CN104203467B - 切削工具用硬质被膜及硬质被膜被覆切削工具 - Google Patents
切削工具用硬质被膜及硬质被膜被覆切削工具 Download PDFInfo
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Abstract
本发明提供优越的耐磨性及耐熔敷性兼备的切削工具用硬质被膜及硬质被膜被覆切削工具。是第1被膜层(24)和第2被膜层(26)交替地层叠2层以上的多层膜;第1被膜层(24)由AgaCu1-a构成;第2被膜层(26)由包含IVa族元素、Va族元素、VIa族元素、Al及Si中的至少1种元素的氮化物、氧化物、碳化物、碳氮化物或硼化物构成;涉及第1被膜层(24)的原子比a处在0.2以上0.4以下的范围内;第1被膜层(24)与第2被膜层(26)的层叠周期(d3)处在0.2nm以上100nm以下的范围内;而且,总膜厚(D)处在0.2μm以上10.0μm以下的范围内。所以,通过在被膜中含有Ag,能够使摩擦系数及切削阻力减轻,获得润滑性及耐熔敷性优越并且高硬度的被膜。
Description
技术领域
本发明涉及一种被覆设置在切削工具的表面上的切削工具用硬质被膜及设置了该硬质被膜的硬质被膜被覆切削工具,特别是涉及用于使耐磨性及耐熔敷性都提高的改良。
背景技术
在钻头、螺丝攻等切削工具上,为了使耐磨性提高而被覆设置硬质被膜。作为此切削工具用硬质被膜,广泛使用TiN系、TiCN系、TiAlN系及AlCrN系的涂层,为了进一步使其性能提高,不断地在谋求改良。例如,记载于专利文献1的硬质层叠被膜就是如此。
现有技术文献
专利文献
专利文献1:日本特开2010-76082号公报
发明内容
发明所要解决的课题
然而,根据上述那样的现有技术形成了硬质被膜的切削工具,当进行其切削加工时,根据被切削材料的种类、切削条件,存在耐熔敷性变得不充分的危险。即,有时会因被切削材料的熔敷等造成工具的寿命变短,存在改良的余地。因此,要求开发优越的耐磨性及耐熔敷性兼备的切削工具用硬质被膜及硬质被膜被覆切削工具。
本发明就是将以上的情况作为背景作出的,其目的在于提供一种优越的耐磨性及耐熔敷性兼备的切削工具用硬质被膜及硬质被膜被覆切削工具。
用于解决课题的技术手段
为了达到这样的目的,本发明第1发明的要旨是,一种被覆设置在切削工具的表面上的切削工具用硬质被膜;该切削工具用硬质被膜的特征在于:是第1被膜层和第2被膜层交替地层叠2层以上的多层膜;该第1被膜层,由AgaCu1-a构成;该第2被膜层,由包含IVa族元素、Va族元素、VIa族元素、Al及Si中的至少1种元素的氮化物、氧化物、碳化物、碳氮化物或硼化物构成;涉及上述第1被膜层的原子比a处在0.2以上0.4以下的范围内;上述第1被膜层与上述第2被膜层的层叠周期处在0.2nm以上100nm以下的范围内;而且,总膜厚处在0.2μm以上10.0μm以下的范围内。
发明的效果
这样根据上述第1发明,是第1被膜层和第2被膜层交替地层叠2层以上的多层膜;该第1被膜层,由AgaCu1-a构成;该第2被膜层,由包含IVa族元素、Va族元素、VIa族元素、Al及Si中的至少1种元素的氮化物、氧化物、碳化物、碳氮化物或硼化物构成;涉及上述第1被膜层的原子比a处在0.2以上0.4以下的范围内;上述第1被膜层与上述第2被膜层的层叠周期处在0.2nm以上100nm以下的范围内;而且,总膜厚处在0.2μm以上10.0μm以下的范围内。所以,通过在被膜中含有Ag,能够使摩擦系数及切削阻力减轻,获得润滑性及耐熔敷性优越并且高硬度的被膜。即,能够提供优越的耐磨性及耐熔敷性兼备的切削工具用硬质被膜。
从属于上述第1发明的本发明第2发明的要旨是,在表面上被覆设置上述第1发明的切削工具用硬质被膜的硬质被膜被覆切削工具。如果这样做,通过在被膜中含有Ag,能够使摩擦系数及切削阻力减轻,获得润滑性及耐熔敷性优越并且高硬度的被膜。即,能够提供优越的耐磨性及耐熔敷性兼备的硬质被膜被覆切削工具。
附图说明
图1是从与轴心垂直的方向观看的作为本发明的硬质被膜被覆切削工具的一实施例的钻头的正面图。
