CN104293207A - 一种化学机械抛光液及其制备方法 - Google Patents
一种化学机械抛光液及其制备方法 Download PDFInfo
- Publication number
- CN104293207A CN104293207A CN201410500335.XA CN201410500335A CN104293207A CN 104293207 A CN104293207 A CN 104293207A CN 201410500335 A CN201410500335 A CN 201410500335A CN 104293207 A CN104293207 A CN 104293207A
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- China
- Prior art keywords
- parts
- polishing liquid
- mechanical polishing
- chemical mechanical
- sodium
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09G—POLISHING COMPOSITIONS; SKI WAXES
- C09G1/00—Polishing compositions
- C09G1/04—Aqueous dispersions
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- Chemical & Material Sciences (AREA)
- Dispersion Chemistry (AREA)
- Organic Chemistry (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
Abstract
Description
外观 | 光泽度(gu) | 空留时间(s) | |
实施例1 | OK | 48 | 43 |
实施例2 | OK | 56 | 37 |
实施例3 | OK | 62 | 34 |
实施例4 | OK | 70 | 29 |
对比例 | NG | 39 | 60 |
Claims (6)
Priority Applications (1)
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CN201410500335.XA CN104293207B (zh) | 2014-09-25 | 2014-09-25 | 一种化学机械抛光液及其制备方法 |
Applications Claiming Priority (1)
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CN201410500335.XA CN104293207B (zh) | 2014-09-25 | 2014-09-25 | 一种化学机械抛光液及其制备方法 |
Publications (2)
Publication Number | Publication Date |
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CN104293207A true CN104293207A (zh) | 2015-01-21 |
CN104293207B CN104293207B (zh) | 2016-03-23 |
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CN201410500335.XA Expired - Fee Related CN104293207B (zh) | 2014-09-25 | 2014-09-25 | 一种化学机械抛光液及其制备方法 |
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CN (1) | CN104293207B (zh) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105623526A (zh) * | 2016-02-16 | 2016-06-01 | 章建群 | 一种化学机械抛光液及其制备方法 |
CN110219004A (zh) * | 2019-07-08 | 2019-09-10 | 周兆梅 | 一种铝合金化学抛光液及其抛光方法 |
CN110431210A (zh) * | 2017-03-23 | 2019-11-08 | 福吉米株式会社 | 研磨用组合物 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1993437A (zh) * | 2004-07-28 | 2007-07-04 | 卡伯特微电子公司 | 用于贵金属的抛光组合物 |
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2014
- 2014-09-25 CN CN201410500335.XA patent/CN104293207B/zh not_active Expired - Fee Related
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1993437A (zh) * | 2004-07-28 | 2007-07-04 | 卡伯特微电子公司 | 用于贵金属的抛光组合物 |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105623526A (zh) * | 2016-02-16 | 2016-06-01 | 章建群 | 一种化学机械抛光液及其制备方法 |
CN110431210A (zh) * | 2017-03-23 | 2019-11-08 | 福吉米株式会社 | 研磨用组合物 |
EP3604475A4 (en) * | 2017-03-23 | 2020-12-23 | Fujimi Incorporated | POLISHING COMPOSITION |
EP3919576A1 (en) * | 2017-03-23 | 2021-12-08 | Fujimi Incorporated | Polishing composition |
US11319460B2 (en) | 2017-03-23 | 2022-05-03 | Fujimi Incorporated | Polishing composition |
CN110431210B (zh) * | 2017-03-23 | 2022-09-20 | 福吉米株式会社 | 研磨用组合物 |
CN110219004A (zh) * | 2019-07-08 | 2019-09-10 | 周兆梅 | 一种铝合金化学抛光液及其抛光方法 |
Also Published As
Publication number | Publication date |
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CN104293207B (zh) | 2016-03-23 |
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C41 | Transfer of patent application or patent right or utility model | ||
CB03 | Change of inventor or designer information |
Inventor after: Yao Li Inventor before: Chen Ling Inventor before: Wang Yan Inventor before: Ren Qi Inventor before: Cheng Xiao |
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Effective date of registration: 20160125 Address after: 311814 Zhejiang city in Shaoxing Province town of Zhuji City Shop No. 195 Yaocun Yu Yao Applicant after: Yao Li Address before: 214000 Huishan Economic Development Zone, Jiangsu province Hui Cheng Road, No. 77, No. Applicant before: Wuxi Kangbaisi Machinery Technology Co., Ltd. |
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C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
C41 | Transfer of patent application or patent right or utility model | ||
CB03 | Change of inventor or designer information |
Inventor after: Zheng Liguo Inventor before: Yao Li |
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COR | Change of bibliographic data | ||
TR01 | Transfer of patent right |
Effective date of registration: 20161205 Address after: 325100 Yongjia County, Zhejiang County, the village of carp Patentee after: Zheng Liguo Address before: 311814 Zhejiang city in Shaoxing Province town of Zhuji City Shop No. 195 Yaocun Yu Yao Patentee before: Yao Li |
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CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20160323 Termination date: 20170925 |
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CF01 | Termination of patent right due to non-payment of annual fee |