CN104034697B - A kind of assay device manufacturing surface roughness affect laser measurement performance and method - Google Patents
A kind of assay device manufacturing surface roughness affect laser measurement performance and method Download PDFInfo
- Publication number
- CN104034697B CN104034697B CN201410294148.0A CN201410294148A CN104034697B CN 104034697 B CN104034697 B CN 104034697B CN 201410294148 A CN201410294148 A CN 201410294148A CN 104034697 B CN104034697 B CN 104034697B
- Authority
- CN
- China
- Prior art keywords
- laser
- light source
- measurement
- vertical rotary
- probe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Abstract
The invention discloses a kind of manufacture surface roughness affect laser measurement performance test apparatus and method, this device utilizes standard 80m long guideway to realize big range measurement, the Distance positioning of laser and material surface is realized by laser interferometer alignment system, light source is that multiband is adjustable, it can be monochromater, also can be polychromatic source, different-waveband and the Continuous Wave with frequency modulation laser needs to surface scattering characteristic influence research can be met, laser focusing system is placed after light source, adjustable laser focusing spot diameter size, meet the laser facula size needs to stray light effects research, the dual-axis rotation system of drop target and fixture use anti-tolerance design, can improve and measure efficiency and certainty of measurement, the quarter circular arc Guide Rail Design placing pick-up probe can realize the change at reflection receivable angle.This systematic survey function is extensive, and certainty of measurement is high, efficiency is high, can realize telemeasurement, and the research of the impact that interacts laser and material surface is significant.
Description
Technical field
The present invention relates to optical radiation measurement device, particularly relate to a kind of test manufacturing surface roughness affect laser measurement performance
Device and method.
Background technology
In practical engineering application, measured target surface is the most all non-ideal Lambert surface, i.e. surface occurs diffuse-reflectance, needs
Considering the multiple reflections phenomenon of complexity, therefore the scattering properties on goal in research surface is particularly important, such as: if known
Spectrum bidirectional reflectance distribution function, then can derive direction spectral absorption and direction spectral reflectivity, and therefore, spectrum is double
It is the important parameter embodying material surface radiation transmission to Reflectance Distribution Function, is applied in a lot of fields, as distant in space flight
The emulation of sense field, field of industrial measurement, geological survey and target and simulation field, be required to carry out surfacing scattering
The detection of characteristic, it is achieved be the important research basis of numerous research field to accurately measuring of target surface scattering properties.
In remote sensing field, form and the feature identifying target is analyzed in scattering of light by available target；Laser radar returns
Containing a lot of target and background information in ripple, people can extract useful information from the complex information obtained；At Industrial Measurement
Amount field, along with the great demand that large space precision coordinate measurement aspect is growing, it is achieved without the contactless survey of cooperative target
Amount a, it has also become important subject, although traditional interferometric method and the laser tracking measurement mode precision that derived by it
Height, but need the cooperative target such as reflecting prism or opal to assist, cannot realize the most at the scene；Development in recent years is got up
Continuous laser frequency modulation ranging technology is a kind of new pattern laser ranging technology, can carry out measuring without cooperative target, measurement scope greatly,
Precision is high, has significant advantage, but the method is the most immature, and some critical bottlenecks not yet solve, and one of them closes
Key problem is after laser is directly incident on tested manufacture surface, the surface impact on laser measurement performance.There iing cooperative target
In the case of, owing to target surface characteristic is certain and known, the echo-signal therefore received also is stable and can be pre-
Knowing, this is also the major reason having the range-measurement system precision of cooperative target high；For without the range-measurement system of cooperative target,
The target surface that laser is irradiated to is unknown and varies, and the roughness on tested manufacture surface, color, texture etc. all can affect
The information such as the intensity of the laser received, phase place, polarization state, the angle of laser light incident, laser focusing spot size also can shadows
Ring the scattered signal received.
