CN104609411A - Quartz boat for graphene growth - Google Patents
Quartz boat for graphene growth Download PDFInfo
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- CN104609411A CN104609411A CN201510060744.7A CN201510060744A CN104609411A CN 104609411 A CN104609411 A CN 104609411A CN 201510060744 A CN201510060744 A CN 201510060744A CN 104609411 A CN104609411 A CN 104609411A
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- Prior art keywords
- quartz boat
- quartz
- graphene growth
- graphene
- wedge shape
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Abstract
The invention discloses a quartz boat for graphene growth, and belongs to the technical field of a tool for graphene growth. The apparatus comprises a quartz boat body and a wedged quartz body, wherein a certain included angle is formed between the upper surface and the lower surface of the wedged quartz body; the distance between the upper and lower surfaces is gradually reduced in the direction of an air source; and strip-shaped bumps are formed in the upper surface of the wedged quartz body. The quartz boat for the graphene growth disclosed by the invention can be used for achieving the full contact between a metal substrate and a carbon source gas; and under the circumstance that the quartz boat body is relatively narrow, the growth of the graphene in a large area is achieved. The quartz boat is stable in structure, convenient in installation, detaching and washing, easy in processing and relatively low in cost.
Description
Technical field
The present invention relates to a kind of Graphene preparation facilities, especially relate to a kind of quartz boat for graphene growth.
Background technology
GEIM in 2004 etc. prepare Graphene first, and the two dimensional crystal structure of Graphene uniqueness gives Graphene good physics, chemistry, electricity, mechanical property, and inner carrier density is up to 10
13cm
-2, room temperature download stream transport factor is 1.5 × 10
4cm
2/ (Vs), have higher electroconductibility, the transmitance of single-layer graphene is 97.7%, and light transmission is high, in addition Graphene also has excellent mechanical flexibility and chemical stability, has a wide range of applications at numerous areas such as new forms of energy, novel material and new devices.
Current preparation method mainly contains Graphene: (1) micromechanics stripping method.This method can only the few small area Graphene of production quantity.(2) epitaxial method.The main drawback of this method be cost higher and because of the less limitation of size of silicon chip its large-scale application.(3) oxidation reduction process.Graphene defect prepared by the method is more.(4) chemical Vapor deposition process.Chemical Vapor deposition process is imported by one or more gaseous substances, in reaction chamber, chemical reaction occurs, and go out film at substrate deposition.The method can prepare large-area high-quality graphene, and easily transfers to various target substrate, therefore becomes the exemplary manufacturing process in industrial production.
In the process of chemical Vapor deposition process growing graphene, usually adopt copper nickel metal as substrate, substrate is attached at quartz boat inside.There is provided carbon source with gas, in High Temperature Furnaces Heating Apparatus, decomposite carbon atom and deposit on the metallic substrate and grow into continuous print graphene film gradually.The groove of the quartz boat used in current production is generally and is horizontally disposed with, metal substrate is placed in bottom portion of groove, because the barrier effect of quartz boat both sides barrier can affect the uniform contact of air-flow and metal substrate, the size of metal substrate is also subject to the restriction of quartz boat groove simultaneously.
Summary of the invention
The object of the invention is to propose a kind ofly can overcome horizontal groove and produce to air-flow and substrate metal uniform contact and substrate dimension the graphene growth quartz boat limited.
For achieving the goal, the present invention adopts following scheme:
A kind of graphene growth quartz boat, comprise a quartz boat body, a wedge shape quartz body, described wedge shape quartz body upper surface becomes 1 ° ~ 75 ° angles with lower surface, upper and lower surface spacing reduces gradually along source of the gas direction, and wedge shape quartz body upper surface is provided with the strip projected parts of one or more parallel arranged.
Further, quartz boat body length is 5cm ~ 100cm, and width is 1cm ~ 20cm, height 1cm ~ 15cm.
Further, wedge shape quartz body upper surface and lower surface angle are 5 ° to 55 °.
Further, strip projected parts is quartzy material.
Further, strip projected parts length is 5mm ~ 200mm, and width is 1mm ~ 150mm, and thickness is 0.1mm ~ 10mm.
The invention has the beneficial effects as follows: graphene growth quartz boat proposed by the invention can realize fully contacting of metal substrate and carbon-source gas, can realize the growth of large-area graphene when quartz boat body width is narrower.The technical scheme simple possible provided, quartz boat structure is firm and facilitate installation to unpick and wash, and be easy to processing, cost is lower.
Accompanying drawing explanation
Fig. 1 is the vertical view of graphene growth quartz boat embodiment 1 of the present invention;
Fig. 2 is the sectional view of graphene growth quartz boat embodiment 1 of the present invention;
Fig. 3 is the vertical view of graphene growth quartz boat embodiment 2 of the present invention;
Fig. 4 is the sectional view of graphene growth quartz boat embodiment 2 of the present invention;
In figure, quartz boat body 1, wedge shape quartz body 2, strip projected parts 3.
Embodiment
A kind of graphene growth quartz boat of the present invention, comprise a quartz boat body 1, wedge shape quartz body 2, described wedge shape quartz body 2 width is identical with quartz boat body 1 width, makes wedge shape quartz body 2 be placed in firm in quartzy body 1 and conveniently install and disassemble.
