CN104545794A - Wireless passive non-invasive MEMS intraocular pressure sensor and manufacturing method thereof - Google Patents
Wireless passive non-invasive MEMS intraocular pressure sensor and manufacturing method thereof Download PDFInfo
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- CN104545794A CN104545794A CN201510065578.XA CN201510065578A CN104545794A CN 104545794 A CN104545794 A CN 104545794A CN 201510065578 A CN201510065578 A CN 201510065578A CN 104545794 A CN104545794 A CN 104545794A
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Abstract
The invention discloses a non-invasive wireless passive intraocular pressure sensor and a manufacturing method thereof. The intraocular pressure sensor comprises a flexible substrate layer, a first electrode layer, an intermediate layer, a second electrode layer and a flexible substrate layer, wherein a dielectric layer of a central capacitor is formed by a part of the intermediate layer, and a polar plate of the central capacitor is formed by corresponding parts of the first electrode layer and the second electrode layer; and the flexible substrate layers are prepared by using ParyleneC thin films, and the intermediate layer is prepared by using a PDMS material. The non-invasive wireless passive intraocular pressure sensor disclosed by the invention is simple and feasible in the whole set of process; the series connection between the capacitor and an inductor can be achieved by using extra edge capacitance, and a simple structure can be achieved; and a sensor electrode is simple to manufacture, the prepared electrode is low in resistivity, the acquisition of relatively high quality factors can be facilitated, and the signal-to-noise ratio of detection signals can be improved.
Description
Technical field
The present invention relates to microsensor manufacture field, relate more specifically to a kind of wireless and passive non-intrusion type MEMS intraocular pressure sensor and preparation method thereof.
Background technology
Glaucoma is because pathologic intraocular pressure raises a kind of disease causing characteristic optic nerve lesion and defect of visual field, is the irreversible blinding oculopathy in the 2nd, the whole world.The rising of intraocular pressure is the glaucomatous important indicator of Diagnosis and Treat.Some patients detection of eyeball tension within the consulting hours is normal, but still has occurred glaucoma blinding.Analyze and find, the fluctuation of glaucoma patient intraocular pressure in 24h (hour) is comparatively large, the some time beyond outpatient service, such as, reaches peak value when sleep or early morning.Thus accurate and continuous print detection of eyeball tension has very important significance to glaucomatous diagnosis and treatment in time.
Traditional tonometry, such as, refer to that survey method, direct method and tonometer detection method etc. all cannot realize intraocular pressure continuous detecting.And the Novel ocular pressure sensor adopting MEMS technology to prepare can realize intraocular pressure 24h monitors continuously.
Novel ocular pressure sensor can be divided into implanted and non-intrusion type according to sensor the need of implantation ocular tissue.
Early stage implanted intraocular pressure sensor adopts silicon as substrate, obtains electrode structure by techniques such as etching, sputterings.But passive type implanted sensor requires to minimize device size on the one hand, thus minimizes implantation infringement; Require sensor and external monitor portion coupling effect on the other hand by force, thus increase the distance detected, this forces sensors inductance not easily too small, impels the formation of the collapsible sensor construction based on flexible substrate.This Origami sensor is folding to be implanted, thus minimizes implantation infringement, launches after implanting, thus maximization coupling effect.This sensor utilizes flexible material, and such as SU-8, ParyleneC etc. are as substrate, obtains electrode structure by the technique such as photoetching and sputtering.Although accordion structure makes sensor, implanted minimizes, and implants ocular tissue, still cause irreversible wound by surgical operation.
Along with the development of non-invasive sensors, the tonometry without the need to Operation can be realized, avoid the irreversible damage that ocular tissue is caused.Early stage non-intrusion type intraocular pressure sensor detects and utilizes piezoresistive effect, and the transmission of signal adopts wired mode, brings sense of discomfort during measurement.During preparation, casting method is utilized to be wrapped in flexible substrate by varistor.In order to overcome the shortcoming of wire transmission, the later stage adopts integrated circuit to realize Signal transmissions.But IC design is complicated, system power dissipation is comparatively large, and heating is comparatively serious, the comfort worn is reduced, and the size of device is larger.The recent wireless and passive non-invasive sensors structure occurred based on L-C structure, but the connection that this structure adopts the mode of wired bonding to realize between inductance and electric capacity, there is certain difficulty in wired being bonded in processing technique, and the making of electrode employing is the mode etching Copper Foil, the thickness of Copper Foil is thin, operating difficulties.
