CN104441994B - 喷墨头的制造方法 - Google Patents
喷墨头的制造方法 Download PDFInfo
- Publication number
- CN104441994B CN104441994B CN201310425684.5A CN201310425684A CN104441994B CN 104441994 B CN104441994 B CN 104441994B CN 201310425684 A CN201310425684 A CN 201310425684A CN 104441994 B CN104441994 B CN 104441994B
- Authority
- CN
- China
- Prior art keywords
- pressure chamber
- oscillating plate
- activator
- piezo
- ink gun
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000000034 method Methods 0.000 title claims abstract description 34
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 26
- 239000012190 activator Substances 0.000 claims abstract description 59
- 239000000758 substrate Substances 0.000 claims abstract description 32
- 239000012530 fluid Substances 0.000 claims abstract description 26
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 20
- 239000000463 material Substances 0.000 claims description 13
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 10
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 10
- 239000000377 silicon dioxide Substances 0.000 claims description 9
- 229920001486 SU-8 photoresist Polymers 0.000 claims description 3
- 230000000694 effects Effects 0.000 description 9
- 230000007797 corrosion Effects 0.000 description 4
- 238000005260 corrosion Methods 0.000 description 4
- 238000005530 etching Methods 0.000 description 3
- 238000002347 injection Methods 0.000 description 3
- 239000007924 injection Substances 0.000 description 3
- 235000012239 silicon dioxide Nutrition 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 2
- 239000011230 binding agent Substances 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 229920002120 photoresistant polymer Polymers 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 238000002791 soaking Methods 0.000 description 2
- 239000007921 spray Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 1
- 238000011982 device technology Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000003628 erosive effect Effects 0.000 description 1
- 238000001125 extrusion Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000008595 infiltration Effects 0.000 description 1
- 238000001764 infiltration Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 238000005488 sandblasting Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 238000007711 solidification Methods 0.000 description 1
- 230000008023 solidification Effects 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 229910001928 zirconium oxide Inorganic materials 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14201—Structure of print heads with piezoelectric elements
- B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1607—Production of print heads with piezoelectric elements
- B41J2/161—Production of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1623—Manufacturing processes bonding and adhesion
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1631—Manufacturing processes photolithography
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1637—Manufacturing processes molding
- B41J2/1639—Manufacturing processes molding sacrificial molding
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14201—Structure of print heads with piezoelectric elements
- B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
- B41J2002/14241—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm having a cover around the piezoelectric thin film element
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2002/1437—Back shooter
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/42—Piezoelectric device making
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49082—Resistor making
- Y10T29/49083—Heater type
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49401—Fluid pattern dispersing device making, e.g., ink jet
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
Abstract
Description
Claims (7)
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201310425684.5A CN104441994B (zh) | 2013-09-17 | 2013-09-17 | 喷墨头的制造方法 |
PCT/CN2014/084095 WO2015039506A1 (zh) | 2013-09-17 | 2014-08-11 | 喷墨头的制造方法及喷墨头 |
JP2016541782A JP6213795B2 (ja) | 2013-09-17 | 2014-08-11 | インクジェットヘッドの製造方法 |
US15/046,361 US9776406B2 (en) | 2013-09-17 | 2016-02-17 | Method for manufacturing ink jet head |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201310425684.5A CN104441994B (zh) | 2013-09-17 | 2013-09-17 | 喷墨头的制造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN104441994A CN104441994A (zh) | 2015-03-25 |
