CN104282527A - Stable direct current discharging anion source - Google Patents
Stable direct current discharging anion source Download PDFInfo
- Publication number
- CN104282527A CN104282527A CN201310291526.5A CN201310291526A CN104282527A CN 104282527 A CN104282527 A CN 104282527A CN 201310291526 A CN201310291526 A CN 201310291526A CN 104282527 A CN104282527 A CN 104282527A
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- CN
- China
- Prior art keywords
- electric
- voltage
- anion source
- ring
- rings
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/10—Ion sources; Ion guns
- H01J49/14—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers
- H01J49/147—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers with electrons, e.g. electron impact ionisation, electron attachment
Abstract
A stable direct current discharging anion source comprises three discharging rings (1), three ceramic rings (2), a ceramic base (3), a spraying nozzle (4), a high-voltage direct current power source (5), a capacitor (6) and a resistor (7), wherein a power supply system is formed by the high-voltage direct current power source (5), the capacitor (6) and the resistor (7), voltage is applied to the discharging rings (1), the three discharging rings (1) and the three ceramic rings (2) are arranged in an intersecting mode and located in the center of the ceramic base (3), and the lower ends of the three discharging rings (1) and the three ceramic rings (2) are connected with the spraying nozzle (4). Electrode rings are made of molybdenum, the power system is formed by the high-voltage direct current power source (5), the capacitor (6) and the resistor (7), stable short pulse high current discharging plasma bodies can be generated, and the problem that electrode rings are deformed and oxidized and are unstable in discharging in a long-term discharging environment is resolved.
Description
Technical field
The invention belongs to ion source field, be specifically related to a kind of stable direct-current discharge anion source.
Background technology
Direct-current discharge ion source and mass spectrographic coupling more and more cause the concern of people, direct-current discharge ion source has that working stability, ion energy dispersion are little, interference less, sensitivity high, can be used for the analyzing and testing of molecular solids.Its principle utilizes electronics to bombard molecular beam under high voltage electric field, forms microplasma and realize ionization.Ionization can produce cation, neutral fragment free radical or anion.In direct-current discharge ion source in the past, often adopt stainless steel as the material of electrode retaining collar, but stainless fusing point is lower, and the temperature of ionized region is higher, and therefore stainless steel oxidation distortion easily occurs, and guiding discharge is unstable.
Summary of the invention
In long-term discharge environment, oxidation is out of shape, the problem of discharge instability in order to solve stainless steel electrode ring in the past.The object of the present invention is to provide a kind of stable direct-current discharge anion source.
The invention provides a kind of stable direct-current discharge anion source, this ion source comprises electric discharge ring (1), ceramic ring (2), ceramic base (3), nozzle (4), high-voltage DC power supply (5), electric capacity (6) and resistance (7); Described high-voltage DC power supply (5), electric capacity (6) and resistance (7) form an electric power system, be connected with electric discharge ring (1), voltage is put in electric discharge ring (1), electric discharge ring (1) and ceramic ring (2) cross arrangement, be positioned at the middle position of ceramic base (3), lower end is connected with nozzle (4).
Stable direct-current discharge anion source provided by the invention, the number of described electric discharge ring (1) and ceramic ring (2) is 3; The number of ceramic base (3), nozzle (4), high-voltage DC power supply (5), electric capacity (6) and resistance (7) is 1.
Stable direct-current discharge anion source provided by the invention, the material of described electric discharge ring (1) is high-temperature material molybdenum, can prevent the high temperature deformation of electric discharge ring.
Stable direct-current discharge anion source provided by the invention, the voltage of described high-voltage DC power supply (5) is-1000V, and electric current is 0.2A.
Stable direct-current discharge anion source provided by the invention, the material of described nozzle (4) is stainless steel.The electric capacity of described electric capacity (6) is 2-10 microfarad.The resistance of described resistance (7) is 500 Europe.
Stable direct-current discharge anion source provided by the invention, the electric power system be made up of high-voltage DC power supply (5), electric capacity (6) and resistance (7), can produce the discharge plasma of stable short pulse heavy current.
Operation logic of the present invention: when pulse gas is sprayed by pulse valve, applies high voltage electric field between molybdenum electrode ring, makes field-causing electron gas breakdown form plasma discharge.
Advantage of the present invention: the present invention utilizes molybdenum as electrode retaining collar, and form electric power system by high-voltage DC power supply (5), electric capacity (6) and resistance (7), the discharge plasma of stable short pulse heavy current can be produced.Solve electrode retaining collar and in long-term discharge environment, be out of shape oxidation, the problem of discharge instability.
Accompanying drawing explanation
Fig. 1 is structural representation of the present invention,
Wherein, 1---electric discharge ring, 2---ceramic ring, 3---ceramic base, 4---nozzle, 5---high-voltage DC power supply, 6---electric capacity, 7---resistance;
Fig. 2 is NF
3with the negative ion mass spectrum figure of water gaseous mixture electric discharge.