图2是从设置切削刃的前端侧观看图1所示钻头的放大仰视图。
图3是图1的钻头的主体的表面附近的放大剖视图,是例示作为本发明的切削工具用硬质被膜的一实施例的硬质被膜的构成的图。
图4是说明图3的硬质被膜的涂镀方法的一例的图。
图5是合并表示在本发明者等为了验证本发明的效果而进行的钻孔试验中使用的、作为本发明的实施例的各试样的被膜构造及各自的试验结果的图。
图6是合并表示在本发明者等为了验证本发明的效果而进行的钻孔试验中使用的、用于比较的各试验品的被膜构造及各自的试验结果的图。
具体实施方式
本发明的切削工具用硬质被膜,除了立铣刀、钻头、平面铣刀、成形铣刀、铰刀、螺丝攻等旋转切削工具外,还可较好地应用于车刀等非旋转式的切削工具等各种各样的切削工具的表面涂层。作为工具基材即设置硬质被膜的构件的材质,虽然可以较好地使用超硬合金、高速工具钢,但也可以是其它的材料,例如在由金属陶瓷、陶瓷、多晶金刚石、单晶金刚石、多晶CBN、单晶CBN等各种各样的材料构成的切削工具广泛应用本发明的切削工具用硬质被膜。
本发明的切削工具用硬质被膜,是被覆设置在切削工具的一部分或全部的表面上的硬质被膜,最好在该切削工具上设置于与切削加工相关的刃部。如以被覆至少其刃部的切削刃至前刃面的方式设置则更理想。
上述2被膜层,由包含IVa族元素、Va族元素、VIa族元素、Al及Si中的至少1种元素的氮化物、氧化物、碳化物、碳氮化物或硼化物或它们的相互固溶体构成。具体地说,是由TiN、TiAlN、TiAlCrVSiB、TiSiO、TiWC、ZrVO、ZrNbB、HfTaCN、NbN、CrN、MoSiC、AlN、AlCrSiCN、SiN等构成的被膜层。
上述第1被膜层及第2被膜层的膜厚,虽然与组成等对应地个别 确定,但在它们重复层叠多层的场合,可分别是一定的膜厚,也可使膜厚连续地或分阶段地改变。上述第1被膜层、第2被膜层的各平均膜厚,虽然根据涂镀的构件、被膜的组成等而不同,但例如0.1~90nm左右的范围内是适当的。
上述第1被膜层、第2被膜层,虽然可由例如电弧离子镀法、离子束沉积法、溅镀法、PLD(Pulse Laser Deposition;脉冲激光沉积)法、IBAD(Ion Beam Assisted Deposition;离子束辅助沉积)法等PVD法较好地设置,但也可采用其它的成膜法。
实施例
下面,根据附图详细地说明本发明的优选的实施例。关于在以下的说明中使用的图,各部分的尺寸比等未必正确地描绘。
图1是表示作为本发明的硬质被膜被覆切削工具的一实施例的钻头10的图,是从与轴心O垂直的方向观看的正面图。图2是从设置切削刃12的前端侧(即朝由箭头II所示的方向)观看图1所示钻头10的放大仰视图。这些图1及图2所示本实施例的钻头10是2片刃的螺旋钻头,在轴心O方向一体地具备柄部14及主体16。在该主体16上,形成绕轴心O右旋地螺旋的一对槽18。在上述主体16的前端,与上述一对槽18对应地设置一对切削刃12,通过上述钻头10从上述柄部14那一侧观看绕轴心O右旋地旋转驱动,由上述切削刃12在被切削材料上切削加工孔,并且,以对该孔进行切削加工时产生的切屑通过上述槽18向柄部14那一侧排出的方式构成。
图3是上述钻头10的主体16的表面附近的放大剖视图,是例示作为本发明的切削工具用硬质被膜的一实施例的硬质被膜22的构成的图。上述钻头10,例如是在高速工具钢(高速钢)制的工具基材(工具母材)20的表面上涂镀图3所示那样的硬质被膜22构成的钻头。此硬质被膜22,例如图3所示那样,是第1被膜层24和第2被膜层26在上述工具基材20的表面上交替地层叠2层以上的多层膜。在图3中,虽然表示出上述第1被膜层24构成设在上述工具基材20的表面上的最下层、上述第2被膜层26构成与上述硬质被膜22的表面(外表面) 相当的最上层的例,但也可以是上述第2被膜层26构成最下层、上述第1被膜层24构成最上层的硬质被膜。
