CN104515748B - A kind of terahertz time-domain spectroscopy instrument based on femtosecond laser - Google Patents
A kind of terahertz time-domain spectroscopy instrument based on femtosecond laser Download PDFInfo
- Publication number
- CN104515748B CN104515748B CN201510028781.XA CN201510028781A CN104515748B CN 104515748 B CN104515748 B CN 104515748B CN 201510028781 A CN201510028781 A CN 201510028781A CN 104515748 B CN104515748 B CN 104515748B
- Authority
- CN
- China
- Prior art keywords
- axis paraboloidal
- paraboloidal mirror
- domain spectroscopy
- sample
- module
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Landscapes
- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
The invention discloses a kind of terahertz time-domain spectroscopy instrument based on femtosecond laser, transmissive system and reflective system both of which are included.THz wave caused by femtosecond laser focusing, after being collimated by the first off-axis paraboloidal mirror, focused on through the second off-axis paraboloidal mirror on sample, transmitted or reflective-mode measures, after the THz wave of sample is collected by the 3rd off-axis paraboloidal mirror, focused on through the 4th off-axis paraboloidal mirror on crystal detection, obtain the time-domain spectroscopy of Terahertz.The present invention using second and the 3rd off-axis paraboloidal mirror and specimen holder be integrated on one piece of bottom plate as a measurement module.Two short focus off-axis paraboloidal mirrors and transmission sample frame are integrated into transmission measurement module.Two long-focus off-axis paraboloidal mirrors and reflected sample frame are integrated into reflection measurement module.Using five dimension adjusting apparatus clampings first and the 4th off-axis paraboloidal mirror, the optimal location of the fast off-axis paraboloidal mirror of quick-recovery first and the 4th when transmiting module or reflecting module for switching.The terahertz time-domain spectroscopy instrument adjustment process of the present invention is simple and quick, is advantageous to the integrated and user operation of terahertz time-domain spectroscopy instrument.
Description
Technical field
The invention belongs to field of photoelectric technology, more particularly to terahertz time-domain spectroscopy fields of measurement.
Background technology
Instrument of the electromagnetic spectrum technology as the human knowledge world, extend the ability that people observe the world.Human eye by
The motley world can be appreciated in visible ray, will be seen that point using infrared conversion spectrum technology and Raman spectroscopy etc.
The properties such as the vibration and rotation of son, the structural information of material is will be seen that using X-ray diffraction technology.And terahertz light spectral technology
Complementation can be formed with infrared, Raman spectroscopy as emerging spectral technique, or even can play in some aspects can not
The effect of replacement, so as to the hot fields as this century scientific research.
THz wave has spectral characteristic and transmission characteristic concurrently, compares X ray using the Examined effect of THz wave as one kind
More effective and unique harmless inspecting method.Because the radiativity using THz wave equipment is smaller, the contrast of imaging is more clear
Chu, it is also possible to realize the unrivaled Chemical recognition of X ray.The application of THz wave is related to communication, biological medicine, biography
Sense field etc..
In recent ten years, developing rapidly with ultrafast laser technique, for terahertz pulse generation provide stabilization, can
The excitation source leaned on, the generation and application of terahertz emission is set to be flourished.Why Terahertz Technology causes people
Extensive concern, firstly because the tera-hertz spectra (including transmission spectrum and reflectance spectrum) of material includes very abundant physics
And chemical information, it is significant to study exploration of spectrum of the material in this wave band for the structure of matter；Secondly because
Terahertz pulse light source has many unique properties compared with conventional light source, such as the transient state, broadband property, phase of terahertz emission
Dryness and low energy etc..
Terahertz time-domain spectroscopic technology is the Typical Representative of Terahertz Technology, is a kind of emerging, very effective relevant
Detection Techniques.Common terahertz time-domain spectroscopy instrument system is divided into transmissive system and reflective system.It is mainly swashed by femtosecond
Light device, terahertz emission generation device and corresponding detection device composition.THz wave caused by femtosecond laser focusing, by first
After off-axis paraboloidal mirror collimation, focused on through the second off-axis paraboloidal mirror on sample, transmitted or reflective-mode measures, by sample
After the THz wave of product is collected by the 3rd off-axis paraboloidal mirror, focused on through the 4th off-axis paraboloidal mirror on crystal detection, obtain terahertz
Time-domain spectroscopy hereby.
