CN205313657U - Vacuum coating machine - Google Patents
Vacuum coating machine Download PDFInfo
- Publication number
- CN205313657U CN205313657U CN201620075227.7U CN201620075227U CN205313657U CN 205313657 U CN205313657 U CN 205313657U CN 201620075227 U CN201620075227 U CN 201620075227U CN 205313657 U CN205313657 U CN 205313657U
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- CN
- China
- Prior art keywords
- vacuum
- vacuum coating
- film coating
- heating mechanism
- electromagnetic heating
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Abstract
The utility model discloses a vacuum coating machine, including the vacuum coating room, be used for to the vacuum coating room carry on the evacuation evacuating device, be used for thin film materials heating evaporation's evaporation heating device, be used for the centre gripping to treat the specimen grip utensil of vacuum coating sample, evacuating device passes through vacuum pipe and vacuum coating room intercommunication, evaporation heating device sets up the bottom in the vacuum coating room, the specimen grip utensil sets up the top in the vacuum coating room, this vacuum coating machine is still including the electromagnetic heating mechanism who is used for improving evacuation efficiency, electromagnetic heating mechanism sets up on the vacuum pipe between evacuating device and vacuum coating room. Through setting up an electromagnetic heating mechanism on evacuating device's vacuum pipe, the imported room that makes evacuating device risees with the temperature of downstream chamber, makes imported room and downstream chamber that the enlarged gas in -process of evacuation institute exhaust aqueous vapor can not freeze evacuating device pump -line tip to evacuation efficiency has been improved.
Description
Technical field
This utility model relates to technical field of vacuum plating, more particularly, it relates to a kind of vacuum coating equipment with heating arrangements, this heating arrangements can be effectively improved the efficiency of evacuation.
Background technology
Vacuum coating refers under vacuum conditions, with the form of gas phase, certain metal or metallic compound is deposited to material surface, forms conducting film. In vacuum coating process, upstream chamber and downstream chamber, due to frequent and atmosphere, amplify in the process of gas at evacuation repeatedly, easily occur the phenomenon frozen in pump-line end, have influence on the efficiency of evacuation, even plug pump-line.
General, it is covered with the heater strip of similar plated film main chamber with downstream chamber at the upstream chamber of vacuum coating, in vacuum coating process, start the heating function of heater strip, make heater strip self produce heat, and transfer heat to the upstream chamber and downstream chamber that contact with heater strip, make the temperature of upstream chamber and downstream chamber raise, putting Atmospheric processes institute expellant gas at evacuation will not make upstream chamber and downstream chamber freeze because temperature is low, improves the efficiency of evacuation.
But, at upstream chamber, heater strip being set with downstream chamber, the power of heater strip is higher, can cause the waste of the energy; And heater strip heating voltage is higher, has potential safety hazard.
Summary of the invention
The technical problems to be solved in the utility model is in that,, the waste energy higher for existing heater strip power, the problem having potential safety hazard, a kind of vacuum coating equipment is provided, by arranging an electromagnetic heating mechanism in the pump-line end of vacuum extractor, the pump-line end making vacuum extractor raises in the temperature of its upstream chamber with downstream chamber, make evacuation put the aqueous vapor discharged in Atmospheric processes will not the upstream chamber of freezing vacuum extractor pump-line end and downstream chamber, thus improve evacuation efficiency.
This utility model solves its technical problem and be the technical scheme is that a kind of vacuum coating equipment of offer, including vacuum film coating chamber, for vacuum film coating chamber is carried out evacuation vacuum extractor, for by the evaporation heater of thin-film material heating evaporation, be used for clamping the sample clamp treating vacuum coating sample;Described vacuum extractor is connected with vacuum film coating chamber by vacuum pipe, and described evaporation heater is arranged on the bottom of vacuum film coating chamber, and described sample clamp is arranged on the top of vacuum film coating chamber; This vacuum coating equipment also includes the electromagnetic heating mechanism for improving evacuation efficiency, described electromagnetic heating mechanism is arranged on the vacuum pipe between vacuum extractor and vacuum film coating chamber, and this electromagnetic heating mechanism includes body, air circulation device and at least one solenoid; The caliber of described body is more than the caliber of described vacuum pipe, and body is set on the vacuum pipe between vacuum extractor and vacuum film coating chamber, forms cavity between inboard wall of tube body and vacuum pipe outer wall; Described air circulation device is arranged on one end of cavity; Described solenoid is coated on the lateral wall of body, and is electrically connected with power supply gas circuit.
