CN104006735A - Embedded type thick-film resistor strain sensor and manufacturing method of embedded type thick-film resistor strain sensor - Google Patents
Embedded type thick-film resistor strain sensor and manufacturing method of embedded type thick-film resistor strain sensor Download PDFInfo
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- CN104006735A CN104006735A CN201410262302.6A CN201410262302A CN104006735A CN 104006735 A CN104006735 A CN 104006735A CN 201410262302 A CN201410262302 A CN 201410262302A CN 104006735 A CN104006735 A CN 104006735A
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Abstract
The invention discloses an embedded type thick-film resistor strain sensor which is used for internal strain monitoring of a concrete structure. The embedded type thick-film resistor strain sensor comprises a stone substrate, a thick-film resistor area, a first electric conduction electrode area and a second electric conduction electrode area, wherein the thick-film resistor area is arranged on the lateral surface of the stone substrate, the first electric conduction electrode area is arranged on the lateral surface of the stone substrate and connected to one end of the thick-film resistor area, the second electric conduction electrode area is arranged on the lateral surface of the stone substrate and connected to the other end of the thick-film resistor area relative to the first electric conduction electrode area, a resistor electrode assembly is jointly formed by the second electric conduction electrode area, the first electric conduction electrode area and the thick-film resistor area, and wires are connected to the second electric conduction electrode area and the first electric conduction electrode area respectively. In addition, the invention further discloses a manufacturing method of the sensor. The embedded type thick-film resistor strain sensor has the advantages of being high in sensitivity, good in concrete matching performance, good in stability and good in durability.
Description
Technical field
The present invention relates to concrete strain monitoring field, be specifically related to a kind of embed-type thick-film resistor strain transducer and preparation method thereof.
Background technology
The structural behaviour of civil infrastructure is carried out to real-time detection and diagnosis, find in time the damage of structure, and assess its security, the performance change of predict and residual life are also made and are safeguarded decision, to improve engineering structure efficiency of operation, assuring the safety for life and property of the people has earth shaking meaning, has become the more and more urgent requirement of modern project.
General xoncrete structure health monitoring systems comprises sensing system, data acquisition, storage, analytic system, damage identification, model correction, safety estimation system, data management system.Sensing subsystem be health monitoring systems foremost with most basic subsystem, it is not only restricting the content of health monitoring, and the reliability of monitoring system and mission life have directly been determined and strain is the key parameter of evaluating material and structural damage, the application of strain transducer in civil engineering work is also extensive, comprises Fibre Optical Sensor, piezoelectric, metal strain meter, semiconductor strain gauge etc.Although strain transducer kind is numerous, all more or less there are separately some problems.
The maximum inferior position of Fibre Optical Sensor is that it needs large number quipments auxiliary mutually with it, arranges more difficultly, and cost is very high; There is aspect and the unmatched problems of original concrete material such as impedance, interface bonding and distortion in piezoelectric; And the sensitivity of metal strain meter is low, the coefficient of strain is only 2, adopts resin to paste, and is easily affected by the external environment and can be aging in time; The topmost shortcoming of semiconductor strain gauge is that temperature-coefficient of electrical resistance is large, and the non-linear comparison of strain one resistance variations is large.
Thick-film resistor refers to employing thick-film technique, and resistance, medium and conductor coating are printed on to formed resistance on ceramic substrate.Thick-film resistor has higher strain sensitivity, lower temperature-coefficient of electrical resistance and strain temperature coefficient.In addition, by manual or automatic silk-screen printing technique, through sintering, can realize production, and cost is lower.Thick-film resistor rete is thicker, and sintering rear surface is smooth, fine and close, wear-resisting, therefore has very high stability.When thick-film resistor produces deformation because of external force, the distribution of conductive particle in matrix will change, and then causes the variation of material resistance value, the piezoresistive effect of Here it is thick-film resistor.