上述第1被膜层24,由包含不可避的杂质的AgaCu1-a构成。涉及此第1被膜层24的原子比(混晶比)a处在0.2以上0.4以下的范围内(0.2≦a≦0.4)。上述第2被膜层26,是包含IVa族元素、Va族元素、VIa族元素、Al及Si中的至少1种元素的氮化物、氧化物、碳化物、碳氮化物或硼化物或它们的相互固溶体,包含不可避的杂质。即,上述第2被膜层26,具体地说,由TiN、TiAlN、TiAlCrVSiB、TiSiO、TiWC、ZrVO、ZrNbB、HfTaCN、NbN、CrN、MoSiC、AlN、AlCrSiCN、SiN等构成。
在上述硬质被膜22,最好上述第1被膜层24及第2被膜层26分别以预先确定了的一定的膜厚(平均膜厚)形成。上述第1被膜层24及第2被膜层26各自的平均膜厚,虽然与涂镀的构件、被膜的组成等对应地个别进行设定,但最好上述第1被膜层24的平均膜厚d1在0.1~90.0nm的范围内适当地决定,上述第2被膜层26的平均膜厚d2在0.1~75.0nm的范围内适当地决定。上述第1被膜层24与上述第2被膜层26的层叠周期d3,处在0.2nm以上100nm以下的范围内。上述第1被膜层24及上述第2被膜层26的层叠数(第1被膜层24及第2被膜层26的层数的合计),最好处在30~6300的范围内。即,上述第1被膜层24及上述第2被膜层26各自的层数,最好处在15~3150的范围内。上述硬质被膜22的总膜厚D,处在0.2μm以上10.0μm以下的范围内。
图4是说明上述硬质被膜22的涂镀方法的一例的图。上述硬质被膜22相对于上述钻头10等的涂镀,使用例如图4所示那样的溅镀装置30,通过控制器36的控制进行。最好首先在作为前处理的腐蚀工序中,由偏压电源34在配置在上述溅镀装置30的腔室32内的上述工具基材20上施加负的偏压。由此,正的氩离子Ar+与上述工具基材20冲撞,该工具基材20的表面被粗面化。
接着,在溅镀工序中,在上述工具基材20的表面上交替地形成上 述第1被膜层24及第2被膜层26。例如,在上述第2被膜层26的形成中,通过由电源40在构成该第2被膜层26的TiAl等的靶材38上施加负的一定的偏压(例如-50~-60V左右),并且,由上述偏压电源34在工具基材20上施加负的一定的偏压(例如-100V左右),氩离子Ar+与上述靶材38冲撞,由此,TiAl等构成物质被轰出。在上述腔室32内,除了氩气外,还以规定的流量导入氮气(N2)、碳氢化合物气体(CH4、C2H2)的反应气体,其氮原子N、碳原子C与从上述靶材38轰出的TiAl等结合,成为TiAlN等,作为上述硬质被膜22中的第2被膜层26等附着在上述工具基材20的表面上。或者,分别与Ti、Al等的单体对应地构成靶材,使用这些多个靶材同时地进行溅镀,形成由TiAlN等构成的上述第2被膜层26。在上述溅镀工序中,也可使得在上述工具基材20上施加正的电压。通过如以上那样做,使上述第1被膜层24和上述第2被膜层26交替地附着在上述工具基材20的表面上,在该工具基材20的表面上形成上述硬质被膜22。
接下来,说明本发明者等为了验证本发明的效果而进行的钻孔试验。图5及图6,是合并表示在此试验中使用的本发明品及试验品的被膜构造和各自的试验结果(加工孔数及判定)的图。图5表示作为本发明的实施例的本发明品1~14的构造及试验结果,图6表示用于比较的作为现有技术的试验品1~9的构造及试验结果。本发明者等在工具直径的超硬钻头上涂镀图5至图6所示各被膜构造及膜厚的硬质被膜,制作作为试样的本发明品1~14及试验品1~9,对于各试验品在以下的切削条件下进行了切削试验。图5所示本发明品1~14与应用了本实施例的硬质被膜22的本发明品相当,图6所示试验品1~9与应用了不满足本发明的必要条件的(从权利要求1的必要条件脱离的)硬质被膜的非发明品相当。图5及图6中的“A层”、“B层”,分别与上述第1被膜层24、第2被膜层26对应。图5及图6所示加工孔数,是侧面磨损宽度0.2mm时的孔数,合格判定基准是侧面磨损宽度0.2mm时的加工孔数在20孔以上。
[加工条件]
.工具形状:超硬钻头
.被切削材料:因科镍合金(注册商标)718
.切削机械:立型M/C
.切削速度:10m/min
.进给速度:0.1mm/rev
.加工深度:33mm(尽头)
.台阶量:无台阶
.切削油:油性
