CN104576469A - Levelness adjusting structure, lifting device and cavity - Google Patents
Levelness adjusting structure, lifting device and cavity Download PDFInfo
- Publication number
- CN104576469A CN104576469A CN201310490338.5A CN201310490338A CN104576469A CN 104576469 A CN104576469 A CN 104576469A CN 201310490338 A CN201310490338 A CN 201310490338A CN 104576469 A CN104576469 A CN 104576469A
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- bracket
- strutting piece
- levelness
- stay pipe
- adjustment structure
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Abstract
The invention provides a levelness adjusting structure used for adjusting the levelness of a bracket. The levelness adjusting structure comprises the bracket, a supporting part and supporting pipes, wherein a plurality of fastening pieces used for connecting the bracket with the supporting pipes are arranged on the bracket; the supporting part is arranged on the lower surface of the bracket or on the upper surfaces of the supporting pipes, and between the bracket and the supporting pipes, so as to support the bracket, and ensure that each fastening piece can adjust the distance between the bracket and one supporting pipe to adjust the levelness of the bracket. Correspondingly, the invention further provides a lifting device and a cavity. Compared with the prior art, the levelness adjusting structure has the advantages that operation for adjusting the levelness of the bracket can be simplified remarkably; the levelness of the bracket can be adjusted more visually and conveniently.
Description
Technical field
The present invention relates to semiconductor equipment and manufacture field, particularly relate to a kind of levelness adjustment structure, lowering or hoisting gear and chamber.
Background technology
In semiconductor fabrication process, in order to enhance productivity, usually complete the transmission of wafer in all kinds of chamber with manipulator.In order to meet the demand of robotic transfer wafer; usually supporting pin can be provided with in all kinds of chamber; wafer can rise through the pedestal in chamber or put down by this supporting pin under the effect of lowering or hoisting gear, with make wafer can and base-separation, be convenient to the transmission of manipulator.
As depicted in figs. 1 and 2, supporting pin 10 is arranged on bracket 20 existing lowering or hoisting gear, and bracket 20 is connected with the fall way 31 of lowering or hoisting gear 30, and bracket 20 can move up and down with fall way 31, makes supporting pin 10 wafer can be risen or put down.During in order to ensure that supporting pin 10 bearing wafer is elevated and manipulator transmit wafer time stability, need many supporting pins 10 to be positioned in same level, therefore, the requirement for horizontality of this lowering or hoisting gear to bracket 20 is higher.
The coupling part structure of existing bracket and fall way as shown in Figure 3 and Figure 4, bracket 20 is arranged and is respectively arranged with four screws 21 and thimble 22, wherein screw 21 can insert in screwed hole corresponding on fall way 31 to be connected with fall way 31 by bracket 20, thimble 22 can contact with by bracket 20 jack-up through bracket 20 with fall way 31, and can adjust the height of each thimble 22 jack-up.
Above-mentioned existing structure is when adjusting the levelness of bracket 20, each screw 21 and each thimble 22 is often needed to coordinate adjustment, and also need between each screw 21 and between each thimble 22 to coordinate adjustment, adjustment process is often comparatively loaded down with trivial details, often need repeated multiple times adjustment just can obtain ideal effect, human cost is higher.
Summary of the invention
In view of this, the object of the present invention is to provide a kind of levelness adjustment structure, lowering or hoisting gear and chamber, with can the levelness of bracket easily.
For achieving the above object, the invention provides a kind of levelness adjustment structure, for adjusting the levelness of bracket, described levelness adjustment structure comprises bracket, strutting piece and stay pipe, described bracket is provided with the securing member of the described bracket of multiple connection and described stay pipe, described strutting piece is arranged on described bracket lower surface or described stay pipe upper surface and between described bracket and described stay pipe, to support described bracket, make each described securing member that the distance between described bracket and described stay pipe can be regulated to regulate the levelness of described bracket.
Preferably, described strutting piece is fixedly installed on the top of described stay pipe, and the upper surface of described strutting piece is protruding arcwall face.
Preferably, the basal surface of described bracket is provided with the groove corresponding with the arcwall face of described strutting piece, and the arcwall face of described strutting piece contacts with described groove.
Preferably, described strutting piece is fixedly installed on the bottom of described bracket, and the lower surface of described strutting piece is protruding arcwall face.
Preferably, the top of described stay pipe is provided with the groove corresponding with the arcwall face of described strutting piece, the lower surface of described strutting piece contacts with described groove.