Thick-film resistor is mainly used for preparing a resistive element in hybrid circuit, and its piezoresistive effect does not also obtain enough attention.Typical case's application of the piezoresistive effect of thick-film resistor is to prepare ceramic pressure sensor.The principle of this sensor is that thick-film resistor and electrode slurry are printed on bottom centre's film of the similar drum end of with of shape.When center rete is subject to gas or fluid pressure, rete produces certain amount of deflection, and two thick-film resistors in rete edge are in pressured state, and resistance reduces; Two thick-film resistors in center are in tension state, and resistance increases.The output voltage situation that gathers this electric bridge by external circuits, just can judge the situation of change of resistance, and then derives rete place force value.Such pressure transducer is only applicable to the pressure survey of gas or liquid, is not suitable for the pressure survey of solid interior.
Summary of the invention
In order to solve the problems of the technologies described above, the object of the present invention is to provide a kind of highly sensitive, with the embed-type thick-film resistor strain transducer of good, the good stability of concrete matching and good endurance, a kind of preparation method of this embed-type thick-film resistor strain transducer is also provided simultaneously.
In order to achieve the above object, technical scheme of the present invention is as follows:
Embed-type thick-film resistor strain transducer, for the strain monitoring of xoncrete structure inside, it comprises:
Stone material substrate;
Thick-film resistor district, it is arranged at the side surface of stone material substrate;
The first conductive electrode district, one end that it is arranged at the side surface of stone material substrate and is connected in thick-film resistor district;
The second conductive electrode district, it is arranged at the side surface of stone material substrate relative the first conductive electrode district and is connected in the other end in thick-film resistor district, the second conductive electrode district forms resistance electrode assembly together with the first conductive electrode district, thick-film resistor district, and is also all connected with wire in the second conductive electrode district and the first conductive electrode district.
Further, stone material substrate is lithotome substrate, ceramic bases or Behavior of Hardened Cement Paste substrate.
Further, resistance electrode assembly forms and is cubical sensor together with stone material substrate.
Further, between thick-film resistor district and the first conductive electrode district, the second conductive electrode district, be arranged with the first electrode resistance clinch and the second electrode resistance clinch.
The preparation method of embed-type thick-film resistor strain transducer, embed-type thick-film resistor strain transducer is for the strain monitoring of xoncrete structure inside, and it comprises the following steps:
1) choose stone material as base material, and milled processed is carried out in the surface of described stone material, form substrate;
2) according to required figure, on the surface of substrate, carry out the making of electrode, and carry out high temperature sintering together with substrate, in substrate, form conductive electrode district;
3) according to required figure, on the surface of substrate, carry out the making of resistance, and carry out high temperature sintering together with substrate, in substrate, form the thick-film resistor district that connects conductive electrode district;
4) in conductive electrode district, install and connect wire.
Further, the 2nd) and the 3rd) in step, high temperature sintering comprises three phases:
First stage, heat up, with the speed of 25-35 ℃/min, be warmed up to 800-900 ℃;
Subordinate phase, is incubated, and is incubated 8-12 minute after reaching the temperature of first stage;
Phase III, stops heating, and body of heater is lowered the temperature naturally, and whole process is at 110-130 minute.
Further, stone material is lithotome, pottery or Behavior of Hardened Cement Paste.
Further, substrate, conductive electrode district and thick-film resistor district form cube.
Further, conductive electrode district and thick-film resistor district is produced on the process that also comprises printing, levelling and oven dry before high temperature sintering.
Further, connect wire bonds in described conductive electrode district.
Adopt the beneficial effect of technique scheme to be: the present invention utilizes the strain sensitivity of thick-film resistor, and thick-film resistor is applied to sensory field, making obtains highly sensitive, and temperature-coefficient of electrical resistance is less, the strain transducer of good stability; The present invention simultaneously adopts the stone material that approaches concrete material as substrate, makes the mechanical property of sensor similar to concrete, has solved sensor and concrete matching problem, more makes sensor become a concrete part; In addition such sensor is not containing organic gel, and good endurance, has the life-span equal with concrete in theory.