Due to transmission sample measurement should be carried out in same set of terahertz time-domain spectroscopy instrument system, reflection sample is carried out again
Product measure, so needing to carry out the switching of light path.Transmission sample and reflected sample are both placed in the second off-axis paraboloidal mirror and the 3rd
Between off-axis paraboloidal mirror, but, it is necessary to change sample and second and the 3rd off-axis paraboloidal mirror when being transmitted to reflection switching.Transmission sample
, it is necessary to second and the 3rd off-axis paraboloidal mirror of short focus during measurement, it is necessary to the second of long-focus and the 3rd when reflected sample measures
Off-axis paraboloidal mirror.When debugging light path first, position and the posture of the off-axis paraboloidal mirror of debugging first and the 4th are also needed.
Current most of terahertz time-domain spectroscopy instrument is when changing metering system, the position of four off-axis paraboloidal mirrors and specimen holder
Put and be required to adjust with posture, and adjust process very complicated, be unfavorable for the integrated and user behaviour of terahertz time-domain spectroscopy instrument
Make.The present invention is exactly in view of the above-mentioned problems, a kind of terahertz time-domain spectroscopy instrument based on femtosecond laser proposed.
The content of the invention
Complicated adjustment process during in order to simplify transmission measurement pattern and Reflection measurement mode switching, it is ensured that switching-over light path essence
Standard resets, and the present invention proposes following scheme：
A kind of terahertz time-domain spectroscopy instrument based on femtosecond laser, comprising transmission measurement and reflection measurement both of which, fly
THz wave caused by second Laser Focusing, after being collimated by the first off-axis paraboloidal mirror, is focused on sample through the second off-axis paraboloidal mirror,
Transmitted or reflective-mode measures, it is off-axis through the 4th after the THz wave of sample is collected by the 3rd off-axis paraboloidal mirror
Parabolic lens is focused on crystal detection, obtains the time-domain spectroscopy of Terahertz.
Wherein, second, third off-axis paraboloidal mirror and specimen holder, which are integrated on one piece of bottom plate, is used as a measurement module, two
Short focus off-axis paraboloidal mirror and specimen holder are integrated into transmission measurement module.Two long-focus off-axis paraboloidal mirrors and specimen holder are integrated into
Reflection measurement module.During measurement, different modules is placed in spectrometer measured as needed, between module and spectrometer
Positioned by machinery positioning pin.
First and the 4th off-axis paraboloidal mirror be placed in spectrometer in light path, but in order to coordinate transmission measurement module and reflection survey
Measure module switching, first and the 4th off-axis paraboloidal mirror should ensure that adjustment position and posture.Therefore, the present invention is adjusted using five dimensions
Engagement positions clamping first and the 4th off-axis paraboloidal mirror.This five dimensions adjusting apparatus includes a two-dimension translational platform, two pivot angle platforms with
One turntable, for around adjusting off-axis paraboloidal mirror, pitching, beat and rotary motion.Five dimension adjusting apparatus with it is off-axis
Ensure the height of off-axis paraboloidal mirror in the optical path with pin positioning between parabolic lens.Regulation handle uses readable counting apparatus,
The reading of optimal light path position during for recording adjustment first.
First during adjustment light path of optical spectrometer, first transmission measurement module is placed in light path, adjustment first and the 4th is off-axis to throw
The position of object lens and posture, while the off-axis paraboloidal mirror of recruitment clamping second and the 3rd is adjusted, when light path is optimal,
With screw by second and the 3rd off-axis paraboloidal mirror mirror holder with transmission module bottom plate fix.Then transmission sample is being placed on light path just
True position, fixed with screw and transmission module bottom plate.Now, transmission measurement module over all Integration, including second and the 3rd from
Axle parabolic lens (short focus), transmission sample frame.Transmission module bottom plate is positioned with spectrometer bottom plate by pin, ensures module in spectrum
Correct position in instrument.The off-axis paraboloidal mirror five of record first and the 4th ties up the adjusting screw rod reading of adjusting apparatus, anti-for switching
The optimal location of the fast off-axis paraboloidal mirror of quick-recovery first and the 4th when moving into transmission module again is penetrated after module.
