CN104535984B - Optical lens of dual-channel composite wavelength near infrared laser radar transmitting system - Google Patents

Optical lens of dual-channel composite wavelength near infrared laser radar transmitting system Download PDF

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Publication number
CN104535984B
CN104535984B CN201410828917.0A CN201410828917A CN104535984B CN 104535984 B CN104535984 B CN 104535984B CN 201410828917 A CN201410828917 A CN 201410828917A CN 104535984 B CN104535984 B CN 104535984B
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lens
reflecting mirror
optical
light
distance
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CN104535984A (en
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王占山
沈正祥
童广德
程鑫彬
焦宏飞
张锦龙
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Tongji University
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Tongji University
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01SRADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/481Constructional features, e.g. arrangements of optical elements
    • G01S7/4814Constructional features, e.g. arrangements of optical elements of transmitters alone
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/10Beam splitting or combining systems

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Optics & Photonics (AREA)
  • Lenses (AREA)

Abstract

The invention relates to an optical lens of a dual-channel composite wavelength near infrared laser radar transmitting system. Two optical channels share a laser light source and a preceding stage beam expanding system, the two channels output parallel beams different in aperture, time-sharing work is conducted through switching by a conversion lens, the requirements for compactness and low cost are met, and modular design is achieved. According to the shared preceding stage beam expanding system, two optical materials are used for achromatism design, and the requirement for a composite operating wavelength is met. Due to change of the output wavelength of the laser light source, the transmitting system can achieve the multiple working modes that the composite operating wavelength is achieved and the double transmitting channels output the parallel light beams different in aperture. The optical axes of the two optical channels are parallel, so after testing equipment and a target to be measured are adjusted, the target to be measured can be measured in different wave bands in different testing modes only by adjusting the operating wavelength of the transmitting system and moving the switching lens, and measuring convenient is remarkably improved. In consideration of the engineering application aspect, the mode that the large-aperture refraction and reflection channel is fixed and a reflection switching mechanism is added to the small-aperture channel is adopted for the optical lens so as to ensure the switching resetting precision of the transmitting system.

