CN104209649A - Efficient and selective laser resonance absorption machining method on basis of doping - Google Patents
Efficient and selective laser resonance absorption machining method on basis of doping Download PDFInfo
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- CN104209649A CN104209649A CN201310209634.3A CN201310209634A CN104209649A CN 104209649 A CN104209649 A CN 104209649A CN 201310209634 A CN201310209634 A CN 201310209634A CN 104209649 A CN104209649 A CN 104209649A
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- Prior art keywords
- doping
- resonance
- laser
- absorption
- machining
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
Abstract
The invention relates to an efficient and selective laser resonance absorption machining method on the basis of doping. The method comprises the steps that materials for an experiment are selected, materials containing doping impurities of different concentrations are prepared, materials generate resonance absorption on a laser of specific wave length after being doped partially, absorption spectra of the materials are measured, a wave length adjusting system adjusts laser wavelength to the absorption peak, a resonance absorption peak should correspond to the laser wavelength, the machining speed of resonance machining and the machining speed of non-resonance machining of different materials at different doping concentrations are compared, and doping conditions are optimized with a characterization method. The efficient and selective laser resonance absorption machining method on the basis of doping has the advantages that specific impurities are doped in large energy gap materials, the resonance absorption effect is generated on photons, and compared with a traditional laser machining method, efficient and selective machining can be carried out on the materials.
Description
Technical field
The present invention relates to laser application, relate in particular to a kind of laser resonant based on doping and absorb high efficiency and selective processing method.
Background technology
For such as improving the laser of doping, in the working (machining) efficiency of the upper application of wide-band gap material (glass, crystal, pottery, polymer etc.), traditional laser processing is all that machining tool---the angle of pulse laser light field is improved crudy and efficiency from regulating.In fact, in Laser Processing, the physical property of the object of processing---material itself, as chemical bond of the lattice defect of the energy gap of transparent material, crystal, polymer molecule etc., absorption and the phase transition process of impact to photon, thus also can have a significant impact crudy and efficiency.Doping method can change the physical characteristics such as the optical absorption characteristics of material, the present invention by the method for doping be applied to improve laser micro-/receive among the working (machining) efficiency and selective processing of processing.
Doping method can change the physical characteristics such as the optical absorption characteristics of material.Be published in the document M.Quirk in October calendar year 2001, J.Serda:Semiconductor Manufacturing Technology.Prentice-Hall, Upper Saddle River, in NJ (2001), author adopts the mode of thermal diffusion or Implantation in semiconductor technology, to the selected foreign particle that adulterates in the crystal structure of semi-conducting material, changes the distribution of hole and electronics, regulate PN junction structure, change its electric property.Document T.Lippert, A.Yabe, A.Wokaun:A.Adv.Mat.9, in 2 (1997), author is in the research of continuous Ultra-Violet Laser etch polymers material, can reduce the exposure intensity of laser by impurity, improve etching efficiency, well be applied in uv-exposure etching.But the method for doping be not also applied to so far improve laser micro-/receive among the working (machining) efficiency and selective processing of processing.
Summary of the invention
The object of this invention is to provide a kind of laser resonant based on doping and absorb high efficiency and selective processing method, to overcome currently available technology above shortcomings.
The object of the invention is to be achieved through the following technical solutions:
Laser resonant based on doping absorbs high efficiency and a selective processing method, said method comprising the steps of:
(1) choose experiment material, experiment material is divided into wide-band gap material and impurity two parts, the material that preparation contains variable concentrations impurity;
(2) material, after the doping of part, produces RESONANCE ABSORPTION to specific wavelength laser;
(3) measurement of material absorption spectrum: find out wavelength corresponding to material resonance absorbing peak in absorption spectra after doping, be decided to be centre wavelength;
(4) wavelength regulation system is adjusted so far absorption peak place of optical maser wavelength, and resonance absorbing peak should be corresponding with optical maser wavelength;
(5) compare under different materials different levels of doping, the difference of processing speed between off-resonance processing is processed in resonance; And
(6) utilize characterizing method, optimize doping condition.
Further, in step (1), described wide-band gap material comprises glass, crystal, pottery and polymer.
