CN104280280B - A kind of micro-sample method that leaks into prepares the device of unimolecule sample - Google Patents
A kind of micro-sample method that leaks into prepares the device of unimolecule sample Download PDFInfo
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- CN104280280B CN104280280B CN201410582243.0A CN201410582243A CN104280280B CN 104280280 B CN104280280 B CN 104280280B CN 201410582243 A CN201410582243 A CN 201410582243A CN 104280280 B CN104280280 B CN 104280280B
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- sample
- vacuum chamber
- microleak valve
- shuttle
- unimolecule
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Abstract
The present invention relates to unimolecule sample preparation technology field, a kind of micro-sample method that leaks into is prepared the device of unimolecule sample and is mainly made up of heater, shuttle, microleak valve, capillary tube, substrate, vacuum chamber, vacuometer, described heater, described shuttle, described microleak valve, described vacuum chamber, described vacuometer are sequentially connected with, described substrate is positioned in described vacuum chamber, it is characterized in that: described microleak valve entrance point connects the opening of described shuttle, the described microleak valve port of export connects described capillary tube, and described capillary tube stretches in described vacuum chamber.Described microleak valve is used for being passed through the molecule of pressed powder state by the present invention, when vacuum cavity toasts, close described microleak valve sample and would not enter vacuum chamber, adapt in ultra-high vacuum environment, prepare unimolecule sample and do not destroy sample molecule, do not interfere with again ultra-high vacuum environment.
Description
Technical field
The present invention relates to unimolecule sample preparation technology field, particularly one have employed powder micro-leakage principle and can fit
A kind of micro-sample method that leaks into that should prepare unimolecule sample in ultra-high vacuum environment prepares the device of unimolecule sample.
Background technology
Prepare unimolecule sample for the thermal evaporation method in ultra-high vacuum environment should require: one is not destroy sample to divide
Son, two is easier to control evaporation rate.Unimolecule sample preparation in ultra-high vacuum environment at present generally uses thermal evaporation
Method powder art sample is sublimate on substrate, general thermal evaporation sources makes solid by resistance wire or high-energy electron beam heating crucible
The sample distillation of state, some portions under heat is uneven, for some macromolecular sample, may destroy its structure, causes point
The generation of sub-fragment, reduces the quality of obtained sample；For the sample that some sublimation temperature is relatively low, in vacuum cavity baking
In the case of (about 200 degrees Celsius), it is possible to sample molecule in evaporation source is evaporated, pollute vacuum chamber；Due to resistance wire or
High-energy electron beam heating crucible opening about 5-10 square millimeter, therefore easily evaporate suddenly a large amount of molecule, the most easily pollute vacuum
Cavity.Described a kind of micro-sample method that leaks into is prepared the device of unimolecule sample and can be solved this problem.
Summary of the invention
In order to solve the problems referred to above, the present invention is a kind of micro-to be leaked into sample method to prepare the device of unimolecule sample (micro-by microleak valve
Leaking valve former is the equipment for minimum gas molecule is passed through ultrahigh vacuum cavity) for being passed through the molecule of solid powdery state, very
During cavity body baking, closing described microleak valve, sample would not enter vacuum chamber, does not results in pollution.Adapt in superelevation true
Altitude is prepared unimolecule sample, does not destroy sample molecule, do not interfere with ultra-high vacuum environment.
The technical solution adopted in the present invention is:
Described a kind of micro-sample method that leaks into prepares the device of unimolecule sample mainly by heater, shuttle, microleak valve, hair
Tubule, substrate, vacuum chamber, vacuometer form, described heater, described shuttle, described microleak valve, described vacuum chamber, institute
Stating vacuometer to be sequentially connected with, described substrate is positioned in described vacuum chamber, and described microleak valve entrance point connects described shuttle
Opening, the described microleak valve port of export connects described capillary tube, and described capillary tube stretches in described vacuum chamber.
The invention has the beneficial effects as follows:
Described a kind of micro-sample method that leaks into is prepared the device of unimolecule sample and is used for being passed through solid powdery by described microleak valve
The molecule of state, when vacuum cavity toasts, closes described microleak valve sample and would not enter vacuum chamber, adapt at ultrahigh vacuum
Environment prepared unimolecule sample and does not destroy sample molecule, not interfering with again ultra-high vacuum environment.
Accompanying drawing explanation
Figure below in conjunction with the present invention further illustrates:
Fig. 1 is schematic diagram of the present invention.
In figure, 1. heater, 2. shuttle, 3. microleak valve, 4. capillary tube, 5. substrate, 6. vacuum chamber, 7. vacuometer.
Detailed description of the invention
If Fig. 1 is schematic diagram of the present invention, mainly by heater (1), shuttle (2), microleak valve (3), capillary tube (4),
Substrate (5), vacuum chamber (6), vacuometer (7) form, described heater (1), described shuttle (2), described microleak valve (3),
Described vacuum chamber (6), described vacuometer (7) are sequentially connected with, and described substrate (5) is positioned in described vacuum chamber (6), described microleak valve
(3) entrance point connects the opening of described shuttle (2), and described microleak valve (3) port of export connects described capillary tube (4), institute
State capillary tube (4) to stretch in described vacuum chamber (6).
