CN104516010A - X-ray beam intensity monitoring device and X-ray inspection system - Google Patents

X-ray beam intensity monitoring device and X-ray inspection system Download PDF

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Publication number
CN104516010A
CN104516010A CN201410851366.XA CN201410851366A CN104516010A CN 104516010 A CN104516010 A CN 104516010A CN 201410851366 A CN201410851366 A CN 201410851366A CN 104516010 A CN104516010 A CN 104516010A
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China
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ray
beam intensity
ray beam
module
signal
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CN201410851366.XA
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CN104516010B (en
Inventor
康克军
李树伟
张清军
李元景
李玉兰
赵自然
刘以农
刘耀红
朱维彬
赵晓琳
何会绍
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Tsinghua University
Nuctech Co Ltd
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Tsinghua University
Nuctech Co Ltd
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Priority to CN201410851366.XA priority Critical patent/CN104516010B/en
Publication of CN104516010A publication Critical patent/CN104516010A/en
Priority to RU2015156055A priority patent/RU2695099C2/en
Priority to US14/981,953 priority patent/US10466372B2/en
Priority to BR102015032988-1A priority patent/BR102015032988B1/en
Priority to PL15203078T priority patent/PL3040744T3/en
Priority to EP15203078.9A priority patent/EP3040744B1/en
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Abstract

The invention discloses an X-ray beam intensity monitoring device and an X-ray inspection system. The X-ray beam intensity monitoring device comprises an intensity detection module and a data processing module, wherein the intensity detection module is used for receiving irradiation of an X-ray beam and emitting a detection signal; the data processing module is coupled with the intensity detection module to receive the detection signal and output an intensity monitoring signal of the X-ray beam; the intensity monitoring signal of the X-ray beam comprises a dosage monitoring signal of the X-ray beam and a brightness correction signal of the X-ray beam. The X-ray beam intensity monitoring device can carry out dosage monitoring and brightness monitoring simultaneously, and the service efficiency of the X-ray beam intensity monitoring device is improved.

Description

X-ray beam intensity of flow supervising device and X-ray inspection system
Technical field
The present invention relates to X ray applied technical field, particularly a kind of X-ray beam intensity of flow supervising device and X-ray inspection system.
Background technology
In X-ray inspection system, X ray emitter is mainly electron accelerator or X-ray tube.X ray emitter and X-ray examination detector array are placed in the both sides of tested object.Generally, in the X ray line that X ray emitter sends, namely there is the working beam of direct irradiation on detector array, have again the redundancy line irradiated outside detector array.
X-ray beam stream is fan-like pattern line normally, and this fan-like pattern line is perpendicular to ground, and in this fan-like pattern line, working beam is roughly equal to the width of detector array at the width General Requirements at detector array place.For this reason, a collimating apparatus is set through being everlasting between X ray emitter and detector array.Collimating apparatus is for masking the redundancy line in X ray line.When checking tested object, collimating apparatus is between X ray emitter and tested object.
Generally pass through the dosage monitoring to X ray line or the monitoring of brightness monitoring realization to X-ray beam intensity of flow.Dosage monitoring refers to the dose intensity by monitoring X-ray beam, and judges whether the dose value exceeding regulation, will send dosage monitoring signal to carry out reporting to the police or cutting off the operations such as the power supply of X ray emitter if exceed.Brightness monitoring refers to the fluctuation changing value of the X-ray beam intensity of flow gathered in each measuring period, sends the value that gamma correction signal correction detector array collects, to obtain the information of tested object more accurately.
Dosage monitoring device and the brightness supervising device of X ray line are common in X-ray inspection system, and generally these two kinds of devices are all be present in independently of one another in X-ray inspection system.
Below to adopt electron accelerator, as the X-ray inspection system of X ray emitter, X-ray inspection system and the X-ray beam intensity of flow supervising device thereof of prior art is described.