Further, in step (1), described impurity comprises rare earth element, oxide and macromolecule.
Further, in step (6), described characterizing method comprises removal volume and the pump probe under working depth under Laser Processing threshold value, different pulse number or aperture area, unit energy.
Beneficial effect of the present invention is: the present invention is by the specific impurities of adulterating in wide-band gap material, produces the RESONANCE ABSORPTION effect to photon, compared with traditional laser processing, can realize high efficiency and selectively processing to material.
Brief description of the drawings
With reference to the accompanying drawings the present invention is described in further detail below.
Fig. 1 is neodymium-doped silicate glass absorption spectrum and the electron transition energy level figure described in the embodiment of the present invention.
Detailed description of the invention
A kind of laser resonant based on doping described in the embodiment of the present invention absorbs high efficiency and selective processing method, said method comprising the steps of:
(1) choose experiment material, experiment material is divided into wide-band gap material and impurity two parts, the material that preparation contains variable concentrations impurity, described wide-band gap material comprises glass, crystal, pottery and polymer, described impurity comprises rare earth element, oxide and macromolecule;
(2) material, after the doping of part, produces RESONANCE ABSORPTION to specific wavelength laser; Utilize the absorption spectrum after spectrometer analysis wide-band gap material impurity, pick out the impurities such as the obvious rare earth element of absorption line or macromolecule, customize or produce the selective absorbing material doped with this alloy of variable concentrations;
(3) measurement of material absorption spectrum: find out wavelength corresponding to material resonance absorbing peak in absorption spectra after doping, be decided to be centre wavelength; The absorption maximum (centre wavelength under photon energy correspond to the excitation resonance transition energy of material Atom or molecule) of material to this wavelength photon;
(4) wavelength regulation system is adjusted so far absorption peak place of optical maser wavelength, and resonance absorbing peak should be corresponding with optical maser wavelength, and single or multiple photon energies are equated or approximately equal with the transition energy level of material;
(5) compare under different materials different levels of doping, the difference of processing speed between off-resonance processing is processed in resonance; And
(6) utilize Laser Processing threshold value, the working depth under different pulse number or aperture area, the removal volume under unit energy, the characterizing methods such as pump probe, optimize the doping conditions such as impurity, concentration, the degree of depth, scope, improve resonance working (machining) efficiency.
As shown in Figure 1, the laser instrument that laser system adopts U.S.'s spectrum physics (Spectrum Physics) company to produce, optical maser wavelength 800nm, pulse width 50fs, repetition rate 1KHz, pulse ceiling capacity 3mJ, light distribution is Gaussian, linear polarization.
Optical parametric amplifier is the TOPAS-C that Light Convertion company of Lithuania produces, can wavelength 800nm laser pulse is adjustable continuously within the scope of wavelength 290-2600nm.
Processing object is silicate glass.Measure the absorption spectrum of normal silicate glass, its near-infrared to the absorption characteristic of near ultraviolet band for substantially not absorbing.By doped with rare-earth elements neodymium in simple glass, its near-infrared becomes height as shown in Figure 1 to the absorption spectrum of near ultraviolet band and rises and falls, optical absorption characteristics changes greatly, and wherein the highest absworption peak is at 586.78nm, and the corresponding neodymium atom of this wavelength photon energy is from ground state 3s
23p
2 1/23p
3 3/23d
104f
5/2to a certain middle excitation state 3s
23p
1/23p
4 3/23d
104d
3/2energy level transition, so in laser processing procedure in the time that optical maser wavelength is or approach 586.78nm, material for laser light photon can carry out high efficiency RESONANCE ABSORPTION, thereby realizes high efficiency resonance processing.Research is found:
(1) femto-second laser pulse number is to measure Laser Processing threshold value at 1～1000 o'clock, and resonance processing situation has reduced 3%-40% than off-resonance processing situation.
(2) as laser power density < 2.28 × 10
14w/cm
2time, the volume of the deep hole volume ratio off-resonance processing of resonance processing has increased 1.4-4.4 doubly.
The present invention is not limited to above-mentioned preferred forms; anyone can draw other various forms of products under enlightenment of the present invention; no matter but do any variation in its shape or structure; every have identical with a application or akin technical scheme, within all dropping on protection scope of the present invention.
