CN104607647B - The continuous material collecting device of submicron metal production equipment - Google Patents

The continuous material collecting device of submicron metal production equipment Download PDF

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CN104607647B
CN104607647B CN201510079797.3A CN201510079797A CN104607647B CN 104607647 B CN104607647 B CN 104607647B CN 201510079797 A CN201510079797 A CN 201510079797A CN 104607647 B CN104607647 B CN 104607647B
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pipe
cooling
receiving chamber
deposited tube
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CN104607647A (en
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江永斌
江科言
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Abstract

The invention belongs to metal dust preparing technical field, it is related to the continuous material collecting device of submicron metal production equipment:The liquid in-out end of coil pipe is connected with the liquid in-out end of cooling back installation respectively, the branch pipe extended downwardly from of connection coil pipe inner chamber is arranged at intervals with coil pipe, cooling deposited tube is set with each branch pipe, it is tightly connected between the upper end of cooling deposited tube and the branch pipe outer wall covered, there is and cooled down the air supply pipe of the chamber formed between deposition inside pipe wall and its branch pipe outer wall covered the upper end of cooling deposited tube, cool down the outlet aperture that insertion cooling deposition tube wall is arranged at intervals with the side wall or/and bottom wall of deposited tube, the recovering hopper of taper type is provided with the bottom wall of vacuum receiving chamber, the drainage conduit connected with the inner chamber of recovering hopper is provided with the bottom wall of recovering hopper, the valve that two or more controls drainage conduit break-make is arranged at intervals with drainage conduit, the present invention is applied to make the continuous material collecting device of submicron metal production equipment.

Description

The continuous material collecting device of submicron metal production equipment
Technical field
The invention belongs to submicron metal preparing technical field, a kind of submicron metal production equipment is refered in particular to continuous Material collecting device.
Background technology
Chinese patent CN104325149A discloses one kind《Applying electronic reaction beam make submicron metal device and Method》, it is mainly characterized in that:Applying electronic reaction beam makes the device of submicron metal, is being evaporated in vacuo in room Intracavitary is provided with crucible, and carrying of being fed into crucible is provided with the locular wall of the vacuums evaporation room of on the upside of crucible or side and is put The feeding device and one for expecting valve make metal become gaseous electron gun by solid-state more than, are evaporated in vacuo inner chamber and the vacuum of room The inner chamber of receiving chamber is all connected with by the pipeline communication with vacuum valve, the inner chamber of vacuum receiving chamber and the inner chamber of vacuum evaporation room There is the pumped vacuum systems that controller is controlled, the gas outlet of vacuum receiving chamber or the inner chamber of vacuum receiving chamber are connected with pumped vacuum systems Pipeline on be provided with separator, electron gun is connected with power-supply controller of electric, is evaporated in vacuo on room and vacuum receiving chamber and is provided with Cooling back installation;Being provided with the concrete structure of cooling back installation on the inwall of the vacuum receiving chamber with interior intracavitary is:Very Discharging door closure, sandwich-type medium transit chamber is provided with the locular wall of empty receiving chamber and measurement vacuum in vacuum receiving chamber is stretched into and received Cooling medium inlet and cooling medium outlet are provided with the thermocouple of indoor chamber temperature, the side wall of vacuum receiving chamber, cooling is situated between Matter import by pipeline communication in cooling medium outlet with having intracavitary in refrigerating circulatory device and control valve, vacuum receiving chamber to set Cooling pipe one end open in cooling medium inlet, the other end be opened on cooling medium outlet, thermocouple, kind of refrigeration cycle dress Put and control valve is electrically connected with the controller.
It is disadvantageous in that:One be from the submicron metal that vacuum receiving chamber is received take out when, it is necessary to shut down progress, The discharging door closure of vacuum receiving chamber is opened after shutdown, the submicron metal of reception is then taken out out of vacuum receiving chamber, is worked Efficiency is low, and labor intensity is big;Two be that submicron metal is adsorbed on the locular wall of vacuum receiving chamber and vacuum receiving chamber inner chamber On the outer wall of interior cooling back installation, it is not easily taken out, influences follow-up work.
