CN104215165B - 一种一维位移精密测量方法 - Google Patents
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Families Citing this family (6)
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CN104654993B (zh) * | 2015-01-14 | 2017-08-11 | 中国计量科学研究院 | 一种差分电容式一维位置矢量传感器 |
UA123583C2 (uk) * | 2015-07-08 | 2021-04-28 | Маріна Владіміровна Мєдвєдєва | Спосіб вимірювання переміщень об'єкта |
JP6823483B2 (ja) * | 2017-02-02 | 2021-02-03 | 株式会社ミツトヨ | 変位検出器 |
CN108033034B (zh) * | 2017-11-23 | 2021-03-26 | 航宇救生装备有限公司 | 一种火箭滑车试验速度测试的方法 |
CN111312491B (zh) * | 2020-03-09 | 2021-08-20 | 南方科技大学 | 耦合平面线圈、位移传感器及可穿戴电子产品 |
CN112372036B (zh) * | 2020-10-30 | 2023-05-23 | 东北林业大学 | 一种亚波长闪耀光栅结构的加工方法 |
Citations (6)
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CN87102580A (zh) * | 1986-04-04 | 1987-12-02 | 株式会社三丰制作所 | 电容式测位传感器 |
CN87107060A (zh) * | 1986-11-13 | 1988-05-25 | 汉斯·乌尔里希·迈尔 | 测量位移的电容性传感器 |
CN1109583A (zh) * | 1993-10-19 | 1995-10-04 | 汉斯·乌尔里希·迈耶 | 用于测量长度和角度的仪器 |
JP2003280540A (ja) * | 2002-03-25 | 2003-10-02 | Sharp Corp | 電子機器 |
CN102636102A (zh) * | 2012-04-28 | 2012-08-15 | 武汉大学 | 一种长距离磁阵列位置传感***自动诊断装置及诊断方法 |
CN103105180A (zh) * | 2011-10-10 | 2013-05-15 | 先进传感技术有限公司 | 绝对位置测量装置和方法 |
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Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
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CN87102580A (zh) * | 1986-04-04 | 1987-12-02 | 株式会社三丰制作所 | 电容式测位传感器 |
CN87107060A (zh) * | 1986-11-13 | 1988-05-25 | 汉斯·乌尔里希·迈尔 | 测量位移的电容性传感器 |
CN1109583A (zh) * | 1993-10-19 | 1995-10-04 | 汉斯·乌尔里希·迈耶 | 用于测量长度和角度的仪器 |
JP2003280540A (ja) * | 2002-03-25 | 2003-10-02 | Sharp Corp | 電子機器 |
CN103105180A (zh) * | 2011-10-10 | 2013-05-15 | 先进传感技术有限公司 | 绝对位置测量装置和方法 |
CN102636102A (zh) * | 2012-04-28 | 2012-08-15 | 武汉大学 | 一种长距离磁阵列位置传感***自动诊断装置及诊断方法 |
Non-Patent Citations (1)
Title |
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基于DSP 的激光一维动态位移测量***设计;章鹏 等;《计算机测量与控制》;20021231;第10卷;第567-569页 * |
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