CN104515748A - Terahertz time-domain spectrograph based on femtosecond laser - Google Patents

Terahertz time-domain spectrograph based on femtosecond laser Download PDF

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Publication number
CN104515748A
CN104515748A CN201510028781.XA CN201510028781A CN104515748A CN 104515748 A CN104515748 A CN 104515748A CN 201510028781 A CN201510028781 A CN 201510028781A CN 104515748 A CN104515748 A CN 104515748A
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axis paraboloidal
paraboloidal mirror
sample
terahertz time
axis parabolic
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CN201510028781.XA
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CN104515748B (en
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冯忠磊
张翼
姚思一
杨晓红
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China Daheng Group, Inc.
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DAHENG OPTICS SCIENCE & TECHNOLOGY DEVELOPMENT (BEIJING) Co Ltd
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Abstract

The invention discloses a terahertz time-domain spectrograph based on a femtosecond laser. The terahertz time-domain spectrograph has two modes of a transmission-type system and a reflection-type system. A terahertz wave generated by the focusing of the femtosecond laser is focused on a sample through a second off-axis parabolic mirror after being collimated by a first off-axis parabolic mirror, transmission or reflection mode measurement is carried out, the terahertz wave of the sample is focused on a detection crystal through a fourth off-axis parabolic mirror after being collected by a third off-axis parabolic mirror, and the terahertz time-domain spectrograph is obtained. The second off-axis parabolic mirror and the third off-axis parabolic mirror as well as a sample stand are integrated as a measuring module on a base plate. Two short-focus off-axis parabolic mirrors and a transmission sample stand are integrated into a transmission measuring module. Two long-focus off-axis parabolic mirrors and a reflection sample stand are integrated into a reflection measuring module. A five-dimensional adjusting device is adopted for clamping the first off-axis parabolic mirror and the fourth off-axis parabolic mirror, and is used for quickly recovering the optimum positions of the first off-axis parabolic mirror and the fourth off-axis parabolic mirror when a transmission mode or a reflection module is switched. The terahertz time-domain spectrograph disclosed by the invention is simple and quick in adjustment process, and integration and user operation of the terahertz time-domain spectrograph are facilitated.

Description

A kind of terahertz time-domain spectroscopy instrument based on femtosecond laser
Technical field
The invention belongs to field of photoelectric technology, particularly terahertz time-domain spectroscopy fields of measurement.
Background technology
Electromagnetic wave spectrum technology, as the instrument in the human knowledge world, extends the ability that people observe the world.Human eye can appreciate the motley world by means of visible ray, utilizes infrared conversion spectrum technology and Raman spectroscopy etc. can understand the character such as vibration and rotation of molecule, utilizes X-ray diffraction technology can understand the structural information of material.And terahertz light spectral technology can form complementation with infrared, Raman spectroscopy as emerging spectral technique, irreplaceable effect can be played even in some aspects, thus become the hot fields of scientific research in this century.
THz wave has spectral characteristic and transport property concurrently, uses the Examined effect of THz wave to become a kind of harmless inspecting method more effective and unique than X ray.Because use the radiativity of THz wave equipment less, the contrast of imaging is clearer, also likely realizes the unrivaled Chemical recognition of X ray.The range of application of THz wave relates to communication, biological medicine, sensory field etc.
In recent ten years, along with developing rapidly of ultrafast laser technique, the generation for terahertz pulse provides stable, reliable excitation source, the generation of terahertz emission and application is obtained flourish.Why Terahertz Technology causes people to pay close attention to widely, first be that research material is significant for the exploration of the structure of matter at the spectrum of this wave band because the tera-hertz spectra (comprising transmission spectrum and reflectance spectrum) of material contains very abundant physics and chemistry information; Next is because terahertz pulse light source has a lot of unique character compared with conventional light source, as the transient state of terahertz emission, broadband property, coherence and low energy etc.
Terahertz time-domain spectroscopic technology is the Typical Representative of Terahertz Technology, is a kind of emerging, very effective coherent detection technology.Common terahertz time-domain spectroscopy instrument system is divided into transmissive system and reflect system.It is primarily of femto-second laser, terahertz emission generation device and corresponding sniffer composition.Femtosecond laser focuses on the THz wave produced, after the first off-axis paraboloidal mirror collimation, focus on sample through the second off-axis paraboloidal mirror, carry out transmission or reflective-mode measurement, after the THz wave of sample is collected by the 3rd off-axis paraboloidal mirror, focus on crystal detection through the 4th off-axis paraboloidal mirror, obtain the time-domain spectroscopy of Terahertz.
