CN104613949A - Gyroscope system and compensation device for cross coupling and electric coupling thereof - Google Patents
Gyroscope system and compensation device for cross coupling and electric coupling thereof Download PDFInfo
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- CN104613949A CN104613949A CN201510099113.6A CN201510099113A CN104613949A CN 104613949 A CN104613949 A CN 104613949A CN 201510099113 A CN201510099113 A CN 201510099113A CN 104613949 A CN104613949 A CN 104613949A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C25/00—Manufacturing, calibrating, cleaning, or repairing instruments or devices referred to in the other groups of this subclass
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Abstract
The invention discloses a gyroscope system and a compensation device for cross coupling and electric coupling thereof. The compensation device comprises a cross coupling compensation module and an electric coupling compensation module, wherein the cross coupling compensation module is positioned in a gyroscope sensor chip, is connected with a gyroscope header, is used for compensating an error caused by a mechanical cross coupling term applied to the gyroscope sensor chip and comprises a first charge sensitive amplifier and a first gain amplifier; the electric coupling compensation module is positioned in the gyroscope sensor chip, is connected with the gyroscope header and is used for compensating an error generated by a parasitic capacitance between a driving feedback electrode and a sensing detection electrode of the gyroscope header; and the electric coupling compensation module comprises a buffer and a second gain amplifier. According to the invention, the mechanical cross coupling term caused by a gyroscope header manufacturing process and an electric coupling term caused by the parasitic capacitance are compensated and interference of the two terms on useful signals is eliminated.
Description
Technical field
The present invention relates to gyroscope system technical field, particularly a kind of gyroscope system and for its orthogonal coupling and the compensation system of electric coupling.
Background technology
In gyroscope system, on the one hand due to the deviation of gyroscope instrument head manufacturing technique, the sensing branch road of gyro sensor chip can be subject to the impact of machinery orthogonal coupling terms; On the other hand due in the encapsulation of gyroscope gauge outfit and gyroscope gauge outfit and integrated circuit, stray capacitance Cp is there is between drive feedback electrode and sensing detection electrode, due to the impact of this electric capacity, the output voltage signal of drive feedback can be coupled to sensing branch road.
Above-mentioned orthogonal coupling terms and electric coupling item two kinds of nonideal coupling effects, can produce interference to useful signal, affect dynamic range and the noiseproof feature of gyroscope system entirety.
Summary of the invention
Object of the present invention is intended at least solve one of described technological deficiency.
For this reason, the object of the invention is to propose a kind of for the orthogonal coupling of gyroscope system and the compensation system of electric coupling and the gyroscope system with it, machinery orthogonal coupling terms that his-and-hers watches head manufacturing technique causes can be realized and the electric coupling item that stray capacitance causes compensates, eliminate this two interference to useful signal.
To achieve these goals, the embodiment of one aspect of the present invention provides a kind of for the orthogonal coupling of gyroscope system and the compensation system of electric coupling, comprise: orthogonal coupling compensating module and electric coupling compensating module, wherein, described orthogonal coupling compensating module, be arranged in the gyro sensor chip of gyroscope system and be connected with the gyroscope gauge outfit of described gyroscope system, the error caused for the machinery orthogonal coupling terms be subject to described gyro sensor chip compensates, wherein, described orthogonal coupling compensating module comprises: the first charge-sensitive amplifiers, the input end of described first charge-sensitive amplifiers is connected with the driving detecting electrode of described gyroscope gauge outfit, export the first signal, the output terminal of described first charge-sensitive amplifiers is connected to the first variable gain amplifier of described gyro sensor chip, first gain amplifier, the input end of described first gain amplifier is connected to the output terminal of described first charge-sensitive amplifiers, carries out amplification process, generating orthogonal coupling terms error compensating signal to described first signal to preset the first gain, described electric coupling compensating module is arranged in the gyro sensor chip of gyroscope system and is connected with the gyroscope gauge outfit of described gyroscope system, error for producing the stray capacitance between the drive feedback electrode of described gyroscope gauge outfit and sensing detection electrode compensates, wherein, described electric coupling compensating module comprises: impact damper, the input end of described impact damper is connected to the second variable gain amplifier of described gyro sensor chip, output terminal is connected to the drive feedback electrode of described gyroscope gauge outfit, exports secondary signal, second gain amplifier, the input end of described second gain amplifier is connected to the output terminal of described impact damper, carries out amplification process, generate electric coupling item error compensating signal to described secondary signal to preset the second gain.
