CN104176491A - Transmitting device and plasma machining equipment - Google Patents
Transmitting device and plasma machining equipment Download PDFInfo
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- CN104176491A CN104176491A CN201310196971.3A CN201310196971A CN104176491A CN 104176491 A CN104176491 A CN 104176491A CN 201310196971 A CN201310196971 A CN 201310196971A CN 104176491 A CN104176491 A CN 104176491A
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Abstract
The invention provides a transmitting device and plasma machining equipment. The transmitting device is used for transmitting a machined workpiece and comprises a linear driving unit, a fixing part, a grasping part and an indirect transmission mechanism, wherein the linear driving unit is used for driving the fixing part on the linear driving unit to make linear reciprocating motion; the grasping part is positioned on the fixing part and is relatively slidably connected with the fixing part; the grasping part is used for grasping the machined workpiece; the indirect transmission mechanism is arranged on the fixing part and is used for synchronously driving the grasping part to slide relative to the fixing part when the fixing part is driven to make linear reciprocating motion by the linear driving unit, and the sliding direction of the grasping part relative to the fixing part is the same as the moving direction of the fixing part. The transmitting device provided by the invention has the advantages of simple structure, easiness in control, lower manufacturing cost and larger transmitting distance.
Description
Technical field
The present invention relates to microelectronic processing technique field, particularly, relate to a kind of transmitting device and plasma processing device.
Background technology
In the manufacturing process such as quartz conductor, LED chip, LCDs, the workpieces to be machined such as wafer or substrate progressively need to be sent to from air environment in vacuum reaction chamber and carry out PROCESS FOR TREATMENT, from reaction chamber, send out again after completing technique.The a set of transmission system being formed by transmitting device, vacuum apparatus and check implement etc. of this process need, wherein most important is exactly transmitting device, this is a kind ofly can in atmosphere or vacuum environment, carry the automatic mechanical arm of workpiece to be machined, is therefore also often called as transmission manipulator or robot.
When transmission workpiece to be machined, conventionally wish that the transmitting device using can meet following requirement: 1) transmission distance wants large, but volume is little; 2) repeatability precision is high; 3) the higher rigidity of structure; 4) cost performance is high, and cost is lower.And existing transmitting device is difficult to meet completely above-mentioned all requirements.
(the Selective Compliance Assembly Robot Arm of a kind of common SCARA mechanical arm as shown in Figure 1, select the compliance arm that puts together machines), it has simulated people's arm structure, adopt two sectional type joint arm to realize transmission action, particularly, mechanical arm comprises steering driving mechanism 101, two joint joint arm 102 and holding parts 103.Wherein, in the junction of two joint joint arms 102, be provided with the linkage part (not shown) of Timing Belt, steel band etc., and, the wherein free end of a joint in two joint joint arms 102 is connected with the axle drive shaft of steering driving mechanism 101, and wherein the free end of another joint is rotatably connected with holding part 103.Steering driving mechanism 101 comprises two rotating machines, in order to control independently respectively two joint joint arms 102, rotate corresponding angle, and in rotation process, two joint joint arms 102 are realized synchronous interaction by linkage part, thereby drive holding part 103 moving linearlies.Easily understand, two joint joint arms 102 rotational angle has separately determined direction and the displacement of holding part 103 moving linearlies.
In actual applications, when above-mentioned mechanical arm is during in contraction state, its entire length is only the length of a joint joint arm, and when above-mentioned mechanical arm is during in deployed condition, its entire length maximum can reach the length sum of two joint joint arms, therefore this mechanical arm has compact conformation, and transmission distance is large, flexible movements and the advantage such as be widely used.Yet inevitably there is in actual applications following problem in this mechanical arm:
One, two joint joint arms 102 of above-mentioned mechanical arm are cantilever design, the rigidity of this structure is poor, and in motion process, can cause holding part 103 to produce slight swing, the precision that impact transmits;
They are two years old, because two joint joint arms 102 rotational angle has separately determined direction and the displacement of holding part 103 moving linearlies, thereby need synthetic calculating two rotatablely moving of joint arm 102 of joint could obtain the straight-line motion of holding part 103, this not only makes calculating process complicated, and because needs drive by two rotating machines, the complex structure that causes mechanical arm, and manufacturing cost is higher.