Owing to transmission sample measurement should be carried out in same set of terahertz time-domain spectroscopy instrument system, carry out reflected sample measurement again, so need the switching carrying out light path.Transmission sample and reflected sample are all placed between the second off-axis paraboloidal mirror and the 3rd off-axis paraboloidal mirror, but are transmitted to reflection when switching, and need to change sample and second and the 3rd off-axis paraboloidal mirror.When transmission sample is measured, need second and the 3rd off-axis paraboloidal mirror of short focus, when reflected sample is measured, need second and the 3rd off-axis paraboloidal mirror of long-focus.When debugging light path first, also need position and the attitude of debugging first and the 4th off-axis paraboloidal mirror.
Current most of terahertz time-domain spectroscopy instrument is when changing metering system, and the position of four off-axis paraboloidal mirrors and specimen holder and attitude all need adjustment, and adjustment process very complicated, be unfavorable for the integrated of terahertz time-domain spectroscopy instrument and user operation.The present invention just for the problems referred to above, a kind of terahertz time-domain spectroscopy instrument based on femtosecond laser of proposition.
Summary of the invention
In order to simplify complicated adjustment process when transmission measurement pattern and Reflection measurement mode switching, guarantee that switching-over light path precisely resets, the present invention proposes following scheme:
A kind of terahertz time-domain spectroscopy instrument based on femtosecond laser, comprise transmission measurement and reflection measurement two kinds of patterns, femtosecond laser focuses on the THz wave produced, after the first off-axis paraboloidal mirror collimation, focus on sample through the second off-axis paraboloidal mirror, carry out transmission or reflective-mode measurement, after the THz wave of sample is collected by the 3rd off-axis paraboloidal mirror, focus on crystal detection through the 4th off-axis paraboloidal mirror, obtain the time-domain spectroscopy of Terahertz.
Wherein, second, third off-axis paraboloidal mirror and specimen holder are integrated into as a measurement module on one piece of base plate, and two short focus off-axis paraboloidal mirrors and specimen holder are integrated into transmission measurement module.Two long-focus off-axis paraboloidal mirrors and specimen holder are integrated into reflection measurement module.During measurement, as required different modules is placed in spectrometer and measures, positioned by mechanical register pin between module and spectrometer.
First and the 4th off-axis paraboloidal mirror be placed in spectrometer light path, but in order to coordinate the switching of transmission measurement module and reflection measurement module, first and the 4th off-axis paraboloidal mirror should be able to ensure adjustment position and attitude.For this reason, the present invention adopts five dimension adjusting gear clamping first and the 4th off-axis paraboloidal mirrors.This five dimensions adjusting gear comprises a two-dimension translational platform, two pivot angle platforms and a turntable, for adjusting all around of off-axis paraboloidal mirror, pitching, beat and rotary motion.Locate to ensure off-axis paraboloidal mirror height in the optical path with pin between five dimension adjusting gears and off-axis paraboloidal mirror.Adjusting handle all adopts readable device, the reading of optimum light path position when debuging first for recording.
When debuging light path of optical spectrometer first, first transmission measurement module is placed in light path, the position of adjustment first and the 4th off-axis paraboloidal mirror and attitude, the clamping of recruitment simultaneously second and the 3rd off-axis paraboloidal mirror adjust, when light path reaches optimum, with screw by second and the 3rd off-axis paraboloidal mirror mirror holder and transmission module base plate fix.Then transmission sample is placed on light path tram, fixes with screw and transmission module base plate.Now, transmission measurement module over all Integration, comprises second and the 3rd off-axis paraboloidal mirror (short focus), transmission sample frame.Transmission module base plate and spectrometer base plate are located by pin, ensure the tram of module in spectrometer.Record first and the 4th off-axis paraboloidal mirror five tie up the adjusting screw(rod) reading of adjusting gear, the optimal location of fast quick-recovery first and the 4th off-axis paraboloidal mirror during for again moving into transmission module after toggle reflections module.
Treat transmission measurement module debug with integrated after, shift out transmission module, utilize pin to locate and put into reflecting module base plate, whole second and the 3rd off-axis paraboloidal mirror (long-focus) are debug in recruitment, adjust five dimension regulating devices of first in spectrometer and the 4th off-axis paraboloidal mirror simultaneously, after light path optimum, with screw by second and the 3rd off-axis paraboloidal mirror mirror holder and reflecting module base plate fix.Then specimen holder is placed in light path tram, fixes with screw and reflecting module base plate.Now, reflection measurement module over all Integration, comprises second and the 3rd off-axis paraboloidal mirror (long-focus), specimen holder.Reflecting module base plate and the spectrometer base plate pin hole of transmission module are located, and ensure the tram of module in spectrometer.Record first and the 4th off-axis paraboloidal mirror five tie up the adjusting screw(rod) reading of adjusting gear, the optimal location of fast quick-recovery first and the 4th off-axis paraboloidal mirror during for again moving into reflecting module after switching transmission module.