Although some physical models having been developed to describe the scattering properties of Rough Target at physics circle, but it is all by problem
It is modeled on the premise of simplifying and target being idealized, and in the middle of reality application, calculating based on ideal model certainly will
Error can be produced, it is impossible to meet high-precision requirement, and the real scattering properties of rough surface can reflect surface geometrical property it
Outer unique trait, scattered information produced by every kind of surface is well-determined, therefore measures and Study of Laser and actual system
The impact that interacts making rough surface is respectively provided with great importance, also to the optimization of the equipment of measurement and the raising of certainty of measurement
It it is the Research foundation of numerous research field.
Traditional scatterometry apparatus function is more single, all can not meet many-sided measurement of Study of Laser and surface interaction
Needs, the most existing bidirectional reflectance distribution function measurement apparatus is only capable of measuring the scattering properties on closely surface, for greatly
The impact etc. of scattering all can not be measured by distance, the aerial energy attenuation of laser, and focal beam spot diameter, existing
The most generally there is function singleness in the some other surface scattering measurement apparatus having, measurement distance is near, positioning precision is low, measurement misses
The defects such as difference is big.
Summary of the invention
The invention provides a kind of assay device manufacturing surface roughness affect laser measurement performance and method, the present invention realizes
The scattering properties of remote surface is measured, and improves certainty of measurement and measurement cycle, described below:
A kind of assay device manufacturing surface roughness affect laser measurement performance, described assay device includes: standard long guideway,
Light source, laser focusing system, article carrying platform, horizontal rotating table, vertical rotary platform, sample clamp, connecting rod, four/
One Circular Sliding guide rail, pick-up probe, laser interferometer transmitting terminal, laser interferometer receiving terminal and PC,
Described light source, described laser focusing system and described laser interferometer transmitting terminal are fixed on the one of described standard long guideway
End, is formed dual-axis rotation system, described pick-up probe and described laser by described horizontal rotating table and described vertical rotary platform
Interferometer receiving terminal is fixed on the described article carrying platform controlled by laser interferometer, freely moves on described standard long guideway
Dynamic, described sample clamp is arranged on the axle center of described vertical rotary platform, installs described 1/4th of described pick-up probe
Circular Sliding guide rail is arranged on described vertical rotary platform by described connecting rod, turns with the rotation of described vertical rotary platform
Dynamic, described horizontal rotating table, described vertical rotary platform, the displacement of described article carrying platform, described pick-up probe are described four
Movement on/mono-Circular Sliding guide rail is uniformly controlled by described PC.
Described light source is multiband tunable light source, including: visible light source 400nm～800nm, near infrared light light source
800nm～2500nm and infrared light light source 2500nm～5000nm.
The turbine of described horizontal rotating table and described vertical rotary platform is pitch turbine, described horizontal rotating table and described vertically
Vernier cursor resolution on turntable is that 5 arcs divide.
A kind of test method manufacturing surface roughness affect laser measurement performance, said method comprising the steps of:
1) sample is placed in sample clamp, makes the end face laminating of sample surfaces and sample clamp；
2) distance and the moving interval on light source incidence angle, launching spot size, described light source and sample surface to be measured are set；
3) incident angle of above-mentioned setting is kept, in position measurement space surface scattered energy to be measured, by vertical rotary platform
Rotation in the range of 360 ° changes recipient's parallactic angle, by pick-up probe movement on quarter circular arc rail plate
Receive the light energy of different angle of reflection；
4) after having measured the light energy of above-mentioned position to be measured, the incident angle still keeping described light source is constant, according to step 2)
The moving interval set moves to next position, according to step 3) measure the light energy of this position, move again to next
Individual setting position, repeat step 3), 4), until having measured the light energy of all setpoint distances；
After completing above-mentioned measurement, then change the incident angle of described light source, repeat step 3), 4), enter completing difference
Measurement when firing angle is spent.