Accompanying drawing explanation
Fig. 1 is the stereographic map of embed-type thick-film resistor strain transducer of the present invention.
Fig. 2 is the structural representation of embed-type thick-film resistor strain transducer of the present invention.
Fig. 3 is the work schematic diagram of embed-type thick-film resistor strain transducer of the present invention.
Fig. 4 is the performance chart of embed-type thick-film resistor strain transducer of the present invention.
Wherein, 1. resistance electrode assembly 11. thick-film resistor district 12. first conductive electrode district 13. second conductive electrode district 14. first electrode resistance clinch 15. second electrode resistance clinch 2. stone material substrate 3. wire F. loads.
Embodiment
Below in conjunction with accompanying drawing, describe the preferred embodiment of the present invention in detail.
In order to reach object of the present invention, as Figure 1-3, in the first embodiment of embed-type thick-film resistor strain transducer of the present invention, it is for the strain monitoring of xoncrete structure inside, and this sensor comprises: stone material substrate 2; Thick-film resistor district 11, it is arranged at the side surface of stone material substrate 2; The first conductive electrode district 12, one end that it is arranged at the side surface of stone material substrate 2 and is connected in thick-film resistor district 11; The second conductive electrode district 13, it is arranged at the side surface of stone material substrate 2 relative the first conductive electrode district 12 and is connected in the other end in thick-film resistor district 11, the second conductive electrode district 13 forms resistance electrode assembly 1 together with the first conductive electrode district 12, thick-film resistor district 11, and is also all connected with wire 3 in the second conductive electrode district 13 and the first conductive electrode district 12.
This sensor utilizes the strain sensitivity of thick-film resistor, and thick-film resistor is applied to sensory field, and making obtains highly sensitive, and temperature-coefficient of electrical resistance is less, the strain transducer of good stability; This sensor adopts the stone material that approaches concrete material as substrate simultaneously, makes the mechanical property of sensor similar to concrete, has solved sensor and concrete matching problem, more makes sensor become a concrete part; In addition such sensor is not containing organic gel, and good endurance, has the life-span equal with concrete in theory.
In order to optimize further the implementation result of above-mentioned the first embodiment, in the second embodiment of embed-type thick-film resistor strain transducer of the present invention, stone material substrate is lithotome substrate, ceramic bases or Behavior of Hardened Cement Paste substrate, lithotome substrate, ceramic bases or Behavior of Hardened Cement Paste substrate can form and concrete between more excellent matching, its mechanical property is closer to concrete.
In order to optimize further the implementation result of above-mentioned the first embodiment, as Figure 1-3, in the third embodiment of embed-type thick-film resistor strain transducer of the present invention, resistance electrode assembly 1 forms and is cubical sensor together with stone material substrate 2, the stress performance of cubical sensor is better, can bear stronger load.Certainly, except cube, we also can make variation to shape according to actual change such as spaces, and as circle, rectangle or other shapes, this is no longer going to repeat them.
In order to optimize further the implementation result of above-mentioned the first embodiment, as Figure 1-3, in the 4th kind of embodiment of embed-type thick-film resistor strain transducer of the present invention, between thick-film resistor district 11 and the first conductive electrode district 12, the second conductive electrode district 13, be arranged with the first electrode resistance clinch 14 and the second electrode resistance clinch 15.