After treating the adjustment of transmission measurement module and integrating, transmission module is removed, reflecting module is put into using pin positioning
Bottom plate, recruitment adjustment whole second and the 3rd off-axis paraboloidal mirror (long-focus), at the same adjust in spectrometer first and it is the 4th off-axis
Five dimension adjusting meanss of parabolic lens, after light path is optimal, with screw by second and the 3rd off-axis paraboloidal mirror mirror holder and reflecting module
Bottom plate is fixed.Then sample is placed on light path correct position, fixed with screw and reflecting module bottom plate.Now, reflection measurement
Module over all Integration, including second and the 3rd off-axis paraboloidal mirror (long-focus), specimen holder.Reflecting module bottom plate and spectrometer bottom
Plate is positioned with the pin hole of transmission module, ensures correct position of the module in spectrometer.The first and the 4th off-axis parabolic of record
Mirror five tie up adjusting apparatus adjusting screw rod reading, for switch transmit module after move into reflecting module again when fast quick-recovery first
With the optimal location of the 4th off-axis paraboloidal mirror.
The five dimension adjusting meanss of the present invention include a two-dimension translational platform, two pivot angle platforms and a turntable.Two dimension is flat
Moving stage is fixed on the mounting base of spectrometer, realizes the two-dimension translational all around of the first, the 4th off-axis paraboloidal mirror.Two dimension is flat
Two pivot angle platforms are installed in moving stage, realize the pitching and the adjustment of beat two dimension angular of the first, the 4th off-axis paraboloidal mirror.Finally install
One turntable, realize the first, the 4th off-axis paraboloidal mirror around optical axis rotary motion.Turntable and the first, the 4th off-axis paraboloidal mirror
Between positioned with pin, ensure parabolic lens in spectrometer height.
The accurate reflected light path of energy, specimen holder reflected fudicial face proposed by the present invention are needed in view of reflection measurement mode sample
Positioned by three pins, sample reflecting surface is close to three pin end faces, and the sample back side applies thrust by spring and ensures sample reflecting surface
Overlapped with pin locating surface, such sample can just keep accurate installation site in specimen holder, anti-so as to realize in the optical path
Penetrate THz wave.
Based on scheme set forth above, the present invention can rapidly and accurately adjust the first, the 4th off-axis paraboloidal mirror, and can protect
The correct position of each measurement module and specimen holder in the optical path is demonstrate,proved, and realizes following effect：
First after the completion of adjustment light path of optical spectrometer, transmission measurement module and reflection measurement module have integrated, and two kinds of surveys
Measuring optimal optical path of the module in spectrometer can also determine.When carrying out transmission sample measurement, transmission module is placed in light
Lu Zhong, at the same input fixed first and the 4th off-axis paraboloidal mirror (short focus) five tie up adjusting apparatus adjusting screw rod reading,
Recover the optimal light path of transmission measurement to measure.When carrying out reflected sample measurement, reflecting module is placed in light path, inputted simultaneously
Fixed first and the 4th off-axis paraboloidal mirror (long-focus) five tie up adjusting apparatus adjusting screw rod reading, recover reflection measurement most
Excellent light path measures.