Embodiment
Below in conjunction with Fig. 1 and embodiment, the present invention is further illustrated.
A kind of stable direct-current discharge anion source of the present invention, as shown in Figure 1,3 electric discharges ring (1), 3 ceramic rings (2), 1 ceramic base (3), 1 nozzle (4), 1 high-voltage DC power supply (5), 1 electric capacity (6) and 1 resistance (7) is comprised.
Described high-voltage DC power supply (5), electric capacity (6) and resistance (7) form an electric power system, voltage is put on molybdenum electric discharge ring (1), 3 electric discharges ring (1) and the cross arrangement of 3 ceramic rings (2), be positioned at the middle position of ceramic base (3), lower end is connected with nozzle (4).
Embodiment 1:
8%NF
3, 32%H
2, 60%N
2pulse air valve is passed into, back pressure 3 atmospheric pressure with micro water vapor.Open high-voltage DC power supply (5), progressively raised voltage, monitoring current, voltage during stable discharging is 700V-850V, and electric current is about 5mA.The ion that stable discharging produces enters mass spectrometer, is detected the flight time mass spectrum that device detection obtains each species.See from Fig. 2, mainly create F
-, F (H
2o)
-, FC (H
2o)
-and C
2h
-ion, wherein the anion of carbon containing mainly comes from the carbon of the trace of sparking electrode remained on surface.Reach 300 hours by monitoring mass spectral intensities, this several dominant species energy stable existence of generation is unattenuated in mass spectrum, and showing to maintain the stable discharging time can more than 300 hour.And the ring that discharges (1) adopts stainless steel material, then maintaining the stable discharging time is within 100 hours.
Claims (8)
1. a stable direct-current discharge anion source, is characterized in that: this ion source comprises electric discharge ring (1), ceramic ring (2), ceramic base (3), nozzle (4), high-voltage DC power supply (5), electric capacity (6) and resistance (7);
Described high-voltage DC power supply (5), electric capacity (6) and resistance (7) form an electric power system, be connected with electric discharge ring (1), electric discharge ring (1) and ceramic ring (2) cross arrangement, be positioned at the middle position of ceramic base (3), and electric discharge ring (1) lower end is connected with nozzle (4).
2. according to direct-current discharge anion source stable described in claim 1, it is characterized in that: the number of described electric discharge ring (1) and ceramic ring (2) is 3; The number of ceramic base (3), nozzle (4), high-voltage DC power supply (5), electric capacity (6) and resistance (7) is 1.
3. according to direct-current discharge anion source stable described in claim 1, it is characterized in that: the material of described electric discharge ring (1) is high-temperature material molybdenum.
4. according to direct-current discharge anion source stable described in claim 1, it is characterized in that: the voltage of described high-voltage DC power supply (5) is-1000V, electric current is 0.2A.
5. according to direct-current discharge anion source stable described in claim 1, it is characterized in that: the material of described nozzle (4) is stainless steel.
6. according to direct-current discharge anion source stable described in claim 1, it is characterized in that: the electric capacity of described electric capacity (6) is 2-10 microfarad.
7. according to direct-current discharge anion source stable described in claim 1, it is characterized in that: the resistance of described resistance (7) is 500 Europe.
8. according to direct-current discharge anion source stable described in claim 1, it is characterized in that: the electric power system be made up of high-voltage DC power supply (5), electric capacity (6) and resistance (7), can produce the discharge plasma of stable short pulse heavy current.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310291526.5A CN104282527A (en) | 2013-07-11 | 2013-07-11 | Stable direct current discharging anion source |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310291526.5A CN104282527A (en) | 2013-07-11 | 2013-07-11 | Stable direct current discharging anion source |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN104282527A true CN104282527A (en) | 2015-01-14 |
Family
ID=52257314
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310291526.5A Pending CN104282527A (en) | 2013-07-11 | 2013-07-11 | Stable direct current discharging anion source |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN104282527A (en) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009002815A (en) * | 2007-06-22 | 2009-01-08 | Hitachi Ltd | Ion mobility spectrometer |
| CN101384747A (en) * | 2005-11-07 | 2009-03-11 | 山米奎普公司 | Dual mode ion source for ion implantation |
| CN101925246A (en) * | 2010-08-13 | 2010-12-22 | 华中科技大学 | Method for producing low-temperature plasma capable of being touched by human bodies directly |
-
2013
- 2013-07-11 CN CN201310291526.5A patent/CN104282527A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101384747A (en) * | 2005-11-07 | 2009-03-11 | 山米奎普公司 | Dual mode ion source for ion implantation |
| JP2009002815A (en) * | 2007-06-22 | 2009-01-08 | Hitachi Ltd | Ion mobility spectrometer |
| CN101925246A (en) * | 2010-08-13 | 2010-12-22 | 华中科技大学 | Method for producing low-temperature plasma capable of being touched by human bodies directly |
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Application publication date: 20150114 |