During work, sample powder it is placed in described shuttle (2) and is connected to described microleak valve (3), opening described micro-
Leakage valve (3) is to maximum, and to described vacuum chamber (6) evacuation, (now shuttle connects with vacuum chamber, is also at evacuation shape
State), after vacuum is higher than certain value, to close described microleak valve (3), described vacuum chamber (6) is toasted, baking is accurate after terminating
When preparing standby sample, heat to described shuttle (2) by described heater (1), according to the registration of described vacuometer (7),
Open described microleak valve (3) slowly, until described vacuometer (7) shows certain special value.
Owing to sample can move to exporting close from described capillary tube (4), therefore compared to ordinary hot evaporation source, heating
Temperature can control relatively low, it is ensured that can be deposited on described with monomolecular form by sample again while not destroying sample molecule
On substrate (5).
Claims (1)
1. micro-sample method that leaks into prepares a device for unimolecule sample, mainly by heater (1), shuttle (2), microleak valve
(3), capillary tube (4), substrate (5), vacuum chamber (6), vacuometer (7) composition, described heater (1), described shuttle (2),
Described microleak valve (3), described vacuum chamber (6), described vacuometer (7) are sequentially connected with, and described substrate (5) is positioned at described vacuum chamber
(6) in, it is characterized in that: described microleak valve (3) entrance point connects the opening of described shuttle (2), and described microleak valve (3) goes out
Mouth end connects described capillary tube (4), and described capillary tube (4) stretches in described vacuum chamber (6).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410582243.0A CN104280280B (en) | 2014-10-13 | 2014-10-13 | A kind of micro-sample method that leaks into prepares the device of unimolecule sample |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410582243.0A CN104280280B (en) | 2014-10-13 | 2014-10-13 | A kind of micro-sample method that leaks into prepares the device of unimolecule sample |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104280280A CN104280280A (en) | 2015-01-14 |
| CN104280280B true CN104280280B (en) | 2016-12-07 |
Family
ID=52255381
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410582243.0A Expired - Fee Related CN104280280B (en) | 2014-10-13 | 2014-10-13 | A kind of micro-sample method that leaks into prepares the device of unimolecule sample |
Country Status (1)
| Country | Link |
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| CN (1) | CN104280280B (en) |
Family Cites Families (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN86104853A (en) * | 1986-07-01 | 1987-02-11 | 刘幸生 | Automatic vacuum activator for activated water |
| US5013006A (en) * | 1989-07-24 | 1991-05-07 | Cosmo Instruments Co., Ltd. | Micro-leakage regulating valve |
| CN2533463Y (en) * | 2001-12-24 | 2003-01-29 | 中国科学院安徽光学精密机械研究所 | Quick sample feeding device for analyzing solid sample in high vacuum |
| CN100393385C (en) * | 2003-07-08 | 2008-06-11 | 中国科学院武汉物理与数学研究所 | Filtering type temperature controlled helium gas microleak valve |
| DE10362116B4 (en) * | 2003-09-17 | 2008-08-28 | Carl Zeiss Nts Gmbh | Method for preparing a sample for electron microscopic examinations, and gripper used thereby |
| CN101445955A (en) * | 2007-11-28 | 2009-06-03 | 中国科学院半导体研究所 | Device for space-modulating atomic layer chemical vapour deposition epitaxial growth and method thereof |
| WO2011060387A1 (en) * | 2009-11-13 | 2011-05-19 | Ventana Medical Systems, Inc. | Thin film processing apparatuses for adjustable volume accommodation |
| CN101717479B (en) * | 2009-11-24 | 2011-08-03 | 武汉理工大学 | Amphiphilic gradient copolymer |
| CN102735522A (en) * | 2011-04-12 | 2012-10-17 | 金华职业技术学院 | Apparatus for preparing single-molecule sample by supersonic wave |
| CN103323303A (en) * | 2013-05-22 | 2013-09-25 | 长沙开元仪器股份有限公司 | Combined sample preparation system |
| CN103439164B (en) * | 2013-09-05 | 2015-11-11 | 中国科学院新疆生态与地理研究所 | Based on plant or the soil moisture fast vacuum method for extracting of microwave heating |
| CN204128873U (en) * | 2014-10-13 | 2015-01-28 | 赵烨梁 | A kind of micro-leakage sampling system prepares the device of unimolecule sample |
-
2014
- 2014-10-13 CN CN201410582243.0A patent/CN104280280B/en not_active Expired - Fee Related
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| Publication number | Publication date |
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| CN104280280A (en) | 2015-01-14 |
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Granted publication date: 20161207 Termination date: 20171013 |