The content of the invention
It is an object of the invention to provide a kind of continuous material collecting device of submicron metal production equipment.
The object of the present invention is achieved like this:
The continuous material collecting device of submicron metal production equipment, circulating cooling is provided with the locular wall of vacuum receiving chamber Device, connected with the inner chamber of vacuum receiving chamber vacuumize conduit and feed pipe, the inner cavity top or one of the vacuum receiving chamber Side is provided with annular or snakelike coil pipe or the comb of grill-shaped, one end closing of coil pipe or comb, other end connection magnetic valve Vacuum is drawn afterwards and receives outdoor as air supply pipe, and some are arranged at intervals with perpendicular to coil pipe or comb and position on coil pipe or comb Cooling deposited tube in coil pipe or comb the same side, cooling deposited tube is connected with the inner chamber of coil pipe or comb, cooling deposited tube It is arranged at intervals with bottom wall and side wall on the outlet aperture of insertion cooling deposition tube wall, the bottom wall of vacuum receiving chamber and is provided with cone It is provided with what is connected with the inner chamber of recovering hopper on the recovering hopper connected with the inner chamber of vacuum receiving chamber of platform shape, the bottom wall of recovering hopper The valve that two or more controls drainage conduit break-make is arranged at intervals with drainage conduit, drainage conduit;Or
The interior intracavitary of the vacuum receiving chamber is provided with the cooling back installation participated on vacuum receiving chamber locular wall and together followed The circulating cooling pipe of ring cooling, circulating cooling pipe is the coil pipe of more than one of annular or snakelike horizontal layout, the lower wall of coil pipe On be arranged at intervals with the branch pipe extended downwardly from of connection coil pipe inner chamber, the lower end closed of branch pipe, each branch pipe and be set with lower end The cooling deposited tube of closing, cooling is deposited between inside pipe wall and its branch pipe outer wall covered, the upper surface of cooling deposited tube bottom wall Airspace is respectively arranged between the lower surface of the branch pipe bottom wall covered with it, the branch pipe for cooling down the upper end of deposited tube and being covered It is tightly connected between outer wall, the upper end of cooling deposited tube is provided with and cooled down between deposition inside pipe wall and its branch pipe outer wall covered The stretching vacuum of the chamber of formation receives outdoor air supply pipe, cools down and is arranged at intervals on the side wall or/and bottom wall of deposited tube Have the outlet aperture of insertion cooling deposition tube wall, be provided with taper type on the bottom wall of vacuum receiving chamber with vacuum receiving chamber It is provided with the drainage conduit connected with the inner chamber of recovering hopper, drainage conduit and is spaced on the recovering hopper of inner chamber connection, the bottom wall of recovering hopper It is provided with the valve that two or more controls drainage conduit break-make.
Above-mentioned stretching vacuum receives outdoor air supply pipe and connected with air accumulator, the high pressure outlet air Guan Lian of air accumulator and gas making machine It is logical;Or the outdoor air supply pipe of vacuum reception that stretches out directly is connected with the high pressure outlet air pipe of gas making machine;It is provided with air supply pipe Magnetic valve.
Above-mentioned stretching vacuum receives outdoor air supply pipe and is made up of some branched pipes, one end of every branched pipe respectively with The upper ends connection of more than two cooling deposition tube cavities, set on every branched pipe after magnetic valve with the inner chamber of air accumulator or The high pressure outlet air pipe connection of gas making machine.
Inert gas is stored in above-mentioned air accumulator, or the gas of gas making machine manufacture is inert gas.
Airspace between above-mentioned cooling deposition inside pipe wall and its branch pipe outer wall covered is 0.5-40mm.
Airspace between above-mentioned cooling deposition inside pipe wall and its branch pipe outer wall covered is 0.5-25mm.
It is provided with vacuum valve, the locular wall of vacuum receiving chamber and sets on the feed pipe set on the locular wall of above-mentioned vacuum receiving chamber Put and be provided with door closure on the thermocouple of measurement vacuum receiving chamber inner chamber temperature, the locular wall of vacuum receiving chamber.