Preferably, described strutting piece and multiple described securing member to surround the middle part of figure corresponding.
Preferably, described securing member is four, and four described securing members are symmetric relative to the center of described strutting piece.
Preferably, described bracket is provided with multiple first screwed hole, described stay pipe is provided with multiple second screwed hole, described securing member comprises screw, described screw passes described first screwed hole and inserts to be connected with described stay pipe by described bracket in described second screwed hole, and described screw can coordinate to adjust the distance between described bracket and described stay pipe with described first screwed hole and described second screwed hole.
Correspondingly, the present invention also provides a kind of lowering or hoisting gear, and described lowering or hoisting gear comprises the levelness adjustment structure that the invention described above provides.
Correspondingly, the present invention also provides a kind of chamber, and described chamber comprises the lowering or hoisting gear that the invention described above provides.
Visible, the present invention by arranging the strutting piece being used for Support bracket between stay pipe and bracket, make it possible to the levelness being carried out bracket by securing member based on the support of strutting piece to bracket, compared with prior art, significantly simplify operation complexity during bracket levelness.Meanwhile, securing member can be set to be symmetric relative to the center of strutting piece by the present invention, makes it possible to bracket levelness in different directions easily more directly perceived.
Accompanying drawing explanation
Accompanying drawing is used to provide a further understanding of the present invention, and forms a part for specification, is used from explanation the present invention, but is not construed as limiting the invention with embodiment one below.In the accompanying drawings:
Fig. 1 is existing lowering or hoisting gear end view;
Fig. 2 is existing lowering or hoisting gear vertical view;
Fig. 3 is existing bracket and fall way coupling part vertical view;
Fig. 4 is existing bracket and fall way coupling part end view;
The bracket that Fig. 5 provides for the embodiment of the present invention and stay pipe coupling part vertical view;
The bracket that Fig. 6 provides for the embodiment of the present invention and stay pipe coupling part end view.
Description of reference numerals
10-supporting pin; 20,40-bracket; 21-screw; 22-thimble; 30-lowering or hoisting gear; 31-fall way; 50-strutting piece; 60-stay pipe; 41-securing member.
Embodiment
Below in conjunction with accompanying drawing, the specific embodiment of the present invention is described in detail.Should be understood that, embodiment described herein, only for instruction and explanation of the present invention, is not limited to the present invention.
As one aspect of the present invention, a kind of levelness adjustment structure is provided, as shown in Figure 5 and Figure 6, this levelness adjustment structure can comprise bracket 40, strutting piece 50 and stay pipe 60, wherein, bracket 40 can be provided with the securing member 41 of multiple connection bracket 40 and stay pipe 60, strutting piece 50 can be arranged on bracket 40 or stay pipe 60 and with Support bracket 40 between bracket 40 and stay pipe 60, make each securing member 41 can distance between bracket 40 and stay pipe 60 with the levelness of bracket 40.
In said structure, strutting piece 50 is arranged between bracket 40 and stay pipe 60, can Support bracket 40, and bracket 40 is connected with stay pipe 60 by securing member 41, each securing member 41 can distance between bracket 40 and stay pipe 60, like this, the distance that each securing member 41 can come between bracket 40 and stay pipe 60 based on the support of strutting piece 50 pairs of brackets 40, with the levelness of this bracket 40.Particularly, strutting piece 50 can be arranged on bracket 40 or stay pipe 60, when strutting piece 50 is arranged on bracket 40, the lower surface of strutting piece 50 can with stay pipe 60 movable contact, or when strutting piece 50 is arranged on stay pipe 60, the upper surface of strutting piece 50 can with bracket 40 movable contact.Like this, strutting piece 50 and the one movable contact in both bracket 40 and stay pipe 60 can be made, be convenient to securing member 41 carrys out bracket 40 levelness based on the support of strutting piece 50 pairs of brackets 40.
Particularly, when the levelness of bracket 40, fulcrum to carry out bracket 40 levelness by each securing member 41 can be supported for strutting piece 50 pairs of brackets 40, when needing to turn down the position of bracket 40 in a certain position, securing member corresponding to this position 41 can be adjusted with the Distance Shortened between the bracket 40 making this position corresponding and stay pipe 60; When needing to heighten the position of bracket 40 in a certain position, can adjust securing member corresponding to this position 41 increases with the distance between the bracket 40 making this position corresponding and stay pipe 60.
