CN104176702A - Device for large-area quick manufacture of nanometer material orderly-assembled functional film - Google Patents
Device for large-area quick manufacture of nanometer material orderly-assembled functional film Download PDFInfo
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- CN104176702A CN104176702A CN201410452105.0A CN201410452105A CN104176702A CN 104176702 A CN104176702 A CN 104176702A CN 201410452105 A CN201410452105 A CN 201410452105A CN 104176702 A CN104176702 A CN 104176702A
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Abstract
Provided is a device for large-area quick manufacture of a nanometer material orderly-assembled functional film. An upper conveying belt and a lower conveying belt are parallelly arranged at interval, an upper base is fixed on the upper conveying belt, the surface of the upper base facing the lower conveying belt is of an orderly-arranged columnar array structure, a lower base is fixed on the lower conveying belt, the lower base corresponds to the upper base, and the upper conveying belt and the lower conveying belt are identical in linear speed. A nanometer material suspension liquid injection port is formed right above one side of the lower conveying belt, and a heating device is arranged under the lower conveying belt. The device has the advantages of being simple and quick, good in controllability and low in manufacture cost when manufacturing the nanometer material orderly-assembled functional film, and facilitates large-scale production. The functional film (an optical element, an electronic element and the like) manufactured by the device can be accurately controlled in position, and the device has a good application value on the aspects of micro-electronic circuits, optical elements and magnetic devices.
Description
Technical field
The present invention relates to a kind of large area and prepare fast the device of nano material ordered fabrication function film, belong to nanomaterial assembly technical field.
Background technology
Along with manifesting that the research and development of nano material aspect synthetic and nano material are worth in the potential huge applications aspect commercial Application, realize the ordered fabrication of different nano materials, the potential using value of exploitation nano material aspect optical element, microelectronic circuit, magnetic device, has been subject to paying close attention to widely.Particularly utilize the ordered fabrication of simple method practical function nano material, the application aspect of function film device (optical element, electricity component etc.) is had to potential value.
The assembling of nano material is that connection nano material science and technology and electronic device are prepared microminiaturized bridge.So along with the miniaturization of electronic device, society is also more and more urgent for the demand of nano material, and has carried out relevant exploration and research.The at present assembling of nano material mainly contains two kinds of approach: a class is the method for (Top-down) from top to bottom; Another kind of is the method for (Bottom-up) from bottom to top.Method is from bottom to top using molecule, nano material as basic structural unit, by certain interaction, forms more special nanostructured.As the uncharted field growing up gradually in recent years, the assembling of nano material is the technology of nano material being carried out to systematism and ordering, prepared composite construction has a series of brand-new physicochemical properties, studying this class system is the method for exploring the special nanostructured of preparation on the one hand, also the specific physical chemical property of this class formation is studied, and be the ready work of potential application of these new properties; Also can deepen on the other hand the understanding of people to nanostructured, and carry out the exploration more deep to this system in conjunction with the research of this respect, this not only has scientific meaning, and has important using value.Especially, monodimension nanometer material assembly, due to its anisotropic structure and special physicochemical properties, has been subject to people and has paid close attention to widely.For example, in monodimension nanometer material array assembly, due to the coupling of surface plasma between adjacent nanometer, the electromagnetic energy of nano material can be propagated, by the structural parameters of regulation and control assembly system, for example particle size and interparticle distance, can regulate and optimize the situation of this propagation.The method of assemble nanometer material one-dimensional array has much at present, the method (hydrogen bond, Van der Waals force, electrostatic force etc.) acting between particle as utilized, the method (DNA, CNT, copolymer, Woelm Alumina and nanofiber etc.) of template, the method for interfacial assembly method and outer field action.Assemble in target substrate but these methods are often random, be difficult to obtain regular, closely packed nanomaterial assembly structure.Therefore, in the controlled array preparation of nanomaterial assembly body, these nano materials can be carried out to sequencing assembling especially, can prepare to be positioned target substrate and form periodic patterns, and open up it in industrial application prospect, be a focus in current nanomaterial assembly research.
