CN104120406A - Repairing device and method for tungsten crucible used for crystal growth furnace - Google Patents
Repairing device and method for tungsten crucible used for crystal growth furnace Download PDFInfo
- Publication number
- CN104120406A CN104120406A CN201410311427.3A CN201410311427A CN104120406A CN 104120406 A CN104120406 A CN 104120406A CN 201410311427 A CN201410311427 A CN 201410311427A CN 104120406 A CN104120406 A CN 104120406A
- Authority
- CN
- China
- Prior art keywords
- reaction
- crucible
- reaction chamber
- tracheae
- tungsten
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 title claims abstract description 37
- 229910052721 tungsten Inorganic materials 0.000 title claims abstract description 37
- 239000010937 tungsten Substances 0.000 title claims abstract description 36
- 238000000034 method Methods 0.000 title claims abstract description 14
- 239000013078 crystal Substances 0.000 title abstract 3
- 238000006243 chemical reaction Methods 0.000 claims abstract description 45
- 239000002699 waste material Substances 0.000 claims abstract description 8
- 230000008439 repair process Effects 0.000 claims abstract description 6
- 238000009966 trimming Methods 0.000 claims description 12
- 239000011148 porous material Substances 0.000 claims description 9
- 238000000137 annealing Methods 0.000 claims description 6
- 239000006227 byproduct Substances 0.000 claims description 5
- 238000005229 chemical vapour deposition Methods 0.000 abstract description 28
- 238000005265 energy consumption Methods 0.000 abstract description 4
- 238000009413 insulation Methods 0.000 abstract description 4
- 239000012495 reaction gas Substances 0.000 abstract 4
- 239000007789 gas Substances 0.000 abstract 2
- 238000013022 venting Methods 0.000 abstract 2
- 239000000463 material Substances 0.000 description 5
- 238000005336 cracking Methods 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 238000005245 sintering Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 229910052783 alkali metal Inorganic materials 0.000 description 1
- 150000001340 alkali metals Chemical class 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000012768 molten material Substances 0.000 description 1
- 230000006911 nucleation Effects 0.000 description 1
- 238000010899 nucleation Methods 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Abstract
The invention discloses a repairing device for a tungsten crucible used for a crystal growth furnace. The repairing device comprises a reaction chamber, a heater and a reaction gas tube. The reaction chamber is provided with a CVD (chemical vapor deposition) cavity. The reaction gas tube is disposed at the upper part of the reaction chamber. One end of the reaction gas tube extends out of the CVD cavity and is used for connecting a gas supply tube, and the other end of the reaction gas tube protrudes into the CVD cavity and is provided with a plurality of gas holes. The lower part of the reaction chamber is provided with a waste venting port. The waste venting port is connected to a pump through a pipeline. The heater is disposed in the CVD cavity, is installed on a column driven to rotate by a motor and is provided with an object placing platform for crucible rotation. The invention discloses a repairing method for the tungsten crucible used for the crystal growth furnace. The method and the device can repair the tungsten crucible thinned by repeated using, thicken the thinned crucible wall, restore original thermal insulation effects, and reduce the energy consumption problem.
Description
Technical field
The present invention relates to the technical field of semi-conductor and LED, tungsten crucible trimming device and the method for special and long brilliant stove use.
Background technology
At present, during artificial gem is produced, the crucible material that is used for carrying raw material is mainly tungsten, fusing point high (over 3400 ℃) due to tungsten, have good hot strength, molten alkali metal and steam are had to good corrosion resisting property, the raw material loader that is used for producing as artificial gem is quite applicable to.
The making processes of tungsten crucible is mainly to use tungsten powder charging moulded section, and through high temperature sintering, this kind of processing procedure molten material not in material produce process, just be not afraid of and sneak into the impurity being brought by crucible and reductor etc. yet, and sintering generally carries out in vacuum and reducing atmosphere, be not afraid of oxidation, can not give any pollution of material yet, and can guarantee exactness and the homogeneity of material composition proportioning.