Five dimension regulating devices of the present invention comprise a two-dimension translational platform, two pivot angle platforms and a universal stage.Two-dimension translational platform is fixed on the mounting base of spectrometer, realizes the two-dimension translational all around of the first, the 4th off-axis paraboloidal mirror.Two-dimension translational platform installs two pivot angle platforms, realizes pitching and the adjustment of beat two dimension angular of the first, the 4th off-axis paraboloidal mirror.Finally a universal stage is installed, realizes the first, the 4th off-axis paraboloidal mirror around optical axis rotary motion.With pin location between universal stage and first, the 4th off-axis paraboloidal mirror, ensure parabolic lens height in spectrometer.
Consider that reflection measurement mode sample needs energy accurately reflected light path, the specimen holder reflected fudicial face that the present invention proposes is located by three pins, three pin end faces are close in sample reflection face, the sample back side applies snap-in force by spring and ensures that sample reflection face overlaps with pin locating surface, such sample just can keep installation site accurately in specimen holder, thus realizes reflected terahertz hereby ripple in the optical path.
Based on scheme set forth above, the present invention can adjust the first, the 4th off-axis paraboloidal mirror rapidly and accurately, and can ensure each measurement module and specimen holder tram in the optical path, and realizes following effect:
Debug after light path of optical spectrometer completes first, transmission measurement module and reflection measurement module all integrated, and the optimum optical path of two kinds of measurement modules in spectrometer also can be determined.Carry out transmission sample when measuring, transmission module be placed in light path, input simultaneously fixed first and the 4th off-axis paraboloidal mirror (short focus) five tie up the adjusting screw(rod) reading of adjusting gear, recover the optimum light path of transmission measurement and measure.Carry out reflected sample when measuring, reflecting module be placed in light path, input simultaneously fixed first and the 4th off-axis paraboloidal mirror (long-focus) five tie up the adjusting screw(rod) reading of adjusting gear, recover the optimum light path of reflection measurement and measure.
Accompanying drawing explanation
Fig. 1 is the schematic diagram of terahertz time-domain spectroscopy instrument transmission measurement mode of the present invention;
101-transmission module base plate, 102-femtosecond pulse, 103-THZ radiation source, 104-first off-axis paraboloidal mirror, 105-second off-axis paraboloidal mirror (short focus), 106-pin locating holes 1,107-sample, 108-specimen holder, 109-pin locating holes 2,110-the 3rd off-axis paraboloidal mirror (short focus), 111-the 4th off-axis paraboloidal mirror, 112-THZ detector;
Fig. 2 is the schematic diagram of terahertz time-domain spectroscopy instrument reflection measurement mode of the present invention;
201-reflecting module base plate, 202-second off-axis paraboloidal mirror (long-focus), 203-catoptron 1,204-catoptron 2,205-the 3rd off-axis paraboloidal mirror (long-focus);
Fig. 3 is that the present invention is for regulating five dimension regulating device schematic diagram of 104 first off-axis paraboloidal mirrors and 111 the 4th off-axis paraboloidal mirrors;
Adjusting handle before and after 301-, 302-left and right adjusting handle, 303-pitch regulation handle, 304-beat adjusting handle, 305-rotates adjusting handle;
Fig. 4 is the structural representation of specimen holder of the present invention;
401-specimen holder main body, 402-tommy, 403-stage clip, 404-sample fore-set;
Embodiment
Below in conjunction with accompanying drawing, the present invention is explained in further detail:
Embodiment:
Fig. 1 and Fig. 2 is the schematic diagram of terahertz time-domain spectroscopy instrument transmission measurement mode of the present invention and reflection measurement mode.Femtosecond pulse 102 focuses on the THz wave that 103THZ radiation source produces, after 104 first off-axis paraboloidal mirror collimations, focus on sample 107 through 105 or 202 second off-axis paraboloidal mirrors, carry out transmission or reflective-mode measurement, after the THz wave of sample is collected by 110 or 205 the 3rd off-axis paraboloidal mirrors, focus on the crystal detection in 112 detectors through 111 the 4th off-axis paraboloidal mirrors, obtain the time-domain spectroscopy of Terahertz.