Fig. 2 is the structural representation of another kind of common mechanical arm in prior art, refers to Fig. 2, and it comprises that drive source 201(comprises rotating machine and retarder), leading screw 202, holding part 203 and steer-drive 204.Wherein, drive source 201 is connected with leading screw 202, in order to drive leading screw 202 to rotate; On leading screw 202, be provided with slide unit (not shown) with matching, when leading screw 202 rotates, this slide unit can be with the positive and negative of leading screw 202 then be axially done straight reciprocating motion along leading screw 202; Holding part 203 is installed on this slide unit, and when slide unit is done straight reciprocating motion, it drives holding part 203 to do straight reciprocating motion; Steer-drive 204 is installed on the below of leading screw 202, in order to drive whole mechanical arm to rotate, thereby can change the straight-line direction of holding part 203.
Although above-mentioned mechanical arm simple in structure, be easy to control and cost lower, but, owing to being subject to the restriction of mechanical arm entire length, holding part 203 movably range is the length of leading screw 202 on it is axial, cause the transmission distance of mechanical arm shorter, thereby possibly cannot meet the occasion that transmission distance is had relatively high expectations.
Summary of the invention
The present invention is intended at least solve one of technical matters existing in prior art, has proposed a kind of transmitting device and plasma processing device, its not only simple in structure, be easy to control and manufacturing cost lower, and transmission distance is larger.
A kind of transmitting device provided by the invention, be used for transmitting workpiece to be machined, described transmitting device comprises linear drives unit, fixed parts, holding part and indirect drive mechanism, and wherein, described linear drives unit is for driving the fixed parts being located thereon to do straight reciprocating motion; Described holding part, is positioned on described fixed parts, and can be connected with described fixed parts relative sliding; Described holding part is used for capturing workpiece to be machined; Described indirect drive mechanism is arranged on described fixed parts, it is for when described in described linear drives unit drives, fixed parts is done straight reciprocating motion, the described holding part of synchronous drive slides with respect to described fixed parts, and the direction that described holding part slides with respect to described fixed parts is identical with the direction that described fixed parts moves.
Wherein, described indirect drive mechanism comprises: determine connecting element, moving connecting element, two power wheels and flexible element, wherein: described two power wheels are fixed on described fixed parts, and arrange along the linear movement direction interval of described fixed parts; Described flexible element is around described two loop configuration that power wheel winds with one circuit; Describedly determine connecting element and be fixedly connected with described flexible element with described linear drives unit respectively; Described moving connecting element is fixedly connected with described flexible element with described holding part respectively; Wherein, describedly determine connecting element and moving connecting element lays respectively on two described flexible elements between described two power wheels; The distance that described holding part slides with respect to described fixed parts is identical with the distance that described fixed parts moves; And, describedly determine connecting element and the position of moving connecting element on described flexible element is set to: in the process of the range of fixed parts accomplish linear motion described in described linear drives unit drives, described determine connecting element and moving connecting element all not can with described two power wheels in any one bump.
Wherein, on described fixed parts, be provided with line slideway, and on described holding part, be provided with the first sliding part with described line slideway bearing fit.
Wherein, described fixed parts is a horizontal plate, described holding part and described horizontal plate sliding block joint; Described two power wheels are all fixed on described horizontal plate, and the S. A. of described two power wheels is perpendicular to described horizontal plate place plane; Or described fixed parts is the compoboard being formed by horizontal plate and vertical plate, described holding part and described horizontal plate sliding block joint; Described two power wheels are fixed on described vertical plate, and the S. A. of the two is perpendicular to described vertical plate place plane.
Wherein, described flexible element is driving band, and described two power wheels are belt wheel; Or described flexible element is messenger chain, described two power wheels are sprocket wheel; Or described flexible element is transmission rope, described two power wheels are rope sheave.
Wherein, described linear drives unit comprises rotating machine, leading screw and the second sliding part, and wherein, described leading screw is fixedly connected with the axle drive shaft of described rotating machine; Described the second sliding part is fixedly connected with described fixed parts, and matches with described leading screw; Described rotating machine is used for driving described leading screw cw or left-hand revolution, so that described leading screw drives described sliding part and fixed parts to do straight reciprocating motion.
Wherein, described transmitting device also comprises and turns to driver element, described in turn to driver element for drive described linear drives unit, fixed parts, holding part and indirect drive mechanism to rotate simultaneously.