The present invention provide technical scheme provide the benefit that: native system utilize standard 80m long guideway to realize big range measurement,
Utilizing laser interferometer alignment system to realize the Distance positioning of laser and material surface, light source is that multiband is adjustable, can be monochromatic
Light source, can be also polychromatic source, can meet different-waveband and Continuous Wave with frequency modulation laser to surface scattering characteristic influence research
Needing, the light source emitted, through laser focusing system, can adjust laser focusing hot spot by regulation laser focusing system
Diameter, meets the laser spot diameter size needs to stray light effects research, places the dual-axis rotation on surface to be measured
System and sample clamp use anti-tolerance design, can improve and measure efficiency and certainty of measurement, and the four of placement pick-up probe/
One arc guide rail design can realize the measurement of space surface scattered light.Certainty of measurement of the present invention is high, efficiency high, can realize big away from
From measurement, measure function many, the measurement of surface to be measured hemisphere spatial light scattering and laser focusing spot size can be completed to surface
The impact of scattering is measured, and the energy attenuation after incident illumination long-distance transmissions can also be recorded by this device, and the present invention can extensively answer
For needing Study of Laser and the material behavior of surface interaction impact and target simulator field, remote sensing field, geology
Fields of measurement, industry large scale are without fields such as cooperative target measurements.
Accompanying drawing explanation
Fig. 1 is the structural representation of the assay device manufacturing surface roughness affect laser measurement performance；
Fig. 2 is the block diagram of the assay device manufacturing surface roughness affect laser measurement performance；
Fig. 3 is sample clamp design drawing；
Fig. 4 is for measuring process schematic；
Fig. 5 is the distribution of roughness sample block space scattered energy
Fig. 6 is the distribution of roughness sample block space scattered energy
In accompanying drawing, the list of parts representated by each label is as follows:
1-80m standard long guideway, 2-light source, 3-laser focusing system, 4-article carrying platform, 5-horizontal rotating table, 6-vertically revolves
Turntable, 7-sample clamp, 8-connecting rod, 9-quarter circular arc rail plate, 10-pick-up probe, 11-laser interferometer
Transmitting terminal, 12-laser interferometer receiving terminal, 13-PC machine；A-transmitter module, B-article carrying platform module, C-receiver module
And D-electronic control module.
Detailed description of the invention
For making the object, technical solutions and advantages of the present invention clearer, below embodiment of the present invention is made the most detailed
Thin description.
Seeing Fig. 1 and Fig. 2, the assay device of this manufacture surface roughness affect laser measurement performance includes: standard long guideway
1, light source 2, laser focusing system 3, article carrying platform 4, horizontal rotating table 5, vertical rotary platform 6, sample clamp 7, company
Extension bar 8, quarter circular arc rail plate 9, pick-up probe 10, laser interferometer transmitting terminal 11, laser interferometer connect
Receiving end 12,
Light source 2, laser focusing system 3 and laser interferometer transmitting terminal 11 are fixed on one end of standard long guideway 1, by level
Turntable 5 and vertical rotary platform 6 form dual-axis rotation system, pick-up probe 10 and laser interferometer receiving terminal 12 to be fixed
On the article carrying platform 4 controlled by laser interferometer, can move freely on standard long guideway 1, sample clamp 7 is arranged on
On the axle center of vertical rotary platform 6, the quarter circular arc rail plate 9 installing pick-up probe 10 is pacified by connecting rod 8
It is contained on vertical rotary platform 6, rotates with the rotation of vertical rotary platform 6, horizontal rotating table 5, vertical rotary platform 6, load
The displacement of thing platform 4, the pick-up probe 10 movement on quarter circular arc rail plate 9 are by PC 13 unification
Control.
Wherein, standard long guideway 1 is 80m length, and article carrying platform 4 can move freely, by laser on standard long guideway 1
Interferometer is accurately positioned.
The embodiment of the present invention by being fixed on one end of standard long guideway 1 by laser interferometer transmitting terminal 11, by laser interferometer
Receiving terminal 12 is fixed on article carrying platform 4, can be realized article carrying platform 4 at standard long guideway 1 by laser interferometer
On accurate running fix.