The levelness adjustment structure that the invention described above provides only need adjust securing member 41 and can regulate the levelness of bracket 40, compared with prior art, significantly simplify adjustment process, bracket 40 levelness in different directions can be carried out by the cooperation between each securing member 41 simultaneously.
Further, strutting piece 50 can be fixedly installed on the top of stay pipe 60, and the upper surface of strutting piece 50 can be protruding arcwall face.Particularly, strutting piece 50 can utilize the modes such as welding to be fixedly installed on the top of stay pipe 60, and the upper surface of strutting piece 50 can be protruding arcwall face, this arcwall face height and radius can set according to actual needs, the present invention is not restricted this, preferably, the height of this arcwall face can be 2-10mm, and the radius of this arcwall face can be 3-5 times of height.In said structure, strutting piece 50 can with bracket 40 movable contact, and can with the contact position of the arcwall face of strutting piece 50 and bracket 40 for fulcrum support bracket 40, like this, each securing member 41 can be convenient to based on the distance between the support bracket 40 of strutting piece 50 pairs of brackets 40 and stay pipe 60.
Further, the basal surface of bracket 40 can be provided with the groove corresponding with the arcwall face of above-mentioned strutting piece 50, and the arcwall face of strutting piece 50 can contact with this groove.Particularly, the shape of the groove depression that the basal surface of bracket 40 is arranged can be corresponding with the shape of arcwall face, with can more stably Support bracket 40, preferably, the cup depth of this groove can be slightly less than the height of arcwall face, and the radius of this groove can be equal with the radius of arcwall face.Adopt said structure that bracket 40 can be made more stable with the contact of strutting piece 50, meanwhile, also can make to change more steady by the levelness of bracket 40 during distance between securing member 41 bracket 40 and stay pipe 60.
Further, strutting piece 50 also can be fixedly installed on the bottom of bracket 40, and the lower surface of strutting piece 50 can be protruding arcwall face.Particularly, strutting piece 50 can utilize the modes such as welding to be fixedly installed on the bottom of bracket 40, and the lower surface of strutting piece 50 can be protruding arcwall face, this arcwall face height and radius can set according to actual needs, the present invention is not restricted this, preferably, the height of this arcwall face can be 2-10mm, and the radius of this arcwall face can be 3-5 times of height.In said structure, bracket 40 can with stay pipe 60 movable contact, and can with the contact position of the arcwall face of strutting piece 50 and stay pipe 60 for fulcrum support bracket 40, like this, each securing member 41 can be convenient to based on the distance between the support bracket 40 of strutting piece 50 pairs of brackets 40 and stay pipe 60.
Further, the upper surface of stay pipe 60 can be provided with the groove corresponding with the arcwall face of above-mentioned strutting piece 50, and the arcwall face of strutting piece 50 can contact with this groove.Particularly, the shape of the groove depression that the upper surface of stay pipe 60 is arranged can be corresponding with the shape of arcwall face, with can more stably Support bracket 40, preferably, the cup depth of this groove can be slightly less than the height of arcwall face, and the radius of this groove can be equal with the radius of arcwall face.Adopt said structure that stay pipe 60 can be made more stable with the contact of strutting piece 50, meanwhile, also can make to change more steady by the levelness of bracket 40 during distance between securing member 41 bracket 40 and stay pipe 60.
Further, strutting piece 50 is corresponding with the middle part that multiple securing member 41 surrounds figure.Particularly, multiple securing member 41 position be arranged on bracket 40 can be distributed in the periphery of strutting piece 50, to make the position of strutting piece 50 corresponding with the middle part of the figure that the plurality of securing member 41 surrounds.Like this, can so that multiple securing member 41 can carry out the levelness of bracket 40 based on the support of strutting piece 50 pairs of brackets 40, also can make to cooperatively interact between securing member 41 with the levelness of bracket 40 from different directions simultaneously.
Further, can four securing members 41 be set on bracket 40, and these four securing members are symmetric relative to the center of strutting piece 50.Four securing members 41 are arranged on bracket 40 relative to the Central Symmetry of strutting piece 50, can be coordinated with bracket 40 levelness in one direction by two symmetrical securing members 41 easily.Preferably, these four securing members 41 can be cruciform symmetry distribution relative to the center of strutting piece 50, like this, these four securing members 41 can form a plane right-angle coordinate, and two securing members 41 wherein in X-axis can coordinate bracket 40 levelness in the X direction, two securing members 41 in Y-axis can coordinate bracket 40 levelness in the Y direction, compared with prior art, adopt said structure can the levelness of convenient bracket intuitively 40.