Wherein, described transmitting device also comprises adapter plate, described linear drives unit, fixed parts, holding part and indirect drive mechanism all by described adapter plate with described in turn to driver element to be connected.
Wherein, the described driver element that turns to, comprise rotary driving source and transmission device, described rotary driving source is for driving described linear drives finite element rotation by described transmission device, described transmission device, comprise: support and transmission component, wherein: described support is positioned at the bottom of described adapter plate, and be rotatably connected with described adapter plate; Described transmission component adopts gear transmission, with the mode of transmission, chain transmission, rope drive or Worm Wheel System, the rotary power from described rotary driving source is passed to described adapter plate.
Wherein, described transmitting device also comprises lifting unit, described in described lifting unit is used for driving, turns to driver element, linear drives unit, fixed parts, holding part, indirect drive mechanism rise simultaneously or decline.
The present invention also provides a kind of plasma processing device, and it comprises transmitting device, and in order to transmit workpiece to be machined, wherein, described transmitting device has adopted the transmitting device described in above-mentioned arbitrary scheme.
The present invention has following beneficial effect:
Transmitting device provided by the invention by by indirect drive mechanism when linear drives unit drives fixed parts is done straight reciprocating motion, synchronous drive holding part with respect to fixed parts at the identical square upward sliding of the straight-line motion with fixed parts, , when fixed parts drives holding part to move, holding part under the drive of flexible element with respect to fixed parts synchronous slide, and the direction that the direction that holding part slides with respect to fixed parts moves with fixed parts is identical, this total transmission distance that makes holding part displacement sum with respect to fixed parts that is fixed parts with respect to the displacement of linear drives unit and holding part, thereby can increase the transmission distance of transmitting device.And because transmitting device provided by the invention is by flexible transmission the in rectilinear direction, this makes the simple in structure of transmitting device, be easy to control, and manufacturing cost is lower.
Plasma processing device provided by the invention, it,, by adopting transmitting device provided by the invention, not only can increase the transmission distance of transmission workpiece to be machined, and structure that can simplified apparatus, reduces the manufacturing cost of equipment.
Accompanying drawing explanation
Fig. 1 is the structural representation of a kind of common mechanical arm of the prior art;
Fig. 2 is the structural representation of another kind of common mechanical arm in prior art;
The block diagram of the transmitting device that Fig. 3 provides for first embodiment of the invention;
The cutaway view of the transmitting device that Fig. 4 provides for first embodiment of the invention;
The flexible element of the transmitting device that Fig. 5 provides for first embodiment of the invention, moving connecting element and determine the relative motion schematic diagram of connecting element;
The movement decomposition schematic diagram that the transmitting device that Fig. 6 provides for first embodiment of the invention transmits;
The block diagram of the transmitting device that Fig. 7 provides for second embodiment of the invention;
The block diagram of the transmitting device that Fig. 8 provides for third embodiment of the invention; And
The cutaway view of the transmitting device that Fig. 9 provides for third embodiment of the invention.
The specific embodiment
For making those skilled in the art understand better technical scheme of the present invention, below in conjunction with accompanying drawing, transmitting device provided by the invention and plasma processing device are described in detail.
The block diagram of the transmitting device that Fig. 3 provides for first embodiment of the invention.The cutaway view of the transmitting device that Fig. 4 provides for first embodiment of the invention.See also Fig. 3 and Fig. 4, transmitting device comprises linear drives unit, fixed parts 2, holding part 3 and indirect drive mechanism 4.Wherein, linear drives unit is used for driving fixed parts 2 to do straight reciprocating motion, and in the present embodiment, linear drives unit comprises housing 301, rotating machine 309, leading screw 11 and the second sliding part 12.Wherein, leading screw 11 is fixedly connected with the axle drive shaft of rotating machine 309, or is fixedly connected with the axle drive shaft of rotating machine 309 by coupler; The second sliding part 12 matches with leading screw 11, and is fixedly connected with fixed parts 2, and under the driving of rotating machine 309, leading screw 11 drives the second sliding parts 12 and the fixed parts 2 being fixedly connected with it along leading screw 11, axially to do straight reciprocating motion together.