CN104441994B true CN104441994B (zh) | 2016-10-26 |
Family
ID=52688192
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201310425684.5A Active CN104441994B (zh) | 2013-09-17 | 2013-09-17 | 喷墨头的制造方法 |
Country Status (4)
Country | Link |
---|---|
US (1) | US9776406B2 (zh) |
JP (1) | JP6213795B2 (zh) |
CN (1) | CN104441994B (zh) |
WO (1) | WO2015039506A1 (zh) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2019014229A (ja) * | 2017-07-06 | 2019-01-31 | セイコーエプソン株式会社 | 圧電デバイス、液体噴射ヘッド及び液体噴射装置 |
US10507656B2 (en) * | 2017-07-06 | 2019-12-17 | Seiko Epson Corporation | Piezoelectric device, liquid ejecting head, and liquid ejecting apparatus |
Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004209875A (ja) * | 2003-01-07 | 2004-07-29 | Canon Inc | インクジェットヘッドの製造方法 |
CN1308144C (zh) * | 2003-02-07 | 2007-04-04 | 佳能株式会社 | 喷墨头的制造方法 |
CN101037045A (zh) * | 2006-03-17 | 2007-09-19 | 精工爱普生株式会社 | 液滴喷头、图像形成装置及成膜装置 |
JP2010201940A (ja) * | 2010-06-11 | 2010-09-16 | Seiko Epson Corp | 記録ヘッドおよび液体噴射装置 |
CN103072378A (zh) * | 2011-10-25 | 2013-05-01 | 珠海纳思达电子科技有限公司 | 一种液体喷头及其制造方法 |
CN103182844A (zh) * | 2011-12-27 | 2013-07-03 | 珠海纳思达企业管理有限公司 | 一种液体喷头 |
CN103252996A (zh) * | 2009-11-02 | 2013-08-21 | 精工爱普生株式会社 | 液体喷射装置 |
CN103252997A (zh) * | 2012-02-16 | 2013-08-21 | 珠海纳思达电子科技有限公司 | 一种液体喷头及其制造方法 |
Family Cites Families (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TW506908B (en) * | 2001-09-06 | 2002-10-21 | Nanodynamics Inc | Piezoelectric ink jet print head and the manufacturing process thereof |
US20040104975A1 (en) * | 2002-03-18 | 2004-06-03 | Seiko Epson Corporation | Liquid-jet head, method of manufacturing the same and liquid-jet apparatus |
JP3849773B2 (ja) * | 2002-07-04 | 2006-11-22 | セイコーエプソン株式会社 | 液体噴射ヘッドの製造方法 |
CN1611361A (zh) * | 2003-10-31 | 2005-05-04 | 飞赫科技股份有限公司 | 压电式喷墨头及其制造方法 |
JP4086864B2 (ja) * | 2004-08-06 | 2008-05-14 | キヤノン株式会社 | 液体吐出ヘッドの製造方法および液体吐出ヘッド用基板の製造方法 |
US7497962B2 (en) * | 2004-08-06 | 2009-03-03 | Canon Kabushiki Kaisha | Method of manufacturing liquid discharge head and method of manufacturing substrate for liquid discharge head |
JP2006123212A (ja) * | 2004-10-26 | 2006-05-18 | Seiko Epson Corp | 液体噴射ヘッドの製造方法及び液体噴射ヘッド |
JP2007069532A (ja) * | 2005-09-08 | 2007-03-22 | Fujifilm Corp | 液体吐出ヘッドの製造方法及び画像形成装置 |
US7909428B2 (en) * | 2006-07-28 | 2011-03-22 | Hewlett-Packard Development Company, L.P. | Fluid ejection devices and methods of fabrication |
KR100818277B1 (ko) * | 2006-10-02 | 2008-03-31 | 삼성전자주식회사 | 잉크젯 프린트헤드의 제조방법 |
KR101113479B1 (ko) * | 2006-12-27 | 2012-02-29 | 삼성전기주식회사 | 비수용성 잉크를 사용하는 잉크젯 프린트헤드 |
KR20100080096A (ko) * | 2008-12-31 | 2010-07-08 | 삼성전자주식회사 | 잉크젯 프린트헤드 및 그 제조방법 |
JP2010214634A (ja) * | 2009-03-13 | 2010-09-30 | Ricoh Co Ltd | 薄膜アクチュエータ、液体吐出ヘッド、インクカートリッジ及び画像形成装置 |
CN102378691B (zh) * | 2009-03-31 | 2014-07-30 | 惠普开发有限公司 | 喷墨笔、制造喷墨笔的方法和清洗喷墨笔的方法 |
JP2011037055A (ja) * | 2009-08-07 | 2011-02-24 | Seiko Epson Corp | 液体噴射ヘッドの製造方法、液体噴射ヘッド及び液体噴射装置 |
JP5693204B2 (ja) * | 2010-12-17 | 2015-04-01 | キヤノン株式会社 | インクジェット記録ヘッドの製造方法 |
CN103085479B (zh) * | 2013-02-04 | 2015-12-23 | 珠海赛纳打印科技股份有限公司 | 一种墨水喷头及其制造方法 |
-
2013
- 2013-09-17 CN CN201310425684.5A patent/CN104441994B/zh active Active
-
2014
- 2014-08-11 JP JP2016541782A patent/JP6213795B2/ja active Active
- 2014-08-11 WO PCT/CN2014/084095 patent/WO2015039506A1/zh active Application Filing
-
2016
- 2016-02-17 US US15/046,361 patent/US9776406B2/en active Active
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004209875A (ja) * | 2003-01-07 | 2004-07-29 | Canon Inc | インクジェットヘッドの製造方法 |
CN1308144C (zh) * | 2003-02-07 | 2007-04-04 | 佳能株式会社 | 喷墨头的制造方法 |
CN101037045A (zh) * | 2006-03-17 | 2007-09-19 | 精工爱普生株式会社 | 液滴喷头、图像形成装置及成膜装置 |
CN103252996A (zh) * | 2009-11-02 | 2013-08-21 | 精工爱普生株式会社 | 液体喷射装置 |
JP2010201940A (ja) * | 2010-06-11 | 2010-09-16 | Seiko Epson Corp | 記録ヘッドおよび液体噴射装置 |
CN103072378A (zh) * | 2011-10-25 | 2013-05-01 | 珠海纳思达电子科技有限公司 | 一种液体喷头及其制造方法 |
CN103182844A (zh) * | 2011-12-27 | 2013-07-03 | 珠海纳思达企业管理有限公司 | 一种液体喷头 |
CN103252997A (zh) * | 2012-02-16 | 2013-08-21 | 珠海纳思达电子科技有限公司 | 一种液体喷头及其制造方法 |
Also Published As
Publication number | Publication date |
---|---|
JP2016531779A (ja) | 2016-10-13 |
JP6213795B2 (ja) | 2017-10-18 |
CN104441994A (zh) | 2015-03-25 |
WO2015039506A1 (zh) | 2015-03-26 |
US9776406B2 (en) | 2017-10-03 |
US20160159096A1 (en) | 2016-06-09 |
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