The dosage monitoring device of prior art comprises detecting module, this detecting module is all generally the X-ray beam flow export place being directly placed on electron accelerator, be positioned at the casing of electron accelerator, X ray directly penetrates the sensitive volume of this detecting module, then is irradiated on tested object.
The method for supervising that the brightness supervising device of prior art adopts utilizes the redundancy detector of the upper edge region being positioned at fan-like pattern line in X-ray examination detector array to carry out luminance signal collection and sends the value that gamma correction signal correction detector array collects.
Realizing in process of the present invention, the present inventor finds that above prior art has following weak point:
In the dosage monitoring device of prior art, X-ray beam intensity of flow is lost because penetrating the sensitive volume of detecting module, namely detects X-ray beam intensity of flow and reciprocal power-fed that sensitive volume has intervened the tested object of arrival.And because electron accelerator is heavy current installation, and the detecting module of dosage monitoring device is light current instrument, detecting module is very easy to the electromagnetic interference (EMI) by the former, generally only can provide in a period of time, as the average dosage information in several seconds.And for guaranteeing safety in X-ray inspection system, when the dosage of X ray line is greater than the threshold value of regulation, the power supply of X ray emitter must be cut off as early as possible, therefore require that dosage monitoring device must be reliable accurate with measurement, and the dosage monitoring device of above prior art is difficult to meet this requirement.
In the brightness supervising device of prior art, the redundancy detector of detector array is easily subject to the interference of the factor such as reflected signal and mechanically deform of tested object.And when X ray emitter is electron accelerator, on " main beam " direction of X ray line, (i.e. the direction of electron beam) X-ray beam intensity of flow is large, the position X-ray beam intensity of flow larger with " main beam " angle is more weak, the X-ray beam intensity of flow in the region residing for this redundancy detector is general more weak, finally affects monitoring effect.
Summary of the invention
The object of the present invention is to provide a kind of X-ray beam intensity of flow supervising device and X-ray inspection system, the service efficiency of X-ray beam intensity of flow supervising device can be promoted.
First aspect present invention provides a kind of X-ray beam intensity of flow supervising device, comprise strength investigation module and data processing module, described strength investigation module is for accepting the irradiation of X ray line and sending detectable signal, described data processing module is coupled to receive described detectable signal with described strength investigation module and exports X-ray beam intensity of flow pilot signal, wherein, described X-ray beam intensity of flow pilot signal comprises the dosage monitoring signal of described X ray line and the gamma correction signal of described X ray line.
Further, described X-ray beam intensity of flow supervising device comprises multiple described strength investigation module, and described multiple strength investigation module is coupled with same described data processing module.
Further, each described strength investigation module independently seals.
Further, described data processing module comprises integrating amplifier and chromacoder, described integrating amplifier is coupled to receive described detectable signal and output voltage signal with described strength investigation module, and described chromacoder is coupled to receive described voltage signal with described integrating amplifier and exports described dosage monitoring signal and described gamma correction signal.
Further, described chromacoder comprises voltage comparator and analog to digital converter, described voltage comparator be coupled to receive described voltage signal with described integrating amplifier and outputs level signals as described dosage monitoring signal, described analog to digital converter be coupled to receive described voltage signal with described integrating amplifier and output digit signals as described gamma correction signal.
Further, described strength investigation module is flash detection module or detection of gas module.
Further, described strength investigation module is flash detection module, and described flash detection module comprises scintillator, photosensitive device and screen layer, and one end of described scintillator is coupled with described photosensitive device, and it is peripheral that described screen layer is arranged at described photosensitive device.
Second aspect present invention provides a kind of X-ray inspection system, comprise X ray emitter, detector array and X-ray beam intensity of flow supervising device, wherein, the X-ray beam intensity of flow supervising device of described X-ray beam intensity of flow supervising device according to any one of first aspect present invention.
Further, the X ray line that described X ray emitter sends comprises the working beam that irradiates on described detector array and irradiates the redundancy line outside described detector array, the described strength investigation module installation of described X-ray beam intensity of flow supervising device between described X ray emitter and described detector array to accept the irradiation of described redundancy line and to send described detectable signal.