Further, bracket 40 can be provided with multiple first screwed hole, stay pipe 60 can be provided with multiple second screwed hole, securing member 41 can comprise screw, this screw can pass the first screwed hole and insert to be connected with stay pipe 60 by bracket 40 in the second screwed hole, and this screw can coordinate with the first screwed hole and the second screwed hole with the distance adjusted between bracket 40 and stay pipe 60.Adopt said structure, stably bracket 40 can be connected with stay pipe 60 by screw, and, can coordinate with the first screwed hole and the second screwed hole the distance adjusted between bracket 40 and stay pipe 60 by screw, particularly, when needing to shorten the distance between bracket 40 and stay pipe 60, screw can be tightened to be pressed down by bracket 40, when needing to increase the distance between bracket 40 and stay pipe 60, can lift to make bracket 40 by releasing screw.Be understandable that, the securing member described in the present invention can also be realized by other means except aforesaid way, such as, the elastomeric element of adjustable elastic power can be fixedly installed in the bottom of bracket 40, corresponding bayonet socket can be set on the upper surface of stay pipe 60, elastomeric element can be entrenched in stable connection bracket 40 and stay pipe 60 in this bayonet socket, and can by the size of adjustable elastic power to adjust the distance between bracket 40 and stay pipe 60.
Above-mentioned for the description of inventing the levelness adjustment structure that provides and carrying out, can find out, the present invention by arranging the strutting piece being used for Support bracket between stay pipe and bracket, make it possible to the levelness being carried out bracket by securing member based on the support of strutting piece to bracket, compared with prior art, significantly simplify operation complexity during bracket levelness.Meanwhile, securing member can be set to be symmetric relative to the center of strutting piece by the present invention, makes it possible to bracket levelness in different directions easily more directly perceived.
As another aspect of the present invention, provide a kind of lowering or hoisting gear, this lowering or hoisting gear comprises the levelness adjustment structure that the invention described above provides.Particularly, the fall way in lowering or hoisting gear can be the stay pipe in above-mentioned levelness adjustment structure.This lowering or hoisting gear can drive stay pipe vertically to move up and down by driver part, thus can bracket be driven further vertically to move up and down, and wafer rises or puts down by the pedestal that the supporting pin on bracket can be passed in chamber.
As another aspect of the invention, provide a kind of chamber, this chamber comprises the lowering or hoisting gear that the invention described above provides.The chamber that this chamber can need by robotic transfer wafer for classes of semiconductors manufacture process, such as, can be degas chamber, pre-cleaning chamber or vapor deposition chamber etc., the present invention be restricted this.
Be understandable that, the illustrative embodiments that above execution mode is only used to principle of the present invention is described and adopts, but the present invention is not limited thereto.For those skilled in the art, without departing from the spirit and substance in the present invention, can make various modification and improvement, these modification and improvement are also considered as protection scope of the present invention.
Claims (10)
1. a levelness adjustment structure, for adjusting the levelness of bracket, it is characterized in that, described levelness adjustment structure comprises bracket, strutting piece and stay pipe, described bracket is provided with the securing member of the described bracket of multiple connection and described stay pipe, described strutting piece is arranged on described bracket lower surface or described stay pipe upper surface and between described bracket and described stay pipe, to support described bracket, make each described securing member that the distance between described bracket and described stay pipe can be regulated to regulate the levelness of described bracket.
2. levelness adjustment structure according to claim 1, is characterized in that, described strutting piece is fixedly installed on the top of described stay pipe, and the upper surface of described strutting piece is protruding arcwall face.
3. levelness adjustment structure according to claim 2, is characterized in that, the basal surface of described bracket is provided with the groove corresponding with the arcwall face of described strutting piece, and the arcwall face of described strutting piece contacts with described groove.
4. levelness adjustment structure according to claim 1, is characterized in that, described strutting piece is fixedly installed on the bottom of described bracket, and the lower surface of described strutting piece is protruding arcwall face.
5. levelness adjustment structure according to claim 4, is characterized in that, the top of described stay pipe is provided with the groove corresponding with the arcwall face of described strutting piece, and the lower surface of described strutting piece contacts with described groove.
