CN104216113A - Piezoelectric scanner - Google Patents
Piezoelectric scanner Download PDFInfo
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- CN104216113A CN104216113A CN201410407899.9A CN201410407899A CN104216113A CN 104216113 A CN104216113 A CN 104216113A CN 201410407899 A CN201410407899 A CN 201410407899A CN 104216113 A CN104216113 A CN 104216113A
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- piezoelectric
- scanner
- elastic
- catoptron
- resistance strain
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Abstract
The invention belongs to the field of electronic scanners and particularly relates to a piezoelectric scanner. The piezoelectric scanner comprises a base, two elastic housings, piezoelectric ceramic piles, resistance strain gauges, a hinge frame and a reflector. The piezoelectric scanner is characterized in that the reflector is adhered to the top plane of the hinge frame which is in a symmetrical structure and bolted onto one side of each elastic housing through a screw. The other sides of the elastic housings are fixed on the base. The piezoelectric ceramic piles are embedded in the elastic housings through pretightening force. The resistance strain gauges are adhered to the outsides of the piezoelectric ceramic piles. Through adjustment of the structure, scanning frequency is effectively improved. The piezoelectric scanner is simple in structure and easy to promote and use.
Description
Technical field
The invention belongs to electronic scanner field, particularly relate to a kind of piezoelectric type scanner.
Background technology
Laser scanner technique is a kind of technology being deflected by laser beam, move, scan, and the equipment that can realize laser scanning is called laser scanner.Now common laser scanner has rotating polygon mirror scanner, galvanometer galvanometer, voice coil motor scanner and piezoelectric scanner etc.Rotating multisurface scarnning mirror has the advantages such as rotating speed is high, scanning angle large, good stability, but also there is the shortcoming such as scan non-linearity, Drift entrance pupil.Galvanometer galvanometer is when high frequency sweep, and scanning maximum angle and the linearity all can degradations.Voice coil motor scanner scanning angle is comparatively large, but resonance frequency is low, cannot realize high-speed linear scanning.Traditional piezoelectric scanner sweep frequency is higher, but scanning angle is little, limits its application.
Summary of the invention
The present invention aims to provide a kind of piezoelectric scanner of effective raising sweep frequency.
Piezoelectric scanner, comprises substrate, elastic housing, piezoelectric element, resistance strain gage, hinge bracket and catoptron composition; It is characterized in that, catoptron is bonded in the top planes of hinge bracket, hinge bracket is symmetrical structure, by the side of screw bolt at two elastic housings, the opposite side of elastic housing is fixed on pedestal, piezoelectricity Tao Ce stacks and is embedded in elastic housing by pretightning force, and the outboard bonds of each piezoelectric element has resistance strain gage.
Piezoelectric scanner of the present invention, is characterized in that described piezoelectric element is provided with two, and is symmetrical arranged.
Piezoelectric scanner of the present invention, it is characterized in that the width of described catoptron is more than or equal to the width of elastic housing, elastic housing is in the vertical projection of catoptron completely.
Piezoelectric scanner of the present invention, is characterized in that described resistance strain gage is arranged at the middle part of two pieces of piezoelectric elements.
Piezoelectric scanner of the present invention, effectively raises the frequency of scanning through structural adjustment, and piezoelectric scanner structure of the present invention is simple and be easy to promote the use of.
Accompanying drawing explanation
Fig. 1 is structural representation of the present invention;
Wherein 1-substrate, 2-elastic housing, 3-piezoelectric element, 4-resistance strain gage, 5-hinge bracket, 6-catoptron.
Embodiment
Piezoelectric scanner of the present invention, comprises substrate 1, elastic housing 2, piezoelectric element 3, resistance strain gage 4, hinge bracket 5 and catoptron 6 and forms; It is characterized in that, catoptron 6 is bonded in the top planes of hinge bracket 5, hinge bracket 5 is symmetrical structure, by the side of screw bolt at two elastic housings 2, the opposite side of elastic housing 2 is fixed on pedestal 1, piezoelectricity Tao Ce stacks 3 and is embedded in elastic housing 2 by pretightning force, and the outboard bonds of each piezoelectric element 3 has resistance strain gage 4.Piezoelectric scanner of the present invention, described piezoelectric element is provided with two, and is symmetrical arranged.The width of described catoptron is more than or equal to the width of elastic housing, and elastic housing is in the vertical projection of catoptron completely.Described resistance strain gage is arranged at the middle part of two pieces of piezoelectric elements.