Brief description of the drawings
Fig. 1 is the schematic diagram of the terahertz time-domain spectroscopy instrument transmission measurement mode of the present invention；
101- transmission module bottom plates, 102- femtosecond pulses, 103-THZ radiation sources, the off-axis paraboloidal mirrors of 104- first,
The off-axis paraboloidal mirrors of 105- second (short focus), 106- pin locating holes 1,107- samples, 108- specimen holders, 109- pin locating holes
2,110- the 3rd off-axis paraboloidal mirrors (short focus), the off-axis paraboloidal mirrors of 111- the 4th, 112-THZ detectors；
Fig. 2 is the schematic diagram of the terahertz time-domain spectroscopy instrument reflection measurement mode of the present invention；
201- reflecting module bottom plates, the off-axis paraboloidal mirrors of 202- second (long-focus), 203- speculums 1,204- speculums 2,
The off-axis paraboloidal mirrors (long-focus) of 205- the 3rd；
Fig. 3 is the five dimension adjusting meanss that the present invention is used to adjust 104 first off-axis paraboloidal mirrors and 111 the 4th off-axis paraboloidal mirrors
Schematic diagram；
Regulation handle before and after 301-, 302- left and right adjusting handles, 303- pitch regulation handles, 304- beat regulation handles,
305- rotates regulation handle；
Fig. 4 is the structural representation of the specimen holder of the present invention；
401- sample frame bodies, 402- shop bolts, 403- stage clips, 404- sample fore-sets；
Embodiment
The present invention is explained in further detail below in conjunction with the accompanying drawings：
Embodiment：
Fig. 1 and Fig. 2 is the terahertz time-domain spectroscopy instrument transmission measurement mode of the present invention and the schematic diagram of reflection measurement mode.
Femtosecond pulse 102 focuses on THz wave caused by 103THZ radiation sources, after being collimated by 104 first off-axis paraboloidal mirrors, warp
105 or 202 second off-axis paraboloidal mirrors are focused on sample 107, are transmitted or reflective-mode measures, by the terahertz of sample
The detection that hereby ripple after the collection of 110 or 205 the 3rd off-axis paraboloidal mirrors, is focused in 112 detectors through 111 the 4th off-axis paraboloidal mirrors
On crystal, the time-domain spectroscopy of Terahertz is obtained.
Two kinds of metering systems are integrated in a set of terahertz time-domain spectroscopy instrument system by the present invention, and handover measurement mode need only
Change corresponding measurement module.As shown in figure 1,105 second off-axis paraboloidal mirrors (short focus), 107 samples, 108 specimen holders
It is integrated in 110 the 3rd off-axis paraboloidal mirrors (short focus) on 101 transmission module bottom plates, forms transmission measurement module.Such as Fig. 2 institutes
Show, 202 second off-axis paraboloidal mirrors (long-focus), 203 speculums 1,107 samples, 108 specimen holders, 204 speculums 2,205 the 3rd
Off-axis paraboloidal mirror (long-focus) is integrated on 201 reflecting module bottom plates, forms reflection measurement module.In a set of terahertz time-domain light
In spectrometer, transmission measurement module and reflection measurement module can switch, and ensure that module exists with 106 and 109 two pin locating holes
Correct position in light path of optical spectrometer, and the repetitive positioning accuracy after handover measurement mode can be ensured.
, it is necessary to adjust adjustment 104 first off-axis paraboloidal mirrors and 111 the 4th when debugging terahertz time-domain spectroscopy instrument light path first
The position of off-axis paraboloidal mirror and posture, while the off-axis paraboloidal mirror of recruitment clamping 105 second and 110 the 3rd off-axis paraboloidal mirrors are carried out
Adjustment, it is with screw that 105 second off-axis paraboloidal mirrors and 110 the 3rd off-axis paraboloidal mirror mirror holders and 101 are saturating when light path is optimal
Module bottom plate is penetrated to fix.Then 108 transmission samples are placed on light path correct position, consolidated with screw and 101 transmission module bottom plates
It is fixed.Now, transmission measurement module over all Integration.
Similarly, 201 reflecting module bottom plates, recruitment adjustment whole 202 second are put into using 106 and 109 two pin locating holes
Off-axis paraboloidal mirror, 203 speculums 1,204 speculums 2,108 specimen holders and 205 the 3rd off-axis paraboloidal mirrors, while adjust spectrometer
In 104 first off-axis paraboloidal mirrors and 111 the 4th off-axis paraboloidal mirrors, after light path is optimal, with screw by 202 second off-axis parabolics
Mirror mirror holder and 205 the 3rd off-axis paraboloidal mirror mirror holders are fixed with 201 reflecting module bottom plates.Then 108 reflected samples are placed on light
Road correct position, fixed with screw and 201 reflecting module bottom plates.Now, reflection measurement module over all Integration.
