CN202094080U - Ion source - Google Patents

Ion source Download PDF

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Publication number
CN202094080U
CN202094080U CN2011202210330U CN201120221033U CN202094080U CN 202094080 U CN202094080 U CN 202094080U CN 2011202210330 U CN2011202210330 U CN 2011202210330U CN 201120221033 U CN201120221033 U CN 201120221033U CN 202094080 U CN202094080 U CN 202094080U
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China
Prior art keywords
ion
ion source
voltage
discharge body
positive
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CN2011202210330U
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Chinese (zh)
Inventor
马军
刘立秋
颜毅坚
徐翔
张伟
张亦扬
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Shenzhen Securities Spectrum Intelligent Technology Co., Ltd.
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Wuhan Xigan Sci & Tech Co Ltd
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Abstract

The present utility model discloses an ion source which comprises a power supply, a discharge body capable of generating ions, and an ion leading-out electrode. The high-voltage end of the discharge body is connected with the power supply, and the low-voltage end is connected with the ground through a current-limiting resistor R1. One end of the ion leading-out electrode is connected with the high-voltage end of the discharge body through a voltage-dividing resistor R3, and the other end is connected with the ground through a voltage-dividing resistor R2. In the ion source, by adding the ion leading-out electrode, and the leading-out voltage between the ion leading-out electrode and the discharge body, ions produced by the ion source can be effectively led out, and the discharge stability of the ion source will not be influenced.