Granted publication number is that the Chinese invention patent of CN103253629B discloses a kind of accurate ordered fabrication method of nano particle, first the method utilizes the method for photoetching to carry out surface etch to the sheet material of hard, obtains having the columnar arrays structure of regular arrangement at the plate surface of hard; Then respectively surface is there is to the sheet material of columnar arrays structure of regular arrangement and the sheet material of flat surface as lower substrate and upper substrate, and have as the surface of lower substrate regular arrangement columnar arrays structure sheet material and as on fill the sandwich of the suspension composition sandwich that contains nano particle between the sheet material with flat surface of substrate; After the solvent evaporates in suspension, upper and lower substrate is separated, obtain the accurately nano particles array of assembling at the plate surface with flat surface.Nano particles array prepared by the present invention can be realized the accurate assembling of nano particle at ad-hoc location.The shortcoming of the method is cannot realize large-scale industrialization to produce.
Summary of the invention
The object of the invention is to provide the device that a kind of large area is prepared nano material ordered fabrication function film fast.
For achieving the above object, the first technical scheme that the present invention adopts is: a kind of large area is prepared the device of nano material ordered fabrication function film fast, comprises upper conveyor belt, lower conveyer belt, substrate on several, several lower substrate, heater and nano material suspension injection ports; Described upper conveyor belt and lower conveyer belt interval and be arranged in parallel, described upper substrate is fixed on described upper conveyor belt, described upper substrate has the columnar arrays structure of regular arrangement towards the surface of the side of described lower conveyer belt, described lower substrate is fixed on described lower conveyer belt, described lower substrate and upper substrate are corresponding to be arranged, and described upper conveyor belt is identical with the linear velocity of lower conveyer belt; Directly over one side of described lower conveyer belt, be provided with in order to nano material suspension is expelled to described lower suprabasil nano material suspension injection port, the below of described lower conveyer belt is provided with the heater in order to lower suprabasil nano material suspension is heated.
Preferred technical scheme is: described upper substrate is flexible substrates, and its material is selected from dimethyl silicone polymer, butadiene-styrene rubber, neoprene.
Preferred technical scheme is: the material of described lower substrate is selected from silicon chip, sheet glass, quartz plate, iron plate, copper sheet, dimethyl silicone polymer film, pet film, polystyrene film, polyurethane film, Kapton, aluminium flake, alumina wafer.
Preferred technical scheme is: the surface of described lower conveyer belt is provided with recess, and described lower substrate is embedded in described recess.
Preferred technical scheme is: also comprise that one for holding the lower substrate storage ware of lower substrate.
Preferred technical scheme is: described columnar arrays structure can be spindle pillar array structure, cylindrical-array structure or polyhedron pillar array structure.
For achieving the above object, the second technical scheme that the present invention adopts is: a kind of large area is prepared the device of nano material ordered fabrication function film fast, comprises upper conveyor belt, lower conveying cylinder group, substrate on several, several lower substrate, heater and nano material suspension injection ports; Described upper conveyor belt and lower conveying cylinder group interval and be arranged in parallel, described upper substrate is fixed on described upper conveyor belt, described upper substrate has the columnar arrays structure of regular arrangement towards the surface of the side of described lower conveying cylinder group, described lower substrate is placed in described lower conveying cylinder group, described lower substrate and upper substrate are corresponding to be arranged, and the head roll of described upper conveyor belt is identical with the linear velocity of the cylinder of lower conveying cylinder group; Directly over one side of described lower conveying cylinder group, be provided with in order to nano material suspension is expelled to described lower suprabasil nano material suspension injection port, the below of described lower conveying cylinder group is provided with the heater in order to lower suprabasil nano material suspension is heated.
Because technique scheme is used, the present invention compared with prior art has following advantages and effect:
The present invention, in the time of preparation nano material ordered fabrication function film, has simple and fast, and controllability is strong, the advantage that preparation cost is low, and be convenient to large-scale production.Function film (optical element, electricity component etc.) prepared by the present invention can be realized the accurately controlled of position, has good using value aspect microelectronic circuit, optical element, magnetic device.
Brief description of the drawings
Accompanying drawing 1 is embodiment one schematic diagram that large area is prepared the device of nano material ordered fabrication function film fast.
Accompanying drawing 2 is upper substrate, lower substrate corresponding relation schematic diagram.
Accompanying drawing 3 is lower conveyer belt schematic diagram.
Accompanying drawing 4 is lower substrate storage ware schematic diagram
Accompanying drawing 5 is embodiment two schematic diagrames that large area is prepared the device of nano material ordered fabrication function film fast.
Accompanying drawing 6 is lower substrate finished product schematic diagram.