The external diameter of above-mentioned branch pipe is 10-80mm, and the external diameter of cooling deposited tube is 13-85mm, branch pipe and cooling deposited tube Wall thickness be 0.3-3mm, the cooling deposited tube has 8-80, and the length of the cooling deposited tube is 150-3000mm.
The internal diameter of above-mentioned outlet aperture is 0.01-0.3mm, between cooling deposited tube and cooling deposited tube, cools down deposited tube Spacing distance is 1-500mm between the inwall of vacuum receiving chamber.
It is above-mentioned it is each cooling deposited tube on, on the inwall of vacuum receiving chamber, the cooling back installation of vacuum receiving chamber inner chamber Positive and negative charge alternating loading device is connected with outer wall.
The present invention is prominent and beneficial compared with prior art to be had the technical effect that:
1st, the present invention can realize the non-stop-machine continuous submicron metal that reception is taken out out of vacuum receiving chamber, work Intensity is small, and operating efficiency is high.
2nd, the present invention adsorbs intracavitary on the locular wall of vacuum receiving chamber and in vacuum receiving chamber using inert gas purging Cooling deposited tube outer wall on submicron metal, speed is fast, and purging is clean, and the submicron metal blown off is fallen directly into In the recovering hopper of downside, continuous feeding is realized by circulating open close valve, and then realize the company of submicron metal production equipment Continuous production;Such as valve 911 on the upside of valve 912, opening on the downside of closing, submicron metal can be fallen between lower valve Drainage conduit 92 in, then, valve 911 on the upside of closing, open on the downside of valve 912, submicron metal can be from drainage conduit Discharged in 92, complete a discharge;Above-mentioned action is repeated, non-stop-machine continuous pulp discharge can be achieved.
3rd, the present invention using inert gas can direct cooling vacuum receiving chamber temperature, good cooling results.
4th, the present invention is applied to make the continuous material collecting device of submicron metal production equipment.
Brief description of the drawings
Fig. 1 is the use state structural representation of the embodiment of the present invention 1.
Fig. 2 is the structural representation of the embodiment of the present invention 1.
Fig. 3 is the schematic perspective view of the cooling back installation of the interior intracavitary setting of the vacuum receiving chamber of the embodiment of the present invention 1.
Fig. 4 is the front view of the cooling back installation of the interior intracavitary setting of the vacuum receiving chamber of the embodiment of the present invention 1.
Fig. 5 is Fig. 4 A-A to sectional view.
Fig. 6 is Fig. 5 B portions enlarged drawing.
Fig. 7 is Fig. 5 C portions enlarged drawing.
Fig. 8 is the coil pipe or comb and its cooling deposited tube of the interior intracavitary setting of the vacuum receiving chamber of the embodiment of the present invention 2 Front view.
Embodiment
With specific embodiment, the invention will be further described below in conjunction with the accompanying drawings:
Embodiment 1, referring to Fig. 1-Fig. 7:The continuous material collecting device of submicron metal production equipment, in vacuum receiving chamber 8 Locular wall 80 on be provided with cooling back installation 90, outdoor inner chamber received with vacuum connect vacuumize conduit 97 and feed pipe 94, the interior intracavitary of the vacuum receiving chamber 8 is provided with the cooling back installation 90 participated on the locular wall of vacuum receiving chamber 8 and together circulated The circulating cooling pipe of cooling, circulating cooling pipe for annular or snakelike horizontal layout the coil pipe 81 of more than one, under coil pipe 81 It is arranged at intervals with wall on the branch pipe 85 extended downwardly from of connection coil pipe 81 inner chamber, the lower end closed of branch pipe 85, each branch pipe 85 The cooling deposited tube 86 of lower end closed is set with, between the cooling inwall of deposited tube 86 and its outer wall of branch pipe covered 85, cools down and sinks Airspace L1, L2 is respectively arranged between the upper surface of product pipe 86 bottom wall and the lower surface of its bottom wall of branch pipe covered 85, it is cold But it is tightly connected between the upper end of deposited tube 86 and the outer wall of branch pipe 85 covered, the upper end of cooling deposited tube 86 is provided with and cooled down Air supply pipe outside the stretching vacuum receiving chamber 8 of the chamber formed between the inwall of deposited tube 86 and its outer wall of branch pipe covered 85 84, cool down and the outlet aperture 861 that insertion cools down the tube wall of deposited tube 86 is arranged at intervals with the side wall or/and bottom wall of deposited tube 86, The recovering hopper 89 connected with the inner chamber of vacuum receiving chamber 8 of taper type is provided with the bottom wall of vacuum receiving chamber 8, recovering hopper 89 It is provided with bottom wall in the drainage conduit 92 connected with the inner chamber of recovering hopper 89, drainage conduit 92 and is arranged at intervals with two or more control row The valve 911,912 of the break-make of expects pipe 92.