See Fig. 2, overall be made up of four modules: transmitter module A, article carrying platform module B, receiver module C and automatically controlled
Module D.Transmitter module 1 is made up of light source 2 and laser focusing system 3；Article carrying platform module B is by article carrying platform 4, mark
Quasi-long guideway 1 and dual-axis rotation system (horizontal rotating table 5 and vertical rotary platform 6 form) composition, article carrying platform 4 conduct
Mobile platform, it is achieved the dual-axis rotation system of space surface pose to be measured is fixed on article carrying platform 4, passes through laser interferometer
Position；Receiver module C is made up of, in conjunction with dual-axis rotation pick-up probe 10 and quarter circular arc rail plate 9
System completes the measurement of space scatter energy, it is achieved electronic control module D of whole measurement system automation operation is by PC 13
It is uniformly controlled.
When implementing, light source 2 is multiband tunable light source, including: visible light source 400nm～800nm, near infrared light
Light source 800nm～2500nm and infrared light light source 2500nm～5000nm, additionally, light source 2 also can be Continuous Wave with frequency modulation light source,
The research measurement needs of polychromatic light and surface interaction impact can be met.Laser focusing system 3 can effectively control and select
The size of shoot laser spot diameter, is adjusted by pinhole diaphragm.
Wherein, seeing Fig. 3, sample clamp 7 is arranged on the axle center of vertical rotary platform 6, the end face of sample clamp 7 and water
The vertical axis of flat turntable 5 overlaps, to realize any conversion of sample space pose.Horizontal rotating table 5 and vertical rotary
The turbine of platform 6 is pitch turbine, by DC servo motor control worm screw drive turbine rotates in the range of 360 °, worm screw and
The reducer shaft being fixed on motor is connected, and the vernier cursor resolution on horizontal rotating table 5 and vertical rotary platform 6 is 5 arcs
Point.
Seeing Fig. 3, further, sample clamp 7 uses anti-tolerance design, i.e. sample cell to have one fixed width, is suitable for not
The sample of stack pile, only need to be by sample surfaces joint jig end face during measurement, it is not necessary to other position adjustments, it is ensured that the most double
How axle system rotates, and light source 2 is incident in sample in the heart all the time, saves the overall measurement time.
Wherein, pick-up probe 10 is arranged on quarter circular arc rail plate 9, and pick-up probe 10 can be according to survey
Amount demand is replaced, and can be such as photodetector, optical power detector or brightness detector etc..
Quarter circular arc rail plate 9, uses the intersection point weight of standard designed arc-shaped appearance, the center of circle and dual-axis rotation system two axial lines
Closing, its guide pass is turbine wheel flute profile, is rotated by the electronic worm drive turbine gear teeth, thus realizes pick-up probe 10
Movement on quarter circular arc rail plate 9, to receive the light energy of different angle of reflection, pick-up probe 10 is four
The moving range of 0 ° to 90 ° is had on/mono-arc guide rail 9.
Connecting rod 8 is connected with vertical rotary platform 6 with quadrant arc guide rail 9, is fixed on vertical rotary platform 6, with hanging down
The rotation of direct rotary turntable 6 and rotate, thus change recipient's parallactic angle, the length of connecting rod 8 and quadrant arc guide rail 9
Different size design can be carried out according to measurement demand, only need to be fixed on vertical rotary platform 6.
The test method of the manufacture surface roughness affect laser measurement performance that the present invention provides comprises the following steps:
1) sample is placed in sample clamp 7, makes the end face laminating of sample surfaces and sample clamp 7；
2) light source 2 incident angle, launching spot size, light source 2 and the distance on sample surface to be measured and moving interval are set；
3) incident angle of above-mentioned setting is kept, in position measurement space surface scattered energy to be measured, by vertical rotary platform 6
Rotation in the range of 360 ° changes recipient's parallactic angle, by pick-up probe 10 on quarter circular arc rail plate 9
Movement receive the light energy of different angle of reflection；
4), after having measured the light energy of above-mentioned position to be measured, the incident angle still keeping light source 2 is constant, sets according to step 2
Fixed moving interval moves to next position, has measured the light energy of this position according to step 3, has moved again to the next one and set
Location is put, repeat step 3), 4), until having measured the light energy of all setpoint distances；
After completing above-mentioned measurement, then change light source 2 incident angle, so can reduce to greatest extent by horizontal rotating table 5
Rotation and the run-out error that introduces, thus reduce measurement error, repeat step 3), 4), to complete different incidence angles
Measurement when spending.
