CN105424231A - High-precision ceramic pressure sensor - Google Patents
High-precision ceramic pressure sensor Download PDFInfo
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- CN105424231A CN105424231A CN201510979742.8A CN201510979742A CN105424231A CN 105424231 A CN105424231 A CN 105424231A CN 201510979742 A CN201510979742 A CN 201510979742A CN 105424231 A CN105424231 A CN 105424231A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/14—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/12—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in capacitance, i.e. electric circuits therefor
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Abstract
The invention discloses a high-precision ceramic pressure sensor which comprises a ceramic baseplate containing a concave hole and a plurality of electric-conductive through holes as well as a ceramic thin plate combined on the side of the ceramic baseplate where the concave hole is located, a measuring electrode and a first annular electrode winding the measuring electrode are disposed on a concave face of the concave hole, a moving electrode and a second annular electrode winding the moving electrode are disposed on the face of the ceramic thin plate which is opposite to the concave face, leading-out ends of the measuring electrode, the first annular electrode, the moving electrode and the second annular electrode are respectively led out from the other side opposite of the ceramic baseplate which is opposite to the concave hole via the corresponding electric-conductive through holes, the moving electrode and the measuring electrode constitute a measuring capacitor, the moving electrode and the first annular electrode constitute a reference capacitor, and the first annular electrode and the second annular electrode also constitute an isoelectric face through short circuits of the electric-conductive through holes. The high-precision ceramic pressure sensor disclosed by the invention can control an electrode spacing within a very high precision scope without introducing any second material, and has high sensitivity and good sealing effects.
Description
Technical field
The present invention relates to a kind of pressure transducer, particularly relate to a kind of high-precision ceramic pressure transducer.
Background technology
Between two potsherds, spacing size control accuracy ensures this type of ceramic pressure sensor direct capacitance, usable range and precision basic, the spacing of the second material formation required for parallel-plate is introduced in all leaning against on substrate of current control two potsherd distance method, picture ceramic bead, resin beads, low temperature co-fired (LTCC) potsherd, Tao Ci Duan, the materials such as spacer are by hot pressing mode and substrate, thin slice is sintered together, the final thickness introducing material is just required final spacing between parallel-plate, be stressed owing to introducing material Z-direction shrinkage factor, the uncertainty of the factor impacts such as sintering temperature, the method is difficult to the control ensureing final spacing, and sensor is follow-up need through compression shock repeatedly, the second material is easy to occur because of thermal expansivity coefficient, elastic modulus, the difference of the parameters such as compressive strength and porcelain body material and cause sensor failure.
Two porcelain body top electrode design are another key factors affecting the pressure transducer way of output and precision, at present this type of ceramic pressure sensor electrode all adopts the formation parallel-plate structure that to print electrode on a thick thin two panels pottery, electrode adopts a public electrode, a potential electrode, a reference electrode three-electrode structure, this structure can adopt single point of output, but the impact of stray capacitance on reference capacitance cannot be eliminated, when sensing chip self-capacitance is less, stray capacitance is often also large than chip selfcapacity, the final output accuracy of sensor is caused to be difficult to ensure.
Adopt air as the ceramic pressure sensor of two electric contrasted between solid dielectric, transducer dwell capacitance using air as electrode dielectric is less, output capacitance changing value is little at the same pressure for it, the defeated poor sensitivity of sensor, and under overload pressure effect, electrode there will be electric pole short circuit phenomenon, and the signal processing circuit of sensor that is easy to make of short circuit is burnt.
Summary of the invention
The object of the invention is to overcome the deficiencies in the prior art, a kind of high-precision ceramic pressure transducer is provided.
For achieving the above object, the present invention is by the following technical solutions:
A kind of high-precision ceramic pressure transducer, comprise the ceramic substrate with depression and multiple conductive through hole, and be incorporated into the ceramic sheet of that side at depression place of described ceramic substrate, the concave surface of described depression is provided with potential electrode and the first ring electrode around described potential electrode, the side that described ceramic sheet is relative with described concave surface is provided with traveling electrode and the second ring electrode around described traveling electrode, described potential electrode, described first ring electrode, the exit of described traveling electrode and described second ring electrode is drawn at the opposite side contrary with described depression of described ceramic substrate respectively by the conductive through hole of correspondence, described traveling electrode and described potential electrode are formed measures electric capacity, described traveling electrode and the first described ring electrode form reference capacitance, described first ring electrode and described second ring electrode also form equipotential face by conductive through hole short circuit.
