CN106842587B - The diffraction optical method realizes the shaping of Gaussian light into ultra-fine linear uniform light spots with ultra-high length-width ratio - Google Patents
The diffraction optical method realizes the shaping of Gaussian light into ultra-fine linear uniform light spots with ultra-high length-width ratio Download PDFInfo
- Publication number
- CN106842587B CN106842587B CN201510875267.XA CN201510875267A CN106842587B CN 106842587 B CN106842587 B CN 106842587B CN 201510875267 A CN201510875267 A CN 201510875267A CN 106842587 B CN106842587 B CN 106842587B
- Authority
- CN
- China
- Prior art keywords
- light
- flat
- ultra
- laser
- cylindrical lens
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
- G02B27/0927—Systems for changing the beam intensity distribution, e.g. Gaussian to top-hat
Abstract
The invention relates to a novel light path for shaping Gaussian light into superfine linear light spots with high length-width ratio by using a flat-top light diffraction optical element. The light path structure of the laser comprises a flat top light element, a ball lens and a cylindrical lens in sequence along the laser propagation direction. And obtaining the flat-top optical element, the ball lens and the cylindrical lens with corresponding specifications according to the laser source parameters and the target line light spot parameters, and obtaining the optimal working distance. The diffraction method has the advantages of simple and light structure, high light energy utilization rate, high design freedom degree and uniform light beam energy.
Description
Technical Field
The invention provides a novel optical path structure for shaping Gaussian light into superfine linear light spots with high length-width ratio by using a flat-top light diffraction optical element.
Background
In the laser processing industry, especially the laser cutting industry, increasingly high requirements are provided for the quality of light beams, on one hand, fine processing requires that light spots are increasingly small, on the other hand, the requirements for the uniformity of light beam energy are increasingly high, and on the other hand, requirements for various light spot forms are provided. Among them, linear light spots are increasingly used in fields such as glass integral cutting. In laser three-dimensional sensing systems, line structured illumination, also known as "light knives", is used to measure the depth of points on the surface of an object.
There are many methods for generating the line light spot, and there are typical methods of combining a cylindrical mirror and a spherical mirror, and other methods include diffraction method and rotating mirror scanning method. Commercial light knife projectors produce line light with a minimum line width of about 0.1mm at a distance of about 100mm, with the minimum line width of the spot increasing as the projected distance increases.
The diffraction method has the advantages of simple and light structure, high light energy utilization rate, high design freedom degree and uniform light beam energy. The invention designs a flat-top optical element capable of generating light spots with uniform energy distribution by using a diffraction optical method, and combines the traditional optical elements of a ball lens and a cylindrical lens to obtain an ultra-fine linear uniform light spot with the length-width ratio of more than 1000 and the line width of less than 15 mu m.
Disclosure of Invention
A new optical path for shaping Gaussian light into a very fine linear spot with a high aspect ratio by using a flat-top light diffraction optical element. The light path structure of the laser comprises a flat top light element, a ball lens and a cylindrical lens in sequence along the laser propagation direction.
Firstly, according to the laser source parameters and the target line light spot parameters, a flat-top optical element, a ball lens and a cylindrical lens with corresponding specifications are obtained, and the optimal working distance is obtained.
The second step is that: the laser beam is expanded and collimated, and the requirement of a flat-top optical element on incident light is met.
The third step: a light path is constructed according to a design scheme, and a flat-top optical element, a ball lens and a cylindrical lens are sequentially arranged in the light path along the laser emitting direction.
The fourth step: and observing the distribution of light spots at the focal length F of the focusing element, and debugging the distance of an image plane until the required light spots are obtained.
Drawings
The following are described separately:
fig. 1 is an optical path diagram of the embodiment of the present patent disclosure, and the width of the linear light spot on the image plane is changed by adjusting the working distance L.
Fig. 2 is a plan view of a measured energy distribution of a linear uniform spot of 10mm in length and 15 μm in width, as achieved using the embodiments of the present patent disclosure.
Fig. 3 is a three-dimensional plot of the measured energy distribution of a linear uniform spot of 10mm in length and 15 μm in width, as achieved using the embodiments of the present patent disclosure.
Detailed Description
The flat-top optical element is matched with other traditional optical elements, including a ball lens, a cylindrical lens and a beam expanding collimating lens, so as to realize ultra-fine linear uniform light spots.
The specific implementation comprises the following steps:
1. the flat-top optical element, the ball lens and the cylindrical lens are selected and the distance between the flat-top optical element, the ball lens and the cylindrical lens is selected according to the incident light parameters (including wavelength, beam waist diameter and divergence angle) and the parameters of the linear light spot which needs to be obtained finally (light spot size, length-width ratio, working distance and the like).
2. And (4) debugging the light path according to a design scheme to obtain the required light spot at a proper working distance.
Examples and effects
Example 1 a linear uniform spot of 10mm in length and 15 μm in width was achieved.
There is a laser incident light source with wavelength λ and beam waist diameter D to achieve a linear uniform spot with length L0 and width W.
First step to obtain the best results, consider a flat top shaping element and a ball lens with focal length F and a cylindrical lens with focal length F.