In one embodiment of the invention, also comprise: the second charge-sensitive amplifiers, first and second totalizers, the input end of described second charge-sensitive amplifiers is connected to the sensing detection electrode of described gyroscope gauge outfit, first and second totalizers, the input end of described first adder is connected to the output terminal of described second gain amplifier and the output terminal of described second charge-sensitive amplifiers, the input end of described second adder is connected with the output terminal of described first adder with the output terminal of described first gain amplifier respectively, for described orthogonal coupling terms error compensating signal and electric coupling item error compensating signal are added to orthogonal coupling terms error signal and electric coupling item error signal, export the sensing tributary signal after compensating.
In one embodiment of the invention, the sensing tributary signal Vsm after described compensation is following formula:
Vsm＝Vsig+kq1*A*sin(wt)+ke1*Vdp*cos(wt)+Nq*kq*Kd*A*sin(wt)+Ne*ke*Vdp*cos(wt)，
Wherein, Vsig is useful signal, when gyroscope system remains static, Vsig=0, kq1*A*sin (wt) is orthogonal coupling terms error signal, ke1*Vdp*cos (wt) is electric coupling item error signal, Nq*kq*Kd*A*sin (wt) is orthogonal coupling terms error compensating signal, Ne*ke*Vdp*cos (wt) is electric coupling item error compensating signal, and A is the amplitude of the driven-mode of described gyroscope gauge outfit, w is vibration frequency, Kq1 and ke1 is coupling coefficient.
In yet another embodiment of the present invention, when the condition of the described orthogonal coupling terms error compensating signal of satisfied elimination and electric coupling item error compensating signal, the gain coefficient of described first and second gains meets following relation:
Nq＝-kq1/(kq*kd)，Ne＝-ke1/ke。
An alternative embodiment of the invention also proposes a kind of gyroscope system, comprise: described in gyroscope gauge outfit, gyro sensor chip and above-described embodiment for the orthogonal coupling of gyroscope system and the compensation system of electric coupling, wherein, describedly described gyro sensor chip is positioned at for the orthogonal coupling of gyroscope system and the compensation system of electric coupling.
According to the embodiment of the present invention for the orthogonal coupling of gyroscope system and the compensation system of electric coupling and gyroscope system, by introducing orthogonal coupling terms compensating module and electric coupling item compensating module between gyroscope gauge outfit and gyro sensor chip, the machinery orthogonal coupling terms that his-and-hers watches head manufacturing technique causes and the electric coupling item that stray capacitance causes compensate, eliminate this two interference to useful signal, thus avoid the impact of dynamic range on gyroscope system entirety and noiseproof feature, improve the overall performance of gyroscope system.
The aspect that the present invention adds and advantage will part provide in the following description, and part will become obvious from the following description, or be recognized by practice of the present invention.
Accompanying drawing explanation
Above-mentioned and/or additional aspect of the present invention and advantage will become obvious and easy understand from accompanying drawing below combining to the description of embodiment, wherein:
Fig. 1 is the structured flowchart for the orthogonal coupling of gyroscope system and the compensation system of electric coupling according to the embodiment of the present invention;
Fig. 2 is the circuit diagram for the orthogonal coupling of gyroscope system and the compensation system of electric coupling according to the embodiment of the present invention.
Embodiment
Be described below in detail embodiments of the invention, the example of embodiment is shown in the drawings, and wherein same or similar label represents same or similar element or has element that is identical or similar functions from start to finish.Be exemplary below by the embodiment be described with reference to the drawings, be intended to for explaining the present invention, and can not limitation of the present invention be interpreted as.