Description

A kind of dual pathways composite wavelength coherent infrared radar emission system optical lens
Technical field
The present invention relates to optical lens are and in particular to a kind of dual pathways composite wavelength coherent infrared radar emission system optics Camera lens.
Background technology
The laser scattering properties of target are one of most important optical characteristics, are that laser measurement system detects, identifies target Foundation, the laser scattering properties of destination object determine the important technological parameters of laser measurement system or even the choosing of working system Select.Laser dacryocystoplasty(LRCS)The direction scattering propertiess of optical maser wavelength, polarization, targeted surface material can be reflected comprehensively And the impact to target laser scattering propertiess for the various factors such as roughness, target geometric shapes.Carry out target laser scattering Feature measurement, obtains corresponding data, the laser light scattering section of statistics target(LRCS)Characteristic, can for laser radar development, test, Emulate and using offer technical support.
It is proposed that a series of laser radar in the measurement Research to air, wind field etc., at present composite wavelength is swashed Optical radar, frequently with achromat-design, realizes the mode of multi-wavelength Shared aperture output, and patent CN201310586672.0 discloses A kind of Fine Particles spatial and temporal distributions Raman Mie scattering lidar measurement apparatus, device is operated in 532nm, 355nm and 387nm Wavelength, transmitting optical design uses single multi-wavelength coupling firing telescope, but only one of which transmission channel.Another Scheme is the transmission channel using multiple Single wavelength, and such as patent CN200910185155.6 discloses a kind of laser radar and symmetrically divides Cloth beam emissions method of reseptance and device, using independent transmission design and the method for reseptance of multiple wavelength light beams, multiple wavelength Cannot public transmission channel, and the clear aperture of transmission channel is identical.
In order to realize to the scale model difference unified light beam of optical maser wavelength and the radar of small-bore light beam scan mode Scattering section test and analysis, need to set up a set of Laser dacryocystoplasty measuring system.According to actual needs, unified survey The collimated light beam bore of examination and small-bore sweep test is respectively 250mm and 15mm, and test wavelength point is 0.860 μm and 1.064 μ m.The dual pathways proposed by the present invention, the optical lens of compound operation wavelength near-infrared laser radar emission system, realize different mouths The output of the collimated light beam in footpath not yet has been reported that.
Content of the invention
It is an object of the invention to provide a kind of dual pathways composite wavelength coherent infrared radar emission system optical lens, this Invention shares LASER Light Source and one-level beam-expanding system by two-way optical channel, and two-way optical channel exports the parallel of different bores Light beam, carries out time-sharing work by conversion mirror switching, and the requirement meeting densification and low cost is it is achieved that modularized design; Shared one-level beam-expanding system carries out achromat-design using two kinds of optical materials, meets the demand of compound operation wavelength, passes through Change LASER Light Source output wavelength, system enables compound operation wavelength, double optics passage exports different bore collimated light beams Multi-operation mode.It has the characteristics that level of integrated system height, easy switching, high precision, good reliability, and lens construction rationally, Low cost.
A kind of dual pathways composite wavelength coherent infrared radar emission system optical lens proposed by the present invention, including mutually flat Wavelength tunable laser sources and one-level that the two-way optical channel of row, moveable switching mechanism and two-way optical channel share Beam-expanding system;In the described two-way optical channel being parallel to each other, the one-level that first via optical channel includes setting gradually expands Microscope group and two grades expand reflection transmitting microscope group, the second road optical channel include the shared one-level extender lenses group setting gradually and Diversing lens group;Described two-way optical channel shares one-level extender lenses group, described one-level extender lenses group by the first lens 1, Second lens 2, the 3rd lens 3 and the 4th lens 4 form, and described two grades expand reflection transmitting microscope group and include the first reflecting mirror 7 He Second reflecting mirror 8, described diversing lens group includes the 5th lens 5 and the 6th lens 6, and described moveable switching mechanism includes one 4th reflecting