But in use procedure, tungsten there will be oxide compound volatilization above at 1000 ℃, this can cause tungsten wall gradually because of access times attenuation, and after being thinned to a certain degree, its heat insulation effect meeting variation, affect again the ability of well heater material, cause well heater that higher power must be provided, and this part can cause the loss of energy consumption.And tungsten crucible is after reusing, due to the hole problem that volatilization causes, can cause its embrittlement, easily cause the problem of tungsten crucible cracking, and then cause life cycle to shorten, and production cost increases.
Summary of the invention
For above-mentioned problem, the invention provides tungsten crucible trimming device and the method for the brilliant stove use of a kind of length, to repair because reusing the tungsten crucible of attenuation, allow the sidewall of crucible of attenuation thicken, reply the heat insulation effect of its script, reduce the problem of energy consumption.
In order to reach above-mentioned purpose, solution of the present invention is:
The tungsten crucible trimming device of long brilliant stove use, comprises reaction chamber, well heater and reaction tracheae; Reaction chamber tool CVD (chemical vapor deposition chemical vapour desposition) cavity, reaction tracheae is installed in the top of reaction chamber, one end of reaction tracheae stretches outside CVD cavity for connecting air-supply duct, and the other end of reaction tracheae stretches in CVD cavity and this end on offer some pores, waste discharge mouth is offered in the below of reaction chamber, and waste discharge mouth is connected to pump by pipeline; Well heater is placed in CVD cavity, and well heater is arranged on the pillar being rotated by driven by motor, has the articles holding table for crucible rotation on well heater.
The other end of described reaction tracheae is inverted T shape, all offers some pores on the transverse tube of inverted T shape and vertical tube.
RF power generator is also installed on described reaction chamber.
The tungsten crucible method for trimming of long brilliant stove use, its step is as follows:
The first step, the crucible that need are repaired is put in the CVD cavity of reaction chamber, and is placed on the articles holding table of well heater;
Second step, the crucible splendid attire WF repairing at need
6, and the other end of reaction tracheae is stretched into WF
6in, the pore that makes to react on tracheae is immersed in WF
6in;
The 3rd step, vacuumizes CVD cavity, to 100Pa ﹤ P ﹤ 0.1MPa;
The 4th step, by heater heats to 600～800 ℃;
The 5th step, by reacting tracheae to CVD cavity air feed SiH
4, make gas SiH
4with WF
6reaction, produces tungsten deposit film and repairs tungsten crucible;
The 6th step, takes unreacted gas and byproduct away by vacuum pump, clean CVD cavity;
The 7th step, delivers to annealing furnace by the tungsten crucible after repairing, and launches high temperature (2100 ℃ of >) annealing, completes finishing.
Described the 6th step, is used Ar and N
2be filled with CVD cavity, relend and help vacuum pump to take unreacted gas and byproduct away.
Adopt after such scheme, the present invention repairs because reusing the tungsten crucible of attenuation by chemical vapour deposition (CVD), not only can allow W atom enter crucible and fill up the hole causing because of volatilization, the chance that reduces sidewall of crucible cracking, has extended life cycle, simultaneously greatly, allow the sidewall of crucible of attenuation thicken, reply its heat insulation effect originally, reduce the problem of energy consumption, production cost reduces.
Accompanying drawing explanation
Fig. 1 is the structural representation of apparatus of the present invention.
Embodiment
As shown in Figure 1, the present invention has disclosed the tungsten crucible trimming device of long brilliant stove use, comprises reaction chamber 1, well heater 2 and reaction tracheae 3.
Reaction chamber 1 tool CVD (chemical vapor deposition chemical vapour desposition) cavity.
Reaction tracheae 3 is installed in the top of reaction chamber 1, and one end of reaction tracheae 3 stretches CVD cavity outside for connecting air-supply duct (conventional member, not shown), and the other end of reaction tracheae 3 stretches on interior and this end of CVD cavity and offers some pores 31.In order to reach optimum response effect, the other end of reaction tracheae 3 is inverted T shape, all offers some pores 31 on the transverse tube of inverted T shape and vertical tube.Waste discharge mouth 11 is offered in the below of reaction chamber 1, and waste discharge mouth 11 is connected to pump (conventional member, not shown) by pipeline.