Air supply pipe 84 outside above-mentioned stretching vacuum receiving chamber 8 is connected with air accumulator 7, the high extrusion of air accumulator 7 and gas making machine 5 Tracheae is connected;Or the air supply pipe 84 stretched out outside vacuum receiving chamber 8 is directly connected with the high pressure outlet air pipe of gas making machine 5;Supply It is provided with magnetic valve 83 on pipe 84, each magnetic valve 83 can control that it is individually switched or multiple magnetic valves 83 are same by controller Shi Kaiguan.
Air supply pipe 84 outside above-mentioned stretching vacuum receiving chamber 8 is made up of some branched pipes 841, every branched pipe 841 Upper end of the one end respectively with more than two cooling deposited tube 86 inner chambers is connected, and is set on every branched pipe 841 after magnetic valve 83 Connected with the inner chamber of air accumulator 7 or the high pressure outlet air pipe of gas making machine 5.
Inert gas is stored in above-mentioned air accumulator 7, or the gas that gas making machine 5 is manufactured is inert gas, such as nitrogen, argon Gas etc..
Airspace between the above-mentioned inwall of cooling deposited tube 86 and its outer wall of branch pipe covered 85 is 0.5-40mm.
Airspace between the above-mentioned inwall of cooling deposited tube 86 and its outer wall of branch pipe covered 85 is 0.5-25mm.
Vacuum valve 95, the room of vacuum receiving chamber 8 are provided with the feed pipe set on the locular wall 80 of above-mentioned vacuum receiving chamber 8 Set on wall 80 and be provided with door closure on the thermocouple 100 of the inner chamber temperature of measurement vacuum receiving chamber 8, the locular wall 80 of vacuum receiving chamber 8, In order to repair or directly from feeding in vacuum receiving chamber 8.
The external diameter of above-mentioned branch pipe 85 is 10-80mm, and the external diameter of cooling deposited tube 86 is 13-85mm, branch pipe 85 and cooling The wall thickness of deposited tube 86 is 0.3-3mm, and the cooling deposited tube 86 has 8-80, and the length of the cooling deposited tube 86 is 150—3000mm。
The internal diameter of above-mentioned outlet aperture 861 be 0.01-0.3mm, cooling deposited tube 86 and cooling deposited tube 86 between, it is cold But spacing distance is 1-500mm between the inwall of deposited tube 86 and vacuum receiving chamber 8.
It is connected with just on above-mentioned each cooling deposited tube 86, on the inwall of vacuum receiving chamber 8, on the outer wall of circulating cooling pipe 81 Negative electrical charge replaces loading device, when being coupled with positive charge or negative electricity on the inwall and the outer wall of circulating cooling pipe 81 of vacuum receiving chamber 8 During lotus, the submicron metal received in it has also taken positive charge or negative electrical charge, when positive and negative charge alternating loading device is true It is super with positive charge or negative electrical charge when the inwall and the outer wall of circulating cooling pipe 81 of empty receiving chamber 8 add negative electrical charge or positive charge Fine metal powder can draw that identical charges repel each other and by submicron metal from the inwall and the outer wall of circulating cooling pipe 81 of vacuum receiving chamber 8 Release and fall into the recovering hopper 89 of downside, the valve 911 on the upside of valve 912, opening on the downside of closing, submicron metal meeting Fall into the drainage conduit 92 between lower valve, then, the valve 912 on the downside of valve 911, opening on the upside of closing, ultra-fine gold Belonging to powder can discharge out of drainage conduit 92, complete a discharge;Above-mentioned action is repeated, non-stop-machine continuous pulp discharge can be achieved.