Applying voltage by two piezoelectric elements 3 makes both to identical collapsing length.Then by applying driving voltage reverse each other to two piezoelectric elements 3, two piezoelectric elements 3 can be made to do operation reverse each other, the telescopic displacement of piezoelectric element 3 is converted into the displacement in the vertical telescopic direction after amplification by elastic housing 2, elastic hinge support 5 peripheral shaft is rotated to formation, realizes the rotation of catoptron 6.In resistance strain gage 4 and external circuit, resistance forms double bridge, applies reverse voltage to two piezoelectric elements 3, when an arm resistance stretches, during an arm resistance compression, then produces certain pressure reduction between two-arm.This pressure reduction can reflect that piezoelectric scanner angle changes indirectly.
Claims (4)
1. piezoelectric scanner, comprises substrate (1), elastic housing (2), piezoelectric element (3), resistance strain gage (4), hinge bracket (5) and catoptron (6) composition; It is characterized in that, catoptron (6) is bonded in the top planes of hinge bracket (5), hinge bracket (5) is symmetrical structure, by the side of screw bolt two elastic housings (2), the opposite side of elastic housing (2) is fixed on pedestal (1), piezoelectricity Tao Ce stacks (3) and is embedded in elastic housing (2) by pretightning force, and the outboard bonds of piezoelectric element (3) has resistance strain gage (4).
2. piezoelectric scanner as claimed in claim 1, is characterized in that described piezoelectric element (3) is provided with two, and is symmetrical arranged.
3. piezoelectric scanner as claimed in claim 1, it is characterized in that the width of described catoptron (6) is more than or equal to the width of elastic housing (2), elastic housing (2) is in the vertical projection of catoptron (6) completely.
4. piezoelectric scanner as claimed in claim 1, is characterized in that described resistance strain gage (4) is arranged at the middle part of two pieces of piezoelectric elements (3).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410407899.9A CN104216113A (en) | 2014-08-19 | 2014-08-19 | Piezoelectric scanner |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410407899.9A CN104216113A (en) | 2014-08-19 | 2014-08-19 | Piezoelectric scanner |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN104216113A true CN104216113A (en) | 2014-12-17 |
Family
ID=52097791
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410407899.9A Pending CN104216113A (en) | 2014-08-19 | 2014-08-19 | Piezoelectric scanner |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN104216113A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105403997A (en) * | 2015-11-19 | 2016-03-16 | 苏州工业园区纳米产业技术研究院有限公司 | Piezoelectric driving two-dimensional scanning micro-mirror |
| CN106526833A (en) * | 2016-12-29 | 2017-03-22 | 大族激光科技产业集团股份有限公司 | Unstressed piezoelectric drive laser galvanometer system |
| CN109669267A (en) * | 2019-01-18 | 2019-04-23 | 成都理想境界科技有限公司 | A kind of scan actuator and fibre optic scanner |
-
2014
- 2014-08-19 CN CN201410407899.9A patent/CN104216113A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105403997A (en) * | 2015-11-19 | 2016-03-16 | 苏州工业园区纳米产业技术研究院有限公司 | Piezoelectric driving two-dimensional scanning micro-mirror |
| CN106526833A (en) * | 2016-12-29 | 2017-03-22 | 大族激光科技产业集团股份有限公司 | Unstressed piezoelectric drive laser galvanometer system |
| CN106526833B (en) * | 2016-12-29 | 2019-02-19 | 大族激光科技产业集团股份有限公司 | Unstressed Piezoelectric Driving laser galvanometer system |
| CN109669267A (en) * | 2019-01-18 | 2019-04-23 | 成都理想境界科技有限公司 | A kind of scan actuator and fibre optic scanner |
| CN109669267B (en) * | 2019-01-18 | 2021-01-05 | 成都理想境界科技有限公司 | Scanning actuator and optical fiber scanner |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| WD01 | Invention patent application deemed withdrawn after publication | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20141217 |