In above accompanying drawing, in above accompanying drawing, 1, upper conveyor belt; 2, lower conveyer belt; 3, upper substrate; 4, lower substrate; 5, heater; 6, nano material suspension injection port; 7, columnar arrays structure; 8, recess; 9, lower substrate storage ware; 10, cylinder.
Detailed description of the invention
Below in conjunction with drawings and Examples, the invention will be further described:
Notice, appended graphic the illustrated structure of this description, ratio, size etc., all contents in order to coordinate description to disclose only, understand and read for person skilled in the art scholar, not in order to limit the enforceable qualifications of the present invention, therefore the not technical essential meaning of tool, the adjustment of the modification of any structure, the change of proportionate relationship or size, not affecting under effect that the present invention can produce and the object that can reach, all should still drop on disclosed technology contents and obtain in the scope that can contain.Simultaneously, in this description, quote as " on ", the term of D score, " left side ", " right side ", " centre " and " " etc., also only for ease of understanding of narrating, but not in order to limit the enforceable scope of the present invention, the change of its relativeness or adjustment, changing under technology contents, when being also considered as the enforceable category of the present invention without essence.
Embodiment mono-: a kind of large area is prepared the device of nano material ordered fabrication function film fast
Shown in accompanying drawing 1～accompanying drawing 4, large area is prepared a device for nano material ordered fabrication function film fast, comprises the substrate of undertaking the printing of of upper conveyor belt 1, lower conveyer belt 2, substrate 3 on several, several lower substrate 4(targets), heater 5 and nano material suspension injection port 6; Described upper conveyor belt 1 and lower conveyer belt 2 intervals and be arranged in parallel, described upper substrate 3 is fixed on described upper conveyor belt 1, described upper substrate 3 has the columnar arrays structure 7 of regular arrangement towards the surface of the side of described lower conveyer belt 2, described lower substrate 4 is fixed on described lower conveyer belt 2, described lower substrate 4 and the corresponding setting of upper substrate 3, described upper conveyor belt 1 is identical with the linear velocity of lower conveyer belt 2; Directly over one side of described lower conveyer belt 2, be provided with in order to nano material suspension is expelled to the nano material suspension injection port 6 in described lower substrate 4, the below of described lower conveyer belt 2 is provided with the heater 5 in order to the nano material suspension in lower substrate 4 is heated.Described upper substrate 3 is flexible substrates, and its material is butadiene-styrene rubber, in other specific embodiment, can use polysiloxanes if dimethyl silicone polymer, elastomeric material are as butadiene-styrene rubber, neoprene.The material of described lower substrate 4 is silicon chip, can use in other embodiments sheet glass, quartz plate, iron plate, copper sheet, dimethyl silicone polymer film, pet film, polystyrene film, polyurethane film, Kapton, aluminium flake, alumina wafer.
Place lower substrate 4 and lower substrate 4 is taken out for convenient, in a preferred embodiment, the surface of described lower conveyer belt 2 is provided with recess 8, and described lower substrate 4 is embedded in described recess 8.
In order to protect lower substrate 4, also arrange one for holding the lower substrate storage ware 9 of lower substrate 4.Can be positioned over recess 8 together with lower substrate 4 for lower substrate storage ware 9
Described columnar arrays structure 7 is spindle pillar array structure, can select cylindrical-array structure or polyhedron pillar array structure in other specifically has a try mode.
Using method: will be about the Nano silver grain of 50nm by particle diameter, the mass content that lauryl sodium sulfate and water are prepared the silver nano-grain obtaining is 0.5%, the mass content of lauryl sodium sulfate is 0.05%, surplus is the nano material suspension that contains Nano silver grain of water, after preparing, pack in a liquid storage container, then be expelled in lower substrate 4 by nano material suspension injection port 6, lower conveyer belt 2 drives lower substrate 4 to move, upper conveyor belt 1 drives upper substrate 3 to move simultaneously, can accurately dock in order to make lower substrate 4 and upper substrate 3, need to keep lower conveyer belt 2 identical with the translational speed of conveyer belt 1, then go up substrate 3 and lower substrate contact, both accompany nano material suspension by paper part, form sandwich structure, heater 5 heats sandwich structure, the temperature of heater is 60 DEG C.The object of heating is the solvent evaporates that makes nano material suspension, then obtains the Nano silver grain function film device of cyclic array on the surface of lower substrate 4, participates in shown in accompanying drawing 6.
