buffer 21, and amplifies the second signal Vdp × cos (wt) with a predetermined second gain Ne × ke to generate the electric coupling term error compensation signal Ne × ke Vdp × cos (wt).
The electric coupling compensation module 2 is introduced between the driving feedback electrode Cdf of the gyroscope head 20 and the gyroscope sensor chip 30 to compensate the electric coupling term, i.e. introduce an electric coupling term error compensation signal to the sensing branch circuit to eliminate the electric coupling term error signal.
Further, the compensation apparatus 10 for quadrature coupling and electrical coupling of a gyroscope system of the present invention further includes: a second charge sensitive amplifier 3, a first adder 4 and a second adder 5, wherein the input end of the second charge sensitive amplifier 3 is connected to the sensing electrode Csm of the gyroscope head 20, and the output end outputs a useful signal Vsig. The input of the first adder 4 is connected to the output of the second gain amplifier 22 and the output of the second charge-sensitive amplifier 3, the input of the second adder 5 is connected to the output of the first gain amplifier 12 and the output of the first adder 4, respectively, and the quadrature coupling term error compensation signal Nq × kq × Kd a sin (wt) and the electric coupling term error compensation signal Ne × ke × Vdp cos (wt) are superimposed on the useful signal Vsig, the quadrature coupling term error signal kq1 × a sin (wt), and the electric coupling term error signal ke1 × Vdp cos (wt), and the compensated sense branch signal Vsm is output. Wherein,
vsm + Kq1 a sin (wt) + ke1 Vdp cos (wt) + Nq Kq Kd a sin (wt) + Ne ke Vdp cos (wt), where a is the amplitude of the driving mode of the gyroscope head, w is the vibration frequency, Kq1 and ke1 are coupling coefficients. Where Vsig is 0 when the gyroscope system is in a stationary state.
In one embodiment of the present invention, when a condition for canceling the quadrature coupling term error compensation signal and the electric coupling term error compensation signal is satisfied, gain coefficients of the first gain amplifier and the second gain amplifier satisfy the following relationship:
Nq＝-kq1/(kq*kd)，Ne＝-ke1/ke。
specifically, after quadrature demodulation, the I/Q terms should be 0, and thus Nq — kq1/(kq — kd) and Ne — ke1/ke can be obtained. The gain coefficients of the first and second gain amplifiers can be set based on the calculated Nq and Ne to compensate for the orthogonal and electric couplings. It should be noted that Nq and Ne are different depending on the model of the gyro sensor chip. When the gyroscope system is compensated by the compensation, the interference of the orthogonal/electric coupling terms to useful signals can be completely eliminated.
The invention also proposes a gyroscope system comprising: the gyroscope head 20, the gyroscope sensor chip 30 and the compensation device 10 for quadrature coupling and electrical coupling of a gyroscope system of the above-described embodiment, wherein the compensation device 10 for quadrature coupling and electrical coupling of a gyroscope system is located within the gyroscope sensor chip 30.
According to the compensation device for orthogonal coupling and electric coupling of the gyroscope system and the gyroscope system, the orthogonal coupling item compensation module and the electric coupling item compensation module are introduced between the gyroscope gauge head and the gyroscope sensor chip, the mechanical orthogonal coupling item caused by the gauge head manufacturing process and the electric coupling item caused by parasitic capacitance are compensated, and the interference of the two items on useful signals is eliminated, so that the influence on the whole dynamic range and the noise performance of the gyroscope system is avoided, and the whole performance of the gyroscope system is improved.
In the description herein, references to the description of the term "one embodiment," "some embodiments," "an example," "a specific example," or "some examples," etc., mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
Although embodiments of the present invention have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting the present invention, and that variations, modifications, substitutions and alterations can be made in the above embodiments by those of ordinary skill in the art without departing from the principle and spirit of the present invention. The scope of the invention is defined by the appended claims and their full range of equivalents.