Described first ring electrode has opening, described potential electrode draws potential electrode exit from the outward opening of described first ring electrode, described first ring electrode outwards draws the first ring electrode first exit in the opposite end of its opening, described second ring electrode has opening, described traveling electrode draws traveling electrode exit from the outward opening of described second ring electrode, described second ring electrode outwards draws the second ring electrode exit in the opposite end of its opening, described first ring electrode also outwards draws the first ring electrode second exit, described second ring electrode exit and described first ring electrode second exit alignment and by conductive through hole short circuit to form common electrode leads to client, preferably, described second ring electrode exit is electrically connected with described conductive through hole by the conductive pole inserting conductive through hole with described traveling electrode exit.
The external diameter of described first ring electrode and described second ring electrode is equal.
Described potential electrode is the circle concentric with described first ring electrode, described traveling electrode is the circle concentric with described second ring electrode, the external diameter of the first ring electrode and described second ring electrode described in the diameter < of traveling electrode described in the diameter < of described potential electrode, preferably, the external diameter of described first ring electrode and described second ring electrode is equal and concentric.
Described ceramic substrate is integrated by glass film sintering adhesive bonding between the periphery of described depression and described ceramic sheet, and preferably, the thickness of described glass film is at 10-12 μm.
The degree of depth of described depression is 40-200 μm, especially 40-100 μm, preferred 40-60 μm.
The gross thickness of described ceramic substrate at 2-5mm, the thickness of described ceramic sheet at 0.3-1.0mm, preferably at 0.3-0.6mm.
Described ceramic substrate is aluminium oxide or zirconia substrate.
Described traveling electrode and described second ring electrode are coated with dielectric layer, and preferably, described thickness of dielectric layers is at 0.5-1.0 μm.
Described potential electrode, described first ring electrode, described traveling electrode and described second ring electrode sintering rear electrode surfaceness are less than 0.3 μm, and THICKNESS CONTROL is at 0.5-1.5 μm.
Advantageous Effects of the present invention:
In the present invention, the spacing of electrode is directly formed by the depression of certain depth on ceramic substrate, the degree of depth generating depression can be controlled as required, not needing to introduce the second material just can control in very high accuracy rating electrode separation, and this scheme efficiently solves to be introduced the second material and cause the problem that electrode separation deviation is large at present on substrate; And the electrode separation of substrate and thin slice does not in use exist because thermal expansivity between material is inconsistent and causes sensor accuracy decline phenomenon.Electrode of substrate and ceramic sheet electrode all adopt bipolar electrode structure, wherein potential electrode and traveling electrode form measurement electric capacity, traveling electrode and the first ring electrode form reference capacitance, first ring electrode and the second ring electrode short circuit form equipotential face, this structure effectively can eliminate stray capacitance to the impact of measuring electric capacity and reference capacitance, makes output no matter adopt difference and or single point all has very high precision.
Therefore, the present invention effectively can solve current ceramic pressure sensor electrode structural designs cannot eliminate stray capacitance influences, between two parallel-plates, spacing control accuracy is poor, while introducing the second control of material spacing, substrate and thin slice are bonded together and cause bonding effect poor, product failure is caused due to match materials sex chromosome mosaicism in use procedure, adopt air to cause as dielectric layer transducer dwell electric capacity little, to export under sensitive low and overload pressure the problems such as easily short circuit.Compared with conventional ceramic pressure transducer, adopt the present invention, electrode separation precise control, sensitive height, sealing-in are effective, adopt single point can ensure very high precision with difference output, also have that structure is simple, overload-resistant, corrosion resistance is strong, capacitance temperature factor is low simultaneously, creep and little, the non-linear advantage such as good of sluggishness, in high and low temperature and different range ability, all there is very strong adaptability.