mirror 10 of moveable 3rd reflecting mirror 9 of block and one piece of fixation parallel with it is constituted, wherein:First lens the 1, the 3rd Lens 3, the 5th lens 5 are concavees lens, and the second lens 2, the 4th lens 4, the 6th lens 6 are convex lenss, the first reflecting mirror 7 For convex aspheric surface reflecting mirror, the second reflecting mirror 8 is recessed non-spherical reflector, and the 3rd reflecting mirror 9 and the 4th reflecting mirror 10 are flat Face reflecting mirror;The light inlet alignment wavelengths tunable laser sources 11 of the first lens 1, the light-emitting window be aligned second of the first lens 1 is saturating The light inlet of mirror 2, the light-emitting window of the second lens 2 is directed at the light inlet of the 3rd lens 3, and the 4th lens 4 light-emitting window be aligned first is anti- Penetrate the light inlet of mirror 7, the light-emitting window of the first reflecting mirror 7 is directed at the light inlet of the second reflecting mirror 8, makes first via optical channel work Make;When the 4th lens 4 light-emitting window is directed at the light inlet of the 3rd reflecting mirror 9, the light-emitting window of the 3rd reflecting mirror 9 is directed at the 4th reflecting mirror 10 light inlet, during the light inlet of light-emitting window be aligned the 5th lens 5 of the 4th reflecting mirror 10, makes the second road optical channel work; By the switching of mobilizable 3rd reflecting mirror 9, realize the mutual switching of two-way optical channel.
In the present invention, the first lens front and rear surfaces range of curvature radius of one-level extender lenses group be followed successively by -12mm ~ - 14mm and 12mm ~ 14mm, optical thickness is 2.5mm ~ 3.5mm, and optical material is BK7 glass;Table before and after the second described lens Curvature radius scope is followed successively by 17mm ~ 19mm and -94mm ~ -96mm, optical thickness scope 2.5mm ~ 3.5mm, and optical material is F2 glass;The 3rd described lens front and rear surfaces range of curvature radius is followed successively by -80mm ~ -82mm and 36mm ~ 38mm, and optics is thick Degree scope 6mm ~ 8mm, optical material is F2 glass;The 4th described lens front and rear surfaces range of curvature radius be followed successively by 38mm ~ 40mm and -32mm ~ -34mm, optical thickness scope 6mm ~ 8mm, optical material is BK7 glass;The song of the first described reflecting mirror 7 Rate radius is 47mm ~ 50mm, and asphericity coefficients are -0.9~-1.1;The radius of curvature of the second described reflecting mirror 8 be 748mm ~ 752mm, asphericity coefficients are -0.9~-1.1;The 5th described lens front and rear surfaces range of curvature radius be followed successively by 559mm ~ 561mm and 133mm ~ 136mm, optical thickness scope 4mm ~ 6mm, optical material is F2 glass;Table before and after the 6th described lens Curvature radius scope is followed successively by 147mm ~ 150mm and plane, optical thickness scope 4mm ~ 6mm, and optical material is BK7 glass. Wherein:Regulation in figure all optical elements left-hand face is front surface, and right lateral surface is rear surface.
In the present invention, the distance between the first lens and the second lens are 0.5mm~1mm;The second described lens and The distance between three lens are 93mm~96mm;The distance between the 3rd described lens and the 4th lens are 0.5mm~1mm; The distance between the 4th described lens and the first reflecting mirror are 470mm~490mm;The first described reflecting mirror and the second reflection The distance between mirror is 350mm~352mm;The distance between the 4th described lens and the 3rd reflecting mirror are 18mm~22mm; The distance between the 3rd described reflecting mirror and the 4th reflecting mirror are 148mm~152mm;The 4th described reflecting mirror is saturating with the 5th The distance between mirror is 458mm ~ 462mm;The distance between the 5th described lens and the 6th lens are 1.5mm~2.5mm.
The beneficial effects of the present invention is:Expand and be using the adjustable LASER Light Source of same output wavelength and shared one-level System, the first optical channel is followed by reflective beam expanding lens, and the second optical path is followed by lens group composition emission system, and two passages are defeated Go out the collimated light beam of different bores, time-sharing work is carried out by the switching of plane conversion mirror, meet densification and inexpensive wanting Ask it is achieved that modularized design;Shared one-level beam-expanding system carries out achromat-design using two kinds of optical materials, meets multiple Close the demand of operation wavelength, by changing LASER Light Source output wavelength, systemic-function realizes compound operation wavelength, double transmission channel The multi-operation mode of the different bore collimated light beam of output.Two-way optical channel optical axis in the present invention is parallel, is adjusting test After equipment and target to be measured, only the operation wavelength of adjustment system and mobile handoff mirror can carry out different ripples to target to be measured Section, the measurement of different test pattern, significantly improve the convenience of measurement.Consider from application of engineering project, for guaranteeing system Switch back precision, employs fixing heavy caliber catadioptric passage, adds reflecting mirror switching mechanism to small-bore transmission channel Mode, actually can also select the first optical channel total refraction, add the structural shape reflecting switching in the second channel, but This structural shape is higher to the reseting precision requirement of reflecting mirror, and system margins are less than the reset tolerance of the present invention.