Further, described X-ray inspection system also comprises collimating apparatus, and described strength investigation module installation is between described X ray emitter and described collimating apparatus.
Based on X-ray beam intensity of flow supervising device provided by the invention and X-ray inspection system, X-ray beam intensity of flow supervising device comprises strength investigation module and data processing module, strength investigation module is for accepting the irradiation of X ray line and sending detectable signal, data processing module is coupled to receive detectable signal with strength investigation module and exports X-ray beam intensity of flow pilot signal, wherein, X-ray beam intensity of flow pilot signal comprises the dosage monitoring signal of X ray line and the gamma correction signal of X ray line, therefore this X-ray beam intensity of flow supervising device can carry out dosage monitoring and brightness monitoring simultaneously, improve the service efficiency of X-ray beam intensity of flow supervising device.
By referring to the detailed description of accompanying drawing to exemplary embodiment of the present invention, further feature of the present invention and advantage thereof will become clear.
Accompanying drawing explanation
Accompanying drawing described herein is used to provide a further understanding of the present invention, and form a application's part, schematic description and description of the present invention, for explaining the present invention, does not form inappropriate limitation of the present invention.In the accompanying drawings:
Fig. 1 is the schematic layout pattern of the X-ray inspection system of first embodiment of the invention.
Fig. 2 is for the B-B of the X-ray inspection system shown in Fig. 1 is to cross-sectional schematic.
Fig. 3 is the structural principle schematic diagram of the strength investigation module of X-ray beam intensity of flow supervising device in the X-ray inspection system shown in Fig. 1.
Fig. 4 is for the C-C of the strength investigation module shown in Fig. 3 is to sectional structure principle schematic.
The functional-block diagram of the X-ray beam intensity of flow supervising device that Fig. 5 is the X-ray inspection system shown in Fig. 1.
Fig. 6 is the structural principle schematic diagram overlooking direction of the strength investigation module of X-ray beam intensity of flow supervising device in the X-ray inspection system of second embodiment of the invention.
Structural principle schematic diagram when what Fig. 7 was the strength investigation module shown in Fig. 6 observes perpendicular to X ray fan-like pattern line.
In Fig. 1 to Fig. 7, each Reference numeral represents respectively:
1, electron accelerator;
2, detector array;
3, collimating apparatus;
4, tested object;
5, flash detection module;
51, scintillator;
52, photosensitive device;
53, screen layer;
6, detection of gas module;
61, electrode plate with high voltage;
62, passive electrode plate;
63, working gas.
Embodiment
Below in conjunction with the accompanying drawing in the embodiment of the present invention, be clearly and completely described the technical scheme in the embodiment of the present invention, obviously, described embodiment is only the present invention's part embodiment, instead of whole embodiments.Illustrative to the description only actually of at least one exemplary embodiment below, never as any restriction to the present invention and application or use.Based on the embodiment in the present invention, those of ordinary skill in the art, not making the every other embodiment obtained under creative work prerequisite, belong to the scope of protection of the invention.
Unless specifically stated otherwise, otherwise positioned opposite, the numerical expression of the parts of setting forth in these embodiments and step and numerical value do not limit the scope of the invention.Meanwhile, it should be understood that for convenience of description, the size of the various piece shown in accompanying drawing is not draw according to the proportionate relationship of reality.May not discuss in detail for the known technology of person of ordinary skill in the relevant, method and apparatus, but in the appropriate case, described technology, method and apparatus should be regarded as a part of authorizing instructions.In all examples with discussing shown here, any occurrence should be construed as merely exemplary, instead of as restriction.Therefore, other example of exemplary embodiment can have different values.It should be noted that: represent similar terms in similar label and letter accompanying drawing below, therefore, once be defined in an a certain Xiang Yi accompanying drawing, then do not need to be further discussed it in accompanying drawing subsequently.