Further scheme can also obtain more advantage.Such as, the first ring electrode is equal with the second ring electrode external diameter, is conducive to the impact eliminating stray capacitance further, obtains higher precision.And for example, traveling electrode and and the second ring electrode on can cover the dielectric layer of a floor height dielectric constant, the existence of dielectric layer can improve direct capacitance and the pressure-dependent sensitivity of electric capacity of sensor, and substrate and thin electrode can be prevented again because of the short circuit phenomenon by overload pressure deforming contact simultaneously.
Accompanying drawing explanation
Fig. 1 is high-precision ceramic pressure transducer sectional view (cross section corresponds to the line direction of electrode leads to client 14,16 in Fig. 4) of an embodiment of the present invention;
Fig. 2 is another sectional view of high-precision ceramic pressure transducer (cross section corresponds to the line direction of electrode leads to client 18,19 in Fig. 5) of an embodiment of the present invention;
Fig. 3 is the ceramic substrate sectional view in an embodiment of the present invention;
Fig. 4 is the ceramic substrate electrode design planimetric map in an embodiment of the present invention;
Fig. 5 is the ceramic sheet electrode design planimetric map in an embodiment of the present invention;
Fig. 6 is the pressure-electric capacity curve of output of the invention process ratio sensor.
Embodiment
Below in conjunction with accompanying drawing, embodiments of the invention are elaborated.It is emphasized that following explanation is only exemplary, instead of in order to limit the scope of the invention and apply.
Refer to Fig. 1 to Fig. 5, in some embodiments, a kind of high-precision ceramic pressure transducer, comprise and there is depression 3 and multiple conductive through hole 10, 11, 12, the ceramic substrate 1 of 13, and be incorporated into the ceramic sheet 2 of that side at depression 3 place of ceramic substrate 1, the concave surface of depression 3 is provided with potential electrode 4 and the first ring electrode 5 around potential electrode 4, the side that ceramic sheet 2 is relative with concave surface is provided with traveling electrode 6 and the second ring electrode 7 being rotated around electrode 6, potential electrode 4, first ring electrode 5, the electrode leads to client 14 of traveling electrode 6 and the second ring electrode 7, 16, 18, 19 respectively by the conductive through hole 10 of correspondence, 11, 12, 13 opposite sides contrary with depression 3 extending to ceramic substrate 1, traveling electrode 6 and potential electrode 4 are formed measures electric capacity, traveling electrode 6 and the first ring electrode 5 form reference capacitance, first ring electrode 5 and the second ring electrode 7 also form equipotential face by conductive through hole 13 short circuit.According to the sensor of above-mentioned configuration, no matter adopt independent pressure/measurement electric capacity or pressure/measurement electric capacity-reference capacitance output, sensor has very high output accuracy.
In a preferred embodiment, first ring electrode 5 has opening, potential electrode 4 draws potential electrode exit 14 from the outward opening of the first ring electrode 5, first ring electrode 5 outwards draws the first ring electrode first exit 16 in the opposite end of its opening, second ring electrode 7 has opening, traveling electrode 6 draws traveling electrode exit 18 from the outward opening of the second ring electrode 7, second ring electrode 7 outwards draws the second ring electrode exit 19 in the opposite end of its opening, first ring electrode 5 also outwards draws the first ring electrode second exit 17, second ring electrode exit 19 and the first ring electrode second exit 17 align and by conductive through hole 13 short circuit to form common electrode leads to client, preferably, the second ring electrode exit 19 is electrically connected with conductive through hole 13,12 respectively by the conductive pole inserting conductive through hole 13,12 with traveling electrode exit 18 (electrode leads to client 15 shown in traveling electrode exit 18 corresponding diagram 4).
In a preferred embodiment, the external diameter of the first ring electrode 5 and the second ring electrode 7 is equal.
In a preferred embodiment, potential electrode 4 is the circle concentric with the first ring electrode 5, traveling electrode 6 is the circle concentric with the second ring electrode 7, diameter < first ring electrode 5 of the diameter < traveling electrode 6 of potential electrode 4 and the external diameter of the second ring electrode 7.More preferably, the external diameter of the first ring electrode 5 and the second ring electrode 7 is equal and concentric.