Easily understand, can make by the forward or reverse of rotating machine 309 leading screw 11 cws or conter clockwise rotation, thereby realize the straight reciprocating motion of the second sliding part 12.Preferably, linear drives unit can also comprise retarder 308, it is serially connected between the axle drive shaft and leading screw 11 of rotating machine 309, in order to reduce the rotating speed of rotating machine 309, and passed to leading screw 11, thereby can make leading screw 11 obtain a lower rotating speed, so that the second sliding part 12 and fixed parts 2 obtain desirable point-to-point speed.
Fixed parts 2 can be connected with holding part 3 relative sliding, and the direction of slip of holding part 3 is identical with the linear movement direction of fixed parts 2.In the present embodiment, fixed parts 2 with the concrete mode that holding part 3 can be connected relative sliding is: fixed parts 2 is a horizontal plate, on the upper surface of this horizontal plate, be provided with line slideway 304, and accordingly, on holding part 3, be provided with the first sliding part 31 with line slideway 304 bearing fits, thereby holding part 3 can slide along line slideway 304 by this first sliding part 31.Easily understand, line slideway 304 should with being axially parallel to each other of leading screw 11 so that the direction of slip of holding part 3 can be parallel with the linear movement direction of fixed parts 2.Preferably, a stop block 302 can be set at the end of line slideway 304, in order to prevent that the first sliding part 31 from skidding off from line slideway 304, causes holding part 3 to come off.
Indirect drive mechanism 4 is arranged on fixed parts 2, it is for when linear drives unit drives fixed parts 2 is done straight reciprocating motion, the synchronous holding part 3 that drives slides with respect to fixed parts 2, and the direction that holding part 3 is slided with respect to fixed parts 2 is identical with the direction that fixed parts 2 moves.Below the concrete structure of indirect drive mechanism 4 is described in detail, particularly, indirect drive mechanism 4 comprises two power wheels 311,318 and flexible element 316, in the present embodiment, it is respectively belt wheel and driving band, wherein, the S. A. of two power wheels 311,318 is vertically fixed on the upper surface of above-mentioned fixed parts 2, and the two linear movement direction interval along fixed parts 2 arranges; The loop configuration of flexible element 316 for winding with one circuit around two power wheels 311,318; And, on the housing 301 of linear drives unit, be provided with and determine connecting element 317, at the first sliding part 31(or holding part 3) on be provided with moving connecting element 306, determining connecting element 317 is all fixedly connected with flexible element 316 with moving connecting element 306, and determining the side (that is, the right side of flexible element 316 in Fig. 3) that connecting element 317 is positioned at flexible element 316 locates; Moving connecting element 306 is positioned at flexible element 316 opposite sides (that is, the left side of flexible element 316 in Fig. 3).
Below in conjunction with Fig. 5 and Fig. 6, the indirect drive mechanism 4 of employing said structure is realized when linear drives unit drives fixed parts 2 is done straight reciprocating motion, the concrete principle that synchronously drives holding part 3 to slide with respect to fixed parts 2 is described in detail.Particularly, under the driving of linear drives unit, horizontal plate can drive holding part fixed thereon 3 and indirect drive mechanism 4 to do together straight reciprocating motion, and can produce relative motion between the housing 301 of horizontal plate and linear drives unit, this makes two ends be separately fixed at determining connecting element 317 and can drop flexible element 316 around two power wheels 311 on flexible element 316 and housing 301, 318 rotate, , determining connecting element 317 can be with respect to two power wheel 311, 318 lines of centres along the two move, this distance moving is the distance that horizontal plate moves with respect to housing 301, and the opposite direction that the direction that this moves and horizontal plate move with respect to housing 301.Meanwhile, the flexible element 316 being dropped will synchronously drive two ends to be separately fixed at flexible element 316 and the first sliding part 31(or holding part 3) on moving connecting element 306, with respect to two power wheels, 311,318 lines of centres along the two, move, this distance moving is the distance that horizontal plate moves with respect to housing 301, and this direction moving is identical with the direction that horizontal plate moves with respect to housing 301, thereby realized when linear drives unit drives fixed parts is done straight reciprocating motion, synchronously driven holding part 3 to slide with respect to horizontal plate.