The second step is that: the laser beam is expanded and collimated, and the requirement of a flat-top optical element on incident light is met.
The third step: a light path is constructed according to a design scheme, and a flat-top optical element, a ball lens and a cylindrical lens are sequentially arranged in the light path along the laser emitting direction.
The fourth step: and observing the distribution of light spots at the focal length F of the focusing element, and debugging the distance of an image plane until the required light spots are obtained.
The actually obtained light spots are shown in fig. 2 and fig. 3.
Claims (5)
1. A light path structure for shaping Gaussian light into superfine linear light spots with high length-width ratio by utilizing a flat-top light diffraction optical element only comprises the flat-top light element, a ball lens with a focal length of F and a cylindrical lens with a focal length of F along the laser propagation direction;
firstly, according to laser source parameters and target line light spot parameters, obtaining a flat-top optical element, a ball lens and a cylindrical lens with corresponding specifications, and obtaining an optimal working distance L;
the second step is that: expanding and collimating the laser beam to meet the requirement of a flat-top optical element on incident light;
the third step: building a light path according to a design scheme, wherein a flat-top light element, a ball lens and a cylindrical lens are sequentially arranged in the light path along the laser emergent direction;
the fourth step: and observing the distribution of light spots at the focal length F of the focusing element, and debugging the distance of an image plane until the required light spots are obtained, thereby obtaining the ultra-fine linear uniform light spots with the length-width ratio of more than 1000 and the line width of less than 15 mu m.
2. The optical circuit structure according to claim 1, wherein the material of the optical flat top diffraction element is quartz glass, ordinary glass, or ZnSe.
3. An optical circuit structure as claimed in claim 1, wherein the laser source parameters include wavelength, beam waist diameter, and divergence angle.
4. An optical path structure as claimed in claim 1, characterized in that the target spot parameters include spot length, width, working distance.
5. The optical circuit structure of claim 1, wherein the parameters of the ball lens and the cylindrical lens include focal length and relative position.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510875267.XA CN106842587B (en) | 2015-12-04 | 2015-12-04 | The diffraction optical method realizes the shaping of Gaussian light into ultra-fine linear uniform light spots with ultra-high length-width ratio |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510875267.XA CN106842587B (en) | 2015-12-04 | 2015-12-04 | The diffraction optical method realizes the shaping of Gaussian light into ultra-fine linear uniform light spots with ultra-high length-width ratio |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106842587A CN106842587A (en) | 2017-06-13 |
| CN106842587B true CN106842587B (en) | 2020-12-15 |
Family
ID=59148732
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510875267.XA Active CN106842587B (en) | 2015-12-04 | 2015-12-04 | The diffraction optical method realizes the shaping of Gaussian light into ultra-fine linear uniform light spots with ultra-high length-width ratio |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106842587B (en) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107329276A (en) * | 2017-09-01 | 2017-11-07 | 中国电子科技集团公司第三十八研究所 | A kind of wide spectrum optical reshaper based on cascade diffraction optical element and preparation method thereof |
| CN108120666A (en) * | 2017-11-07 | 2018-06-05 | 山东卓越生物技术股份有限公司 | For the Optical devices of blood cell analysis |
| CN107861250A (en) * | 2017-11-27 | 2018-03-30 | 中国科学院上海光学精密机械研究所 | Light-beam forming unit and regulation and control method based on dispersion grating |
| CN110190491A (en) * | 2019-07-02 | 2019-08-30 | 中国工程物理研究院激光聚变研究中心 | A kind of injection seeded formula Terahertz parameter generator |
| CN111240009B (en) * | 2019-12-31 | 2020-12-29 | 嘉兴驭光光电科技有限公司 | Diffractive optical element capable of projecting oblique lines, projection device and design method thereof |
| CN111665581B (en) * | 2020-05-12 | 2021-10-12 | 杭州驭光光电科技有限公司 | Optical device, projection apparatus including the same, and linear projection method |
| CN115487328B (en) * | 2022-08-02 | 2024-03-12 | 郑州大学 | USP laser inactivating device stirring system based on acoustic standing wave principle |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201032671Y (en) * | 2007-03-07 | 2008-03-05 | 中国科学院上海光学精密机械研究所 | Optical beam shaping and coupling device of linear laser diode array |
| WO2008065188A1 (en) * | 2006-11-30 | 2008-06-05 | Upstream Engineering Oy | Beam shaping method and apparatus |
| CN103064190A (en) * | 2012-12-28 | 2013-04-24 | 西北核技术研究所 | Flaky light beam smoothing and reshaping device |
| CN103336366A (en) * | 2013-06-06 | 2013-10-02 | 西北大学 | Device capable of generating uniform linear laser beams based on high-numerical aperture cylindrical lens focusing |