Shown in Fig. 1-3, in the first embodiment of the preparation method of embed-type thick-film resistor strain transducer of the present invention, it has comprised following steps:
1) choose stone material as base material, and milled processed is carried out in the surface of described stone material, form substrate, i.e. stone material substrate 2;
2) according to required figure, on the surface of substrate, carry out the making of electrode, at the print electrode on surface slurry of described substrate, and carry out high temperature sintering together with substrate, in substrate, form conductive electrode district, i.e. the first conductive electrode district 12 and the second conductive electrode district 13;
3) according to required figure, on the surface of substrate, carry out the making of resistance, at the surface printing resistance slurry of described substrate, and carry out high temperature sintering together with substrate, in substrate, form the thick-film resistor district 11 that connects conductive electrode district 12,13;
4) in conductive electrode district, install and connect wire 3.
As shown in Figure 4, the coefficient of strain
simultaneously in conjunction with Fig. 3, the upper and lower surfaces of sensor are compression face, and when applying an evenly load F, sensor will produce strain stress, because the thickness of thick-film resistor is compared and can be ignored with size sensor, can think that the strain of thick-film resistor equals the strain of substrate; Thick-film resistor GF is the parameter that characterizes thick-film resistor strainometer resistance variations strain sensitive.It is defined as the relative variation (Δ R/R) of resistance and the ratio of axial strain (ε=Δ l/l): GF=(Δ R/R)/Δ l/l.
So now the situation of change by the tracerse survey resistance of drawing can converse strain stress now by the coefficient of strain, due to sensor and concrete matching better, can think that the strain of this locations of structures is ε.
This preparation method utilizes the strain sensitivity of thick-film resistor, and thick-film resistor is applied to sensory field, and making obtains highly sensitive, and temperature-coefficient of electrical resistance is less, the strain transducer of good stability; This preparation method adopts the stone material that approaches concrete material as substrate simultaneously, makes the mechanical property of sensor similar to concrete, has solved sensor and concrete matching problem, more makes sensor become a concrete part; In addition such sensor is not containing organic gel, and good endurance, has the life-span equal with concrete in theory.
In order to optimize further the implementation result of above-mentioned preparation method's the first embodiment, in the second embodiment of the preparation method of embed-type thick-film resistor strain transducer of the present invention, the 2nd) the and 3rd) in step, high temperature sintering comprises three phases: the first stage, heat up, with the speed of 25-35 ℃/min, be warmed up to 800-900 ℃; Subordinate phase, is incubated, and is incubated 8-12 minute after reaching the temperature of first stage; Phase III, stops heating, and body of heater is lowered the temperature naturally, and whole process is at 110-130 minute.As preferably, we can choose 850 ℃ in the first stage, are incubated 10 minutes in subordinate phase, in the phase III, lower the temperature 120 minutes, certainly, in practice, we also can need to carry out the adjustment in this scope according to actual processing, at this, will not enumerate.By the calcination of three steps, substrate is not decomposed at this temperature, volumetric expansion is less, intensity is higher and do not crack after calcination.
In order to optimize further the implementation result of above-mentioned preparation method's the first embodiment, in the second embodiment of the preparation method of embed-type thick-film resistor strain transducer of the present invention, stone material is lithotome, pottery or Behavior of Hardened Cement Paste.Lithotome, pottery or Behavior of Hardened Cement Paste can form and concrete between more excellent matching, its mechanical property is closer to concrete.
In order to optimize further the implementation result of above-mentioned preparation method's the first embodiment, in the third embodiment of the preparation method of embed-type thick-film resistor strain transducer of the present invention, as Figure 1-3, substrate, conductive electrode district and thick-film resistor district form cube.The stress performance of cubical sensor is better, can bear stronger load.Certainly, except cube, we also can make variation to shape according to actual change such as spaces, and as circle, rectangle or other shapes, this is no longer going to repeat them.
In order to optimize further the implementation result of above-mentioned preparation method's the first embodiment, in the preparation method's of embed-type thick-film resistor strain transducer of the present invention the 4th kind of embodiment, conductive electrode district and thick-film resistor district are produced on the process that also comprises printing, levelling and oven dry before high temperature sintering, this manufacturing process belongs to the content that those skilled in the art can be known according to prior art, and in this not go into detail.