Embodiment 2, referring to Fig. 8 and Fig. 2:The present embodiment and the structure of embodiment 1 are essentially identical, and difference is:It is super The continuous material collecting device of fine metal powder production equipment, be provided with the locular wall 80 of vacuum receiving chamber 8 cooling back installation 90, What is connected with inner chamber vacuumizes conduit 97 and feed pipe 94, and the inner cavity top of the vacuum receiving chamber 8 or side are provided with annular Or snakelike coil pipe 81 or the comb of grill-shaped, one end closing of coil pipe 81 or comb, the other end, which are connected, draws true after magnetic valve Sky receives outdoor as air supply pipe 84, and some are arranged at intervals with perpendicular to coil pipe or comb and positioned at disk on coil pipe 81 or comb Pipe or the cooling deposited tube 86 of comb the same side, cooling deposited tube 86 are connected with the inner chamber of coil pipe 81 or comb, cool down deposited tube It is arranged at intervals with 86 bottom wall and side wall on the outlet aperture that insertion cools down the tube wall of deposited tube 86, the bottom wall of vacuum receiving chamber 8 It is provided with the recovering hopper 89 connected with the inner chamber of vacuum receiving chamber of taper type, the bottom wall of recovering hopper 89 and is provided with and recovering hopper The drainage conduit 92 of 89 inner chamber connection, be arranged at intervals with drainage conduit 92 two or more control drainage conduit break-make valve 911, 912。
Replaced with the vacuum receiving chamber of the present invention disclosed in CN104325149A《Applying electronic reaction beam makes superfine metal The device and method of powder》In vacuum receiving chamber be that can be used, wherein the present invention Fig. 1 in Intelligent touch electrical equipment control system System 1 receives temperature signal and control (vacuum mechanical pump, lobe pump, diffusion pump) 9, vacuum mechanical pump 4, the refrigeration that thermocouple is sent EGR 93, control valve, turbomolecular pump 6, gas making machine 5, magnetic valve 83, valve 911,912 etc. are worked by control, electronics The power-supply controller of electric 2 of reaction beam is used to control electron reaction rifle 3;As for the detailed operation principle of submicron metal production equipment And process, reference can be made to Chinese patent CN104325149A《Applying electronic reaction beam makes device and the side of submicron metal Method》, the present invention be only pair《Applying electronic reaction beam makes the device and method of submicron metal》Vacuum receiving chamber portion The improvement divided.
Above-described embodiment is only presently preferred embodiments of the present invention, is not limited the scope of the invention according to this, therefore:It is all according to The equivalence changes that structure, shape, the principle of the present invention is done, all should be covered by within protection scope of the present invention.

Claims (9)

1. the continuous material collecting device of submicron metal production equipment, is provided with circulating cooling dress on the locular wall of vacuum receiving chamber Put, connected with the inner chamber of vacuum receiving chamber vacuumize conduit and feed pipe, it is characterised in that:The inner chamber of the vacuum receiving chamber Inside it is provided with the cooling back installation together hydronic circulating cooling pipe, circulating cooling pipe participated on vacuum receiving chamber locular wall For the coil pipe of more than one of annular or snakelike horizontal layout, the downward of connection coil pipe inner chamber is arranged at intervals with the lower wall of coil pipe The cooling deposited tube of lower end closed, cooling deposition inside pipe wall are set with the branch pipe of stretching, the lower end closed of branch pipe, each branch pipe Between the branch pipe outer wall covered with it, cool down and divide between the upper surface of deposited tube bottom wall and the lower surface of its branch pipe bottom wall covered Airspace is not provided with, is tightly connected between the upper end of cooling deposited tube and the branch pipe outer wall covered, is cooled down the upper of deposited tube End is provided with and cooled down the stretching vacuum receiving chamber of the chamber formed between deposition inside pipe wall and its branch pipe outer wall covered Outer air supply pipe, cools down the outlet aperture that insertion cooling deposition tube wall is arranged at intervals with the side wall or/and bottom wall of deposited tube, It is provided with the bottom wall of vacuum receiving chamber on the recovering hopper connected with the inner chamber of vacuum receiving chamber of taper type, the bottom wall of recovering hopper It is provided with and the valve that two or more controls drainage conduit break-make is arranged at intervals with the drainage conduit connected with the inner chamber of recovering hopper, drainage conduit Door;Airspace between the cooling deposition inside pipe wall and its branch pipe outer wall covered is 0.5-40mm.