Claims (5)
1. A compensation apparatus for quadrature and electrical coupling of a gyroscope system, comprising: a quadrature coupling compensation module and an electrical coupling compensation module, wherein,
the orthogonal coupling compensation module is positioned in a gyroscope sensor chip in a gyroscope system, is connected with a gyroscope head of the gyroscope system, and is used for compensating errors caused by mechanical orthogonal coupling terms received by the gyroscope sensor chip, wherein the orthogonal coupling compensation module comprises:
the input end of the first charge-sensitive amplifier is connected with the driving detection electrode of the gyroscope gauge outfit and outputs a first signal, and the output end of the first charge-sensitive amplifier is connected to the first variable gain amplifier of the gyroscope sensor chip;
the input end of the first gain amplifier is connected to the output end of the first charge sensitive amplifier, and the first signal is amplified by a preset first gain to generate an orthogonal coupling term error compensation signal;
the electric coupling compensation module is positioned in a gyroscope sensor chip in a gyroscope system, is connected with a gyroscope head of the gyroscope system, and is used for compensating errors generated by parasitic capacitance between a driving feedback electrode and a sensing detection electrode of the gyroscope head, wherein the electric coupling compensation module comprises:
the input end of the buffer is connected to the second variable gain amplifier of the gyroscope sensor chip, and the output end of the buffer is connected to the driving feedback electrode of the gyroscope gauge outfit and outputs a second signal;
and the input end of the second gain amplifier is connected to the output end of the buffer, and the second signal is amplified by a preset second gain to generate an electric coupling term error compensation signal.
2. The compensation apparatus for quadrature and electrical coupling of a gyroscope system of claim 1, further comprising: the input end of the second charge sensitive amplifier is connected to the sensing detection electrode of the gyroscope header, the input end of the first adder is connected to the output end of the second gain amplifier and the output end of the second charge sensitive amplifier, and the input end of the second adder is respectively connected to the output end of the first gain amplifier and the output end of the first adder and is used for superposing the quadrature coupling term error compensation signal and the electric coupling term error compensation signal to the quadrature coupling term error signal and the electric coupling term error signal and outputting a compensated sensing branch signal.
3. The compensation apparatus for quadrature and electrical coupling of a gyroscope system as claimed in claim 2, wherein the compensated sense branch signal Vsm is of the formula:
Vsm＝Vsig+kq1*A*sin(wt)+ke1*Vdp*cos(wt)+Nq*kq*Kd*A*sin(wt)+Ne*ke*Vdp*cos(wt)，
vsig is a useful signal, Vsig is 0, Kq1 a sin (wt) is an orthogonal coupling term error signal, ke1 Vdp cos (wt) is an electrical coupling term error signal, Nq Kq Kd a sin (wt) is an orthogonal coupling term error compensation signal, Ne ke Vdp cos (wt) is an electrical coupling term error compensation signal, a is an amplitude of a driving mode of the gyro head, w is a vibration frequency, and Kq1 and ke1 are coupling coefficients when the gyro system is in a stationary state.
4. The compensation apparatus for quadrature coupling and electrical coupling of a gyroscope system of claim 2, wherein when a condition to cancel the quadrature coupling term error compensation signal and the electrical coupling term error compensation signal is satisfied, gain coefficients of the first gain amplifier and the second gain amplifier satisfy the following relationship:
Nq＝-kq1/(kq*kd)，Ne＝-ke1/ke。
5. a gyroscope system, comprising: gyroscope head, gyroscope sensor chip and compensation means for orthogonal and electrical coupling of a gyroscope system according to any of claims 1 to 4, wherein said compensation means for orthogonal and electrical coupling of a gyroscope system are located within said gyroscope sensor chip.
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| CN104949664B (en) * | 2015-06-11 | 2018-02-02 | 工业和信息化部电子第五研究所 | Micro-mechanical gyroscope is electrically coupled suppression circuit and method |
| CN112146637B (en) * | 2020-08-24 | 2022-10-28 | 南京理工大学 | Full-angle mode circuit gain error self-compensation system of micro-electromechanical gyroscope |
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| CN102278982A (en) * | 2011-07-13 | 2011-12-14 | 中国人民解放军国防科学技术大学 | Restraining method for coupling error of micro silicon gyroscope with four mass blocks |
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