Description

Ion source
Technical field
The utility model relates to the technology of ion source field, relates in particular to a kind of glow discharge formula ion source.
Background technology
One of technology of most critical is exactly an ion source in the ionic migration spectrometer, ionogenic effect is to be used for producing ion, and the intensity of ion flow is by the decision of the lead-out mode of ion, and therefore, what technology of ion source comprised effective generation of ion and ion effectively draws two major parts.
Effective generation for ion, the Chinese patent Granted publication number is CN101452806 B, denomination of invention is in a kind of ionization source and the application in mass spectrum or ion mobility spectrometry thereof, a kind of ion source has been described, it comprises DC power supply, carrier gas, positive and negative sparking electrode and current-limiting resistance, wherein, current-limiting resistance and positive and negative sparking electrode are connected with DC power supply and positive and negative sparking electrode by lead, form a series connection circuit.As seen, described positive and negative sparking electrode has been formed a discharge body that produces ion by glow discharge.
For effectively drawing of ion, description is arranged seldom then in the prior art.
The utility model content
For this reason, technical problem to be solved in the utility model is: a kind of ion source is provided, and the ion that makes this ion source produce can effectively be drawn, and does not influence the stability of ion source discharge simultaneously again.
So, the utility model provides a kind of ion source, this ion source comprises: power supply, the discharge body that can produce ion and ion extraction electrode, the high-pressure side of discharge body connects power supply, low-pressure end is by current-limiting resistance R1 ground connection, one end of ion extraction electrode connects the high-pressure side of described discharge body by divider resistance R3, and the other end is by divider resistance R2 ground connection.
Wherein, described ion extraction electrode is becket, metal cylinder or wire netting.
Voltage between described discharge body and the ion extraction electrode is extraction voltage, this extraction voltage
Figure DEST_PATH_RE-170943DEST_PATH_IMAGE001
, wherein,
Figure DEST_PATH_RE-68360DEST_PATH_IMAGE002
Be described power source voltage,
Figure DEST_PATH_RE-874642DEST_PATH_IMAGE003
Be described discharge body resistance.
The span of stating resistance R 1 is 500K Ω to 30M Ω.
Described discharge body comprises positive and negative sparking electrode.
Described positive and negative sparking electrode is two pin shaped electric discharging electrodes that the position is relative.
Described discharge body also comprises: positive and negative electrode body and the chamber shape insulator that is used for security protection, described pin shaped electric discharging electrodes is arranged on the positive and negative electrode body, and extend in the insulator, offers the discharge gas hand-hole on the insulator.
Described discharge gas hand-hole is circle shape or seam shape.
Pin shaped electric discharging electrodes on the described positive and negative electrode body, the spacing between two electrodes are 1mm to 10mm.
Described power supply is a high voltage source, and its voltage range is 3KV to 30KV.
Ion source described in the utility model, by increasing the extraction voltage between ion extraction electrode and ion extraction electrode and the discharge body, the ion that makes this ion source produce can effectively be drawn, and does not influence the stability of ion source discharge simultaneously again.
Description of drawings
Fig. 1 is the described ion source circuit diagram of present embodiment;
Fig. 2 is the structural representation of discharge body A shown in Figure 1;
Fig. 3 is a pin shaped electric discharging electrodes A3 structural representation among the discharge body A shown in Figure 2;
Fig. 4 is the glow discharge schematic diagram.
Embodiment
Below, in conjunction with the accompanying drawings the utility model is described in detail.
As shown in Figure 1, present embodiment provides a kind of ion source, and this ion source comprises: power supply H.V, the discharge body A that can produce ion and ion extraction electrode B.The high-pressure side of discharge body A connects power supply, and low-pressure end is by current-limiting resistance R1 ground connection, and the end of ion extraction electrode B is by the high-pressure side of divider resistance R3 connection discharge body A, and the other end is by divider resistance R2 ground connection.
Wherein, resistance R 2 can be an adjustable resistance.The span of resistance R 1 is between 500K Ω to the 30M Ω.
Power supply H.V is high voltage source, and it both can be a positive supply, also can be negative supply, its high tension voltage usually
Figure DEST_PATH_RE-924638DEST_PATH_IMAGE002
Between 3KV to 30KV.
Discharge body A can comprise pin-face, pin-tube, rod-tube, face-face, the positive and negative sparking electrode of pin-pin type.Present embodiment adopts the positive and negative sparking electrode of pin-pin type, promptly the sparking electrode position of two needle-likes is relative, as shown in Figure 2, discharge body A also comprises: positive and negative electrode body A1 and the chamber shape insulator A2 that is used for security protection, described pin shaped electric discharging electrodes A3 is arranged on the positive and negative electrode body A1, and extend in the insulator A2, offers discharge gas hand-hole A29 on the insulator A2, discharge gas hand-hole A29 can be the circle shape, also can be the seam shape.As shown in Figure 3, generally between 1mm to 10mm, its needle handle diameter d is 2mm to the spacing between two pin shaped electric discharging electrodes A3 in the present embodiment, and angle α is 30 ° in the needle point.The material of pin shaped electric discharging electrodes A3 is refractory metal, for example tungsten.
Ion extraction electrode B is becket, metal cylinder or wire netting.
In conjunction with Fig. 1 and shown in Figure 4, describe the described ion source ion of present embodiment below in detail and draw principle:
High tension voltage at power supply H.V
Figure DEST_PATH_RE-259804DEST_PATH_IMAGE002
Effect can produce gas breakdown among the discharge body A, and under the effect of current-limiting resistance R1, discharge body A is able to continuous discharge, and maintains the aura district down, and this aura district is meant whole region of discharge.
When discharge body A produced gas breakdown, its inside existed negative glow district, Aston dark space, this dark space of Kroc, negative glow, Faraday dark space, positive column, anode dark space and anode brightness district.Wherein, the positive column is exactly our usually said plasma slab, the ion in this district be difficult to derivative, have only the ion of dark space to be drawn, especially this dark space of Aston dark space and Kroc, most pressure drop is added in this district, and therefore ion wherein can be easier to be drawn.This be because, electronics is here quickened, and obtains primary power, electronics makes the atom of dark space or molecule be able to ionization and form ion, we are by the electrical potential difference between discharge body A and the ion extraction electrode B
Figure DEST_PATH_RE-519884DEST_PATH_IMAGE004
Can realize drawing to the dark space part ion.
Discharge body A place voltage For:
Figure DEST_PATH_RE-253933DEST_PATH_IMAGE006
Ion extraction electrode B place voltage
Figure DEST_PATH_RE-556739DEST_PATH_IMAGE007
For:
Figure DEST_PATH_RE-507377DEST_PATH_IMAGE008
So the voltage between discharge body A and the ion extraction electrode B is extraction voltage, this extraction voltage , wherein,
Figure DEST_PATH_RE-680050DEST_PATH_IMAGE002
Be described power source voltage,
Figure DEST_PATH_RE-622598DEST_PATH_IMAGE003
Be described discharge body resistance.
So the part in the ion in the above-mentioned dark space is just at extraction voltage
Figure DEST_PATH_RE-716325DEST_PATH_IMAGE010
Effect under leave the dark space and form and draw ion flow.
Usually it is believed that, use the discharge body of pin-pin type sparking electrode to be easier to produce arc discharge, thereby discharge brings instability to discharge body.And the described ion source of present embodiment, its structure has overcome this defective.Experiment showed, that when the dark space ion was effectively drawn, the plasma of positive column still was stable, when promptly ion was effectively drawn, the discharge body discharge was not affected.
In sum, the described ion source of present embodiment, by increasing the extraction voltage between ion extraction electrode and ion extraction electrode and the discharge body, the ion that makes this ion source produce can effectively be drawn, and does not influence the stability of ion source discharge simultaneously again.
The above only is preferred embodiment of the present utility model; not in order to restriction the utility model; all within spirit of the present utility model and principle, any modification of being done, be equal to replacement, improvement etc., all should be included within the protection range of the present utility model.