Embodiment bis-: a kind of large area is prepared the device of nano material ordered fabrication function film fast
Large area is prepared a device for nano material ordered fabrication function film fast, comprises upper conveyor belt 1, lower conveying cylinder group, substrate 3 on several, several lower substrate 4, heater 5 and nano material suspension injection ports 6; Described upper conveyor belt 1 and lower conveying cylinder group interval and be arranged in parallel, described upper substrate 3 is fixed on described upper conveyor belt 1, described upper substrate has the columnar arrays structure of regular arrangement towards the surface of the side of described lower conveying cylinder group, described lower substrate is placed in described lower conveying cylinder group, described lower substrate and upper substrate are corresponding to be arranged, and the linear velocity of the cylinder 10 of the head roll of described upper conveyor belt 1 and lower conveying cylinder group is identical; Directly over one side of described lower conveying cylinder group, be provided with in order to nano material suspension is expelled to described lower suprabasil nano material suspension injection port, the below of described lower conveying cylinder group is provided with the heater in order to lower suprabasil nano material suspension is heated.
Above-described embodiment is only explanation technical conceive of the present invention and feature, and its object is to allow person skilled in the art can understand content of the present invention and implement according to this, can not limit the scope of the invention with this.All equivalences that Spirit Essence is done according to the present invention change or modify, within all should being encompassed in protection scope of the present invention.
Claims (7)
1. large area is prepared a device for nano material ordered fabrication function film fast, it is characterized in that: comprise upper conveyor belt, lower conveyer belt, substrate on several, several lower substrate, heater and nano material suspension injection ports; Described upper conveyor belt and lower conveyer belt interval and be arranged in parallel, described upper substrate is fixed on described upper conveyor belt, described upper substrate has the columnar arrays structure of regular arrangement towards the surface of the side of described lower conveyer belt, described lower substrate is fixed on described lower conveyer belt, described lower substrate and upper substrate are corresponding to be arranged, and described upper conveyor belt is identical with the linear velocity of lower conveyer belt; Directly over one side of described lower conveyer belt, be provided with in order to nano material suspension is expelled to described lower suprabasil nano material suspension injection port, the below of described lower conveyer belt is provided with the heater in order to lower suprabasil nano material suspension is heated.
2. large area according to claim 1 is prepared the device of nano material ordered fabrication function film fast, it is characterized in that: described upper substrate is flexible substrates, and its material is selected from dimethyl silicone polymer, butadiene-styrene rubber, neoprene.
3. large area according to claim 1 is prepared the device of nano material ordered fabrication function film fast, it is characterized in that: the material of described lower substrate is selected from silicon chip, sheet glass, quartz plate, iron plate, copper sheet, dimethyl silicone polymer film, pet film, polystyrene film, polyurethane film, Kapton, aluminium flake, alumina wafer.
4. large area according to claim 1 is prepared the device of nano material ordered fabrication function film fast, it is characterized in that: the surface of described lower conveyer belt is provided with recess, and described lower substrate is embedded in described recess.
5. large area according to claim 1 is prepared the device of nano material ordered fabrication function film fast, it is characterized in that: also comprise that one for holding the lower substrate storage ware of lower substrate.
6. large area according to claim 1 is prepared the device of nano material ordered fabrication function film fast, it is characterized in that: described columnar arrays structure can be spindle pillar array structure, cylindrical-array structure or polyhedron pillar array structure.