As shown in Figure 1, the embodiment of the present invention for the orthogonal coupling of gyroscope system and the compensation system 10 of electric coupling, comprise orthogonal coupling compensating module 1 and electric coupling compensating module 2, wherein, orthogonal coupling compensating module 1 and electric coupling compensating module 2, be arranged in the gyro sensor chip 30 of gyroscope system and be connected with the gyroscope gauge outfit 20 of gyroscope system.
Due to the deviation of gyroscope gauge outfit 20 manufacturing process, the sensing branch road of gyro sensor chip 30 can be subject to the impact of machinery orthogonal coupling terms.If the amplitude of gauge outfit driven-mode is A, vibration frequency is w, then this orthogonal coupling terms is after first charge-sensitive amplifiers (CSA) of sensing branch road: kq1*A*sin (wt), and wherein, kq1 is coupling coefficient.This orthogonal coupling terms produces interference to the useful signal in gyroscope system.For this reason, the error that the machinery orthogonal coupling terms adopting orthogonal coupling compensating module 1 pair of gyro sensor chip 30 to be subject to causes compensates.
With reference to figure 2, orthogonal coupling compensating module 1 comprises: the first charge-sensitive amplifiers 11 and the first gain amplifier 12.Wherein, the input end of the first charge-sensitive amplifiers 11 is connected with the driving detecting electrode Cdm of gyroscope gauge outfit 20, exports the first signal Kd*A*sin (wt), and wherein, kd is the gain coefficient that voltage arrives displacement.The output terminal of the first charge-sensitive amplifiers 11 is connected to the first variable gain amplifier 31 of gyro sensor chip 30.The input end of the first gain amplifier 12 is connected to the output terminal of the first charge-sensitive amplifiers 11, amplification process is carried out, generating orthogonal coupling terms error compensating signal Nq*kq*Kd*A*sin (wt) to preset the first gain Nq*kq to the first signal Kd*A*sin (wt).
Introduce orthogonal coupling compensating module 1 by the driving detecting electrode Cdm in gyroscope gauge outfit 20, orthogonal coupling terms is compensated, be incorporated into sensing branch road by orthogonal coupling terms error compensating signal and eliminated orthogonal coupling terms error signal.
On the other hand, because gyroscope gauge outfit 20 and gyroscope gauge outfit 20 are with the encapsulation of integrated circuit, between drive feedback electrode Cdf and sensing detection electrode Csm, there is stray capacitance Cp.Due to the impact of this stray capacitance Cp, the output voltage signal of drive feedback can be coupled to sensing branch road, hypothesis driven feedback signal Vdf=Vdp*cos (wt), then this electric coupling item is after the second charge-sensitive amplifiers of sensing branch road: ke1*Vdp*cos (wt), wherein, ke1 is coupling coefficient.
For this reason, electric coupling compensating module 2 is adopted to compensate for the error produced the stray capacitance Cp between the drive feedback electrode Cdf of gyroscope gauge outfit 20 and sensing detection electrode Csm.
With reference to figure 2, electric coupling compensating module 2 comprises impact damper 21 and the second gain amplifier 22.Particularly, the input end of impact damper 21 is connected to the second variable gain amplifier 32 of gyro sensor chip 30, and output terminal is connected to the drive feedback electrode Cdf of gyroscope gauge outfit 20, exports secondary signal Vdp*cos (wt).The input end of the second gain amplifier 22 is connected to the output terminal of impact damper 21, to preset the second gain Ne*ke, amplification process is carried out to secondary signal Vdp*cos (wt), generates electric coupling item error compensating signal Ne*ke*Vdp*cos (wt).
By introducing electric coupling compensating module 2 between the drive feedback electrode Cdf and gyro sensor chip 30 of gyroscope gauge outfit 20, electric coupling item is compensated, is incorporated into sensing branch road by electric coupling item error compensating signal and is eliminated electric coupling item error signal.