Two kinds of metering systems are integrated in a set of terahertz time-domain spectroscopy instrument system by the present invention, and handover measurement mode need only change corresponding measurement module.As shown in Figure 1,105 second off-axis paraboloidal mirrors (short focus), 107 samples, 108 specimen holders and 110 the 3rd off-axis paraboloidal mirrors (short focus) are integrated on 101 transmission module base plates, composition transmission measurement module.As shown in Figure 2,202 second off-axis paraboloidal mirrors (long-focus), 203 catoptron 1,107 samples, 108 specimen holders, 204 catoptron 2,205 the 3rd off-axis paraboloidal mirrors (long-focus) are integrated on 201 reflecting module base plates, composition reflection measurement module.In a set of terahertz time-domain spectroscopy instrument, transmission measurement module and reflection measurement module can switch, and guarantee the tram of module in light path of optical spectrometer, and can ensure the repetitive positioning accuracy after handover measurement mode with 106 and 109 two pin locating holes.
When debugging terahertz time-domain spectroscopy instrument light path first, need the position and the attitude that adjust adjustment 104 first off-axis paraboloidal mirror and 111 the 4th off-axis paraboloidal mirrors, recruitment clamping 105 second off-axis paraboloidal mirror and 110 the 3rd off-axis paraboloidal mirrors adjust simultaneously, when light path reaches optimum, with screw, 105 second off-axis paraboloidal mirrors and 110 the 3rd off-axis paraboloidal mirror mirror holders and 101 transmission module base plates are fixed.Then 108 transmission samples are placed on light path tram, fix with screw and 101 transmission module base plates.Now, transmission measurement module over all Integration.
In like manner, 106 and 109 two pin locating holes are utilized to put into 201 reflecting module base plates, whole 202 second off-axis paraboloidal mirrors, 203 catoptron 1,204 catoptron 2,108 specimen holders and 205 the 3rd off-axis paraboloidal mirrors are debug in recruitment, adjust 104 first off-axis paraboloidal mirrors in spectrometer and 111 the 4th off-axis paraboloidal mirrors simultaneously, after light path optimum, with screw, 202 second off-axis paraboloidal mirror mirror holders and 205 the 3rd off-axis paraboloidal mirror mirror holders and 201 reflecting module base plates are fixed.Then 108 reflected sample are placed on light path tram, fix with screw and 201 reflecting module base plates.Now, reflection measurement module over all Integration.
Can see, optimum light path in spectrometer at two kinds of metering systems is different, so need during handover module to regulate light path of optical spectrometer, and now, all mirror holders in transmission measurement module and reflection measurement module and specimen holder all fixing, so just need position and the attitude of adjustment 104 first off-axis paraboloidal mirror and 111 the 4th off-axis paraboloidal mirrors.After handover measurement module, regulate 104 first off-axis paraboloidal mirrors and 111 the 4th off-axis paraboloidal mirrors fast and return to optimum light path, present invention employs five dimension adjusting gears shown in Fig. 3 and regulate 104 first off-axis paraboloidal mirrors and 111 the 4th off-axis paraboloidal mirrors.Five dimension adjusting screw(rod)s of this device all can reading, when debuging light path of optical spectrometer first, 104 first off-axis paraboloidal mirrors when 104 first off-axis paraboloidal mirrors during the optimum light path of record transmission mode, 111 the 4th off-axis paraboloidal mirrors five tie up the adjusting screw(rod) reading of adjusting gear and reflection mode optimum light path, 111 the 4th off-axis paraboloidal mirrors five tie up the adjusting screw(rod) reading of adjusting gear.These two readings as the input parameter of spectrometer, for switching the optimal location of fast quick-recovery 104 first off-axis paraboloidal mirror and 111 the 4th off-axis paraboloidal mirrors after transmission module or reflecting module.
As shown in Figure 3,104 is the first off-axis paraboloidal mirror, 301 and 302 is the adjusting handle realizing moving two-dimension translational platform all around, 303 is the adjusting handle of pivot angle platform, realize pitch regulation, 304 is the adjusting handle of pivot angle platform, and the beat that realizes bowing regulates, 305 is the adjusting handle of universal stage, realizes the rotary motion of off-axis paraboloidal mirror.Locate with pin between 104 off-axis paraboloidal mirrors and universal stage, ensure that off-axis paraboloidal mirror height need not regulate.Each adjusting handle, all with scale, can read the reading of each adjusting position under optimum light path.Like this, switch corresponding measurement module, regulate the optimum light path reading of record during debugging first, just can return to the optimum light path meeting and measure and require fast.In like manner, the regulative mode of 111 the 4th off-axis paraboloidal mirrors is also like this.