It can be seen that the optimal light path in spectrometer at two kinds of metering systems is different, so being needed during handover module
Light path of optical spectrometer is adjusted, and now, all mirror holders and specimen holder in transmission measurement module and reflection measurement module have been fixed,
So just need position and the posture of 104 first off-axis paraboloidal mirrors of regulation and 111 the 4th off-axis paraboloidal mirrors.For handover measurement mould
After block, quickly adjust 104 first off-axis paraboloidal mirrors and 111 the 4th off-axis paraboloidal mirrors and recover to optimal light path, the present invention to adopt
104 first off-axis paraboloidal mirrors and 111 the 4th off-axis paraboloidal mirrors are adjusted with five dimension adjusting apparatus shown in Fig. 3.The device
Five dimension adjusting screw rods can with reading, in adjustment light path of optical spectrometer first, during the optimal light path of record transmission mode 104 first from
Axle parabolic lens, 111 the 4th off-axis paraboloidal mirrors five dimension adjusting apparatus adjusting screw rod reading and reflection mode optimal light path when 104 the
The adjusting screw rod reading of one off-axis paraboloidal mirror, 111 the 4th off-axis paraboloidal mirrors five dimension adjusting apparatus.The two readings are as spectrometer
Input parameter, for switching after transmission module or reflecting module the fast off-axis paraboloidal mirror of quick-recovery 104 first and 111 the 4th off-axis
The optimal location of parabolic lens.
As shown in figure 3,104 be the first off-axis paraboloidal mirror, 301 and 302 all around move two-dimension translational platform to realize
Regulation handle, 303 be the regulation handle of pivot angle platform, realizes pitch regulation, and 304 be the regulation handle of pivot angle platform, realizes beat of bowing
Regulation, 305 be the regulation handle of turntable, realizes the rotary motion of off-axis paraboloidal mirror.Between 104 off-axis paraboloidal mirrors and turntable
Positioned with pin, ensure that off-axis paraboloidal mirror does not have to regulation highly.Each regulation handle carries scale, can read optimal light path
Under each adjusting position reading.So, corresponding measurement module is switched, the optimal light path that regulation records when debugging first is read
Number, can soon quick-recovery to the optimal light path for meeting measurement request.Similarly, the regulative mode of 111 the 4th off-axis paraboloidal mirrors is also
So.
As shown in Fig. 2 under reflection measurement mode, 107 samples need reflected terahertz hereby ripple, and this just needs the anti-of 107 samples
Penetrate face to be accurately positioned as reference plane, therefore, the present invention proposes specimen holder structure as shown in Figure 4.In 401 sample frame bodies
In structure, three 402 shop bolts are tumbled in, three pins are uniform in 360 degree, sophisticated rounding, three nose circle point locations, one mark
Directrix plane P, then the preceding surface of 107 samples be close on this standard flat P.The sample back side is clamped with 404 sample fore-sets, is leaned on
The datum plane close registration that the thrust of 403 stage clips makes the preceding surface of 107 samples and pin defines.
Due to terahertz time-domain spectroscopy instrument proposed by the present invention when measuring sample it is higher to the environmental requirement residing for sample,
In order to avoid external environment (temperature, humidity, dust etc.) impacts to measurement result, the present invention to two kinds of measurement modules and
104 first off-axis paraboloidal mirrors and 111 the 4th off-axis paraboloidal mirrors carry out partially sealed.
Although making specific descriptions to the present invention with reference to the above embodiments, for the ordinary skill people of this area
For member, it should be appreciated that can modify or improve based on present disclosure, and these modification and improvement all exist
Within the spirit and scope of the present invention.