If desired change spot size, then adjust laser focusing system 3, make the hot spot of different-diameter size be incident on tested table
On face, rotation and the pick-up probe 10 movement on quarter circular arc rail plate 9 by dual-axis rotation system come
Complete the measurement of space scattering light energy.
Below in conjunction with measuring process schematic 4, concrete measuring method is elaborated.Here with data acquisition amount maximum
Displacement is as a example by space scattering light energy measurement scheme, and the part steps that other measurement function can win this measurement scheme is come real
Existing.
1) first need to open light source 2 to preheat 20 minutes, testing sample is arranged in sample clamp 7 on request, makes sample
Surface fits tightly with the end face of sample clamp 7.
2) set laser incident angle, focal beam spot size, PC 13 rotation controlling horizontal rotating table 5 changes
Laser incident angle, in the present embodiment, initial incidence angle is set to 0 °, and light source 2 is set to 5m with the distance on testing sample surface,
Article carrying platform 4 is driven to move to specify position by laser interferometer alignment system.
3) start to measure, the pick-up probe 10 movement on quarter circular arc rail plate 9 receive different reflection
The light energy at angle, after having surveyed, is controlled the rotation of vertical rotary platform 6 to change recipient's parallactic angle, the present embodiment by PC 13
It is set to 5 °, then is received under this azimuth different by the pick-up probe 10 movement on quarter circular arc rail plate 9
The light energy of angle of reflection.
4) step 3 is repeated), until vertical rotary platform 6 turns over 360 °, i.e. measure the scattered energy in half spherical space.
5) step 4 is completed) after, the laser interferometer PC control software set next one measure position, the present embodiment is
10m。
6) repeat step 3), 4), 5), until having measured the distance to be measured.Change light source incidence angle, by level
PC control software set angle stepping in turntable 5 is 5 °.
7) repeat step 2), 3), 4), 5), 6), until measured under different incidence angles degree, different distance time surface
Hemisphere space scattering light energy.
In above-mentioned measurement, when changing incident distance, the incident angle keeping light source 2 is constant, as shown in Figure 4, so may be used
The run-out error introduced to reduce the rotation by horizontal rotating table 5 to greatest extent, thus reduce measurement error.If
Need to change spot size, then adjust laser focusing system 3, make the hot spot of different-diameter size be incident on measured surface,
Selecting step 2), 3), 4) complete measure.Fig. 5, Fig. 6 are roughness sample block space scattered energy distribution measuring knot
Fruit figure.In figure, sample block roughness is 0.8 μm, and processing mode is planer, and measurement result is the collection data in half spherical space,
Owing to the coordinate of each collection point is about zenith angle and azimuthal Spatial Sphere coordinate, so cartesian coordinate need to be converted into
Realize surface fitting.Fig. 5 is incident angle θi=30 °, incident orientation angleTime measurement result, Fig. 6 is for entering
Penetrate angle, θi=30 °, incident orientation angleTime measurement result, it can be seen that when incident angle identical,
And different scattered energy distributions during the difference of incident orientation angle, can be obtained, scattered light peak and energy profile are all sent out
Give birth to change.
The embodiment of the present invention is to the model of each device in addition to doing specified otherwise, and the model of other devices does not limits, as long as
The device of above-mentioned functions can be completed.
It will be appreciated by those skilled in the art that accompanying drawing is the schematic diagram of a preferred embodiment, the invention described above embodiment sequence number
Just to describing, do not represent the quality of embodiment.
The foregoing is only presently preferred embodiments of the present invention, not in order to limit the present invention, all in the spirit and principles in the present invention
Within, any modification, equivalent substitution and improvement etc. made, should be included within the scope of the present invention.