Claims (4)
1. the laser resonant based on doping absorbs high efficiency and a selective processing method, it is characterized in that, said method comprising the steps of:
(1) choose experiment material, experiment material is divided into wide-band gap material and impurity two parts, the material that preparation contains variable concentrations impurity;
(2) material, after the doping of part, produces RESONANCE ABSORPTION to specific wavelength laser;
(3) measurement of material absorption spectrum: find out wavelength corresponding to material resonance absorbing peak in absorption spectra after doping, be decided to be centre wavelength;
(4) wavelength regulation system is adjusted so far absorption peak place of optical maser wavelength, and resonance absorbing peak should be corresponding with optical maser wavelength;
(5) compare under different materials different levels of doping, the difference of processing speed between off-resonance processing is processed in resonance; And
(6) utilize characterizing method, optimize doping condition.
2. the laser resonant based on doping according to claim 1 absorbs high efficiency and selective processing method, it is characterized in that: in step (1), described wide-band gap material comprises glass, crystal, pottery and polymer.
3. the laser resonant based on doping according to claim 1 absorbs high efficiency and selective processing method, it is characterized in that: in step (1), described impurity comprises rare earth element, oxide and macromolecule.
4. the laser resonant based on doping according to claim 1 absorbs high efficiency and selective processing method, it is characterized in that: in step (6), described characterizing method comprises removal volume and the pump probe under working depth under Laser Processing threshold value, different pulse number or aperture area, unit energy.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109775658A (en) * | 2019-01-22 | 2019-05-21 | 华中科技大学 | A kind of method and system preparing micro-nano material based on tunable laser auxiliary |
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| US20030143326A1 (en) * | 2002-01-29 | 2003-07-31 | Daniel Bubb | Deposition of thin films using an infrared laser |
| JP2008062298A (en) * | 2006-09-10 | 2008-03-21 | Ukon Llc | Method for manufacturing minutely perforated material, minutely perforated material and separation membrane equipped with the same |
| CN101186739A (en) * | 2006-11-22 | 2008-05-28 | 住友金属矿山株式会社 | Light-absorbent resin composition for laser welding, light-absorbent resin molding, and method for manufacturing light-absorbent resin molding |
| US20090030799A1 (en) * | 2007-07-25 | 2009-01-29 | Rocks Intertainment Gmbh | System comprising a consumer good and server and a method to bestow an advantage with a monetary value |
| WO2009030799A1 (en) * | 2007-08-28 | 2009-03-12 | Universitat De Valencia, Estudi General | Method for the synthesis of inert metal nanoparticles |
| WO2009129801A1 (en) * | 2008-04-25 | 2009-10-29 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Method for joining at least two transparent elements to be joined by laser transmission welding |
-
2013
- 2013-05-31 CN CN201310209634.3A patent/CN104209649A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20030143326A1 (en) * | 2002-01-29 | 2003-07-31 | Daniel Bubb | Deposition of thin films using an infrared laser |
| JP2008062298A (en) * | 2006-09-10 | 2008-03-21 | Ukon Llc | Method for manufacturing minutely perforated material, minutely perforated material and separation membrane equipped with the same |
| CN101186739A (en) * | 2006-11-22 | 2008-05-28 | 住友金属矿山株式会社 | Light-absorbent resin composition for laser welding, light-absorbent resin molding, and method for manufacturing light-absorbent resin molding |
| US20090030799A1 (en) * | 2007-07-25 | 2009-01-29 | Rocks Intertainment Gmbh | System comprising a consumer good and server and a method to bestow an advantage with a monetary value |
| WO2009030799A1 (en) * | 2007-08-28 | 2009-03-12 | Universitat De Valencia, Estudi General | Method for the synthesis of inert metal nanoparticles |
| WO2009129801A1 (en) * | 2008-04-25 | 2009-10-29 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Method for joining at least two transparent elements to be joined by laser transmission welding |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109775658A (en) * | 2019-01-22 | 2019-05-21 | 华中科技大学 | A kind of method and system preparing micro-nano material based on tunable laser auxiliary |
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Application publication date: 20141217 |