When determining connecting element 317 and the position of moving connecting element 306 on flexible element 316 in position as shown in A figure in Fig. 5, the transmission distance △ of holding part 3 is 0, as shown in the A figure in Fig. 6; When determining connecting element 317 and the position of moving connecting element 306 on flexible element 316 in position as shown in B figure in Fig. 5, the transmission distance △ of holding part 3 is L, as shown in the B figure in Fig. 6, the distance that the distance that now horizontal plate moves with respect to housing 301 and holding part 3 move with respect to horizontal plate is 0.5L.When determining connecting element 317 and the position of moving connecting element 306 on flexible element 316 in position as shown in C figure in Fig. 5, the transmission distance △ of holding part 3 is 2L, as shown in the C figure in Fig. 6, the distance that the distance that now horizontal plate moves with respect to housing 301 and holding part 3 move with respect to horizontal plate is L.Hence one can see that, the transmission distance △ of holding part 3,, holding part 3 is with respect to the excursion of the housing 301 displacement sum with respect to horizontal plate that is horizontal plate with respect to the displacement of housing 301 and holding part 3,, for the twice of horizontal plate with respect to the displacement of housing 301, thereby can increase the transmission distance of transmitting device.And because above-mentioned transmitting device is by flexible transmission the in rectilinear direction, this makes the simple in structure of transmitting device, be easy to control, and manufacturing cost is lower.
Easily understand, owing to determining the miles of relative movement that connecting element 317 or moving connecting element 306 line of centres along two power wheels 311,318 moves, equate with the distance that horizontal plate moves with respect to housing 301, therefore, determine connecting element 317 and the position of moving connecting element 306 on flexible element 316 should be set to: in the process of the range of linear drives unit drives horizontal plate accomplish linear motion, determine connecting element 317 and moving connecting element 306 all not can with two power wheels 311,318 in any one bump.Its concrete set-up mode can be, that is: when the transmission distance △ of holding part 3 is 0, at the length L 1(that determines the flexible element 316 between connecting element 317 and power wheel 311 as shown in A figure in Fig. 5) should be more than or equal to the range that horizontal plate slides on leading screw 11, thereby in the process increasing gradually at the transmission distance △ of holding part 3, can guarantee to determine connecting element 317 and can not make horizontal plate and holding part 3 all cannot continue to move because being subject to the obstruction of power wheel 311.Similar with it, when the transmission distance △ of holding part 3 is 0, the length L 2(of the flexible element 316 between moving connecting element 306 and power wheel 318 is as shown in A figure in Fig. 5) also should be more than or equal to the range of horizontal plate on leading screw 11.
It should be noted that, in the present embodiment, two power wheels 311,318 and flexible element 316 are respectively belt wheel and driving band, but the present invention is not limited thereto, in actual applications; Two power wheels 311,318 and flexible element 316 also can be respectively sprocket wheel and messenger chain; Or, can also be respectively rope sheave and transmission rope.
Also it should be noted that, in the present embodiment, linear drives unit drives fixed parts 2 to do straight reciprocating motion by leading screw 11 and rotating machine 309, but the present invention is not limited thereto, in actual applications, the mechanism of straight reciprocating motion can also be done for other driven fixed partss 2 of linear electric motors etc. in linear drives unit.
The block diagram of the transmitting device that Fig. 7 provides for second embodiment of the invention.As shown in Figure 7, the transmitting device that the present embodiment provides is compared with the first embodiment, comprises equally linear drives unit, fixed parts 2, holding part 3 and indirect drive mechanism 4.Because the 26S Proteasome Structure and Function of linear drives unit, fixed parts 2, holding part 3 and indirect drive mechanism 4 has had detailed description in above-mentioned the first embodiment, do not repeat them here.
Only with regard to the difference of the present embodiment and the first embodiment, be described below: particularly, in the present embodiment, fixed parts 2 is the compoboard being formed by horizontal plate 303 and vertical plate 303 ', and indirect drive mechanism 4 is arranged on vertical plate 303 ', its concrete set-up mode is: two power wheels 311,318 are fixed on vertical plate 303 ', and the linear movement direction interval along fixed parts 2 arranges, and its S. A. is perpendicular to vertical plate 303 ' place plane; The driving band of flexible element 316 for winding with one circuit around two power wheels 311,318.Because indirect drive mechanism 4 is arranged on vertical plate 303 ' above, this compares with the first embodiment, can save transmitting device size in the horizontal direction, thereby can reduce the volume of transmitting device.