First embodiment
Fig. 1 to Fig. 5 shows the X-ray inspection system of first embodiment of the invention.
Fig. 1 is the schematic layout pattern of the X-ray inspection system of first embodiment of the invention.Fig. 2 is for the B-B of the X-ray inspection system shown in Fig. 1 is to cross-sectional schematic.As depicted in figs. 1 and 2, the X-ray inspection system of the first embodiment comprises X ray emitter for launching X ray, collimating apparatus 3, the detector array 2 of X-ray examination and X-ray beam intensity of flow supervising device.
Wherein X-ray beam intensity of flow supervising device is for monitoring the X-ray beam intensity of flow of X ray emitter.X-ray beam intensity of flow supervising device comprises strength investigation module and data processing module.Data processing module is coupled with strength investigation module the detectable signal that sends with receiving intensity detecting module export X-ray beam intensity of flow pilot signal.X-ray beam intensity of flow pilot signal comprises the dosage monitoring signal of X ray line and the gamma correction signal of X ray line.This X-ray beam intensity of flow supervising device can carry out dosage monitoring and brightness monitoring simultaneously, improves the service efficiency of X-ray beam intensity of flow supervising device.
The X ray line that X ray emitter sends comprises the working beam irradiated on detector array 2 and the redundancy line irradiated outside detector array 2.The strength investigation module of X-ray beam intensity of flow supervising device is preferably arranged between emitter and detector array 2 to accept the irradiation of redundancy line and to send detectable signal.The redundancy line of what the strength investigation module of this X-ray inspection system utilized is X ray line, strength investigation module is not substantially by the impact of X ray emitter and tested object 4, thus the monitored results that can make X-ray beam intensity of flow more accurately and reliably.In addition, because strength investigation module does not affect working beam, therefore do not affect the intensity of the working beam arriving checking matter body 4 and detector array 2.
In first embodiment, X ray emitter is electron accelerator 1.In other unshowned embodiment, can be other X ray emitters such as X-ray tube.
Collimating apparatus 3 is between X ray emitter and detector array 2.Collimating apparatus 3 is for masking redundancy line.When checking tested object 4, collimating apparatus 3 is between X ray emitter and tested object 4, and the working beam of X ray line is irradiated to tested object 4 and detector array 2 after collimating apparatus 3.
When X-ray inspection system has collimating apparatus 3, strength investigation module is between X ray emitter and collimating apparatus 3.While this is arranged on the direct electromagnetic interference (EMI) being avoided electron accelerator 1, also can not affect X-ray beam intensity of flow monitored results because of arranging of collimating apparatus 3.
Preferably, X-ray beam intensity of flow supervising device comprises the multiple strength investigation modules be arranged symmetrically with relative to working beam.Being arranged symmetrically with multiple strength investigation module relative to working beam can when the X ray line generation beat of X ray emitter transmitting, the detectable signal that each strength investigation module is sent compensates each other, thus can make the monitored results of X-ray beam intensity of flow than only arranging single strength investigation module more accurately and reliably.Two strength investigation modules are provided with particularly in first embodiment.In other unshowned embodiment, more strength investigation module can be set, such as four.
In first embodiment, working beam is fan-like pattern line, and strength investigation module is positioned at the covering of the fan side of fan-like pattern line.This setting makes strength investigation module be in " main beam " place of X ray line, closer to the center of X ray line, thus more effectively can provide X-ray beam intensity of flow information.
As depicted in figs. 1 and 2, the covering of the fan of fan-like pattern line is perpendicular to ground, electron accelerator 1 side is front side, detector array 2 side is rear side, each side arranges a strength investigation module (calling left detecting module and right detecting module in the following text) at the covering of the fan of fan-like pattern line.Wherein left detecting module and right detecting module are placed between electron accelerator 1 and collimating apparatus 3, the detectable signal obtained are transferred to data processing module and carry out merging treatment and after conversion, produce X-ray beam intensity of flow pilot signal.