Claims (10)

1. ion source, it is characterized in that, comprise power supply, the discharge body that can produce ion and ion extraction electrode, the high-pressure side of discharge body connects power supply, low-pressure end is by current-limiting resistance R1 ground connection, one end of ion extraction electrode connects the high-pressure side of described discharge body by divider resistance R3, and the other end is by divider resistance R2 ground connection.
2. ion source according to claim 1 is characterized in that, described ion extraction electrode is becket, metal cylinder or wire netting.
3. ion source according to claim 1 is characterized in that, the voltage between described discharge body and the ion extraction electrode is extraction voltage, this extraction voltage
Figure 2011202210330100001DEST_PATH_IMAGE002
, wherein,
Figure 2011202210330100001DEST_PATH_IMAGE004
Be described power source voltage, Be described discharge body resistance.
4. according to any described ion source of claim 1 to 3, it is characterized in that the span of described resistance R 1 is 500K Ω to 30M Ω.
5. ion source according to claim 1 is characterized in that described discharge body comprises positive and negative sparking electrode.
6. ion source according to claim 5 is characterized in that, described positive and negative sparking electrode is two pin shaped electric discharging electrodes that the position is relative.
7. ion source according to claim 6, it is characterized in that described discharge body also comprises: positive and negative electrode body and the chamber shape insulator that is used for security protection, described pin shaped electric discharging electrodes is arranged on the positive and negative electrode body, and extend in the insulator, offer the discharge gas hand-hole on the insulator.
8. ion source according to claim 7 is characterized in that, described discharge gas hand-hole is circle shape or seam shape.
9. ion source according to claim 6 is characterized in that, the pin shaped electric discharging electrodes on the described positive and negative electrode body, and the spacing between two electrodes is 1mm to 10mm.
10. ion source according to claim 1 is characterized in that, described power supply is a high voltage source, and its voltage range is 3KV to 30KV.
CN2011202210330U 2011-06-27 2011-06-27 Ion source Expired - Lifetime CN202094080U (en)

Priority Applications (1)

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Application Number Priority Date Filing Date Title
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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102263005A (en) * 2011-06-27 2011-11-30 武汉矽感科技有限公司 Ion source

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102263005A (en) * 2011-06-27 2011-11-30 武汉矽感科技有限公司 Ion source

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Address before: 430000, No. 4, Wu Nan Road, Taiwan business investment zone, Dongxihu District, Hubei, Wuhan

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