In order to optimize further the implementation result of above-mentioned preparation method's the first embodiment, in the preparation method's of embed-type thick-film resistor strain transducer of the present invention the 5th kind of embodiment, connect wire and be also welded in described conductive electrode district, prevent wire damage.
Above-described is only the preferred embodiment of the present invention, it should be pointed out that for the person of ordinary skill of the art, without departing from the concept of the premise of the invention, can also make some distortion and improvement, and these all belong to protection scope of the present invention.
Claims (10)
1. embed-type thick-film resistor strain transducer, the strain monitoring for xoncrete structure inside, is characterized in that, comprising:
Stone material substrate;
Thick-film resistor district, it is arranged at the side surface of described stone material substrate;
The first conductive electrode district, one end that it is arranged at the side surface of described stone material substrate and is connected in described thick-film resistor district;
The second conductive electrode district, it is arranged at the side surface of described stone material substrate relatively described the first conductive electrode district and is connected in the other end in described thick-film resistor district, described the second conductive electrode district forms resistance electrode assembly with described the first conductive electrode district, described thick-film resistor together with district, and is also all connected with wire in described the second conductive electrode district and the first conductive electrode district.
2. embed-type thick-film resistor strain transducer according to claim 1, is characterized in that, described stone material substrate is lithotome substrate, ceramic bases or Behavior of Hardened Cement Paste substrate.
3. embed-type thick-film resistor strain transducer according to claim 1 and 2, is characterized in that, described resistance electrode assembly forms and is cubical sensor together with described stone material substrate.
4. embed-type thick-film resistor strain transducer according to claim 1, it is characterized in that, between described thick-film resistor district and described the first conductive electrode district, described the second conductive electrode district, be arranged with the first electrode resistance clinch and the second electrode resistance clinch.
5. the preparation method of embed-type thick-film resistor strain transducer, described embed-type thick-film resistor strain transducer for the strain monitoring of xoncrete structure inside, is characterized in that, comprises the following steps:
1) choose stone material as base material, and milled processed is carried out in the surface of described stone material, form substrate;
2) making at the enterprising column electrode in the surface of described substrate according to required figure, and carry out high temperature sintering together with described substrate, in described substrate, form conductive electrode district;
3) according to required figure, on the surface of described substrate, carry out the making of resistance, and carry out high temperature sintering together with described substrate, in described substrate, form the thick-film resistor district that connects described conductive electrode district;
4) in described conductive electrode district, install and connect wire.
6. the preparation method of embed-type thick-film resistor strain transducer according to claim 5, is characterized in that, the described the 2nd) and the 3rd) in step, described high temperature sintering comprises three phases:
First stage, heat up, with the speed of 25-35 ℃/min, be warmed up to 800-900 ℃;
Subordinate phase, is incubated, and is incubated 8-12 minute after reaching the temperature of first stage;
Phase III, stops heating, and body of heater is lowered the temperature naturally, and whole process is at 110-130 minute.
7. according to the preparation method of the embed-type thick-film resistor strain transducer described in claim 5 or 6, it is characterized in that, described stone material is lithotome, pottery or Behavior of Hardened Cement Paste.
8. according to the preparation method of the embed-type thick-film resistor strain transducer described in claim 5 or 6, it is characterized in that, described substrate, conductive electrode district and thick-film resistor district form cube.
9. according to the preparation method of the embed-type thick-film resistor strain transducer described in claim 5 or 6, it is characterized in that, described conductive electrode district and described thick-film resistor district are produced on the process that also comprises printing, levelling and oven dry before described high temperature sintering.
10. according to the preparation method of the embed-type thick-film resistor strain transducer described in claim 5 or 6, it is characterized in that, described connection wire bonds is in described conductive electrode district.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN113514163A (en) * | 2021-06-22 | 2021-10-19 | 苏州纳格光电科技有限公司 | Temperature detection device |
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