Claims (6)
1. a kind of terahertz time-domain spectroscopy instrument based on femtosecond laser, includes transmission measurement and reflection measurement both of which, femtosecond
THz wave caused by Laser Focusing, after being collimated by the first off-axis paraboloidal mirror, focus on sample, enter through the second off-axis paraboloidal mirror
Row transmission or reflective-mode measurement, after the THz wave of sample is collected by the 3rd off-axis paraboloidal mirror, thrown off axis through the 4th
Object lens are focused on crystal detection, obtain the time-domain spectroscopy of Terahertz, it is characterised in that by two short focus second, third from
Axle parabolic lens and specimen holder are fixed on one block of independent optical flat and are integrated into transmission module, by the second of two long-focus,
3rd off-axis paraboloidal mirror and specimen holder, which are fixed on one block of independent optical flat, is integrated into reflecting module, transmits module and reflection
Module can mutually switch, and the first, the 4th off-axis paraboloidal mirror is fixed by five dimension adjusting apparatus of a readable respectively, and five dimensions are adjusted
Engagement positions can carry out around, pitching, beat and rotation five dimension regulation.
2. terahertz time-domain spectroscopy instrument as claimed in claim 1, it is characterised in that five dimension adjusting apparatus are by a two-dimension translational
Platform, two pivot angle platforms and a turntable composition.
3. terahertz time-domain spectroscopy instrument as claimed in claim 1, it is characterised in that optical flat and terahertz time-domain spectroscopy instrument
Positioned between measurement module with pin.
4. terahertz time-domain spectroscopy instrument as claimed in claim 1, it is characterised in that the first, the 4th off-axis paraboloidal mirror and five dimensions are adjusted
Fixed between whole by pin.
5. terahertz time-domain spectroscopy instrument as claimed in claim 1, it is characterised in that the reflected fudicial face of reflected sample frame is by three
Pin positions, and sample reflecting surface is close to three pin end faces, and the sample back side applies thrust by spring and ensures sample reflecting surface and pin
Locating surface is followed closely to overlap.
6. the terahertz time-domain spectroscopy instrument as described in claim any one of 1-5, it is characterised in that the first off-axis paraboloidal mirror, second
The part that off-axis paraboloidal mirror, the 3rd off-axis paraboloidal mirror, the 4th off-axis paraboloidal mirror, specimen holder are formed, using partially sealed design.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510028781.XA CN104515748B (en) | 2015-01-21 | 2015-01-21 | A kind of terahertz time-domain spectroscopy instrument based on femtosecond laser |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510028781.XA CN104515748B (en) | 2015-01-21 | 2015-01-21 | A kind of terahertz time-domain spectroscopy instrument based on femtosecond laser |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104515748A CN104515748A (en) | 2015-04-15 |
| CN104515748B true CN104515748B (en) | 2017-12-26 |
Family
ID=52791373
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510028781.XA Active CN104515748B (en) | 2015-01-21 | 2015-01-21 | A kind of terahertz time-domain spectroscopy instrument based on femtosecond laser |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN104515748B (en) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104865221B (en) * | 2015-06-01 | 2017-04-26 | 上海理工大学 | Terahertz plasma wave organic matter detecting device and detecting method |
| CN109374567A (en) * | 2018-12-06 | 2019-02-22 | 西安电子科技大学 | Terahertz imaging method based on order subset fast convergence |
| CN109520620B (en) * | 2018-12-28 | 2024-05-10 | 深圳市华讯方舟光电技术有限公司 | Terahertz time-domain spectrometer |
| CN109828197B (en) * | 2019-03-19 | 2021-04-09 | 北京遥感设备研究所 | Five-dimensional adjustable terahertz receiving chip responsivity measuring system and method |
| JP7278188B2 (en) * | 2019-09-27 | 2023-05-19 | 株式会社エス・テイ・ジャパン | sample holder |
| CN113030004A (en) * | 2021-03-02 | 2021-06-25 | 青岛青源峰达太赫兹科技有限公司 | Focusing device of self-adaptive terahertz reflection type measuring system |