In a preferred embodiment, ceramic substrate 1 is integrated by glass film 9 sintering adhesive bonding between the periphery of depression 3 and ceramic sheet 2, and preferably, the thickness of glass film 9 is at 10-12 μm.
In a preferred embodiment, the degree of depth of the depression 3 of ceramic substrate 1 is 40-200 μm, especially 40-100 μm, is more preferably 40-60 μm.
In a preferred embodiment, the gross thickness of ceramic substrate 1 at 2-5mm, the thickness of ceramic sheet 2 at 0.3-1.0mm, preferably at 0.3-0.6mm.
Ceramic substrate 1 can adopt aluminium oxide or zirconia substrate.
In a preferred embodiment, traveling electrode 6 and the second ring electrode 7 are coated with dielectric layer 8, preferably, dielectric layer 8 thickness is at 0.5-1.0 μm.
In a preferred embodiment, potential electrode 4, first ring electrode 5, traveling electrode 6 and the second ring electrode 7 sinter rear electrode surfaceness and are less than 0.3 μm, and THICKNESS CONTROL is at 0.5-1.5 μm.
When making, can with aluminium oxide or Zirconium powder through the ceramic substrate with certain depth depression and through hole of granulation, dry-pressing formed squarely and ceramic sheet base substrate.Ceramic body sinters fine and close porcelain body at 1350-1450 DEG C, and the aluminium oxide after sintering or zirconia ceramics substrate gross thickness are at 2-5mm, and the concave surface degree of depth is at 100-150 μm, and sheet thickness is at 0.3-1.0mm.In order to the consistance of the precision and porcelain body surface that ensure pocket depth, the aluminium oxide after sintering or zirconia porcelain body are through grinding, polishing, and make porcelain body surfaceness be less than 0.3 μm, the degree of depth of depression is between 40-60 μm.
By adopt aluminium oxide or Zirconium powder in advance forming and sintering become there is the ceramic substrate of certain depth depression and through hole and smooth ceramic sheet, can by sputtering or bat printing at its surface coverage electrode pattern to ceramic substrate and ceramic sheet.Thin electrode surface also by sputtering or coating covering one floor height dielectric constant film, forms dielectric layer.The electrode leads to client of ceramic substrate is communicated with by through hole with the electrode leads to client of ceramic sheet, and the electrode separation of ceramic substrate and ceramic sheet is passed through, and the pocket depth of ceramic substrate own controls, thus without the need to introducing the second material to control two electrode separations.
During making, through potential electrode 4 on concave surface of grinding, the aluminium oxide of polishing or zirconia ceramics substrate 1 and the first ring electrode 5, and traveling electrode 6 on ceramic sheet and the second ring electrode 7, sputtering or bat printing mode can be adopted to print.Electrode material can adopt silver/platinum, and silver/platinum electrode is smooth after being incubated 30min sintering at 850 DEG C, be firmly attached to porcelain body on the surface, and sintering rear electrode surfaceness is less than 0.3 μm, and thickness of electrode preferably controls between 0.5-1.5 μm.Electrode leads to client on the ceramic substrate 1 be sintered into one and ceramic sheet 2 is by inserting conductive pole and injecting tin cream welding and conducting at conductive through hole.
Can sputter on aluminium oxide or zirconia thin electrode or apply and cover a layer thickness at the dielectric layer 8 of 0.5-1.0 μm.Dielectric layer 8 only covers the main part of traveling electrode 6 and the second ring electrode 7, not coated electrode exit 18,19.Dielectric layer 8 both can adopt inorganic materials, as stupalith, also can adopt high-molecular organic material.
Aluminium oxide or zirconia ceramics substrate and ceramic sheet are sintered together by glass film.Ceramic substrate, ceramic sheet and glass film between the two can by superimposed to parallactic angle 20 exactitude position, and glass film is incubated 3h and substrate and thin slice are sintered into one at 450 DEG C.