Left detecting module and right detecting module are symmetrically arranged on the covering of the fan both sides of fan-like pattern line and are positioned at the position that redundancy line can shine directly into, and carry out intensity monitoring to utilize redundancy line to X-ray beam stream.Left detecting module and right detecting module certain space spaced intermediate, the width in space ensures that working beam can be irradiated within the scope of the width requirement of detector array 2 insusceptibly.
The detector that left detecting module and right detecting module are two symmetrical geometry, structure is identical.On the direction of the covering of the fan perpendicular to X ray line, enough sensitive sizes are had to meet the cover width still not exceeding these two detector sensitive volumes when fan-like pattern line deflects.Strength investigation module can have multiple implementation.Fig. 3 is the structural principle schematic diagram of the strength investigation module of the X-ray beam intensity of flow supervising device shown in Fig. 1.Fig. 4 is for the C-C of the strength investigation module shown in Fig. 3 is to sectional structure principle schematic.Fig. 3 and Fig. 4 illustrates the principle of work of the strength investigation module of the first embodiment in left detecting module and right detecting module.In Fig. 4, L represents the incident direction of X ray line.
As shown in Figure 3 and Figure 4, in the first embodiment, left detecting module and right detecting module are flash detection module 5.Flash detection module 5 comprises scintillator 51, photosensitive device 52, screen layer 53 and reflection horizon (not shown).Wherein one end of scintillator 51 is coupled with photosensitive device 52 and between photosensitive device 52 and working beam.The periphery that screen layer 53 is arranged on photosensitive device 52 is used for shielding the X ray of scattering to the damage of photosensitive device 52.Screen layer 53 preferably adopts heavy metal to make.Scintillator 51 is enclosed with reflection horizon on the non-coupled face be not coupled with photosensitive device 52.The material in reflection horizon can be titania.In addition, each flash detection module 5 has a respective light sealing structure, and it is inner that scintillator 51 and photosensitive device 52 are arranged on corresponding hermetically-sealed construction, guarantees hermetically-sealed construction not light leak.
The scintillator 51 (i.e. sensitive volume) of flash detection module 5 preferably adopts scintillation crystal to make.Length between scintillator 51 to photosensitive device 52 preferably ensures that the beat of fan-like pattern line can not arrive the position of photosensitive device 52.Scintillator 51 is preferably vertical with the incident direction L of X ray line.
Flash detection module 5 is when detecting x-ray beam intensity, and x-ray bombardment, on scintillation crystal, sends passage of scintillation light, and photosensitive device 52 absorbs passage of scintillation light and produces electric signal, and the electric signal that photosensitive device 52 exports is input to data processing module and is for further processing.
Flash detection module 5 is adopted to have the advantage that sensitive Media density is large and sensitivity is higher.
The functional-block diagram of the X-ray beam intensity of flow supervising device that Fig. 5 is the X-ray inspection system shown in Fig. 1.As shown in Figure 5, data processing module is coupled with each strength investigation module, the detectable signal that each strength investigation module exports is transferred to data processing module together, is carried out by detectable signal merging, processing and export X-ray beam intensity of flow pilot signal after data processing module receives the detectable signal of each strength investigation module in this data processing module.
As shown in Figure 5, data processing module comprises integrating amplifier and chromacoder.Wherein integrating amplifier is coupled to receive the detectable signal output voltage signal that each strength investigation module sends with each strength investigation module.The amplitude size of this voltage signal is proportional to X-ray beam intensity of flow.Chromacoder is coupled to receive the voltage signal of integrating amplifier and exports X-ray beam intensity of flow pilot signal with integrating amplifier.
As shown in Figure 5, in the first embodiment, chromacoder comprises voltage comparator and analog to digital converter particularly.Voltage comparator and analog to digital converter carry out conversion independent of each other.
Voltage comparator be coupled to receive the voltage signal of integrating amplifier with integrating amplifier and outputs level signals as the dosage monitoring signal of X ray line.The reference voltage x-ray dose intensity according to the rules of this voltage comparator is determined.Whether dosage monitoring signal controls X ray emitter should be cut off power supply or warning.