Claims (3)
1. the assay device manufacturing surface roughness affect laser measurement performance, it is characterised in that described assay device
Including: standard long guideway, light source, laser focusing system, article carrying platform, horizontal rotating table, vertical rotary platform, specimen holder
Tool, connecting rod, quarter circular arc rail plate, pick-up probe, laser interferometer transmitting terminal, laser interferometer receive
End and PC,
Described light source, described laser focusing system and described laser interferometer transmitting terminal are fixed on the one of described standard long guideway
End, is formed dual-axis rotation system, described pick-up probe and described laser by described horizontal rotating table and described vertical rotary platform
Interferometer receiving terminal is fixed on the described article carrying platform controlled by laser interferometer, freely moves on described standard long guideway
Dynamic, described sample clamp is arranged on the axle center of described vertical rotary platform, installs described 1/4th of described pick-up probe
Circular Sliding guide rail is arranged on described vertical rotary platform by described connecting rod, turns with the rotation of described vertical rotary platform
Dynamic, described horizontal rotating table, described vertical rotary platform, the displacement of described article carrying platform, described pick-up probe are described four
Movement on/mono-Circular Sliding guide rail is uniformly controlled by described PC.
A kind of assay device manufacturing surface roughness affect laser measurement performance the most according to claim 1, it is special
Levying and be, described light source is multiband tunable light source, including: visible light source 400nm～800nm, near infrared light light source
800nm～2500nm and infrared light light source 2500nm～5000nm.
3. the test method manufacturing surface roughness affect laser measurement performance, it is characterised in that described method includes
Following steps:
1) sample is placed in sample clamp, makes the end face laminating of sample surfaces and sample clamp；
2) distance and the moving interval on light source incidence angle, launching spot size, described light source and sample surface to be measured are set；
3) incident angle of above-mentioned setting is kept, in position measurement space surface scattered energy to be measured, by vertical rotary platform
Rotation in the range of 360 ° changes recipient's parallactic angle, by pick-up probe movement on quarter circular arc rail plate
Receive the light energy of different angle of reflection；
4) after having measured the light energy of above-mentioned position to be measured, the incident angle still keeping described light source is constant, according to step 2)
The moving interval set moves to next position, according to step 3) measure the light energy of this position, move again to next
Individual setting position, repeat step 3), 4), until having measured the light energy of all setpoint distances；
After completing above-mentioned measurement, then change the incident angle of described light source, repeat step 3), 4), different incident to complete
Measurement during angle.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410294148.0A CN104034697B (en) | 2014-06-25 | 2014-06-25 | A kind of assay device manufacturing surface roughness affect laser measurement performance and method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410294148.0A CN104034697B (en) | 2014-06-25 | 2014-06-25 | A kind of assay device manufacturing surface roughness affect laser measurement performance and method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104034697A CN104034697A (en) | 2014-09-10 |
| CN104034697B true CN104034697B (en) | 2016-08-17 |
Family
ID=51465548
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410294148.0A Active CN104034697B (en) | 2014-06-25 | 2014-06-25 | A kind of assay device manufacturing surface roughness affect laser measurement performance and method |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN104034697B (en) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104792736B (en) * | 2015-03-20 | 2017-07-21 | 北京环境特性研究所 | The measuring method and measuring system of Laser scattering signature in a kind of large scale target chamber |
| CN106840048B (en) * | 2016-12-17 | 2019-09-10 | 江汉大学 | Roughness measuring device and method |
| CN109141298A (en) * | 2018-09-05 | 2019-01-04 | 广州达欧技术检测有限公司 | A kind of ball-type piece surface curve detection system |