2. the continuous material collecting device of submicron metal production equipment according to claim 1, it is characterised in that:It is described to stretch Go out the outdoor air supply pipe of vacuum reception to connect with air accumulator, air accumulator is connected with the high pressure outlet air pipe of gas making machine;Or the stretching Vacuum receives outdoor air supply pipe and directly connected with the high pressure outlet air pipe of gas making machine;Magnetic valve is provided with air supply pipe.
3. the continuous material collecting device of submicron metal production equipment according to claim 2, it is characterised in that:It is described to stretch Go out vacuum and receive outdoor air supply pipe and be made up of some branched pipes, one end of every branched pipe respectively with more than two coolings Deposit to set on the upper end connection of tube cavity, every branched pipe and extruded after magnetic valve with the inner chamber of air accumulator or the high of gas making machine Tracheae is connected.
4. the continuous material collecting device of the submicron metal production equipment according to Claims 2 or 3, it is characterised in that:Institute State and inert gas is stored in air accumulator, or the gas of gas making machine manufacture is inert gas.
5. the continuous material collecting device of the submicron metal production equipment according to any one of claim 1-3, its feature exists In:Airspace between the cooling deposition inside pipe wall and its branch pipe outer wall covered is 0.5-25mm.
6. the continuous material collecting device of the submicron metal production equipment according to any one of claim 1-3, its feature exists In:It is provided with to set on vacuum valve, the locular wall of vacuum receiving chamber on the feed pipe set on the locular wall of the vacuum receiving chamber and surveys Measure and be provided with door closure on the thermocouple of vacuum receiving chamber inner chamber temperature, the locular wall of vacuum receiving chamber.
7. the continuous material collecting device of the submicron metal production equipment according to any one of claim 1-3, its feature exists In:The external diameter of the branch pipe is 10-80mm, and the external diameter of cooling deposited tube is 13-85mm, the wall thickness of branch pipe and cooling deposited tube It is 0.3-3mm, the cooling deposited tube has 8-80, and the length of the cooling deposited tube is 150-3000mm.
8. the continuous material collecting device of the submicron metal production equipment according to any one of claim 1-3, its feature exists In:The internal diameter of the outlet aperture is 0.01-0.3mm, between cooling deposited tube and cooling deposited tube, cools down deposited tube and true Spacing distance is 1-500mm between the inwall of empty receiving chamber.
9. the continuous material collecting device of the submicron metal production equipment according to any one of claim 1-3, its feature exists In:On each cooling deposited tube, positive and negative charge alternating is connected with the inwall of vacuum receiving chamber, in circulating cooling pipe outer wall Loading device.
CN201510079797.3A 2015-02-13 2015-02-13 The continuous material collecting device of submicron metal production equipment Active CN104607647B (en)

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CN109332713A (en) * 2018-11-26 2019-02-15 广东先导稀材股份有限公司 Powder slush collection device and method
CN109332714A (en) * 2018-11-26 2019-02-15 广东先导稀材股份有限公司 Material collecting device and rewinding method
CN111001817A (en) * 2019-12-26 2020-04-14 中天上材增材制造有限公司 Powder collecting tank for vacuum gas atomization powder preparation
CN115383124A (en) * 2022-09-02 2022-11-25 杭州新川新材料有限公司 Cooling equipment for superfine metal powder

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JP2853046B2 (en) * 1989-06-21 1999-02-03 日新製鋼株式会社 Ultra fine powder production equipment
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