Analog to digital converter be coupled to receive the voltage signal of integrating amplifier with integrating amplifier and output digit signals as the gamma correction signal of X ray line.
The X-ray beam intensity of flow supervising device of the X-ray inspection system of the first embodiment can carry out dosage monitoring and brightness monitoring simultaneously, improves the service efficiency of X-ray beam intensity of flow supervising device.And dosage monitoring no longer affects the intensity of working beam, and avoid the electromagnetic interference (EMI) of electron accelerator 1.Brightness monitoring is no longer by the impact that tested object 4 and system mechanics are out of shape.
Second embodiment
Second embodiment and the first embodiment unlike, replace the flash detection module 5 of the first embodiment as strength investigation module using detection of gas module 6 in a second embodiment.Wherein, left detecting module and right detecting module respectively detect by the intensity of the identical detection of gas module 6 pairs of X ray lines of structure.
Fig. 6 is the structural principle schematic diagram overlooking direction of the strength investigation module of X-ray beam intensity of flow supervising device in the X-ray inspection system of second embodiment of the invention.Fig. 7 is the strength investigation module shown in Fig. 6 perpendicular to structural principle schematic diagram during X ray fan-like pattern line.Fig. 6 and Fig. 7 illustrates the principle of work of the strength investigation module of the second embodiment in left detecting module and right detecting module.In Fig. 6 and Fig. 7, L represents the incident direction of X ray line.
See Fig. 6 and Fig. 7, detection of gas module 6 comprises gas ionization chamber.Gas ionization chamber comprises two electrode plate, is respectively electrode plate with high voltage 61 and passive electrode plate 62.Two electrode plate are all perpendicular to the incident direction L of X ray line.The external high-tension electricity of electrode plate with high voltage 61, and receive the irradiation of redundancy line, passive electrode plate 62 is coupled with data processing module.It is working gas 63 between electrode plate with high voltage 61 and passive electrode plate 62.Electrode plate with high voltage 61 and passive electrode plate 62 and working gas 63 need be arranged in a hermetically-sealed construction.
Adopt detection of gas module 6 to be do not have irradiation damage as the advantage of strength investigation module, increase detection area and be easy to, cost is lower.
Other undeclared part in second embodiment, with reference to the related content of the first embodiment, can not repeat them here.
Finally should be noted that: above embodiment is only in order to illustrate that technical scheme of the present invention is not intended to limit; Although with reference to preferred embodiment to invention has been detailed description, those of ordinary skill in the field are to be understood that: still can modify to the specific embodiment of the present invention or carry out equivalent replacement to portion of techniques feature; And not departing from the spirit of technical solution of the present invention, it all should be encompassed in the middle of the technical scheme scope of request of the present invention protection.

Claims (10)

1. an X-ray beam intensity of flow supervising device, it is characterized in that, comprise strength investigation module and data processing module, described strength investigation module is for accepting the irradiation of X ray line and sending detectable signal, described data processing module is coupled to receive described detectable signal with described strength investigation module and exports X-ray beam intensity of flow pilot signal, wherein, described X-ray beam intensity of flow pilot signal comprises the dosage monitoring signal of described X ray line and the gamma correction signal of described X ray line.
2. X-ray beam intensity of flow supervising device according to claim 1, is characterized in that, described X-ray beam intensity of flow supervising device comprises multiple described strength investigation module, and described multiple strength investigation module is coupled with same described data processing module.
3. X-ray beam intensity of flow supervising device according to claim 2, is characterized in that, each described strength investigation module independently seals.
4. X-ray beam intensity of flow supervising device according to any one of claim 1 to 3, it is characterized in that, described data processing module comprises integrating amplifier and chromacoder, described integrating amplifier is coupled to receive described detectable signal and output voltage signal with described strength investigation module, and described chromacoder is coupled to receive described voltage signal with described integrating amplifier and exports described dosage monitoring signal and described gamma correction signal.