6. levelness adjustment structure as claimed in any of claims 1 to 5, is characterized in that, described strutting piece and multiple described securing member to surround the middle part of figure corresponding.
7. according to the levelness adjustment structure in claim 6 described in any one, it is characterized in that, described securing member is four, and four described securing members are symmetric relative to the center of described strutting piece.
8. levelness adjustment structure as claimed in any of claims 1 to 5, it is characterized in that, described bracket is provided with multiple first screwed hole, described stay pipe is provided with multiple second screwed hole, described securing member comprises screw, described screw passes described first screwed hole and inserts to be connected with described stay pipe by described bracket in described second screwed hole, and described screw can coordinate to adjust the distance between described bracket and described stay pipe with described first screwed hole and described second screwed hole.
9. a lowering or hoisting gear, is characterized in that, described lowering or hoisting gear comprises the levelness adjustment structure in claim 1 to 8 described in any one.
10. a chamber, is characterized in that, described chamber comprises lowering or hoisting gear according to claim 9.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310490338.5A CN104576469A (en) | 2013-10-14 | 2013-10-14 | Levelness adjusting structure, lifting device and cavity |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310490338.5A CN104576469A (en) | 2013-10-14 | 2013-10-14 | Levelness adjusting structure, lifting device and cavity |
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| CN104576469A true CN104576469A (en) | 2015-04-29 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201310490338.5A Pending CN104576469A (en) | 2013-10-14 | 2013-10-14 | Levelness adjusting structure, lifting device and cavity |
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Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN107785301A (en) * | 2016-08-24 | 2018-03-09 | 北京北方华创微电子装备有限公司 | Level(l)ing device, pressure ring assembly and semiconductor processing equipment |
| CN108695228A (en) * | 2017-04-10 | 2018-10-23 | 北京北方华创微电子装备有限公司 | Levelling mechanism, wafer lift mechanism and the reaction chamber of wafer carrier |
| CN108735587A (en) * | 2017-04-17 | 2018-11-02 | 北京北方华创微电子装备有限公司 | Fluid on-off mechanism and semiconductor processing equipment |
| CN111326438A (en) * | 2018-12-14 | 2020-06-23 | 北京北方华创微电子装备有限公司 | Leveling device and reaction chamber |
| CN111850517A (en) * | 2020-06-30 | 2020-10-30 | 北京北方华创微电子装备有限公司 | Lower electrode assembly and process chamber |
| CN113903703A (en) * | 2021-12-10 | 2022-01-07 | 上海陛通半导体能源科技股份有限公司 | Horizontal adjusting device of thimble mechanism |
| CN114599142A (en) * | 2022-03-07 | 2022-06-07 | 盛吉盛(宁波)半导体科技有限公司 | Plasma conditioning device, plasma conditioning method, plasma generating device, and semiconductor processing device |
| WO2023051437A1 (en) * | 2021-09-29 | 2023-04-06 | 北京北方华创微电子装备有限公司 | Semiconductor process device and wafer support structure thereof |
| CN117672942A (en) * | 2024-02-01 | 2024-03-08 | 深圳市森美协尔科技有限公司 | Level adjustment device and wafer detection system |
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| WO2023051437A1 (en) * | 2021-09-29 | 2023-04-06 | 北京北方华创微电子装备有限公司 | Semiconductor process device and wafer support structure thereof |
| CN113903703A (en) * | 2021-12-10 | 2022-01-07 | 上海陛通半导体能源科技股份有限公司 | Horizontal adjusting device of thimble mechanism |
| CN114599142A (en) * | 2022-03-07 | 2022-06-07 | 盛吉盛(宁波)半导体科技有限公司 | Plasma conditioning device, plasma conditioning method, plasma generating device, and semiconductor processing device |
| CN117672942A (en) * | 2024-02-01 | 2024-03-08 | 深圳市森美协尔科技有限公司 | Level adjustment device and wafer detection system |
| CN117672942B (en) * | 2024-02-01 | 2024-04-12 | 深圳市森美协尔科技有限公司 | Level adjustment device and wafer detection system |
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Address after: 100176 No. 8 Wenchang Avenue, Beijing economic and Technological Development Zone Applicant after: Beijing North China microelectronics equipment Co Ltd Address before: 100176 Beijing economic and Technological Development Zone, Wenchang Road, No. 8, No. Applicant before: Beifang Microelectronic Base Equipment Proces Research Center Co., Ltd., Beijing |
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Application publication date: 20150429 |
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