When making, can by aluminium oxide or Zirconium powder and solvent, bonding agent, plastifier, spreading agent, slurry made by defoamer by a certain percentage mixing and ball milling, slurry is through mist projection granulating glomeration particle, granulation powder becomes to have the base substrate of four recessed through holes and a concave surface through particular mold dry-pressing, base substrate is incubated 3h and sinters fine and close porcelain body at 1350-1450 DEG C, porcelain body thickness after sintering is at 2-5mm, the concave surface degree of depth is at 100-150 μm, this concave surface degree of depth is for bigger than normal as sensor cavities height, and there is certain error in diverse location, in order to ensure the consistance of the precision that final cavity height controls and each position, ceramic substrate after sintering and thin slice are through grinding, be polished to final thickness and surfaceness is less than 0.3 μm, grinding is according to corase grind, the order of fine grinding and fine grinding is carried out, fine grinding adamas size controlling below 0.5 μm between.Ceramic substrate after grinding, polishing covers potential electrode 4 and the first annular reference electrode 5 of one deck circle by bat printing or ion sputtering at its concave surface, the electrode leads to client 14 of potential electrode 4, the electrode leads to client 16,17 of the first ring electrode 5, and the electrode leads to client 15 corresponding to traveling electrode exit 18.Ceramic sheet covers one deck traveling electrode 6 and the second ring electrode 7 in the same way, the electrode leads to client 18 of traveling electrode 6, and the electrode leads to client 19 of the second ring electrode 7.
When making glass film, glass dust ball milling can be become after 1-3 μm of particle diameter powder and solvent, surfactant ball milling mixing by a certain percentage 4-6h, and then add bonding agent, spreading agent and plastifier secondary ball milling 8-12h and make slurry, glass paste by curtain coating, dry and be prepared into thickness at the film of 10-12 μm, film is through being laser-cut into the film square consistent with ceramic substrate size, pattern.
Then, the ceramic sheet of glass film, blanket dielectric layer is superimposed on ceramic substrate successively according to edge alignment mark 20, composition ceramic substrate, glass film and ceramic sheet three-decker, glass film through 450 DEG C insulation 3h sintering after substrate together with thin slice strong bonded.The glass film of bonded ceramics substrate 1 and ceramic sheet only need realize binding function, need not realize controlling substrate and thickness of electrode function, glass film base substrate can control in the very close limit of 10-12 μm, glass membrane just substrate together with thin slice good bond, just can ensure excellent bonding effect without the need to hot pressing and tool support through 450 DEG C of insulation 3h sintering.
When making glass film, the mixed oxidization zirconium ball ball milling 6-12 hour that also glass powder and certain proportion can be configured, make diameter of particle D50 at 1-2 μm, D90 is less than 3 μm, levigate rear glass dust is according to 10 parts of glass dust, the mass ratio first ball milling mixing 4-6 hour of 5 parts of solvents and 0.4 part of surfactant, and then add the bonding agent of 2 parts and the plastifier secondary ball milling of 2 parts makes casting slurry in 8-12 hour, slurry is through curtain coating, be dried into thickness at 10-12 μm of film, glass film is cut into and substrate size size by laser cutting machine, the film square that pattern is consistent.
Obtained glass film and ceramic sheet are superimposed on ceramic substrate successively according to alignment mark 20, form ceramic substrate 1, glass film 9, ceramic sheet 2 three-decker, glass film sinters 3h and ceramic substrate and thin slice is sintered into one at 450 DEG C, the electrode leads to client of ceramic substrate and ceramic sheet inserts stem by through hole and injects tin cream and makes traveling electrode exit 18 and potential electrode exit 14 form measurement capacity measurement end, traveling electrode exit 18 and the first annular electrode leads to client 16 form reference capacitance test lead, first annular electrode leads to client 17 becomes equipotential face with the second ring electrode exit 19 by injecting tin cream short circuit, the short circuit of the equal ring electrode of two external diameters effectively can eliminate the impact of ring electrode on reference capacitance.
Uniformly pressure is applied to the ceramic pressure sensor welding upper stem, testing apparatus is by measuring electric capacity and reference capacitance test lead pick-up transducers core body capacitance variation, no matter adopt single point or difference processing, pressure/capacitance variations relation curve as shown in Figure 6 can be exported.
