CN104130716B - A kind of polishing fluid for optical glass and preparation method thereof - Google Patents
A kind of polishing fluid for optical glass and preparation method thereof Download PDFInfo
- Publication number
- CN104130716B CN104130716B CN201410308846.1A CN201410308846A CN104130716B CN 104130716 B CN104130716 B CN 104130716B CN 201410308846 A CN201410308846 A CN 201410308846A CN 104130716 B CN104130716 B CN 104130716B
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- auxiliary agent
- polishing fluid
- optical glass
- polyoxyethylene ether
- mixing
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Abstract
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Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN201410308846.1A CN104130716B (en) | 2014-07-01 | A kind of polishing fluid for optical glass and preparation method thereof |
Applications Claiming Priority (1)
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CN201410308846.1A CN104130716B (en) | 2014-07-01 | A kind of polishing fluid for optical glass and preparation method thereof |
Publications (2)
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CN104130716A CN104130716A (en) | 2014-11-05 |
CN104130716B true CN104130716B (en) | 2016-11-30 |
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Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1502667A (en) * | 2002-10-30 | 2004-06-09 | ������������ʽ���� | Polishing solution composition |
CN101362925A (en) * | 2008-09-28 | 2009-02-11 | 成都贝瑞光电子材料技术有限公司 | Compound polishing powder for polishing optical elements, preparation method and polishing technology |
CN102352188A (en) * | 2011-09-05 | 2012-02-15 | 上海华明高纳稀土新材料有限公司 | Precision cerium-zirconium-based solid solution rare earth polishing powder and preparation method thereof |
CN102408835A (en) * | 2011-10-20 | 2012-04-11 | 天津理工大学 | Nano-polishing solution for chemical mechanical planarization of nickel oxide thin film and application thereof |
CN102559064A (en) * | 2011-12-15 | 2012-07-11 | 上海华明高纳稀土新材料有限公司 | Cerium-zirconium praseodymium sosoloid and preparation method thereof |
CN103436186A (en) * | 2013-08-31 | 2013-12-11 | 青岛承天伟业机械制造有限公司 | No-toxic-substance-residue mechanical polishing agent for semiconductor materials |
CN103468148A (en) * | 2013-08-31 | 2013-12-25 | 青岛承天伟业机械制造有限公司 | Chemical mechanical polishing solution of dielectric layer material |
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1502667A (en) * | 2002-10-30 | 2004-06-09 | ������������ʽ���� | Polishing solution composition |
CN101362925A (en) * | 2008-09-28 | 2009-02-11 | 成都贝瑞光电子材料技术有限公司 | Compound polishing powder for polishing optical elements, preparation method and polishing technology |
CN102352188A (en) * | 2011-09-05 | 2012-02-15 | 上海华明高纳稀土新材料有限公司 | Precision cerium-zirconium-based solid solution rare earth polishing powder and preparation method thereof |
CN102408835A (en) * | 2011-10-20 | 2012-04-11 | 天津理工大学 | Nano-polishing solution for chemical mechanical planarization of nickel oxide thin film and application thereof |
CN102559064A (en) * | 2011-12-15 | 2012-07-11 | 上海华明高纳稀土新材料有限公司 | Cerium-zirconium praseodymium sosoloid and preparation method thereof |
CN103436186A (en) * | 2013-08-31 | 2013-12-11 | 青岛承天伟业机械制造有限公司 | No-toxic-substance-residue mechanical polishing agent for semiconductor materials |
CN103468148A (en) * | 2013-08-31 | 2013-12-25 | 青岛承天伟业机械制造有限公司 | Chemical mechanical polishing solution of dielectric layer material |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PB01 | Publication | ||
SE01 | Entry into force of request for substantive examination | ||
CB03 | Change of inventor or designer information |
Inventor after: Zhang Lianjiang Inventor before: Song Yuchun |
|
TA01 | Transfer of patent application right |
Effective date of registration: 20161008 Address after: 362417 Quanzhou province Anxi County Peach boat Township, South pit street, No. 8 Applicant after: Zhang Lianjiang Address before: 233000 No. 404 South Daqing Road, hi tech Zone, Anhui, Bengbu Applicant before: Anhui Topusen Battery Co., Ltd. |
|
GR01 | Patent grant | ||
CB03 | Change of inventor or designer information |
Inventor after: Qin Chaofeng Inventor before: Zhang Lianjiang |
|
TR01 | Transfer of patent right |
Effective date of registration: 20170320 Address after: 528437 Zhongshan Torch Development Zone, Guangdong Road, No. 13 Patentee after: North Zhongshan Jinghua Precision Optical Co. Ltd. Address before: 362417 Quanzhou province Anxi County Peach boat Township, South pit street, No. 8 Patentee before: Zhang Lianjiang |
|
CB03 | Change of inventor or designer information |
Inventor after: Qin Chaofeng Inventor after: Yang Shugang Inventor after: Yuan Zhifeng Inventor before: Qin Chaofeng |