Brief description
A kind of first optical channel work of Fig. 1 dual pathways composite wavelength coherent infrared radar emission system optical lens When schematic diagram.
A kind of second optical channel work of Fig. 2 dual pathways composite wavelength coherent infrared radar emission system optical lens When schematic diagram.
During a kind of the first optical channel work of Fig. 3 dual pathways composite wavelength coherent infrared radar emission system optical lens Round energy profile.
During a kind of the first optical channel work of Fig. 4 dual pathways composite wavelength coherent infrared radar emission system optical lens Point range figure.
During a kind of the first optical channel work of Fig. 5 dual pathways composite wavelength coherent infrared radar emission system optical lens Wavefront distortion figure.
During a kind of the second optical channel work of Fig. 6 dual pathways composite wavelength coherent infrared radar emission system optical lens Round energy profile.
During a kind of the second optical channel work of Fig. 7 dual pathways composite wavelength coherent infrared radar emission system optical lens Point range figure.
During a kind of the second optical channel work of Fig. 8 dual pathways composite wavelength coherent infrared radar emission system optical lens Wavefront distortion figure.
In Fig. 1 and Fig. 2:1st, the first lens;2nd, the second lens;3rd, the 3rd lens;4th, the 4th lens;5th, the 5th lens;6、 6th lens;7th, the first reflecting mirror;8th, the second reflecting mirror;9th, the 3rd reflecting mirror;10th, the 4th reflecting mirror;11st, wavelength tunable laser Light source.
Specific embodiment
The invention will be further described with reference to the accompanying drawings and examples.
Fig. 1 and Fig. 2 show a kind of optimal reality of dual pathways composite wavelength coherent infrared radar emission system optical lens Apply a schematic diagram.First optical channel operation wavelength is respectively 0.860 μm and 1.064 μm, and focal power is 0, according to laser instrument Characteristic, full filed is 0.1 °, employs 6 lens altogether, expands group including shared 4 lens of prime beam-expanding system and secondary reflex 2 non-spherical reflectors, it is achieved that 83 times expand, export 250mm collimated light beam;One-level beam-expanding system employs BK7 and F2 two Plant combination of materials and achieve achromat-design.The operation wavelength of the second optical channel is respectively 0.860 μm and 1.064 μm, and light is burnt Spend for 0, adopt 8 lens in camera lens, optical lens shared one-level beam-expanding system with the first optical channel, by one group 2 45 ° Plane-parallel mirror carries out light path and turns back, and is followed by 2 diversing lens groups it is achieved that 5 times expand, the directional light of output 15mm Bundle.Two optical channels employ the combination of BK7 and F2 bi-material and achieve achromat-design, meet at 0.860 μm and 1.064 All can normal work under mum wavelength.After light path switched mirror the 3rd reflecting mirror is along-OY direction removal light path, the first optics Passage is in running order;After light path switched mirror the 3rd reflecting mirror moves into light path along OY direction, the second optical channel In running order.
Specifically, a kind of dual pathways composite wavelength coherent infrared radar emission system optical lens, including be parallel to each other Two-way optical channel, moveable switching surface reflecting mirror and shared one-level beam-expanding system;The described two-way being parallel to each other In optical channel, the first two grades of optical channel expands using aspheric surface two-mirror system, catadioptric with one-level beam-expanding system composition Penetrate emission system, including the shared one-level beam-expanding system, the first reflecting mirror and the second reflecting mirror that set gradually;Second optics leads to Road carries out light path by one group of 45 degree of plane-parallel mirror and turns back, including the shared prime beam-expanding system setting gradually, removable Dynamic switched mirror the 3rd reflecting mirror, the 4th reflecting mirror, the 5th lens, the 6th lens;Described shared one-level beam-expanding system bag Include the first lens, the second lens, the 3rd lens, the 4th lens.Two optical channels share wavelength tunable laser sources, laser instrument Output bore is 3mm, and operation wavelength is 0.860 μm ~ 1.064 μm near-infrared laser wavelength.