Further, of the present inventionly also to comprise for the orthogonal coupling of gyroscope system and the compensation system 10 of electric coupling: the second charge-sensitive amplifiers 3, first adder 4 and second adder 5, wherein the input end of the second charge-sensitive amplifiers 3 is connected to the sensing detection electrode Csm of gyroscope gauge outfit 20, and output terminal exports useful signal Vsig.The input end of first adder 4 is connected to the output terminal of the second gain amplifier 22 and the output terminal of the second charge-sensitive amplifiers 3, the input end of second adder 5 is connected with the output terminal of first adder 4 with the output terminal of the first gain amplifier 12 respectively, be added to orthogonal coupling terms error compensating signal Nq*kq*Kd*A*sin (wt) and electric coupling item error compensating signal Ne*ke*Vdp*cos (wt) useful signal Vsig, on orthogonal coupling terms error signal kq1*A*sin (wt) and electric coupling item error signal ke1*Vdp*cos (wt), export the sensing tributary signal Vsm after compensating.Wherein,
Vsm=Vsig+kq1*A*sin (wt)+ke1*Vdp*cos (wt)+Nq*kq*Kd*A*sin (wt)+Ne*ke*Vdp*cos (wt), wherein, A is the amplitude of the driven-mode of gyroscope gauge outfit, w is vibration frequency, Kq1 and ke1 is coupling coefficient.Wherein, when gyroscope system remains static, Vsig=0.
In one embodiment of the invention, when the condition of the orthogonal coupling terms error compensating signal of satisfied elimination and electric coupling item error compensating signal, the gain coefficient of the first and second gains meets following relation:
Nq＝-kq1/(kq*kd)，Ne＝-ke1/ke。
Particularly, after quadrature demodulation, I/Q item should be all 0, can obtain Nq=-kq1/ (kq*kd) thus, Ne=-ke1/ke.The gain coefficient of the first and second gain amplifiers can be set according to above-mentioned Nq and Ne calculated, realize the compensation to orthogonal coupling and electric coupling.It should be noted that, Nq and Ne is different according to the model of gyro sensor chip.After gyroscope system is passed through above compensation, orthogonal/electric coupling item can be eliminated completely to the interference of useful signal.
The present invention also proposes a kind of gyroscope system, comprise: gyroscope gauge outfit 20, gyro sensor chip 30 and above-described embodiment for the orthogonal coupling of gyroscope system and the compensation system 10 of electric coupling, wherein, the compensation system 10 of this orthogonal coupling and electric coupling being used for gyroscope system is positioned at gyro sensor chip 30.
According to the embodiment of the present invention for the orthogonal coupling of gyroscope system and the compensation system of electric coupling and gyroscope system, by introducing orthogonal coupling terms compensating module and electric coupling item compensating module between gyroscope gauge outfit and gyro sensor chip, the machinery orthogonal coupling terms that his-and-hers watches head manufacturing technique causes and the electric coupling item that stray capacitance causes compensate, eliminate this two interference to useful signal, thus avoid the impact of dynamic range on gyroscope system entirety and noiseproof feature, improve the overall performance of gyroscope system.
In the description of this instructions, specific features, structure, material or feature that the description of reference term " embodiment ", " some embodiments ", " example ", " concrete example " or " some examples " etc. means to describe in conjunction with this embodiment or example are contained at least one embodiment of the present invention or example.In this manual, identical embodiment or example are not necessarily referred to the schematic representation of above-mentioned term.And the specific features of description, structure, material or feature can combine in an appropriate manner in any one or more embodiment or example.
Although illustrate and describe embodiments of the invention above, be understandable that, above-described embodiment is exemplary, can not be interpreted as limitation of the present invention, those of ordinary skill in the art can change above-described embodiment within the scope of the invention when not departing from principle of the present invention and aim, revising, replacing and modification.Scope of the present invention is by claims extremely equivalency.