Except the difficulty in above-mentioned preparation, non-invasive sensors needs to be worn on as contact lens on cornea, has requirement like this to sensor substrate, on the one hand needs flexible substrate, realizes the conformal of sensor and cornea; Backing material is needed to have bio-compatibility on the other hand.And when this sensor adopts fluid silicone rubber as substrate, what need to adopt casting method to realize with cornea is conformal, needs by mould, have higher requirement to mould.
In addition, sensor relates to the preparation of inductance and capacitance electrode when making, unlikely too small in order to ensure the quality factor (Q-value) of the C-L-C series circuit in sensor, require that electrode impedance is as far as possible little, and preparation process should be tried one's best simply.Sensing unit due to sensor is electric capacity, therefore in manufacturing process, needs the electric capacity produced by considering to be presser sensor variable capacitance.Namely necessary choosing to be carried out to the structure and material making electric capacity.What the preparation of sensor electrode adopted usually is etching Copper Foil method, although by selecting thicker Copper Foil can ensure higher Q-value, thin copper foil carrying out graphical, easily causing electrode open circuit, fetch operating difficulties, increasing the difficulty of preparation process.In addition, during etching Copper Foil, need the strict concentration controlling time and the etching liquid etched, prevented and carve and serious lateral erosion, cause the little lines of the inductance of sensor to occur the phenomenon of fracture.
Summary of the invention
For one of above-mentioned multiple technical problem, the present invention adopts a kind of intraocular pressure sensor of C-L-C cascaded structure, to realize the wireless connections of inductance and electric capacity; Adopt flexible material to do substrate, with solve non-invasive sensors conformal time to the too high requirement of mould because flexible material has good bio-compatibility, and belong to thermoplastic, moulding condition is simple; The mode of electro-coppering is adopted to prepare sensor electrode, to solve the excessively thin operating difficulties caused of Copper Foil in the inductance of non-invasive sensors electrode and electric capacity preparation process.
Thus, as one aspect of the present invention, the invention provides a kind of non-intrusion type intraocular pressure sensor, it is characterized in that, adopt the cascaded structure of a kind of C-L-C, wherein two electric capacity are respectively edge capacitance and central electric capacity, and described edge capacitance plays a part to connect described inductance and described central electric capacity, and the capacitance of described edge capacitance is much larger than the capacitance of described central electric capacity.
Wherein, described intraocular pressure sensor comprises: flexible substrate layer, the first electrode layer, intermediate layer, the second electrode lay and flexible substrate layer, and the part in described intermediate layer forms the dielectric layer of described central electric capacity, the corresponding part of described first electrode layer and the second electrode lay forms the pole plate of described central electric capacity.
Wherein, described flexible substrate layer selects Parylene C thin-film material to make.
Wherein, the thickness of described flexible substrate layer is 5-25 μm.
Wherein, described intermediate layer selects polydimethyl siloxane material to make.
Wherein, the mode of electro-coppering is adopted to prepare described first electrode layer and the second electrode lay.
Wherein, described intraocular pressure sensor is MEMS sensor, and described intraocular pressure sensor is curved surface sensor.
As another aspect of the present invention, present invention also offers a kind of preparation method of non-intrusion type wireless and passive intraocular pressure sensor, comprise the following steps:
Utilize vaccum gas phase sedimentation method, substrate deposits the flexible material that one deck has bio-compatibility;
Deposition chromium/gold seeds layer on described flexible material;
Described Seed Layer is coated with photoresist and photoetching, then copper electroplating layer on photoengraving pattern;
Remove the photoresist in non-copper electroplating layer region, the chromium/gold seeds layer in the described region of etching removing;
The described structure obtained is coated with polydimethylsiloxane as intermediate layer;
Repeat the chip up and down that above-mentioned steps obtains described intraocular pressure sensor respectively, utilize polydimethylsiloxane to carry out bonding as intermediate layer;
The structure obtained is peeled off from described substrate, continue to adopt pressure sintering to carry out moulding to the described structure obtained, described pressure sintering is for being fixed on the described structure in curve mold under vacuum described in heat treated, treatment temperature is 170 DEG C, and the processing time is no less than 30min;
By the structure that obtains from described curve mold sur-face peeling, obtain the product of final described intraocular pressure sensor.
Wherein, described in there is bio-compatibility flexible material be Parylene C thin film, thickness is 5-25 μm.
Wherein, in the step of the chromium/gold seeds layer in the described region of described etching removing, employing ammonia and the sedimental step of hydrogen peroxide dissolving removal is also comprised.
Known based on technique scheme, the present invention utilizes the material that Paralyne C and PDMS two kinds of bio-compatibilities are good, and due to the Young's modulus difference of this bi-material, achieve the making of pressure-sensitive variable capacitance, whole set process is simple; Adopt extra edge capacitance to realize connecting of electric capacity and inductance, structure is simple; Only need adopt additional edge capacitance, utilize this electric capacity upper and lower base plate to be connected with ring-shaped inductors with central electric capacity respectively, thus realize connecting of inductance and central electric capacity.In addition, edge capacitance is much larger than central electric capacity, and the total capacitance after series connection depends on central electric capacity, and the effect of edge capacitance is only to connect inductance and electric capacity; Therefore, adopt this structure, simply can realize connecting of inductance and electric capacity; Sensor electrode makes simple, and prepared electrode resistance rate is low, is conducive to obtaining higher quality factor, improves the signal to noise ratio of detection signal.
Accompanying drawing explanation
Fig. 1 is the structural representation of chip on non-intrusion type intraocular pressure sensor of the present invention;
Fig. 2 is the structural representation of chip under non-intrusion type intraocular pressure sensor of the present invention;
Fig. 3 is the flow chart of steps of the first step to the tenth step of non-intrusion type intraocular pressure sensor preparation process of the present invention;
Fig. 4 is the structural representation of non-intrusion type flat surface sensor of the present invention;
Fig. 5 is the structural representation that non-intrusion type curved surface sensor of the present invention is attached at die surface.
Description of reference numerals is as follows:
1, edge capacitance; 2, central electric capacity; 3, ring-shaped inductors; 4, substrate; 5, flexible substrate layer; 6, Seed Layer; 7, photoresist; 8, electrode layer; 9, intermediate layer; 10, mould; 11, curved surface sensor.
Detailed description of the invention
For making the object, technical solutions and advantages of the present invention clearly understand, below in conjunction with specific embodiment, and with reference to accompanying drawing, the present invention is described in further detail.
Non-intrusion type wireless and passive intraocular pressure sensor of the present invention, adopts the cascaded structure of a kind of C-L-C, and two electric capacity are respectively edge capacitance 1 and central electric capacity 2, and edge capacitance is for realizing the wireless connections of inductance and electric capacity.Wherein, edge capacitance 1 plays a part to connect ring-shaped inductors and central electric capacity.This circuit total capacitance is connected with central electric capacity 2 by edge capacitance 1 and obtains, and because edge capacitance 1 is much larger than central electric capacity 2, total capacitance is approximately equal to central electric capacity 2.Fig. 1 and Fig. 2 sets forth the schematic diagram of chip structure up and down of sensor.Wherein, upper chip comprises central electric capacity 2, ring-shaped inductors 3 and edge capacitance 1, and lower chip comprises central electric capacity 2 and edge capacitance 1.
For solve wireless and passive non-invasive sensors conformal time to the too high requirement of mould, the present invention adopts flexible material, such as C type Parylene (the C type of Parylene, be called for short Parylene C) do substrate, because this material has good bio-compatibility, and belonging to thermoplastic, moulding condition is simple.Parylene is a kind of new coating material that U.S. Union Carbide Co. developed in the sixties in last century, and main component is Parylene, can be divided into the models such as N-type, C type, HT type according to molecular structure.Wherein, C type has the transmitance of low-down hydrone and corrosive gas, and deposition growing speed ratio N-type is a lot of soon, and corresponding penetrating power is worse than N-type.
Sensor of the present invention mainly comprises 5 layers: ground floor is flexible substrate Parylene C thin film 5; The second layer is copper electrode layer 8; Third layer is the intermediate layer 9 of bonding, is also the dielectric layer of electric capacity, such as, adopts flexible material, preferred polydimethylsiloxane (PDMS); 4th layer is copper electrode layer 8; Layer 5 is the thin layer 5 of Parylene C.Adopt Parylene C thin film as substrate, parcel electrode structure, plays sealing function.Adopt PDMS as the intermediate layer 9 of bonding, be because the Young's modulus of PDMS is far below Parylene C, when pressurized produces deformation, intermediate layer 9, due to the extruding of the two-layer Parylene C of outermost, causes PDMS thickness to reduce, thus changes the capacitance of sensor.For solving the excessively thin operating difficulties caused of Copper Foil in wireless and passive non-invasive sensors electrode production process, the present invention adopts the mode of electro-coppering to prepare sensor electrode.
In addition, non-intrusion type wireless and passive intraocular pressure sensor of the present invention can make MEMS sensor, thus realize that volume is little, the simple object efficiently of preparation technology.In order to conformal with eye sphere, this MEMS sensor can be made into curved surface sensor, is described in detail below in conjunction with its preparation technology.
As shown in the step (1) in Fig. 3 to (10), the preparation technology of non-intrusion type wireless and passive plane MEMS intraocular pressure sensor of the present invention is as described below:
The first step: utilize silicon/glass as substrate 4, and through cleaning treatment, rotary coating remover, is convenient to the stripping of later stage Parylene C from substrate;
Second step: utilize vacuum vapor deposition method, substrate deposits the Parylene C thin film 5 that one deck has bio-compatibility, and thickness is 5-25 μm, and preference is as being 20 μm;
3rd step: the mode adopting electron beam transpiration, deposition one deck Seed Layer chromium/gold (Cr/Au) 6, thickness is
4th step: rotary coating photoresist AZ4620 photoetching, glue thickness is not less than 15 μm;
5th step: electroplate in the electroplate liquid of copper sulfate and sulphuric acid, electroplating current is about 45mA, and the thickness of electrodeposited coating copper (Cu) is not more than photoresist 7 thickness.Fig. 3 gives the figure of the electrode after plating;
6th step: utilize and soak acetone method removal photoresist 7, can be suitably ultrasonic, but power can not be too high;
7th step: etching Cr/Au, in etching process, can generate one deck grey black deposit at electrode surface, need to utilize ammonia to add a little hydrogen peroxide dissolve deposits;
8th step: the ratio of rotary coating PDMS, PDMS and firming agent is 12: 1, obtains flexible larger intermediate layer 9.After solidification, PDMS thickness is 20 μm.
9th step: above-mentioned 8 steps can obtain up/down chip, utilizes PDMS to carry out bonding as intermediate layer 9;
Tenth step: thin film is peeled off from substrate 4, obtains flat surface sensor.
In order to be made into curved surface further, as shown in Figure 5, the preparation technology of non-intrusion type wireless and passive intraocular pressure sensor of the present invention also comprises:
11 step: adopt pressure sintering to carry out moulding to flat surface sensor.Pressure sintering process is: first device is adhered to the die surface with cornea same curvature; Under vacuum, be heated to 170 DEG C, pressurization is not less than 1Kpa, and the processing time is no less than 30min; Finally take out mould, and device is peeled off from die surface.
Through above-mentioned steps, just curved surface sensor can be obtained.Fig. 4 gives the structure of flat surface sensor, adheres to the sensor construction on mould 10 surface when Fig. 5 gives moulding, it is peeled off from mould 10 and just obtains curved surface sensor 11.
Known by a large amount of tests, sensor construction of the present invention is simple, sensor electrode makes simple, prepared electrode resistance rate is low, is conducive to obtaining higher quality factor, improves the signal to noise ratio of detection signal, in addition, utilize the material that Paralyne C and PDMS two kinds of bio-compatibilities are good, achieve the making of pressure-sensitive variable capacitance, whole set process is simple.
Above-described specific embodiment; object of the present invention, technical scheme and beneficial effect are further described; be understood that; the foregoing is only specific embodiments of the invention; be not limited to the present invention; within the spirit and principles in the present invention all, any amendment made, equivalent replacement, improvement etc., all should be included within protection scope of the present invention.
Claims (10)
1. a non-intrusion type wireless and passive intraocular pressure sensor, it is characterized in that, adopt the cascaded structure of a kind of C-L-C, wherein two electric capacity are respectively edge capacitance and central electric capacity, described edge capacitance plays a part to connect described inductance and described central electric capacity, and the capacitance of described edge capacitance is much larger than the capacitance of described central electric capacity.