The block diagram of the transmitting device that Fig. 8 provides for third embodiment of the invention.The cutaway view of the transmitting device that Fig. 9 provides for third embodiment of the invention.See also Fig. 8 and Fig. 9, the transmitting device that the present embodiment provides is compared with above-mentioned first, second embodiment, comprises equally linear drives unit, fixed parts 2, holding part 3 and indirect drive mechanism 4.Because the 26S Proteasome Structure and Function of linear drives unit, fixed parts 2, holding part 3 and indirect drive mechanism 4 has had and described in detail in above-mentioned first, second embodiment, do not repeat them here.
Only the difference of the present embodiment and first, second embodiment is described below, particularly, the transmitting device that the present embodiment provides also comprises and turns to driver element 5, it is for drive linear drives unit, fixed parts 2, holding part 3 and indirect drive mechanism 4 to rotate simultaneously, to change the transmission direction of holding part 3, thereby can make transmitting device realize, planar workpiece to be machined is transmitted.
Below to turning to the structure of driver element 5 to be described in detail.Particularly, turn to driver element 5 to comprise adapter plate 310, rotary driving source 314 and transmission device.Wherein, linear drives unit, fixed parts 2, holding part 3 and indirect drive mechanism 4 are all fixed on adapter plate 310; Rotary driving source 314 is for rotating by transmission device drive installation plate 310 and setting linear drives unit, fixed parts 2, holding part 3 and indirect drive mechanism 4 thereon, and rotary driving source 314 can be rotating machine.Transmission device comprises support 312 and transmission component, wherein, support 312 is positioned at the bottom of adapter plate 310, and be rotatably connected with it, in the present embodiment, the concrete mode that support 312 is rotatably connected with adapter plate 310 is: on adapter plate 310, be provided with a rotating shaft 324, and on support 312, be provided with a through hole accordingly, this through hole is passed in rotating shaft 324, and is rotatably connected with support 312 by the bearing 320 being fixed in through hole.
In the present embodiment, transmission component adopts the transmission of power of rotary driving source 314 being exported with type of drive to adapter plate 310, so that it rotates around rotating shaft 324 with respect to support 312.Employing with the concrete structure of the transmission component of type of drive can be: transmission component comprises small synchronous pulley 323, large synchronous pulley 321 and around the Timing Belt 322 of the two setting.Wherein, the S. A. of small synchronous pulley 323 is connected with the axle drive shaft of rotary driving source 314; The large S. A. of synchronous pulley 321 and the rotating shaft 324 of adapter plate 310 are connected, under the driving of rotary driving source 314, small synchronous pulley 323 drives Timing Belt 322 to rotate, and Timing Belt 322 drives large synchronous pulley 321 rotations, thereby drives adapter plate 310 around rotating shaft 324 rotations.Preferably, in rotating shaft 324, be provided with central through hole, and, inside at adapter plate 310 is provided with passage, one end of this passage is communicated with rotating shaft 324 central through holes, and the other end extends to the outside face of the close rotating machine 309 of adapter plate 310, and the cable of rotating machine 309 is drawn via this passage and central through hole, thereby can avoid when adapter plate 310 rotates around rotating shaft 324, the cable of rotating machine 309 is wound around.
It should be noted that, in the present embodiment, transmission component is the tape handler being comprised of small synchronous pulley 323, Timing Belt 322 and large synchronous pulley 321, but, the present invention is not limited to this, in actual applications, transmission component can also adopt other type of drive such as gear transmission, chain transmission, rope drive or Worm Wheel System that the rotary power of rotary driving source is passed to adapter plate.
Further improvement as the transmitting device that the present embodiment is provided, transmitting device also comprises lifting unit, in order to drive, turn to driver element 5, linear drives unit, fixed parts 2, holding part 3 and indirect drive mechanism 4 rise simultaneously or decline, to change the transmission height of holding part 3, thereby can make transmitting device realize, in three dimensional space, workpiece to be machined is transmitted.Lifting unit can adopt the lifting drive of lifting motor, lift cylinder etc.
In sum, the transmitting device that the embodiment of the present invention provides, its by by indirect drive mechanism 4 when linear drives unit drives fixed parts 2 is done straight reciprocating motion, synchronous drive holding part 3 with respect to fixed parts 2 at the identical square upward sliding of the straight-line motion with fixed parts 2, , when fixed parts 2 drives holding part 3 to move, holding part 3 under the drive of flexible element 316 with respect to fixed parts 2 synchronous slides, and the direction that the direction that holding part 3 slides with respect to fixed parts 2 moves with fixed parts 2 with distance is identical with distance, this total transmission distance that makes holding part 3 displacement sum with respect to fixed parts 2 that is fixed parts 2 with respect to the displacement of linear drives unit and holding part 3, , holding part 3 is with respect to the twice of the displacement of fixed parts 2, thereby can increase the transmission distance of transmitting device.And the transmitting device providing due to the embodiment of the present invention is by flexible transmission the in rectilinear direction, this makes the simple in structure of transmitting device, be easy to control, and manufacturing cost is lower.
The present embodiment also provides a kind of plasma processing device, and it comprises for transmitting the transmitting device of workpiece to be machined, the transmitting device that this transmitting device has adopted above-mentioned each embodiment to provide.
The plasma processing device that the present embodiment provides, it not only can increase the transmission distance of transmission workpiece to be machined by the above-mentioned transmitting device that adopts the present embodiment to provide, and structure that can simplified apparatus, reduces the manufacturing cost of equipment.
Be understandable that, above embodiment is only used to principle of the present invention is described and the illustrative embodiments that adopts, yet the present invention is not limited thereto.For those skilled in the art, without departing from the spirit and substance in the present invention, can make various modification and improvement, these modification and improvement are also considered as protection scope of the present invention.
Claims (11)
1. a transmitting device, for transmitting workpiece to be machined, is characterized in that, described transmitting device comprises linear drives unit, fixed parts, holding part and indirect drive mechanism, wherein,
Described linear drives unit is for driving the fixed parts being located thereon to do straight reciprocating motion;
Described holding part, is positioned on described fixed parts, and can be connected with described fixed parts relative sliding; Described holding part is used for capturing workpiece to be machined;
Described indirect drive mechanism is arranged on described fixed parts, it is for when described in described linear drives unit drives, fixed parts is done straight reciprocating motion, the described holding part of synchronous drive slides with respect to described fixed parts, and the direction that described holding part slides with respect to described fixed parts is identical with the direction that described fixed parts moves.
2. transmitting device according to claim 1, is characterized in that, described indirect drive mechanism comprises: determine connecting element, moving connecting element, two power wheels and flexible element, wherein:
Described two power wheels are fixed on described fixed parts, and arrange along the linear movement direction interval of described fixed parts;
Described flexible element is around described two loop configuration that power wheel winds with one circuit;
Describedly determine connecting element and be fixedly connected with described flexible element with described linear drives unit respectively;
Described moving connecting element is fixedly connected with described flexible element with described holding part respectively;
Wherein, describedly determine connecting element and moving connecting element lays respectively on two described flexible elements between described two power wheels; The distance that described holding part slides with respect to described fixed parts is identical with the distance that described fixed parts moves;
And, describedly determine connecting element and the position of moving connecting element on described flexible element is set to: in the process of the range of fixed parts accomplish linear motion described in described linear drives unit drives, described determine connecting element and moving connecting element all not can with described two power wheels in any one bump.
3. transmitting device according to claim 1, is characterized in that, on described fixed parts, is provided with line slideway, and on described holding part, is provided with the first sliding part with described line slideway bearing fit.
4. transmitting device according to claim 2, is characterized in that, described fixed parts is a horizontal plate, described holding part and described horizontal plate sliding block joint; Described two power wheels are all fixed on described horizontal plate, and the S. A. of described two power wheels is perpendicular to described horizontal plate place plane; Or,
Described fixed parts is the compoboard being formed by horizontal plate and vertical plate, described holding part and described horizontal plate sliding block joint; Described two power wheels are fixed on described vertical plate, and the S. A. of the two is perpendicular to described vertical plate place plane.
5. transmitting device according to claim 2, is characterized in that, described flexible element is driving band, and described two power wheels are belt wheel; Or,
Described flexible element is messenger chain, and described two power wheels are sprocket wheel; Or,
Described flexible element is transmission rope, and described two power wheels are rope sheave.
6. transmitting device according to claim 1 and 2, is characterized in that, described linear drives unit comprises rotating machine, leading screw and the second sliding part, wherein,
Described leading screw is fixedly connected with the axle drive shaft of described rotating machine;
Described the second sliding part is fixedly connected with described fixed parts, and matches with described leading screw;
Described rotating machine is used for driving described leading screw cw or left-hand revolution, so that described leading screw drives described sliding part and fixed parts to do straight reciprocating motion.
7. transmitting device according to claim 1, is characterized in that, described transmitting device also comprises and turn to driver element, described in turn to driver element for drive described linear drives unit, fixed parts, holding part and indirect drive mechanism to rotate simultaneously.
8. transmitting device according to claim 7, is characterized in that, described transmitting device also comprises adapter plate, described linear drives unit, fixed parts, holding part and indirect drive mechanism all by described adapter plate with described in turn to driver element to be connected.
9. transmitting device according to claim 8, it is characterized in that, the described driver element that turns to, comprise rotary driving source and transmission device, described rotary driving source is for driving described linear drives finite element rotation by described transmission device, described transmission device, comprising: support and transmission component, wherein:
Described support is positioned at the bottom of described adapter plate, and is rotatably connected with described adapter plate;
Described transmission component adopts gear transmission, with the mode of transmission, chain transmission, rope drive or Worm Wheel System, the rotary power from described rotary driving source is passed to described adapter plate.
10. transmitting device according to claim 7, it is characterized in that, described transmitting device also comprises lifting unit, described in described lifting unit is used for driving, turns to driver element, linear drives unit, fixed parts, holding part, indirect drive mechanism rise simultaneously or decline.
11. 1 kinds of plasma processing devices, comprise transmitting device, in order to transmit workpiece to be machined, it is characterized in that, described transmitting device has adopted the transmitting device described in any one in claim 1-10.
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| CN201310196971.3A CN104176491A (en) | 2013-05-23 | 2013-05-23 | Transmitting device and plasma machining equipment |
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| CN201310196971.3A CN104176491A (en) | 2013-05-23 | 2013-05-23 | Transmitting device and plasma machining equipment |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106783703A (en) * | 2015-11-19 | 2017-05-31 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Manipulator and transmission chamber |
| CN106926246A (en) * | 2015-12-31 | 2017-07-07 | 中微半导体设备(上海)有限公司 | A kind of mechanical arm used in vacuum environment |
| CN108486532A (en) * | 2018-03-12 | 2018-09-04 | 昆山国显光电有限公司 | A kind of carrying device of evaporation source |
| CN110137124A (en) * | 2019-06-21 | 2019-08-16 | 北京北方华创微电子装备有限公司 | Manipulator locating device and semiconductor processing equipment |
| CN110349879A (en) * | 2018-04-03 | 2019-10-18 | 北京北方华创微电子装备有限公司 | Manipulator transmission mechanism, transmission cavity and semiconductor processing equipment |
| CN116021551A (en) * | 2023-03-31 | 2023-04-28 | 成都思越智能装备股份有限公司 | Connecting rod type mechanical arm |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN106783703A (en) * | 2015-11-19 | 2017-05-31 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Manipulator and transmission chamber |
| CN106783703B (en) * | 2015-11-19 | 2019-10-11 | 北京北方华创微电子装备有限公司 | Manipulator and transmission chamber |
| CN106926246A (en) * | 2015-12-31 | 2017-07-07 | 中微半导体设备(上海)有限公司 | A kind of mechanical arm used in vacuum environment |
| CN106926246B (en) * | 2015-12-31 | 2019-05-28 | 中微半导体设备(上海)股份有限公司 | Mechanical arm used in a kind of vacuum environment |
| CN108486532A (en) * | 2018-03-12 | 2018-09-04 | 昆山国显光电有限公司 | A kind of carrying device of evaporation source |
| CN110349879A (en) * | 2018-04-03 | 2019-10-18 | 北京北方华创微电子装备有限公司 | Manipulator transmission mechanism, transmission cavity and semiconductor processing equipment |
| CN110349879B (en) * | 2018-04-03 | 2021-12-17 | 北京北方华创微电子装备有限公司 | Manipulator transmission mechanism, transmission cavity and semiconductor processing equipment |
| CN110137124A (en) * | 2019-06-21 | 2019-08-16 | 北京北方华创微电子装备有限公司 | Manipulator locating device and semiconductor processing equipment |
| CN116021551A (en) * | 2023-03-31 | 2023-04-28 | 成都思越智能装备股份有限公司 | Connecting rod type mechanical arm |
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Application publication date: 20141203 |