In vacuum coating equipment described in the utility model, described air circulation device includes motor and the blower fan being electrically connected with motor, and the air outlet of described blower fan is connected with one end of described cavity.
In vacuum coating equipment described in the utility model, described electromagnetic heating mechanism also includes for enclosing the protective cover covering solenoid, in described body is coated on by described protective cover.
In vacuum coating equipment described in the utility model, described protective cover being provided with heat dissipation channel, described heat dissipation channel is through hole.
In vacuum coating equipment described in the utility model, described vacuum extractor includes mechanical pump, booster pump and oil diffusion pump, described mechanical pump is connected with oil diffusion pump, described mechanical pump, booster pump seal valve with four-way respectively with oil diffusion pump and are connected, and four-way is sealed valve and is connected with the inside of vacuum film coating chamber by vacuum pipe.
Implement vacuum coating equipment of the present utility model, have the advantages that
(1) by being provided with electromagnetic heater on the vacuum pipe of the vacuum extractor of vacuum coating equipment, the vacuum pipe end contacted is transferred heat to by Electromagnetic Heating, the vacuum pipe end making vacuum extractor raises in the temperature of its upstream chamber with downstream chamber, make evacuation put the aqueous vapor discharged in Atmospheric processes will not the upstream chamber of freezing vacuum extractor pump-line end and downstream chamber, thus improve evacuation efficiency;
(2) additionally, for electrical heating of the prior art, electromagnetic heating mechanism of the present utility model has the effect that thermal losses is little, easily controllable, firing rate fast and is conducive to saving the energy;
(3) by arranging air circulation device on electromagnetic heating mechanism, by blower fan uniform thermal power is dispersed in cavity, stabilizes the temperature of heating, it is ensured that the safety of vacuum extractor;
(4) heat dissipation channel arranged by protective cover, it is ensured that the stability of solenoid work.
Accompanying drawing explanation
Below in conjunction with drawings and Examples, the utility model is described in further detail, in accompanying drawing:
Fig. 1 is the structural representation of the vacuum coating equipment of this utility model preferred embodiment;
Fig. 2 is the structural representation of the electromagnetic heating mechanism of this utility model preferred embodiment;
Fig. 3 is the structural representation of the vacuum extractor of this utility model preferred embodiment;
Wherein, 1, vacuum film coating chamber; 2, vacuum extractor; 21, mechanical pump; 22, booster pump; 23, oil diffusion pump; 24, four-way seals valve; 3, evaporation heater; 4, sample clamp; 5, electromagnetic heating mechanism; 51, body;52, air circulation device; 53, solenoid; 54, protective cover.
Detailed description of the invention
Below, in conjunction with accompanying drawing and detailed description of the invention, this utility model is described further:
As Figure 1-3, a kind of vacuum coating equipment, including vacuum film coating chamber 1, for vacuum film coating chamber is carried out evacuation vacuum extractor 2, for by the evaporation heater 3 of thin-film material heating evaporation, be used for clamping the sample clamp 4 treating vacuum coating sample; Described vacuum extractor 2 is connected with vacuum film coating chamber 1 by vacuum pipe, and described evaporation heater 3 is arranged on the bottom of vacuum film coating chamber 1, and described sample clamp 4 is arranged on the top of vacuum film coating chamber 1; This vacuum coating equipment also includes the electromagnetic heating mechanism 5 for improving evacuation efficiency, and described electromagnetic heating mechanism 5 is arranged on the vacuum pipe between vacuum extractor 2 and vacuum film coating chamber 1.
Described electromagnetic heating mechanism 5 include body 51, air circulation device 52 and at least one solenoid 53, for enclosing the protective cover 54 covering solenoid; The caliber of described body 51 is more than the caliber of described vacuum pipe, and body 51 is set on the vacuum pipe between vacuum extractor and vacuum film coating chamber, forms cavity between inboard wall of tube body and vacuum pipe outer wall; Described air circulation device 52 is arranged on one end of cavity; Described solenoid 53 is coated on the lateral wall of body, and is electrically connected with power supply gas circuit; In described body is coated on by described protective cover 54, protective cover 54 being provided with heat dissipation channel, described heat dissipation channel is through hole. By the heat dissipation channel that protective cover is arranged, it is ensured that the stability of solenoid work.