如图5所示,上述本发明品1~14是都是第1被膜层(A层)24和第2被膜层(B层)26交替地层叠2层以上的多层膜,第1被膜层(A层)24由AgaCu1-a构成,第2被膜层(B层)26由包含IVa族元素、Va族元素、VIa族元素、Al及Si中的至少1种元素的氮化物、氧化物、碳化物、碳氮化物或硼化物构成,涉及上述第1被膜层24的原子比a处在0.2以上0.4以下的范围内,上述第1被膜层24与上述第2被膜层26的层叠周期d3处在0.2nm以上100nm以下的范围内,而且,总膜厚D处在0.2μm以上10.0μm以下的范围内。即,应用了满足本发明的权利要求1的必要条件的硬质被膜22。如从图5所示试验结果可以得知的那样,在应用了这样的本实施例的硬质被膜22的本发明品1~14中,不论是哪个试样,侧面磨损宽度0.2mm时的加工孔数都在20孔以上,满足合格基准。
可以得知,特别是在上述第1被膜层24由Ag0.4Cu0.6构成、上述第2被膜层26由AlN构成、上述第1被膜层24的平均膜厚是0.5nm、上述第2被膜层26的平均膜厚是36.5nm、层叠周期是37.0nm、层数是150、总膜厚是2.8μm的本发明品4,加工孔数成为41,在上述第1被膜层24由Ag0.3Cu0.7构成、上述第2被膜层26由CrN构成、上述第1被膜层24的平均膜厚是5.0nm、上述第2被膜层26的平均膜厚是10.0nm、层叠周期是15.0nm、层数是400、总膜厚是3.0μm的本发明品2,加工孔数成为36,在上述第1被膜层24由Ag0.4Cu0.6构成、上述第2被膜层26由ZrNbB构成、上述第1被膜层24及第2 被膜层26的平均膜厚都是0.1nm、层叠周期是0.2nm、层数是2000、总膜厚是0.2μm的本发明品12,加工孔数成为36,在上述第1被膜层24由Ag0.4Cu0.6构成、上述第2被膜层26由TiSiO构成、上述第1被膜层24的平均膜厚是5.0nm、上述第2被膜层26的平均膜厚是0.1nm、层叠周期是5.1nm、层数是3200、总膜厚是8.2μm的本发明品13,加工孔数成为35,不论是哪一个,侧面磨损宽度0.2mm时的加工孔数都成为35孔以上,表现出特别良好的切削性能。
如图6所示,上述试验品1的上述第1被膜层24由Ag0.1Cu0.9构成,脱离了作为本发明的权利要求1的必要条件的Ag的原子比a是0.2以上0.4以下的范围。上述试验品2的上述第1被膜层24由Ag0.5Cu0.5构成,脱离了作为本发明的权利要求1的必要条件的Ag的原子比a是0.2以上0.4以下的范围。上述试验品3的层叠周期是0.1nm,脱离了作为本发明的权利要求1的必要条件的层叠周期0.2nm以上100nm以下的范围。上述试验品4的层叠周期是101.0nm,脱离了作为本发明的权利要求1的必要条件的层叠周期0.2nm以上100nm以下的范围。上述试验品5的总膜厚是10.1μm,脱离了作为本发明的权利要求1的必要条件的总膜厚0.2μm以上10.0μm以下的范围。上述试验品6的上述第1被膜层24由Ag0.1Cu0.9构成,脱离了作为本发明的权利要求1的必要条件的Ag的原子比a是0.2以上0.4以下的范围。上述试验品7的上述第1被膜层24由Ag0.5Cu0.5构成,脱离了作为本发明的权利要求1的必要条件的Ag的原子比a是0.2以上0.4以下的范围。上述试验品8的层叠周期是0.1nm,脱离了作为本发明的权利要求1的必要条件的层叠周期0.2nm以上100nm以下的范围,并且,总膜厚是0.15μm,脱离了作为本发明的权利要求1的必要条件的总膜厚0.2μm以上10.0μm以下的范围。本试验品9的总膜厚是10.1μm,脱离了作为本发明的权利要求1的必要条件的总膜厚0.2μm以上10.0μm以下的范围,并且,上述第1被膜层24由Ti0.4B0.6ON构成,不满足该第1被膜层由AgaCu1-a构成的本发明的权利要求1的必要条件。如从图6所示试验结果可以得知的那样,在这些试验品1~9 中,不论是哪一个,侧面磨损宽度0.2mm时的加工孔数都不足20,与上述本发明品1~14相比切削性能较差。这可以认为是因为,在不满足本发明的权利要求1的必要条件的硬质被膜,耐熔敷性不充分,熔敷、剥离等导致寿命提前。
