CN104569490B - 一种加速度计的z轴结构及其生产方法 - Google Patents
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CN201510050310.9A CN104569490B (zh) | 2015-01-30 | 2015-01-30 | 一种加速度计的z轴结构及其生产方法 |
US15/546,824 US20170356929A1 (en) | 2015-01-30 | 2015-07-23 | Z-axis structure of accelerometer and manufacturing method of z-axis structure |
PCT/CN2015/084966 WO2016119417A1 (zh) | 2015-01-30 | 2015-07-23 | 一种加速度计的z轴结构及其生产方法 |
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Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
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US20170356929A1 (en) * | 2015-01-30 | 2017-12-14 | Goertek, Inc. | Z-axis structure of accelerometer and manufacturing method of z-axis structure |
CN104931729B (zh) * | 2015-06-29 | 2017-12-05 | 歌尔股份有限公司 | 一种mems三轴加速度计 |
CN106199070B (zh) * | 2016-06-24 | 2019-10-11 | 东南大学 | 单锚点支撑式硅微谐振式加速度计 |
CN107167631B (zh) * | 2017-06-07 | 2019-09-03 | 西人马联合测控(泉州)科技有限公司 | 电荷输出元件及环形剪切式压电加速度传感器 |
JP6958533B2 (ja) * | 2018-11-28 | 2021-11-02 | 横河電機株式会社 | 振動式センサ装置 |
JP7135901B2 (ja) * | 2019-01-31 | 2022-09-13 | セイコーエプソン株式会社 | 慣性センサー、電子機器および移動体 |
CN110568220B (zh) * | 2019-08-27 | 2021-04-30 | 华东光电集成器件研究所 | 一种抗干扰耐过载mems加速度计 |
CN110879303B (zh) * | 2019-10-23 | 2022-01-04 | 杭州士兰微电子股份有限公司 | 一种惯性传感器及其控制方法 |
Citations (5)
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US6718605B2 (en) * | 1997-09-08 | 2004-04-13 | The Regents Of The University Of Michigan | Single-side microelectromechanical capacitive accelerometer and method of making same |
CN1655335A (zh) * | 2004-02-13 | 2005-08-17 | 株式会社电装 | 检测半导体动态量传感器的方法 |
CN101317325A (zh) * | 2005-07-28 | 2008-12-03 | 飞思卡尔半导体公司 | Mems器件中的应力释放机构及其制造方法 |
CN101576570A (zh) * | 2008-05-08 | 2009-11-11 | 芯巧科技股份有限公司 | 悬置式感应装置及其制作方法 |
CN204405695U (zh) * | 2015-01-30 | 2015-06-17 | 歌尔声学股份有限公司 | 一种加速度计的z轴结构 |
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US6215645B1 (en) * | 1998-05-01 | 2001-04-10 | Motorola, Inc. | Differential capacitor structure |
TWI467179B (zh) * | 2011-12-02 | 2015-01-01 | Pixart Imaging Inc | 三維微機電感測器 |
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Patent Citations (5)
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US6718605B2 (en) * | 1997-09-08 | 2004-04-13 | The Regents Of The University Of Michigan | Single-side microelectromechanical capacitive accelerometer and method of making same |
CN1655335A (zh) * | 2004-02-13 | 2005-08-17 | 株式会社电装 | 检测半导体动态量传感器的方法 |
CN101317325A (zh) * | 2005-07-28 | 2008-12-03 | 飞思卡尔半导体公司 | Mems器件中的应力释放机构及其制造方法 |
CN101576570A (zh) * | 2008-05-08 | 2009-11-11 | 芯巧科技股份有限公司 | 悬置式感应装置及其制作方法 |
CN204405695U (zh) * | 2015-01-30 | 2015-06-17 | 歌尔声学股份有限公司 | 一种加速度计的z轴结构 |
Non-Patent Citations (1)
Title |
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基于MEMS技术的SOI微加速度计的研究与设计;吴鹏飞;《中国优秀硕士学位论文全文数据库 工程科技Ⅱ辑》;20130115;C030-53 * |
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