Well heater 2 is placed in CVD cavity, and well heater 2 is arranged on the pillar 21 by motor (conventional member, not shown) driven rotary, has the articles holding table for crucible 5 rotations on well heater 2.By well heater 2, rotate, when tungsten is grown up, can be deposited on uniformly the surface of crucible, promote tungsten chemical vapor deposition uniformity coefficient.
On reaction chamber 1, RF power generator 4 can also be further installed, this RF power generator 4 is prior art equipment, like this, forms alternating electric field in cavity, and under the effect of alternating electric field, gaseous volatilization electric discharge is plasma state, promotes finishing effect.
The tungsten crucible method for trimming of long brilliant stove use, its step is as follows:
The first step, the crucible that need are repaired is put in the CVD cavity of reaction chamber, and is placed on the articles holding table of well heater;
Second step, the crucible splendid attire WF repairing at need
6, and the other end of reaction tracheae is stretched into WF
6in, the pore that makes to react on tracheae is immersed in WF
6in;
The 3rd step, vacuumizes CVD cavity, to 100Pa ﹤ P ﹤ 0.1MPa;
The 4th step, by heater heats to 600～800 ℃;
The 5th step, by reacting tracheae to CVD cavity air feed SiH
4, make gas SiH
4with WF
6reaction, produces tungsten deposit film and repairs tungsten crucible;
Concrete reaction is as follows:
SiH
4reaction during immersion: SiH
4→ Si+H
2
during nucleation: SiH
4+ WF
6→ W+SiH
4+ HF
Si?+?WF
6?→?W?+?SiH
4
During large quantities of deposit: WF
6+ H
2→ W+HF
The 6th step, is used Ar and N
2be filled with CVD cavity, relend and help vacuum pump to take unreacted gas and byproduct away, clean CVD cavity;
The 7th step, delivers to annealing furnace by the tungsten crucible after repairing, and launches high temperature (2100 ℃ of >) annealing, completes finishing.
Claims (5)
1. grow the tungsten crucible trimming device of brilliant stove use, it is characterized in that: comprise reaction chamber, well heater and reaction tracheae; Reaction chamber tool CVD cavity, reaction tracheae is installed in the top of reaction chamber, one end of reaction tracheae stretches outside CVD cavity for connecting air-supply duct, and the other end of reaction tracheae stretches in CVD cavity and this end on offer some pores, waste discharge mouth is offered in the below of reaction chamber, and waste discharge mouth is connected to pump by pipeline; Well heater is placed in CVD cavity, and well heater is arranged on the pillar being rotated by driven by motor, has the articles holding table for crucible rotation on well heater.
2. the tungsten crucible trimming device of the brilliant stove use of length as claimed in claim 1, is characterized in that: the other end of described reaction tracheae is inverted T shape, all offers some pores on the transverse tube of inverted T shape and vertical tube.
3. the tungsten crucible trimming device of the brilliant stove use of length as claimed in claim 1, is characterized in that: RF power generator is also installed on described reaction chamber.
4. grow the tungsten crucible method for trimming of brilliant stove use, it is characterized in that step is as follows:
The first step, the crucible that need are repaired is put in the CVD cavity of reaction chamber, and is placed on the articles holding table of well heater;
Second step, the crucible splendid attire WF repairing at need
6, and the other end of reaction tracheae is stretched into WF
6in, the pore that makes to react on tracheae is immersed in WF
6in;
The 3rd step, vacuumizes CVD cavity, to 100Pa ﹤ P ﹤ 0.1MPa;
The 4th step, by heater heats to 600～800 ℃;
The 5th step, by reacting tracheae to CVD cavity air feed SiH
4, make gas SiH
4with WF
6reaction, produces tungsten deposit film and repairs tungsten crucible;
The 6th step, takes unreacted gas and byproduct away by vacuum pump, clean CVD cavity;
The 7th step, delivers to annealing furnace by the tungsten crucible after repairing, and launches high temperature annealing, completes finishing.