这样构成本实施例,因为是第1被膜层24和第2被膜层26交替地层叠2层以上的多层膜,第1被膜层24由AgaCu1-a构成,第2被膜层26由包含IVa族元素、Va族元素、VIa族元素、Al及Si中的至少1种元素的氮化物、氧化物、碳化物、碳氮化物或硼化物构成,涉及上述第1被膜层24的原子比a处在0.2以上0.4以下的范围内,上述第1被膜层24与上述第2被膜层26的层叠周期d3处在0.2nm以上100nm以下的范围内,而且,总膜厚D处在0.2μm以上10.0μm以下的范围内,所以,通过在被膜中含有Ag,能够使摩擦系数及切削阻力减轻,获得润滑性及耐熔敷性优越并且高硬度的被膜。即,能够提供优越的耐磨性及耐熔敷性兼备的作为切削工具用硬质被膜的硬质被膜22。
根据本实施例,因为是上述硬质被膜22被覆设置在表面上的钻头10,所以,通过在被膜中含有Ag,能够使摩擦系数及切削阻力减轻,获得润滑性及耐熔敷性优越并且高硬度的被膜。即,能够提供优越的耐磨性及耐熔敷性兼备的作为硬质被膜被覆切削工具的钻头10。
以上,根据附图详细地说明了本发明的优选的实施例,但本发明不限于此,在不脱离其宗旨的范围内能够施加各种各样的变更进行实施。
附图标记说明:
10:钻头(硬质被膜被覆切削工具)、12:切削刃、14:柄部、16:主体、18:槽、20:工具基材、22:硬质被膜(切削工具用硬质被膜)、24:第1被膜层、26:第2被膜层、30:溅镀装置、32:腔室、34:偏压电源、36:控制器、38:靶材、40:电源。
Claims (2)
1.一种切削工具用硬质被膜(22),被覆设置在切削工具的表面上;其特征在于:
是第1被膜层(24)和第2被膜层(26)交替地层叠2层以上的多层膜;
该第1被膜层(24)由AgaCu1-a构成;
该第2被膜层(26)由包含IVa族元素、Va族元素、VIa族元素、Al及Si中的至少1种元素的氮化物、氧化物、碳化物、碳氮化物或硼化物构成;
涉及上述第1被膜层的原子比a处在0.2以上0.4以下的范围内;
上述第1被膜层与上述第2被膜层的层叠周期(d3)处在0.2nm以上100nm以下的范围内;
而且,总膜厚(D)处在0.2μm以上10.0μm以下的范围内。
2.一种硬质被膜被覆切削工具(10),其特征在于:该硬质被膜被覆切削工具(10)在表面上被覆设置了权利要求1所述的切削工具用硬质被膜。
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- 2012-04-09 CN CN201280072256.2A patent/CN104203467B/zh not_active Expired - Fee Related
- 2012-04-09 WO PCT/JP2012/059738 patent/WO2013153614A1/ja active Application Filing
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Also Published As
Publication number | Publication date |
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EP2837453A1 (en) | 2015-02-18 |
EP2837453A4 (en) | 2015-11-11 |
JPWO2013153614A1 (ja) | 2015-12-17 |
EP2837453B1 (en) | 2016-08-31 |
KR101626239B1 (ko) | 2016-05-31 |
US20150072126A1 (en) | 2015-03-12 |
WO2013153614A1 (ja) | 2013-10-17 |
CN104203467A (zh) | 2014-12-10 |
KR20140138919A (ko) | 2014-12-04 |
US9409238B2 (en) | 2016-08-09 |
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