Before and after first lens, curved surface radius is followed successively by -13.05mm and 13.15mm, optical thickness scope 3mm, optics Material is BK7 glass;Second lens front and rear surfaces radius of curvature is followed successively by 18.07mm and -95.23mm, optical thickness scope 3mm, optical material is F2 glass;3rd lens front and rear surfaces radius of curvature is followed successively by -81.12mm and 36.76mm, optical thickness Scope 7mm, optical material is F2 glass;4th lens front and rear surfaces radius of curvature is followed successively by 39.15mm and -33.21mm, optics Thickness range 7mm, optical material is BK7 glass;Radius of curvature 48mm of the first reflecting mirror, asphericity coefficients are -1;Second is anti- The radius of curvature penetrating mirror is 750mm, and aspheric plane system is -1.5th lens front and rear surfaces range of curvature radius is followed successively by 559.25 Mm and 134.08mm, optical thickness scope 5mm, optical material is F2 glass;6th lens front and rear surfaces range of curvature radius according to Secondary for 148.94mm with plane, optical thickness scope 5mm, optical material is BK7 glass.
The distance between first lens and the second lens are 0.7mm;The distance between second lens and the 3rd lens are 95mm;The distance between 3rd lens and the 4th lens are 0.7mm;The distance between 4th lens and first reflecting mirror are 480mm;The distance between first reflecting mirror and the second reflecting mirror are 351mm;The distance between 4th lens and the 3rd reflecting mirror For 20mm;The distance between 3rd reflecting mirror and the 4th reflecting mirror are 150mm;The distance between 4th reflecting mirror and the 5th lens For 460mm;The distance between the 5th described lens and the 6th lens are 2mm.
Fig. 3~Fig. 5 show a kind of dual pathways composite wavelength coherent infrared radar emission system optical lens first lead to During road work, the round energy profile of the most preferred embodiment being made using Zemax optical design software, point range figure and wavefront distortion Figure, design input is the parallel laser of 3mm for bore, and wavelength is 0.860 μm and 1.064 μm, and output bore is the parallel of 250mm Light beam, visual field is 0.000 °, 0.057 °, 0.086 ° and 0.100 °, because positive direction visual field is identical with the picture matter of negative direction visual field, Positive direction visual field is only taken when therefore inputting.
Fig. 6~Fig. 8 show a kind of dual pathways composite wavelength coherent infrared radar emission system optical lens second lead to During road work, the round energy profile of the most preferred embodiment being made using Zemax optical design software, point range figure and wavefront distortion Figure, design input is the parallel laser of 3mm for bore, and wavelength is 0.860 μm and 1.064 μm, and output bore is the parallel of 15mm Light beam, visual field is 0.000 °, 0.057 °, 0.086 ° and 0.100 °.From Fig. 3~Fig. 8, first passage and second channel exist 0.860 μm and 1.064 μm of operation wavelength wavefront distortion is little, and uniformly, output beam quality is high for circle Energy distribution.
Attainable technical performance is the present invention at present:
First optical channel and the second optical channel are all the non-power system of directional light input and parallel light output;
First optical channel and the service band of the second optical channel:Between 0.860 μm ~ 1.064 μm;
The visual field of the first optical channel and the second optical channel is 0.100 °;
The output bore of the first optical channel is 250mm, and enlargement ratio is 83 times;
The output bore of the second optical channel is 15mm, and enlargement ratio is 5 times;
First optical channel is nearly diffraction limited system, 1.064 μm of operation wavelength output beam wavefront distortion≤PV 0.06waves;0.860 μm of operation wavelength output beam wavefront distortion≤PV 0.04waves;
Second optical channel is nearly diffraction limited system, 1.064 μm of operation wavelength output beam wavefront distortion≤PV 0.015waves;0.860 μm of operation wavelength output beam wavefront distortion≤PV 0.02waves.
The above-mentioned description to embodiment is technological thought to illustrate the invention and feature it is therefore intended that this technical field Those of ordinary skill be understood that and apply the present invention.Person skilled in the art obviously can easily implement to these Example makes various changes and modification, and General Principle described herein is applied in other embodiment without through creative Work.Therefore, the invention is not restricted to embodiment here, those skilled in the art according to the announcement of the present invention, for this The bright improvement made and modification are all included within the scope of the present invention.

Claims (3)

1. a kind of dual pathways composite wavelength coherent infrared radar emission system optical lens are it is characterised in that include being parallel to each other The wavelength tunable laser sources that two-way optical channel, moveable switching mechanism and two-way optical channel share and one-level expand Lens group;In the described two-way optical channel being parallel to each other, first via optical channel includes the one-level extender lenses setting gradually Group expands reflection transmitting microscope group with two grades, and the second road optical channel includes the shared one-level extender lenses group setting gradually and transmitting Lens group;Described two-way optical channel shares one-level extender lenses group, described one-level extender lenses group by the first lens (1), Two lens (2), the 3rd lens (3) and the 4th lens (4) composition, described two grades expand reflection transmitting microscope group and include the first reflecting mirror (7) and the second reflecting mirror (8), described diversing lens group includes the 5th lens (5) and the 6th lens (6), described movably cuts Converting mechanism includes one piece of moveable 3rd reflecting mirror (9) and the 4th reflecting mirror (10) of one piece of fixation parallel with it is constituted, its In:First lens (1), the 3rd lens (3), the 5th lens (5) are concavees lens, the second lens (2), the 4th lens (4), the 6th Lens (6) are convex lenss, and the first reflecting mirror (7) is convex aspheric surface reflecting mirror, and the second reflecting mirror (8) is recessed aspheric surface reflection Mirror, the 3rd reflecting mirror (9) and the 4th reflecting mirror (10) are plane mirror;The light inlet alignment wavelengths of the first lens (1) can Adjust LASER Light Source (11), the light-emitting window of the first lens (1) is directed at the light inlet of the second lens (2), the light-emitting window of the second lens (2) It is directed at the light inlet of the 3rd lens (3), the 4th lens (4) light-emitting window is directed at the light inlet of the first reflecting mirror (7), the first reflecting mirror (7) light-emitting window is directed at the light inlet of the second reflecting mirror (8), so that first via optical channel is worked;When the 4th lens (4) light-emitting window It is directed at the light inlet of the 3rd reflecting mirror (9), the light-emitting window of the 3rd reflecting mirror (9) is directed at the light inlet of the 4th reflecting mirror (10), the When the light-emitting window of four reflecting mirrors (10) is directed at the light inlet of the 5th lens (5), make the second road optical channel work;By movable The 3rd reflecting mirror (9) switching, realize the mutual switching of two-way optical channel.
2. dual pathways composite wavelength coherent infrared radar emission system optical lens according to claim 1, its feature exists The first lens front and rear surfaces range of curvature radius in one-level extender lenses group is followed successively by -12mm ~ -14mm and 12mm ~ 14mm, light Thickness is 2.5mm ~ 3.5mm, and optical material is BK7 glass;The second described lens front and rear surfaces range of curvature radius is successively For 17mm ~ 19mm and -94mm ~ -96mm, optical thickness scope 2.5mm ~ 3.5mm, optical material is F2 glass;Described the 3rd Lens front and rear surfaces range of curvature radius is followed successively by -80mm ~ -82mm and 36mm ~ 38mm, optical thickness scope 6mm ~ 8mm, optics Material is F2 glass;The 4th described lens front and rear surfaces range of curvature radius is followed successively by 38mm ~ 40mm and -32mm ~ -34mm, Optical thickness scope 6mm ~ 8mm, optical material is BK7 glass;The radius of curvature of the first described reflecting mirror 7 is 47mm ~ 50mm, Asphericity coefficients are -0.9~-1.1;The radius of curvature of the second described reflecting mirror 8 be 748mm ~ 752mm, asphericity coefficients be- 0.9~-1.1;The 5th described lens front and rear surfaces range of curvature radius is followed successively by 559mm ~ 561mm and 133mm ~ 136mm, light Learn thickness range 4mm ~ 6mm, optical material is F2 glass;The 6th described lens front and rear surfaces range of curvature radius is followed successively by 147mm ~ 150mm and plane, optical thickness is 4mm ~ 6mm, and optical material is BK7 glass.
3. dual pathways composite wavelength coherent infrared radar emission system optical lens according to claim 1, its feature exists It is 0.5mm~1mm in the distance between the first lens and the second lens;The distance between the second described lens and the 3rd lens For 93mm~96mm;The distance between the 3rd described lens and the 4th lens are 0.5mm~1mm;Described the 4th lens with The distance between first reflecting mirror is 470mm~490mm;The distance between the first described reflecting mirror and second reflecting mirror are 350mm~352mm;The distance between the 4th described lens and the 3rd reflecting mirror are 18mm~22mm;The 3rd described reflection The distance between mirror and the 4th reflecting mirror are 148mm~152mm;The distance between the 4th described reflecting mirror and the 5th lens are 458mm~462mm;The distance between the 5th described lens and the 6th lens are 1.5mm~2.5mm.
CN201410828917.0A 2014-12-29 2014-12-29 Optical lens of dual-channel composite wavelength near infrared laser radar transmitting system Expired - Fee Related CN104535984B (en)

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CN113391319B (en) * 2021-06-11 2022-07-29 森思泰克河北科技有限公司 Manufacturing method of laser radar shell and laser radar shell
CN115523863B (en) * 2022-10-18 2024-03-22 南京理工大学 Large-caliber phase-shifting interferometry surface shape measuring device

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