| CN110208218A (en) * | 2019-07-08 | 2019-09-06 | 莱森光学（深圳）有限公司 | A kind of two-way dispersion distribution function spectral measurement system |
| CN115070646A (en) * | 2022-07-11 | 2022-09-20 | 辽宁优迅科技有限公司 | Clamp and method for testing front light backlight of coaxial laser bare package |
| CN115077386B (en) * | 2022-08-19 | 2022-12-16 | 南京木木西里科技有限公司 | Full-automatic measuring device, system and measuring method for hydrosol surface |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5434668A (en) * | 1992-04-01 | 1995-07-18 | Electronics & Space Corp. | Laser vibrometer identification friend-or-foe (IFF) system |
| DE29705626U1 (en) * | 1997-03-28 | 1997-05-22 | ALV-Laser Vertriebsgesellschaft mbH, 63225 Langen | Measuring device for determining light scattering |
| US6724473B2 (en) * | 2002-03-27 | 2004-04-20 | Kla-Tencor Technologies Corporation | Method and system using exposure control to inspect a surface |
| CN100514035C (en) * | 2005-03-30 | 2009-07-15 | 中国农业大学 | Method and device for measuring scattered light space distribution |
| CN101158640B (en) * | 2007-11-06 | 2010-06-09 | 山东大学 | Device and method for rapid measuring coherent backscattering by linear array CCD |
| CN101196464B (en) * | 2007-12-14 | 2011-03-30 | 武汉大学 | Laser double-mode micro-volume sample analyzing method and its device |
| CN102419315B (en) * | 2011-09-08 | 2015-09-30 | 苏州汉朗光电有限公司 | Smectic liquid crystal space scattering measurement method and device |
| CN103018205A (en) * | 2012-12-06 | 2013-04-03 | 中国科学院长春光学精密机械与物理研究所 | Angle scattering measuring apparatus for ArF laser optical thin film |
| US9804087B2 (en) * | 2013-06-11 | 2017-10-31 | Scattermaster, Llc | Hemispherical scanning optical scatterometer |
-
2014
- 2014-06-25 CN CN201410294148.0A patent/CN104034697B/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| CN104034697A (en) | 2014-09-10 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN104034697B (en) | A kind of assay device manufacturing surface roughness affect laser measurement performance and method | |
| CN107121095B (en) | A kind of method and device of precise measurement super-large curvature radius | |
| CN106873122B (en) | A kind of device and method for large-diameter non-spherical reflecting mirror centering adjustment | |
| CN101476880B (en) | Surface shape detection apparatus and method for large-bore plane optical element | |
| CN1928533B (en) | Outdoor high optical spectrum BRDF automatic detection method | |
| CN108287338A (en) | Laser range finder verification system based on error cancellation principle and its calibration method | |
| CN204788422U (en) | Be applied to sensitive optical system index adjustment check out test set of satellite positioning star | |
| CN106226759B (en) | A kind of tracking Stabilily parameter device and method | |
| CN102590150A (en) | Indoor hyperspectral bidirectional reflectance distribution function (BRDF) determining system | |
| CN203038129U (en) | Photoelectric tracking system dynamic tracking precision calibrating device | |
| CN104316468A (en) | Multi-purpose omnibearing measuring system for spectrum of surface feature sample | |
| CN203241029U (en) | Intelligent indoor three-dimensional measuring instrument | |
| CN202057596U (en) | Comparison-type reflectivity measuring instrument | |
| CN103528676A (en) | Light distribution test method of semiconductor laser and device of test method | |
| CN105067528A (en) | Two dimension confocal microscopynon-linear intensity scanning system and measurement method | |
| CN102854149A (en) | Measuring apparatus for continuous spectrum bidirectional scattering distribution function | |
| CN203053678U (en) | Detection calibration apparatus for multi-optical axis dynamic consistency | |
| CN210198958U (en) | Device for measuring road marking luminosity performance | |
| CN203745365U (en) | On-line glass color and reflectivity measurement system | |
| CN102841097B (en) | High-accuracy resetting technology-based damage threshold measuring method and device | |
| CN102162751B (en) | Method for measuring space optical distribution function | |
| CN207675937U (en) | Laser range finder verification system based on error cancellation principle | |
| WO2017120730A1 (en) | Novel method of measuring mode field diameter of single-mode fiber using optical integration technique employing gradually-changing-aperture | |
| CN206057558U (en) | A kind of tracking Stabilily parameter device | |
| CN103115876A (en) | Novel field bidirectional reflectance distribution function automatic measuring device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |