CN104258681A - Method for prolonging service life of MOCVD filter - Google Patents
Method for prolonging service life of MOCVD filter Download PDFInfo
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- CN104258681A CN104258681A CN201410514578.9A CN201410514578A CN104258681A CN 104258681 A CN104258681 A CN 104258681A CN 201410514578 A CN201410514578 A CN 201410514578A CN 104258681 A CN104258681 A CN 104258681A
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- filter
- water cooling
- water
- mocvd
- cooling plant
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Abstract
The invention discloses a method for prolonging the service life of an MOCVD filter. According to the method, a water cooling device is additionally arranged at the front end of the MOVCD filter. The water cooling device comprises a water cooling cavity; a water cooling pipe which coils spirally is arranged in the water cooling cavity; a water inlet end and a water outlet end of the water cooling pipe are respectively arranged at the two ends of the water cooling device; the water cooling cavity is also provided with a stainless steel mesh filter element which is used for filtering large particles in exhaust. On one hand, common solid particles and low-boiling-point substances can be subjected to cohesion and deposition before entering the filter by the water cooling device, so that solid substances which enter the filter are reduced, the adsorption amount of a single filter element in the single standard LED program process is reduced, and the service life of the filter element is prolonged; on the other hand, the temperature of the exhaust which enters the filter can be reduced, the waiting time for replacing the filter can be shortened, and the time cost is reduced.
Description
Technical field
The present invention relates to a kind of method extending MOCVD filter life.
Background technology
MOCVD(Metal-organic Chemical Vapor Deposition MOCVD) be a kind of Novel air phase epitaxy growing technology grown up on the basis of vapor phase epitaxial growth.MOCVD is the raw material using hydride of the organic compound of iii-v element and V, VI race element etc. as crystal growth, on substrate (aluminium oxide, carborundum, GaAs, germanium etc.), carry out vapor phase epitaxial growth in pyrolysis mode, be mainly used in the monocrystal thin films material of growth compound semiconductor and multivariate solid solution thereof.
After metallo-organic compound and hydride reaction, tail gas is generally through single or multiple lift filter, to remove the solid particle contained in reaction end gas, the material for core of exhaust gas processing device is generally non-woven fabrics or stainless (steel) wire, along with board extends the duration of runs, in tail gas, solid particle deposits in the filter gradually, after reaching certain deposition degree, the filter core of filter needs the requirement changed to meet pressure stability in reative cell when board grows.When changing filter element, MOCVD board needs to stop producing a few hours, changes filter for installation separately, changes filter for installation continually and can reduce board running efficiency, affect production output.
Tradition MOCVD filter for installation, general employing monotubular multi-stage filter core or many filter cores, be used for by Air flow and filter core reaching the effect of filtering solid particle in tail gas, monotubular multistage filter mainly carrys out filter diameter solid particle not of uniform size by the filter core of successively classification, and many filter cores are then to realize filter effect by the contact area of increase tail gas and filter core.
Conventional filtering method is on the one hand because holding solid particle space is limited, just need to change filter element after 80 to 120 standard LED programs, on the other hand because high-temperature tail gas makes filter temperature exceed a lot than room temperature, could operate after needing filter cooling by the time during replacing.
Summary of the invention
The present invention is directed to the deficiencies in the prior art, provide a kind of method extending MOCVD filter life.
The technical scheme that technical solution problem of the present invention is taked is:
Extend a method for MOCVD filter life, install water cooling plant additional at MOCVD filter front.
Described water cooling plant comprises water-cooled cavity, the water cooling tube of coiled coil is provided with in water-cooled cavity, the water inlet end of water cooling tube and water side are arranged at water cooling plant two ends respectively, are also provided with for filtering oarse-grained stainless (steel) wire filter core in tail gas at water-cooled cavity.
Described water cooling plant reduces the temperature of high-temperature tail gas on the one hand in advance, make by exhaust temperature during MOCVD filter relatively low, also first bulky grain in tail gas is condensed precipitation, in water cooling plant, interception is filtered simultaneously, decreases the bulky grain and quantity thereof that arrive MOCVD filter.
On the other hand because water cooling plant is a continuous print cooling system, eliminate the time that cooling is waited for when changing MOCVD filter, time cost has been saved in production.
The present invention installs water cooling plant additional in conventional filter front end, can make general solid particle and low-boiling point material that cohesion deposition occurred before entering filter on the one hand, the particulate matter entered in filter tails off, reduce the adsorbance of filter core in single standard LED program process, extend filter element life, the temperature entering filter inner exhaust gas can be reduced on the other hand, reduce stand-by period when changing filter, reduce time cost.
Accompanying drawing explanation
Fig. 1 is traditional filter.
Fig. 2 be the present invention with traditional filter in conjunction with schematic diagram.
Fig. 3 is water cooling plant structural representation.
Detailed description of the invention
Secondly conventional filtering method is high-temperature tail gas without cooling due to what directly filter, and first have resistant to elevated temperatures requirement to material for core, need a cooling stand-by period when changing filter, the filter capacity of filter core is also only limited to existing spatial dimension in addition.The present invention installs water cooling plant additional at filter front, the temperature of high-temperature tail gas can be reduced on the one hand in advance, make by exhaust temperature during filter relatively low, just do not need so harsh to the resistant to elevated temperatures requirement of material for core, can reduce costs from filter core raw material; On the other hand because water cooling plant is a continuous print cooling system, eliminate the time that cooling is waited for when changing filter, time cost has been saved in production; Water cooling plant is while reduction exhaust temperature, also first bulky grain in tail gas is condensed precipitation, in water cooling plant, interception is filtered, which reduces the granular size and quantity that arrive rear end filter, also the effect extending conventional filter filter element life can be played, reduce filter element replacing frequency, save production cost.
The present invention mainly installed water cooling plant (as shown in Figure 2) additional before tail gas enters traditional filtering device (as shown in Figure 1), by cooling in advance and filtering the bulky grain in tail gas, reduced the load of filter element, extended the working life of filter.The present invention can make original filter life bring up to 140-160 standard LED program from 80-100 standard LED program.
As shown in Figure 3, water cooling plant comprises water-cooled cavity, in water-cooled cavity, be provided with the water cooling tube of coiled coil, the water inlet end of water cooling tube and water side are arranged at water cooling plant two ends respectively, are also provided with for filtering oarse-grained stainless (steel) wire filter core in tail gas at water-cooled cavity.
The present invention can increase the working life of conventional filter, reduces production cost; Also eliminate stand-by period during filter replacement, enhance productivity; The tail gas filtering of relative low temperature, can reduce the high temperature resistant requirement of material for core simultaneously, saves the raw-material production cost of filter core.
Why the present invention can reach the effect extending the filter element life-span, mainly because the present invention has carried out cooling to it before entering filter to high-temperature tail gas remove anticipating, to reduce the load of filter of large particulate matter.Installing water cooling plant additional is a more simple and efficient mode, is different from traditional filter method.
The invention provides a kind of method extending the conventional filter life-span, water-cooling method is combined with conventional filtering method, optimize the approach of vent gas treatment, save production cost.
Claims (1)
1. extend a method for MOCVD filter life, it is characterized in that: install water cooling plant additional at MOCVD filter front;
Described water cooling plant comprises water-cooled cavity, the water cooling tube of coiled coil is provided with in water-cooled cavity, the water inlet end of water cooling tube and water side are arranged at water cooling plant two ends respectively, are also provided with for filtering oarse-grained stainless (steel) wire filter core in tail gas at water-cooled cavity;
Described water cooling plant reduces the temperature of high-temperature tail gas on the one hand in advance, make by exhaust temperature during MOCVD filter relatively low, also bulky grain cohesion in tail gas separated out, in water cooling plant, interception is filtered simultaneously, decreases the bulky grain and quantity thereof that arrive MOCVD filter;
On the other hand because water cooling plant is a continuous print cooling system, eliminate the time that cooling is waited for when changing MOCVD filter, time cost has been saved in production.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410514578.9A CN104258681A (en) | 2014-09-29 | 2014-09-29 | Method for prolonging service life of MOCVD filter |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410514578.9A CN104258681A (en) | 2014-09-29 | 2014-09-29 | Method for prolonging service life of MOCVD filter |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN104258681A true CN104258681A (en) | 2015-01-07 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410514578.9A Pending CN104258681A (en) | 2014-09-29 | 2014-09-29 | Method for prolonging service life of MOCVD filter |
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Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20070089674A1 (en) * | 2002-09-11 | 2007-04-26 | Planar Systems, Inc. | Precursor material delivery system with thermal enhancements for atomic layer deposition |
| CN101125264A (en) * | 2006-08-15 | 2008-02-20 | 深圳迈瑞生物医疗电子股份有限公司 | Integrated refrigerating functional gas filtering device |
| CN102357309A (en) * | 2011-08-25 | 2012-02-22 | 句容宁武高新技术发展有限公司 | Recovering and utilizing method for epoxide gas in tail gas |
| CN103071353A (en) * | 2012-04-23 | 2013-05-01 | 光达光电设备科技（嘉兴）有限公司 | Gas filtration treatment structure, tail gas treatment system and tail gas treatment method thereof |
| CN103203135A (en) * | 2013-01-31 | 2013-07-17 | 上海博恩世通光电股份有限公司 | Filtration system and filtration method for tail gas particle of MOCVD equipment |
| CN103658164A (en) * | 2013-05-17 | 2014-03-26 | 上海康恒环境股份有限公司 | Device for processing organic contaminants in soil |
-
2014
- 2014-09-29 CN CN201410514578.9A patent/CN104258681A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20070089674A1 (en) * | 2002-09-11 | 2007-04-26 | Planar Systems, Inc. | Precursor material delivery system with thermal enhancements for atomic layer deposition |
| CN101125264A (en) * | 2006-08-15 | 2008-02-20 | 深圳迈瑞生物医疗电子股份有限公司 | Integrated refrigerating functional gas filtering device |
| CN102357309A (en) * | 2011-08-25 | 2012-02-22 | 句容宁武高新技术发展有限公司 | Recovering and utilizing method for epoxide gas in tail gas |
| CN103071353A (en) * | 2012-04-23 | 2013-05-01 | 光达光电设备科技（嘉兴）有限公司 | Gas filtration treatment structure, tail gas treatment system and tail gas treatment method thereof |
| CN103203135A (en) * | 2013-01-31 | 2013-07-17 | 上海博恩世通光电股份有限公司 | Filtration system and filtration method for tail gas particle of MOCVD equipment |
| CN103658164A (en) * | 2013-05-17 | 2014-03-26 | 上海康恒环境股份有限公司 | Device for processing organic contaminants in soil |
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Application publication date: 20150107 |