| CN103399406A (en) * | 2013-07-26 | 2013-11-20 | 王晓峰 | Diffractive optical element for shaping gauss beam into flat-topped beam, and preparation method thereof |
| CN103466922A (en) * | 2013-09-30 | 2013-12-25 | 上海大学 | Laser packaging method and equipment |
| TW201523706A (en) * | 2013-10-21 | 2015-06-16 | Saint Gobain | Modular laser apparatus |
| CN104765087A (en) * | 2015-04-24 | 2015-07-08 | 北京润和微光科技有限公司 | Diffraction optical element shaping Gaussian beam into one-dimensional flattened beam or rectangular flattened beam |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3977038B2 (en) * | 2001-08-27 | 2007-09-19 | 株式会社半導体エネルギー研究所 | Laser irradiation apparatus and laser irradiation method |
| WO2006066706A2 (en) * | 2004-12-22 | 2006-06-29 | Carl Zeiss Laser Optics Gmbh | Optical illumination system for creating a line beam |
| US8029637B2 (en) * | 2007-11-29 | 2011-10-04 | Hitachi Global Technologies Netherlands, B.V. | System, method and apparatus for ultraviolet curing of adhesives with light beam shaping in disk drive manufacturing |
-
2015
- 2015-12-04 CN CN201510875267.XA patent/CN106842587B/en active Active
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2008065188A1 (en) * | 2006-11-30 | 2008-06-05 | Upstream Engineering Oy | Beam shaping method and apparatus |
| CN201032671Y (en) * | 2007-03-07 | 2008-03-05 | 中国科学院上海光学精密机械研究所 | Optical beam shaping and coupling device of linear laser diode array |
| CN103064190A (en) * | 2012-12-28 | 2013-04-24 | 西北核技术研究所 | Flaky light beam smoothing and reshaping device |
| CN103336366A (en) * | 2013-06-06 | 2013-10-02 | 西北大学 | Device capable of generating uniform linear laser beams based on high-numerical aperture cylindrical lens focusing |
| CN103399406A (en) * | 2013-07-26 | 2013-11-20 | 王晓峰 | Diffractive optical element for shaping gauss beam into flat-topped beam, and preparation method thereof |
| CN103466922A (en) * | 2013-09-30 | 2013-12-25 | 上海大学 | Laser packaging method and equipment |
| TW201523706A (en) * | 2013-10-21 | 2015-06-16 | Saint Gobain | Modular laser apparatus |
| CN104765087A (en) * | 2015-04-24 | 2015-07-08 | 北京润和微光科技有限公司 | Diffraction optical element shaping Gaussian beam into one-dimensional flattened beam or rectangular flattened beam |
Also Published As
| Publication number | Publication date |
|---|---|
| CN106842587A (en) | 2017-06-13 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN106842587B (en) | The diffraction optical method realizes the shaping of Gaussian light into ultra-fine linear uniform light spots with ultra-high length-width ratio | |
| US20240142786A1 (en) | Optical element arrangements for varying beam parameter product in laser delivery systems | |
| WO2017159874A1 (en) | Laser processing device, three-dimensional shaping device, and laser processing method | |
| KR101655428B1 (en) | Optical apparus using bessel beam and cutting apparatus thereof | |
| TWI697661B (en) | System for flat-top intensity laser sheet beam generation | |
| CN103176226A (en) | Dodging special-shaped lens used for shaping semiconductor laser leams, dodging laser source and optical system | |
| CN104439716A (en) | Laser processing system and laser processing method | |
| CN104191089A (en) | Three-dimensional dynamic focusing marking system and method based on light beam output by laser device | |
| JP5805256B1 (en) | Optical devices for beam shaping | |
| CN106773025B (en) | Focusing lens and lens vibrating type laser scanning system | |
| CN109416419A (en) | For the beam shaped optical system of laser cutting and the equipment with beam shaped optical system | |
| CN110376750B (en) | Beam splitter based on free-form surface lens | |
| KR20140065547A (en) | Laser machining apparatus and method thereof | |
| CN111880315A (en) | Laser lighting equipment | |
| JP2009543143A (en) | Apparatus for homogenizing light and laser apparatus for generating a linear intensity distribution on the work surface | |
| CN109613708B (en) | Local hollow four-trap system based on double-beam structure | |
| CN203101668U (en) | Dodging lens, dodging laser light source and optical system used for shaping semiconductor laser beam | |
| CN110753596A (en) | Device and method for laser-based separation of transparent and fragile workpieces | |
| CN215200144U (en) | Light path system, laser cutting head and laser cutting equipment | |
| KR101928264B1 (en) | Laser beam shaping apparatus | |
| CN103885186A (en) | Astigmatism eliminating light beam shaping system based on prism pair and cylindrical mirror | |
| CN112099241B (en) | Beam collimation system and method and laser radar | |
| CN113305426A (en) | Bessel beam lens for laser cutting | |
| TW201634164A (en) | Laser processing system and laser processing method | |
| CN217571287U (en) | Bessel beam lens for laser cutting |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| DD01 | Delivery of document by public notice | ||
| DD01 | Delivery of document by public notice |
Addressee: Beijing Runhe Glimmer Technology Co., Ltd. Document name: Notice of payment reduction Addressee: Beijing Runhe Glimmer Technology Co., Ltd. Document name: Notification of Patent Invention Entering into Substantive Examination Stage |
|
| GR01 | Patent grant | ||
| GR01 | Patent grant |