5. X-ray beam intensity of flow supervising device according to claim 4, it is characterized in that, described chromacoder comprises voltage comparator and analog to digital converter, described voltage comparator be coupled to receive described voltage signal with described integrating amplifier and outputs level signals as described dosage monitoring signal, described analog to digital converter be coupled to receive described voltage signal with described integrating amplifier and output digit signals as described gamma correction signal.
6. X-ray beam intensity of flow supervising device according to any one of claim 1 to 3, is characterized in that, described strength investigation module is flash detection module (5) or detection of gas module (6).
7. X-ray beam intensity of flow supervising device according to claim 6, it is characterized in that, described strength investigation module is flash detection module (5), described flash detection module (5) comprises scintillator (51), photosensitive device (52) and screen layer (53), one end of described scintillator (51) is coupled with described photosensitive device (52), and it is peripheral that described screen layer (53) is arranged at described photosensitive device (52).
8. an X-ray inspection system, comprise X ray emitter, detector array (2) and X-ray beam intensity of flow supervising device, wherein, described X-ray beam intensity of flow supervising device is X-ray beam intensity of flow supervising device according to any one of claim 1 to 7.
9. X-ray inspection system according to claim 8, it is characterized in that, the X ray line that described X ray emitter sends comprises the working beam that irradiates on described detector array (2) and irradiates the redundancy line outside described detector array (2), the described strength investigation module installation of described X-ray beam intensity of flow supervising device between described X ray emitter and described detector array (2) to accept the irradiation of described redundancy line and to send described detectable signal.
10. X-ray inspection system according to claim 9, is characterized in that, described X-ray inspection system also comprises collimating apparatus (3), and described strength investigation module installation is between described X ray emitter and described collimating apparatus (3).
CN201410851366.XA 2014-12-31 2014-12-31 X-ray beam intensity monitoring device and X-ray inspection system Active CN104516010B (en)

Priority Applications (6)

Application Number Priority Date Filing Date Title
CN201410851366.XA CN104516010B (en) 2014-12-31 2014-12-31 X-ray beam intensity monitoring device and X-ray inspection system
RU2015156055A RU2695099C2 (en) 2014-12-31 2015-12-25 X-ray beam intensity monitoring device and x-ray radiation monitoring system
US14/981,953 US10466372B2 (en) 2014-12-31 2015-12-29 X-ray beam intensity monitoring device and X-ray inspection
BR102015032988-1A BR102015032988B1 (en) 2014-12-31 2015-12-30 device for monitoring x-ray beam intensity, and x-ray inspection system
PL15203078T PL3040744T3 (en) 2014-12-31 2015-12-30 X-ray beam intensity monitoring device and x-ray inspection system
EP15203078.9A EP3040744B1 (en) 2014-12-31 2015-12-30 X-ray beam intensity monitoring device and x-ray inspection system

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CN101261235A (en) * 2008-05-06 2008-09-10 罗平安 Crude oil gas fraction and moisture percentage dual energy x ray measurement method
CN104515781A (en) * 2014-12-31 2015-04-15 清华大学 X-ray inspection system
CN204439577U (en) * 2014-12-31 2015-07-01 清华大学 X-ray inspection system
CN204439843U (en) * 2014-12-31 2015-07-01 清华大学 X-ray beam intensity of flow supervising device and X-ray inspection system

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* Cited by examiner, † Cited by third party
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CN104515781A (en) * 2014-12-31 2015-04-15 清华大学 X-ray inspection system
CN104515781B (en) * 2014-12-31 2018-01-23 清华大学 X-ray inspection system
US10466372B2 (en) 2014-12-31 2019-11-05 Tsinghua University X-ray beam intensity monitoring device and X-ray inspection
CN113101544A (en) * 2021-04-02 2021-07-13 中国科学院近代物理研究所 Beam halo detector interlocking application system and method for heavy ion treatment device

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