7. large area is prepared a device for nano material ordered fabrication function film fast, it is characterized in that: comprise upper conveyor belt, lower conveying cylinder group, substrate on several, several lower substrate, heater and nano material suspension injection ports; Described upper conveyor belt and lower conveying cylinder group interval and be arranged in parallel, described upper substrate is fixed on described upper conveyor belt, described upper substrate has the columnar arrays structure of regular arrangement towards the surface of the side of described lower conveying cylinder group, described lower substrate is placed in described lower conveying cylinder group, described lower substrate and upper substrate are corresponding to be arranged, and the head roll of described upper conveyor belt is identical with the linear velocity of the cylinder of lower conveying cylinder group; Directly over one side of described lower conveying cylinder group, be provided with in order to nano material suspension is expelled to described lower suprabasil nano material suspension injection port, the below of described lower conveying cylinder group is provided with the heater in order to lower suprabasil nano material suspension is heated.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201410452105.0A CN104176702A (en) | 2014-09-05 | 2014-09-05 | Device for large-area quick manufacture of nanometer material orderly-assembled functional film |
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| CN201410452105.0A CN104176702A (en) | 2014-09-05 | 2014-09-05 | Device for large-area quick manufacture of nanometer material orderly-assembled functional film |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109847684A (en) * | 2019-04-23 | 2019-06-07 | 福建龙新三维阵列科技有限公司 | The equipment for preparing the micro-nano array of metal oxide |
Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1052640A (en) * | 1991-02-04 | 1991-07-03 | 王广武 | Groove belt type conveyer apron |
| JP2002313891A (en) * | 2001-04-16 | 2002-10-25 | Matsushita Electric Ind Co Ltd | Tray for substrate transport and manufacturing method therefor |
| CN101088143A (en) * | 2004-10-22 | 2007-12-12 | 麻省理工学院 | Method and system for transferring a patterned material |
| CN101256943A (en) * | 2007-03-02 | 2008-09-03 | 株式会社Orc制作所 | Conveying device |
| CN101306756A (en) * | 2007-05-14 | 2008-11-19 | 细美事有限公司 | Substrate transporting apparatus and substrate guide unit for use therein |
| US20090183643A1 (en) * | 2008-01-18 | 2009-07-23 | Sen-Yeu Yang | Structure of roller imprinting apparatus |
| CN201966187U (en) * | 2010-12-09 | 2011-09-07 | 均豪精密工业股份有限公司 | Substrate overturning and conveying device |
| US20120274004A1 (en) * | 2010-01-12 | 2012-11-01 | Rolith, Inc. | Nanopatterning method and apparatus |
| CN102870193A (en) * | 2010-04-02 | 2013-01-09 | 罗地亚管理公司 | Selective nanoparticle assembly systems and methods |
| CN103235483A (en) * | 2013-05-07 | 2013-08-07 | 青岛博纳光电装备有限公司 | Large-area nanometer imaging device and large-area nanometer imaging method |
| CN103253629A (en) * | 2013-05-13 | 2013-08-21 | 中国科学院化学研究所 | Nano particle precise order assembling method |
-
2014
- 2014-09-05 CN CN201410452105.0A patent/CN104176702A/en active Pending
Patent Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1052640A (en) * | 1991-02-04 | 1991-07-03 | 王广武 | Groove belt type conveyer apron |
| JP2002313891A (en) * | 2001-04-16 | 2002-10-25 | Matsushita Electric Ind Co Ltd | Tray for substrate transport and manufacturing method therefor |
| CN101088143A (en) * | 2004-10-22 | 2007-12-12 | 麻省理工学院 | Method and system for transferring a patterned material |
| CN101256943A (en) * | 2007-03-02 | 2008-09-03 | 株式会社Orc制作所 | Conveying device |
| CN101306756A (en) * | 2007-05-14 | 2008-11-19 | 细美事有限公司 | Substrate transporting apparatus and substrate guide unit for use therein |
| US20090183643A1 (en) * | 2008-01-18 | 2009-07-23 | Sen-Yeu Yang | Structure of roller imprinting apparatus |
| US20120274004A1 (en) * | 2010-01-12 | 2012-11-01 | Rolith, Inc. | Nanopatterning method and apparatus |
| CN102870193A (en) * | 2010-04-02 | 2013-01-09 | 罗地亚管理公司 | Selective nanoparticle assembly systems and methods |
| CN201966187U (en) * | 2010-12-09 | 2011-09-07 | 均豪精密工业股份有限公司 | Substrate overturning and conveying device |
| CN103235483A (en) * | 2013-05-07 | 2013-08-07 | 青岛博纳光电装备有限公司 | Large-area nanometer imaging device and large-area nanometer imaging method |
| CN103253629A (en) * | 2013-05-13 | 2013-08-21 | 中国科学院化学研究所 | Nano particle precise order assembling method |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109847684A (en) * | 2019-04-23 | 2019-06-07 | 福建龙新三维阵列科技有限公司 | The equipment for preparing the micro-nano array of metal oxide |
| CN109847684B (en) * | 2019-04-23 | 2021-03-05 | 福建龙新三维阵列科技有限公司 | Equipment for preparing metal oxide micro-nano array |
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Application publication date: 20141203 |