As shown in Figure 2, under reflection measurement mode, 107 samples need reflected terahertz hereby ripple, and this just needs the reflecting surface of 107 samples accurately to locate as reference field, for this reason, the present invention proposes specimen holder structure as shown in Figure 4.In 401 specimen holder agent structures, tumble in three 402 tommys, three pins be 360 degree uniform, most advanced and sophisticated rounding, three nose circle point locations standard flat P, then the front surface of 107 samples is close on this standard flat P.The sample back side 404 sample fore-sets clamp, the reference plane close registration that the snap-in force by 403 stage clips makes the front surface of 107 samples and pin define.
The terahertz time-domain spectroscopy instrument proposed due to the present invention is higher to the environmental requirement residing for sample when measuring sample, in order to avoid external environment (temperature, humidity, dust etc.) measurement result is impacted, the present invention carries out partially sealed to two kinds of measurement modules and 104 first off-axis paraboloidal mirrors and 111 the 4th off-axis paraboloidal mirrors.
Although make specific descriptions to the present invention with reference to the above embodiments, but for the person of ordinary skill of the art, should be appreciated that and can modify based on content disclosed by the invention or improve, and these amendments and improvement be all within spirit of the present invention and scope.

Claims (6)

1. the terahertz time-domain spectroscopy instrument based on femtosecond laser, comprise transmission measurement and reflection measurement two kinds of patterns, femtosecond laser focuses on the THz wave produced, after the first off-axis paraboloidal mirror collimation, focus on sample through the second off-axis paraboloidal mirror, carry out transmission or reflective-mode measurement, after the THz wave of sample is collected by the 3rd off-axis paraboloidal mirror, focus on crystal detection through the 4th off-axis paraboloidal mirror, obtain the time-domain spectroscopy of Terahertz, it is characterized in that second, 3rd off-axis paraboloidal mirror and specimen holder are fixed on one piece independently on optical flat, first, 4th off-axis paraboloidal mirror is fixed by five dimension adjusting gears of a readable respectively, five dimension adjusting gears can carry out front and back, left and right, pitching, beat and rotation five dimension regulate.
2. terahertz time-domain spectroscopy instrument as claimed in claim 1, is characterized in that five dimension adjusting gears are made up of a two-dimension translational platform, two pivot angle platforms and a universal stage.
3. terahertz time-domain spectroscopy instrument as claimed in claim 1, is characterized in that positioning with pin between optical flat and terahertz time-domain spectroscopy instrument measurement module.
4. terahertz time-domain spectroscopy instrument as claimed in claim 1, is characterized in that the first, the 4th off-axis paraboloidal mirror and five is tieed up to adjust between platform and is fixed by pin.
5. terahertz time-domain spectroscopy instrument as claimed in claim 1, it is characterized in that the reflected fudicial face of reflected sample frame is located by three pins, three pin end faces are close in sample reflection face, and the sample back side applies snap-in force by spring and ensures that sample reflection face overlaps with pin locating surface.
6. the terahertz time-domain spectroscopy instrument as described in claim 1-5, is characterized in that the part that the first off-axis paraboloidal mirror, the second off-axis paraboloidal mirror, the 3rd off-axis paraboloidal mirror, the 4th off-axis paraboloidal mirror, specimen holder form adopting partially sealed design.
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CN109374567A (en) * 2018-12-06 2019-02-22 西安电子科技大学 Terahertz imaging method based on order subset fast convergence
WO2020135717A1 (en) * 2018-12-28 2020-07-02 深圳市太赫兹科技创新研究院有限公司 Terahertz time-domain spectrometer
CN109828197A (en) * 2019-03-19 2019-05-31 北京遥感设备研究所 The five adjustable Terahertz of dimension of one kind receives chip responsiveness measuring system and method
CN109828197B (en) * 2019-03-19 2021-04-09 北京遥感设备研究所 Five-dimensional adjustable terahertz receiving chip responsivity measuring system and method
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CN113030004A (en) * 2021-03-02 2021-06-25 青岛青源峰达太赫兹科技有限公司 Focusing device of self-adaptive terahertz reflection type measuring system
CN113075780A (en) * 2021-04-13 2021-07-06 中国科学院重庆绿色智能技术研究院 Off-axis parabolic mirror assembly and using method thereof
CN113075780B (en) * 2021-04-13 2022-09-16 中国科学院重庆绿色智能技术研究院 Off-axis parabolic mirror assembly and using method thereof

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