Wherein, described air circulation device 52 includes motor and the blower fan being electrically connected with motor, and the air outlet of described blower fan is connected with one end of described cavity. By arranging air circulation device on electromagnetic heating mechanism, by blower fan uniform thermal power is dispersed in cavity, stabilizes the temperature of heating, it is ensured that the safety of vacuum extractor.
Described vacuum extractor 2 includes mechanical pump 21, booster pump 22 and oil diffusion pump 23, described mechanical pump 21 is connected with oil diffusion pump 23, described mechanical pump, booster pump seal valve 24 with four-way respectively with oil diffusion pump and are connected, and four-way is sealed valve and is connected with the inside of vacuum film coating chamber by vacuum pipe.
This utility model by being provided with electromagnetic heater on the vacuum pipe of the vacuum extractor of vacuum coating equipment, the vacuum pipe end contacted is transferred heat to by Electromagnetic Heating, the vacuum pipe end making vacuum extractor raises in the temperature of its upstream chamber with downstream chamber, make evacuation put the aqueous vapor discharged in Atmospheric processes will not the upstream chamber of freezing vacuum extractor pump-line end and downstream chamber, thus improve evacuation efficiency. Meanwhile, for electrical heating of the prior art, electromagnetic heating mechanism of the present utility model has the effect that thermal losses is little, easily controllable, firing rate fast and is conducive to saving the energy.
It will be apparent to those skilled in the art that can technical scheme as described above and design, make other various corresponding changes and deformation, and all these change and deformation all should belong within this utility model scope of the claims.
Claims (5)
1. a vacuum coating equipment, it is characterised in that include vacuum film coating chamber, for vacuum film coating chamber is carried out evacuation vacuum extractor, for by thin-film material heating evaporation evaporation heater, be used for clamping the sample clamp treating vacuum coating sample;Described vacuum extractor is connected with vacuum film coating chamber by vacuum pipe, and described evaporation heater is arranged on the bottom of vacuum film coating chamber, and described sample clamp is arranged on the top of vacuum film coating chamber; Described vacuum coating equipment also includes the electromagnetic heating mechanism for improving evacuation efficiency, described electromagnetic heating mechanism is arranged on the vacuum pipe between vacuum extractor and vacuum film coating chamber, and this electromagnetic heating mechanism includes body, air circulation device and at least one solenoid; The caliber of described body is more than the caliber of described vacuum pipe, and body is set on the vacuum pipe between vacuum extractor and vacuum film coating chamber, forms cavity between inboard wall of tube body and vacuum pipe outer wall; Described air circulation device is arranged on one end of cavity; Described solenoid is coated on the lateral wall of body, and electrically connects with power supply gas circuit.
2. vacuum coating equipment according to claim 1, it is characterised in that described air circulation device includes motor and the blower fan being electrically connected with motor, and the air outlet of described blower fan is connected with one end of described cavity.
3. vacuum coating equipment according to claim 1, it is characterised in that described electromagnetic heating mechanism also includes for enclosing the protective cover covering solenoid, in described body is coated on by described protective cover.
4. vacuum coating equipment according to claim 3, it is characterised in that be provided with heat dissipation channel on described protective cover, described heat dissipation channel is through hole.
5. vacuum coating equipment according to claim 1, it is characterized in that, described vacuum extractor includes mechanical pump, booster pump and oil diffusion pump, described mechanical pump is connected with oil diffusion pump, described mechanical pump, booster pump seal valve with four-way respectively with oil diffusion pump and are connected, and four-way is sealed valve and is connected with the inside of vacuum film coating chamber by vacuum pipe.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620075227.7U CN205313657U (en) | 2016-01-27 | 2016-01-27 | Vacuum coating machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620075227.7U CN205313657U (en) | 2016-01-27 | 2016-01-27 | Vacuum coating machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205313657U true CN205313657U (en) | 2016-06-15 |
Family
ID=56205954
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201620075227.7U Expired - Fee Related CN205313657U (en) | 2016-01-27 | 2016-01-27 | Vacuum coating machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN205313657U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107043909A (en) * | 2017-04-13 | 2017-08-15 | 江阴市光科真空机械有限公司 | Vacuumize the operating method that the optics of efficiency high is vacuumized with vacuum cavity and to it |
-
2016
- 2016-01-27 CN CN201620075227.7U patent/CN205313657U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107043909A (en) * | 2017-04-13 | 2017-08-15 | 江阴市光科真空机械有限公司 | Vacuumize the operating method that the optics of efficiency high is vacuumized with vacuum cavity and to it |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20160615 Termination date: 20200127 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |