CN104120406B - The tungsten crucible trimming device of long crystal furnace use and method - Google Patents
The tungsten crucible trimming device of long crystal furnace use and method Download PDFInfo
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- CN104120406B CN104120406B CN201410311427.3A CN201410311427A CN104120406B CN 104120406 B CN104120406 B CN 104120406B CN 201410311427 A CN201410311427 A CN 201410311427A CN 104120406 B CN104120406 B CN 104120406B
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- crucible
- reaction
- trachea
- heater
- tungsten
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- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 title claims abstract description 34
- 229910052721 tungsten Inorganic materials 0.000 title claims abstract description 34
- 239000010937 tungsten Substances 0.000 title claims abstract description 33
- 239000013078 crystal Substances 0.000 title claims abstract description 12
- 238000009966 trimming Methods 0.000 title claims abstract description 12
- 238000000034 method Methods 0.000 title claims abstract description 11
- 238000006243 chemical reaction Methods 0.000 claims abstract description 25
- 210000003437 trachea Anatomy 0.000 claims abstract description 23
- 230000008439 repair process Effects 0.000 claims abstract description 9
- 239000011148 porous material Substances 0.000 claims abstract description 8
- 230000008021 deposition Effects 0.000 claims abstract description 4
- 238000000137 annealing Methods 0.000 claims description 6
- 239000006227 byproduct Substances 0.000 claims description 5
- 239000010409 thin film Substances 0.000 claims description 3
- 230000000694 effects Effects 0.000 abstract description 7
- 239000002699 waste material Substances 0.000 abstract description 6
- 238000005265 energy consumption Methods 0.000 abstract description 4
- 238000009413 insulation Methods 0.000 abstract description 4
- 239000000126 substance Substances 0.000 abstract description 4
- 238000005229 chemical vapour deposition Methods 0.000 description 24
- 239000000463 material Substances 0.000 description 6
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 238000005336 cracking Methods 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 229910052783 alkali metal Inorganic materials 0.000 description 1
- 150000001340 alkali metals Chemical class 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 230000006911 nucleation Effects 0.000 description 1
- 238000010899 nucleation Methods 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
Abstract
The tungsten crucible trimming device of disclosure one long crystal furnace use, including reative cell, heater and reaction trachea; Reative cell tool CVD (chemical? vapor? deposition chemical vapour desposition) cavity, the reaction trachea installed above of reative cell, one end of reaction trachea stretches at CVD cavity outer for connecting air supply pipe, and the other end reacting trachea stretches in CVD cavity and offers some pores on this end, waste discharge mouth is offered in the lower section of reative cell, and waste discharge mouth is connected to pump by pipeline; Heater is placed in CVD cavity, and heater is arranged on the pillar rotated by driven by motor, and heater has the articles holding table for crucible rotation. The invention also discloses the tungsten crucible method for trimming of long crystal furnace use. The present invention can repair because reusing thinning tungsten crucible, allows thinning sidewall of crucible thicken, and replys the heat insulation effect of its script, the problem reducing energy consumption.
Description
Technical field
The present invention relates to the technical field of quasiconductor and LED, especially and the tungsten crucible trimming device of long crystal furnace use and method.
Background technology
At present, during artificial gem produces, the crucible material being used for carrying raw material is mainly tungsten, fusing point high (more than 3400 DEG C) due to tungsten, there is good elevated temperature strength, molten alkali metal and steam there are is good corrosion resisting property, is used for the raw material carrier as artificial gem produces and is quite suitable for.
The manufacturing process of tungsten crucible mainly uses tungsten powder charging pressing mold molding, and through high temperature sintering, this kind of processing procedure is in Material Manufacturing Process and non-fusible material, just it is not afraid of and is mixed into the impurity brought by crucible and deoxidizer etc. yet, and sinter and be typically in vacuum and reducing atmosphere to carry out, it is not afraid of oxidation, without to any pollution of material, and can guarantee that correctness and the uniformity of material composition proportioning.
But due in use procedure, tungsten there will be oxide volatilization more than 1000 DEG C, this can cause tungsten wall thinning because of access times gradually, and be thinned to after to a certain degree, its heat insulation effect can be deteriorated, affect again the ability of heater material, cause that heater must provide for higher power, and this part can cause the loss of energy consumption. And tungsten crucible is after repeated, due to the hole problem that volatilization causes, can cause that it is brittle, the problem easily causing tungsten crucible cracking, and then cause that life cycle shortens, and production cost increases.
Summary of the invention
For above-mentioned problem, the present invention provides a kind of tungsten crucible trimming device and the method for long crystal furnace use, to repair because reusing thinning tungsten crucible, allows thinning sidewall of crucible thicken, replys the heat insulation effect of its script, the problem reducing energy consumption.
In order to reach above-mentioned purpose, the solution of the present invention is:
The tungsten crucible trimming device of long crystal furnace use, including reative cell, heater and reaction trachea; Reative cell tool CVD (chemicalvapordeposition chemical vapour desposition) cavity, the reaction trachea installed above of reative cell, one end of reaction trachea stretches at CVD cavity outer for connecting air supply pipe, and the other end reacting trachea stretches in CVD cavity and offers some pores on this end, waste discharge mouth is offered in the lower section of reative cell, and waste discharge mouth is connected to pump by pipeline; Heater is placed in CVD cavity, and heater is arranged on the pillar rotated by driven by motor, and heater has the articles holding table for crucible rotation.
The other end of described reaction trachea is inverted T shape, and the transverse tube of inverted T shape and vertical tube are all offered some pores.
Described reative cell is also installed RF power generator.
The tungsten crucible method for trimming of long crystal furnace use, its step is as follows:
The first step, puts into the crucible that need to repair in the CVD cavity of reative cell, and is placed on the articles holding table of heater;
Second step, contains WF at the crucible that need to repair6, and the other end of reaction trachea is stretched into WF6In, make the pore on reaction trachea be immersed in WF6In;
3rd step, by CVD cavity evacuation, to 100Pa P 0.1MPa;
4th step, heats heater to 600～800 DEG C;
5th step, is supplied SiH by reaction trachea to CVD cavity4, make gas SiH4With WF6Reaction, produces tungsten deposition thin film and repairs tungsten crucible;
6th step, takes unreacted gas and side-product away by vacuum pump, cleans CVD cavity;
7th step, delivers to annealing furnace by the tungsten crucible after repairing, and launches high temperature (> 2100 DEG C) annealing, namely completes finishing.
Described 6th step, uses Ar and N2It is filled with CVD cavity, relends and help vacuum pump to take unreacted gas and side-product away.
After adopting such scheme, the present invention repairs because reusing thinning tungsten crucible by chemical vapour deposition (CVD) (CVD), it is possible not only to allow W atom enter crucible and fills up the hole because volatilization causes, reduce the chance of sidewall of crucible cracking, substantially prolongs life cycle, simultaneously, thinning sidewall of crucible is allowed to thicken, replying its heat insulation effect originally, the problem reducing energy consumption, production cost reduces.
Accompanying drawing explanation
Fig. 1 is the structural representation of apparatus of the present invention.
Detailed description of the invention
As it is shown in figure 1, present invention is disclosed the tungsten crucible trimming device of long crystal furnace use, including reative cell 1, heater 2 and reaction trachea 3.
Reative cell 1 has CVD (chemicalvapordeposition chemical vapour desposition) cavity.
The reaction trachea 3 installed above of reative cell 1, one end of reaction trachea 3 stretches at CVD cavity outer for connecting air supply pipe (ordinary elements, not shown), and the other end reacting trachea 3 stretches in CVD cavity and offers some pores 31 on this end. In order to reach optimum response effect, the other end of reaction trachea 3 is inverted T shape, and the transverse tube of inverted T shape and vertical tube are all offered some pores 31. Waste discharge mouth 11 is offered in the lower section of reative cell 1, and waste discharge mouth 11 is connected to pump (ordinary elements, not shown) by pipeline.
Heater 2 is placed in CVD cavity, and heater 2 is arranged on the pillar 21 being rotated by motor (ordinary elements, not shown), and heater 2 has the articles holding table rotated for crucible 5. Rotated by heater 2, the surface of crucible when making tungsten grow up, can be deposited on uniformly, promote the tungsten chemical vapor deposition uniformity.
Can also installing RF power generator 4 on reative cell 1 further, this RF power generator 4 is prior art device, so, forms alternating electric field in cavity, and under the effect of alternating electric field, gaseous volatilization electric discharge is in plasma state, promotes finishing effect.
The tungsten crucible method for trimming of long crystal furnace use, its step is as follows:
The first step, puts into the crucible that need to repair in the CVD cavity of reative cell, and is placed on the articles holding table of heater;
Second step, contains WF at the crucible that need to repair6, and the other end of reaction trachea is stretched into WF6In, make the pore on reaction trachea be immersed in WF6In;
3rd step, by CVD cavity evacuation, to 100Pa P 0.1MPa;
4th step, heats heater to 600～800 DEG C;
5th step, is supplied SiH by reaction trachea to CVD cavity4, make gas SiH4With WF6Reaction, produces tungsten deposition thin film and repairs tungsten crucible;
Concrete reaction is as follows:
SiH4Reaction during immersion: SiH4→Si+H2
During nucleation: SiH4+WF6→W+SiH4+HF
Si+WF6→W+SiH4
During large quantities of deposit: WF6+H2→W+HF
6th step, uses Ar and N2It is filled with CVD cavity, relends and help vacuum pump to take unreacted gas and side-product away, clean CVD cavity;
7th step, delivers to annealing furnace by the tungsten crucible after repairing, and launches high temperature (> 2100 DEG C) annealing, namely completes finishing.
Claims (2)
1. the tungsten crucible method for trimming of long crystal furnace use, it is characterised in that step is as follows:
The first step, puts into the crucible that need to repair in the CVD cavity of reative cell, and is placed on the articles holding table of heater;
Second step, contains WF at the crucible that need to repair6, and the other end of reaction trachea is stretched into WF6In, make the pore on reaction trachea be immersed in WF6In;
3rd step, by CVD cavity evacuation, to 100Pa P 0.1MPa;
4th step, heats heater to 600～800 DEG C;
5th step, is supplied SiH by reaction trachea to CVD cavity4, make gas SiH4With WF6Reaction, produces tungsten deposition thin film and repairs tungsten crucible;
6th step, takes unreacted gas and side-product away by vacuum pump, cleans CVD cavity;
7th step, delivers to annealing furnace by the tungsten crucible after repairing, launches high annealing, namely complete finishing.
2. the tungsten crucible method for trimming of long crystal furnace use as claimed in claim 1, it is characterised in that: described 6th step, use Ar and N2It is filled with CVD cavity, relends and help vacuum pump to take unreacted gas and side-product away.
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| CN201410311427.3A CN104120406B (en) | 2014-07-02 | 2014-07-02 | The tungsten crucible trimming device of long crystal furnace use and method |
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| CN201410311427.3A CN104120406B (en) | 2014-07-02 | 2014-07-02 | The tungsten crucible trimming device of long crystal furnace use and method |
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| CN104120406A CN104120406A (en) | 2014-10-29 |
| CN104120406B true CN104120406B (en) | 2016-06-15 |
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| CN110257862A (en) * | 2019-06-26 | 2019-09-20 | 四川江铜稀土有限责任公司 | A kind of damage revamping method of Rare Earth Electrolysis crucible |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03285075A (en) * | 1990-03-30 | 1991-12-16 | Nisshin Steel Co Ltd | Production of tungsten crucible |
| JP2009027181A (en) * | 2008-08-25 | 2009-02-05 | Japan Science & Technology Agency | Chemical vapor deposition method using chemical vapor deposition apparatus |
| CN102776509A (en) * | 2012-08-13 | 2012-11-14 | 北京博宇半导体工艺器皿技术有限公司 | Method for repairing surface of used pyrolytic boron nitride crucible |
| CN204039495U (en) * | 2014-07-02 | 2014-12-24 | 厦门润晶光电有限公司 | The tungsten crucible trimming device of long brilliant stove use |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2844304B2 (en) * | 1994-02-15 | 1999-01-06 | 日本原子力研究所 | Plasma facing material |
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- 2014-07-02 CN CN201410311427.3A patent/CN104120406B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03285075A (en) * | 1990-03-30 | 1991-12-16 | Nisshin Steel Co Ltd | Production of tungsten crucible |
| JP2009027181A (en) * | 2008-08-25 | 2009-02-05 | Japan Science & Technology Agency | Chemical vapor deposition method using chemical vapor deposition apparatus |
| CN102776509A (en) * | 2012-08-13 | 2012-11-14 | 北京博宇半导体工艺器皿技术有限公司 | Method for repairing surface of used pyrolytic boron nitride crucible |
| CN204039495U (en) * | 2014-07-02 | 2014-12-24 | 厦门润晶光电有限公司 | The tungsten crucible trimming device of long brilliant stove use |
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| CN104120406A (en) | 2014-10-29 |
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