5. the tungsten crucible method for trimming of the brilliant stove use of length as claimed in claim 4, is characterized in that: described the 6th step, use Ar and N
2be filled with CVD cavity, relend and help vacuum pump to take unreacted gas and byproduct away.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410311427.3A CN104120406B (en) | 2014-07-02 | 2014-07-02 | The tungsten crucible trimming device of long crystal furnace use and method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410311427.3A CN104120406B (en) | 2014-07-02 | 2014-07-02 | The tungsten crucible trimming device of long crystal furnace use and method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104120406A true CN104120406A (en) | 2014-10-29 |
| CN104120406B CN104120406B (en) | 2016-06-15 |
Family
ID=51766031
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410311427.3A Active CN104120406B (en) | 2014-07-02 | 2014-07-02 | The tungsten crucible trimming device of long crystal furnace use and method |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN104120406B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110257862A (en) * | 2019-06-26 | 2019-09-20 | 四川江铜稀土有限责任公司 | A kind of damage revamping method of Rare Earth Electrolysis crucible |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03285075A (en) * | 1990-03-30 | 1991-12-16 | Nisshin Steel Co Ltd | Production of tungsten crucible |
| US20020015466A1 (en) * | 1994-02-15 | 2002-02-07 | Masato Akiba | Plasma facing components of nuclear fusion reactors employing tungsten materials |
| JP2009027181A (en) * | 2008-08-25 | 2009-02-05 | Japan Science & Technology Agency | Chemical vapor deposition method using chemical vapor deposition apparatus |
| CN102776509A (en) * | 2012-08-13 | 2012-11-14 | 北京博宇半导体工艺器皿技术有限公司 | Method for repairing surface of used pyrolytic boron nitride crucible |
| CN204039495U (en) * | 2014-07-02 | 2014-12-24 | 厦门润晶光电有限公司 | The tungsten crucible trimming device of long brilliant stove use |
-
2014
- 2014-07-02 CN CN201410311427.3A patent/CN104120406B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03285075A (en) * | 1990-03-30 | 1991-12-16 | Nisshin Steel Co Ltd | Production of tungsten crucible |
| US20020015466A1 (en) * | 1994-02-15 | 2002-02-07 | Masato Akiba | Plasma facing components of nuclear fusion reactors employing tungsten materials |
| JP2009027181A (en) * | 2008-08-25 | 2009-02-05 | Japan Science & Technology Agency | Chemical vapor deposition method using chemical vapor deposition apparatus |
| CN102776509A (en) * | 2012-08-13 | 2012-11-14 | 北京博宇半导体工艺器皿技术有限公司 | Method for repairing surface of used pyrolytic boron nitride crucible |
| CN204039495U (en) * | 2014-07-02 | 2014-12-24 | 厦门润晶光电有限公司 | The tungsten crucible trimming device of long brilliant stove use |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110257862A (en) * | 2019-06-26 | 2019-09-20 | 四川江铜稀土有限责任公司 | A kind of damage revamping method of Rare Earth Electrolysis crucible |
Also Published As
| Publication number | Publication date |
|---|---|
| CN104120406B (en) | 2016-06-15 |
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Address after: 361000 Fujian, Xiamen torch hi tech Zone (Xiangan) Industrial Zone, Yue Yue Road, No. 4, building No. 1, layer 1 Applicant after: SUNPHIRE Opt-tronic Co., Ltd. Address before: 361000 Fujian, Xiamen torch hi tech Zone (Xiangan) Industrial Zone, Yue Yue Road, No. 4, building No. 1, layer 1 Applicant before: XIAMEN CRYSTAL EMBELLISH PHOTOELECTRIC CO., LTD. |
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