Quartz boat body 1 length is arranged according to high temperature furnace pipe length or aperture, and length is 5cm ~ 100cm, and width is 1cm ~ 20cm, height 1cm ~ 15cm.
Described wedge shape quartz body 2 upper surface and lower surface form an angle, upper and lower surface spacing reduces gradually along source of the gas direction, the upper surface tilted is conducive to fully contacting of carbon-source gas and metal substrate, overcome the problem that metal substrate size limits by quartz boat body 1 simultaneously, be applicable to the growth of large-area high-quality Graphene.Wedge shape quartz body 2 upper surface is provided with the strip projected parts 3 of one or more parallel arranged, for fixing metal substrate, prevents from gliding.
Wedge shape quartz body 2 upper surface and lower surface angle are 1 ° ~ 75 °, are preferably 5 ° ~ 55 °.
Preferably, described strip projected parts 3 is quartzy material, and length is arranged according to wedge shape quartz body 2 length and width, length 1mm ~ 100mm, width 1mm ~ 80mm, thickness 1mm ~ 15mm.
Below in conjunction with drawings and Examples, the present invention is further illustrated.
embodiment 1
As shown in Figure 1, 2, this quartz boat is positioned in the silica tube in High Temperature Furnaces Heating Apparatus and carries out graphene growth, and comprise a quartz boat body 1, wedge shape quartz body 2, wedge shape quartz body upper surface arranges 3 strip projected parts 3.The long 12cm of quartz boat body 1, wide 4cm, wedge shape quartz body 2 upper and lower surface angle is 15 °, wide 4cm, the long 35mm of wedge shape quartz body 2 upper surface every bar strip projected parts 3, wide 2.5mm, thick 5mm.
embodiment 2
As shown in Figure 3,4, this quartz boat is positioned in the silica tube in High Temperature Furnaces Heating Apparatus and carries out graphene growth, and comprise a quartz boat body 1, wedge shape quartz body 2, wedge shape quartz body 2 upper surface arranges 1 strip projected parts 3.The long 20cm of quartz boat body 1, wide 4cm, wedge shape quartz body 2 upper and lower surface angle is 5 °, wide 4cm, the long 35mm of wedge shape quartz body 2 upper surface strip projected parts 3, wide 20mm, thick 8mm.
Below in conjunction with specific embodiments object of the present invention, technical scheme and beneficial effect are further described; be understood that; the foregoing is only specific embodiments of the invention; be not limited to the present invention; within the spirit and principles in the present invention; any amendment of making, equivalent replacement, improvement etc., all should be included in protection scope of the present invention.
Claims (5)
1. a graphene growth quartz boat, it is characterized in that, comprise quartz boat body (1), wedge shape quartz body (2), it is characterized in that, described wedge shape quartz body (2) upper surface becomes 1 ° ~ 75 ° angles with lower surface, upper and lower surface spacing reduces gradually along source of the gas direction, and wedge shape quartz body (2) upper surface is provided with the strip projected parts (3) of one or more parallel arranged.
2. graphene growth quartz boat according to claim 1, is characterized in that, described quartz boat body (1) length is 5cm ~ 100cm, and width is 1cm ~ 20cm, height 1cm ~ 15cm.
3. graphene growth quartz boat according to claim 1, is characterized in that, described wedge shape quartz body (2) upper surface and lower surface angle are 5 ° ~ 55 °.
4. graphene growth quartz boat according to claim 1, is characterized in that, described strip projected parts (3) is quartzy material.
5. graphene growth quartz boat according to claim 1, is characterized in that, described strip projected parts (3) length is 5mm ~ 200mm, and width is 1mm ~ 150mm, and thickness is 0.1mm ~ 10mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510060744.7A CN104609411A (en) | 2015-02-05 | 2015-02-05 | Quartz boat for graphene growth |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510060744.7A CN104609411A (en) | 2015-02-05 | 2015-02-05 | Quartz boat for graphene growth |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN104609411A true CN104609411A (en) | 2015-05-13 |
Family
ID=53144112
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510060744.7A Pending CN104609411A (en) | 2015-02-05 | 2015-02-05 | Quartz boat for graphene growth |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN104609411A (en) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101298693A (en) * | 2008-01-18 | 2008-11-05 | 南京大学 | Double-layer airflow quartz fairing reaction chamber apparatus for MOCVD system |
| CN103529099A (en) * | 2013-09-23 | 2014-01-22 | 西南交通大学 | Method for preparing graphene chemically modified electrode through in-situ growth |
| CN204474333U (en) * | 2015-02-05 | 2015-07-15 | 浙江大学 | A kind of graphene growth quartz boat |
-
2015
- 2015-02-05 CN CN201510060744.7A patent/CN104609411A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101298693A (en) * | 2008-01-18 | 2008-11-05 | 南京大学 | Double-layer airflow quartz fairing reaction chamber apparatus for MOCVD system |
| CN103529099A (en) * | 2013-09-23 | 2014-01-22 | 西南交通大学 | Method for preparing graphene chemically modified electrode through in-situ growth |
| CN204474333U (en) * | 2015-02-05 | 2015-07-15 | 浙江大学 | A kind of graphene growth quartz boat |
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| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20150513 |