Claims (5)
1. for the orthogonal coupling of gyroscope system and a compensation system for electric coupling, it is characterized in that, comprising: orthogonal coupling compensating module and electric coupling compensating module, wherein,
Described orthogonal coupling compensating module, be arranged in the gyro sensor chip of gyroscope system and be connected with the gyroscope gauge outfit of described gyroscope system, the error caused for the machinery orthogonal coupling terms be subject to described gyro sensor chip compensates, wherein, described orthogonal coupling compensating module comprises:
First charge-sensitive amplifiers, the input end of described first charge-sensitive amplifiers is connected with the driving detecting electrode of described gyroscope gauge outfit, export the first signal, the output terminal of described first charge-sensitive amplifiers is connected to the first variable gain amplifier of described gyro sensor chip;
First gain amplifier, the input end of described first gain amplifier is connected to the output terminal of described first charge-sensitive amplifiers, carries out amplification process, generating orthogonal coupling terms error compensating signal to described first signal to preset the first gain;
Described electric coupling compensating module is arranged in the gyro sensor chip of gyroscope system and is connected with the gyroscope gauge outfit of described gyroscope system, error for producing the stray capacitance between the drive feedback electrode of described gyroscope gauge outfit and sensing detection electrode compensates, wherein, described electric coupling compensating module comprises:
Impact damper, the input end of described impact damper is connected to the second variable gain amplifier of described gyro sensor chip, and output terminal is connected to the drive feedback electrode of described gyroscope gauge outfit, exports secondary signal;
Second gain amplifier, the input end of described second gain amplifier is connected to the output terminal of described impact damper, carries out amplification process, generate electric coupling item error compensating signal to described secondary signal to preset the second gain.
2. as claimed in claim 1 for the orthogonal coupling of gyroscope system and the compensation system of electric coupling, it is characterized in that, also comprise: the second charge-sensitive amplifiers, first and second totalizers, the input end of described second charge-sensitive amplifiers is connected to the sensing detection electrode of described gyroscope gauge outfit, the input end of described first adder is connected to the output terminal of described second gain amplifier and the output terminal of described second charge-sensitive amplifiers, the input end of described second adder is connected with the output terminal of described first adder with the output terminal of described first gain amplifier respectively, for described orthogonal coupling terms error compensating signal and electric coupling item error compensating signal are added to orthogonal coupling terms error signal and electric coupling item error signal, export the sensing tributary signal after compensating.
3. as claimed in claim 2 for the orthogonal coupling of gyroscope system and the compensation system of electric coupling, it is characterized in that, the sensing tributary signal Vsm after described compensation is following formula:
Vsm＝Vsig+kq1*A*sin(wt)+ke1*Vdp*cos(wt)+Nq*kq*Kd*A*sin(wt)+Ne*ke*Vdp*cos(wt)，
Wherein, Vsig is useful signal, when gyroscope system remains static, Vsig=0, kq1*A*sin (wt) is orthogonal coupling terms error signal, ke1*Vdp*cos (wt) is electric coupling item error signal, Nq*kq*Kd*A*sin (wt) is orthogonal coupling terms error compensating signal, Ne*ke*Vdp*cos (wt) is electric coupling item error compensating signal, and A is the amplitude of the driven-mode of described gyroscope gauge outfit, w is vibration frequency, Kq1 and ke1 is coupling coefficient.
4. as described in right 2 for the orthogonal coupling of gyroscope system and the compensation system of electric coupling, it is characterized in that, when the condition of the described orthogonal coupling terms error compensating signal of satisfied elimination and electric coupling item error compensating signal, the gain coefficient of described first and second gains meets following relation:
Nq＝-kq1/(kq*kd)，Ne＝-ke1/ke。
5. a gyroscope system, it is characterized in that, comprise: described in gyroscope gauge outfit, gyro sensor chip and any one of claim 1-4 for the orthogonal coupling of gyroscope system and the compensation system of electric coupling, wherein, describedly described gyro sensor chip is positioned at for the orthogonal coupling of gyroscope system and the compensation system of electric coupling.
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| CN112146637A (en) * | 2020-08-24 | 2020-12-29 | 南京理工大学 | Full-angle mode circuit gain error self-compensation system of micro-electromechanical gyroscope |
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Granted publication date: 20171024 Termination date: 20180306 |