2. non-intrusion type wireless and passive intraocular pressure sensor according to claim 1, wherein said intraocular pressure sensor comprises: flexible substrate layer, the first electrode layer, intermediate layer, the second electrode lay and flexible substrate layer, and the part in described intermediate layer forms the dielectric layer of described central electric capacity, the corresponding part of described first electrode layer and the second electrode lay forms the pole plate of described central electric capacity.
3. non-intrusion type wireless and passive intraocular pressure sensor according to claim 2, wherein said flexible substrate layer selects Parylene C thin-film material to make.
4. non-intrusion type wireless and passive intraocular pressure sensor according to claim 2, the thickness of wherein said flexible substrate layer is 5-25 μm.
5. non-intrusion type wireless and passive intraocular pressure sensor according to claim 2, wherein said intermediate layer selects polydimethyl siloxane material to make.
6. non-intrusion type wireless and passive intraocular pressure sensor according to claim 2, wherein adopts the mode of electro-coppering to prepare described first electrode layer and the second electrode lay.
7. non-intrusion type wireless and passive intraocular pressure sensor according to claim 2, wherein said intraocular pressure sensor is MEMS sensor, and described intraocular pressure sensor is curved surface sensor.
8. a preparation method for non-intrusion type wireless and passive intraocular pressure sensor, comprises the following steps:
Utilize vaccum gas phase sedimentation method, substrate deposits the flexible material that one deck has bio-compatibility;
Deposition chromium/gold seeds layer on described flexible material;
Described Seed Layer is coated with photoresist and photoetching, then copper electroplating layer on photoengraving pattern;
Remove the photoresist in non-copper electroplating layer region, the chromium/gold seeds layer in the described region of etching removing;
The described structure obtained is coated with polydimethylsiloxane as intermediate layer;
Repeat the chip up and down that above-mentioned steps obtains described intraocular pressure sensor respectively, utilize polydimethylsiloxane to carry out bonding as intermediate layer;
The structure obtained is peeled off from described substrate, continue to adopt pressure sintering to carry out moulding to the described structure obtained, described pressure sintering is for being fixed on the described structure in curve mold under vacuum described in heat treated, treatment temperature is 170 DEG C, and the processing time is no less than 30min;
By the structure that obtains from described curve mold sur-face peeling, obtain the product of final described intraocular pressure sensor.
9. the preparation method of non-intrusion type wireless and passive intraocular pressure sensor according to claim 8, the wherein said flexible material with bio-compatibility is Parylene C thin film, and thickness is 5-25 μm.
10. the preparation method of non-intrusion type wireless and passive intraocular pressure sensor according to claim 8, wherein also comprises and adopts ammonia and hydrogen peroxide to dissolve the sedimental step of removal in the step of the chromium/gold seeds layer in the described region of described etching removing.
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Cited By (5)
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| CN105962887A (en) * | 2016-04-13 | 2016-09-28 | 华中科技大学 | Non-invasive ocular pressure detection sensor based on micro-fluidic technology |
| CN108056755A (en) * | 2017-12-08 | 2018-05-22 | 华中科技大学 | A kind of conformal microfluidic device preparation method of curved surface |
| CN110407161A (en) * | 2019-07-12 | 2019-11-05 | 华中科技大学 | A kind of soft curved surface micro-fluidic device manufacturing method based on conformal bonding technology |
| CN111115556A (en) * | 2019-12-30 | 2020-05-08 | 青岛歌尔智能传感器有限公司 | Packaging method and packaging structure of micro-electro-mechanical system sensor |
| TWI811092B (en) * | 2022-09-06 | 2023-08-01 | 國立高雄科技大學 | Implantable rotator cuff muscle suture spacer with pressure sensing |
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| CN103148977A (en) * | 2013-02-27 | 2013-06-12 | 东南大学 | Flexible-substrate-based passive wireless pressure sensor with self-packaging function |
| CN103293337A (en) * | 2013-05-15 | 2013-09-11 | 中北大学 | Wireless passive capacitive accelerometer |
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| US6939299B1 (en) * | 1999-12-13 | 2005-09-06 | Kurt Petersen | Implantable continuous intraocular pressure sensor |
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| TWI811092B (en) * | 2022-09-06 | 2023-08-01 | 國立高雄科技大學 | Implantable rotator cuff muscle suture spacer with pressure sensing |
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