| CN113075780B (en) * | 2021-04-13 | 2022-09-16 | 中国科学院重庆绿色智能技术研究院 | Off-axis parabolic mirror assembly and using method thereof |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN200962162Y (en) * | 2006-09-28 | 2007-10-17 | 中国工程物理研究院激光聚变研究中心 | 5-D adjusting machine |
| CN201000429Y (en) * | 2006-12-31 | 2008-01-02 | 清华大学 | Equipment for quick detecting vegetable oil purity using THz time-domain spectrum |
| CN201489178U (en) * | 2009-08-20 | 2010-05-26 | 北京卓立汉光仪器有限公司 | Five-dimensional adjusting mechanism of elliptic reflection collecting mirror |
| CN202631110U (en) * | 2012-05-31 | 2012-12-26 | 上海理工大学 | Terahertz time domain double spectrum detecting system |
| CN102798954B (en) * | 2012-08-22 | 2014-11-26 | 中国科学院上海光学精密机械研究所 | Five-dimensional adjusting rack |
| CN202994639U (en) * | 2012-11-02 | 2013-06-12 | 清华大学 | Sample loading device for terahertz spectrum test |
-
2015
- 2015-01-21 CN CN201510028781.XA patent/CN104515748B/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| CN104515748A (en) | 2015-04-15 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN104515748B (en) | A kind of terahertz time-domain spectroscopy instrument based on femtosecond laser | |
| CN101782432B (en) | Universal photoelectric test system for tera-hertz spectra | |
| CN106441580B (en) | The incident terahertz time-domain spectroscopy instrument for surveying transmission and reflection simultaneously of variable-angle | |
| CN106404713B (en) | A kind of miniature near infrared spectrometer of double detector of full spectral coverage 800nm-2500nm | |
| CN108562547B (en) | Laser crystal thermal stress birefringence coefficient measuring device and method thereof | |
| CN106813575B (en) | The outer blindage position measuring system of coronagraph and location measurement method | |
| CN104181131B (en) | Infrared modulated luminescence generated by light two-dimensional imaging light path is automatically positioned calibrating installation | |
| CN106226759B (en) | A kind of tracking Stabilily parameter device and method | |
| CN106596058B (en) | Diffraction efficiency of grating spectral measurement device and measurement method | |
| CN104132911A (en) | Open type long optical distance CO and CH4 online testing instrument | |
| CN107063456B (en) | Time resolution diffraction efficiency of grating spectral measurement device in situ and method | |
| CN101165471A (en) | Multiple angle multiple-pass detection device | |
| CN101539457A (en) | Miniature spectrometer based on MEMS micro lens array | |
| CN108169207A (en) | Space autofocusing laser differential confocal Raman spectrum imaging detection method and device | |
| CN107931784A (en) | A kind of plane arc imaging and spectroscopic simultaneous harvester | |
| CN105716756A (en) | Accurate measuring device for microstress spatial distribution of optical material | |
| CN102426058A (en) | Static interference imaging polarizer and method for acquiring polarization information of target | |
| CN109186759A (en) | A kind of grating spectrograph image quality measurement method and apparatus | |
| CN107345908A (en) | A kind of scattering system for obtaining fruit multiaspect diffusing reflection information | |
| CN204008076U (en) | A kind of optical system general performance test | |
| Wadsworth et al. | Rugged high-speed rotary imaging Fourier transform spectrometer for industrial use | |
| CN101294965A (en) | Miniature non-mark protein chip detecting system | |
| CN106247992B (en) | A kind of high-precision, wide scope and big working distance autocollimation and method | |
| CN104614315A (en) | Test sample holder, switching type test system and test method for terahertz absorption spectrum | |
| CN106323198B (en) | A kind of high-precision, wide scope and big working distance laser auto-collimation apparatus and method |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| EXSB | Decision made by sipo to initiate substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| TA01 | Transfer of patent application right | ||
| TA01 | Transfer of patent application right |
Effective date of registration: 20171121 Address after: 100080 Beijing City, Haidian District Suzhou Street No. 3 North Block Building 13 layer Daheng Technology Applicant after: China Daheng Group, Inc. Address before: 100085 Suzhou Street, Haidian District, Haidian District, Beijing, No. 3, 13 layer 1301-15 Applicant before: DAHENG OPTICS SCIENCE & TECHNOLOGY DEVELOPMENT (BEIJING) CO., LTD. |
|
| GR01 | Patent grant |