Above content is in conjunction with concrete preferred implementation further description made for the present invention, can not assert that specific embodiment of the invention is confined to these explanations.For general technical staff of the technical field of the invention, without departing from the inventive concept of the premise, some simple deduction or replace can also be made, all should be considered as belonging to protection scope of the present invention.
Claims (10)
1. a high-precision ceramic pressure transducer, it is characterized in that, comprise the ceramic substrate with depression and multiple conductive through hole, and be incorporated into the ceramic sheet of that side at depression place of described ceramic substrate, the concave surface of described depression is provided with potential electrode and the first ring electrode around described potential electrode, the side that described ceramic sheet is relative with described concave surface is provided with traveling electrode and the second ring electrode around described traveling electrode, described potential electrode, described first ring electrode, the electrode leads to client of described traveling electrode and described second ring electrode is drawn at the opposite side contrary with described depression of described ceramic substrate respectively by the conductive through hole of correspondence, described traveling electrode and described potential electrode are formed measures electric capacity, described traveling electrode and the first described ring electrode form reference capacitance, described first ring electrode and described second ring electrode also form equipotential face by conductive through hole short circuit.
2. high-precision ceramic pressure transducer as claimed in claim 1, it is characterized in that, described first ring electrode has opening, described potential electrode draws potential electrode exit from the outward opening of described first ring electrode, described first ring electrode outwards draws the first ring electrode first exit in the opposite end of its opening, described second ring electrode has opening, described traveling electrode draws traveling electrode exit from the outward opening of described second ring electrode, described second ring electrode outwards draws the second ring electrode exit in the opposite end of its opening, described first ring electrode also outwards draws the first ring electrode second exit, described second ring electrode exit and described first ring electrode second exit alignment and by conductive through hole short circuit to form common electrode leads to client, preferably, described second ring electrode exit is electrically connected with described conductive through hole by the conductive pole inserting conductive through hole with described traveling electrode exit.
3. high-precision ceramic pressure transducer as claimed in claim 1, it is characterized in that, the external diameter of described first ring electrode and described second ring electrode is equal.
4. high-precision ceramic pressure transducer as claimed in claim 1, it is characterized in that, described potential electrode is the circle concentric with described first ring electrode, described traveling electrode is the circle concentric with described second ring electrode, the external diameter of the first ring electrode and described second ring electrode described in the diameter < of traveling electrode described in the diameter < of described potential electrode, preferably, the external diameter of described first ring electrode and described second ring electrode is equal and concentric.
5. high-precision ceramic pressure transducer as claimed in claim 1, it is characterized in that, described ceramic substrate is integrated by glass film sintering adhesive bonding between the periphery of described depression and described ceramic sheet, and preferably, the thickness of described glass film is at 10-12 μm.
6. high-precision ceramic pressure transducer as claimed in claim 1, it is characterized in that, the degree of depth of described depression is 40-200 μm, especially 40-100 μm, preferred 40-60 μm.
7. high-precision ceramic pressure transducer as claimed in claim 1, is characterized in that, the gross thickness of described ceramic substrate at 2-5mm, the thickness of described ceramic sheet at 0.3-1.0mm, preferably at 0.3-0.6mm.
8. high-precision ceramic pressure transducer as claimed in claim 1, it is characterized in that, described ceramic substrate is aluminium oxide or zirconia substrate.
9. high-precision ceramic pressure transducer as claimed in claim 1, it is characterized in that, described traveling electrode and described second ring electrode are coated with dielectric layer, and preferably, described thickness of dielectric layers is at 0.5-1.0 μm.
10. high-precision ceramic pressure transducer as claimed in claim 1, it is characterized in that, described potential electrode, described first ring electrode, described traveling electrode and described second ring electrode sintering rear electrode surfaceness are less than 0.3 μm, and THICKNESS CONTROL is at 0.5-1.5 μm.
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| CN105784212A (en) * | 2016-03-25 | 2016-07-20 | 深圳安培龙科技股份有限公司 | Ceramic capacitive pressure sensor and preparation method thereof |
| CN109211461A (en) * | 2017-07-05 | 2019-01-15 | 意法半导体股份有限公司 | For monitoring the capacitive pressure transducer of the especially building structure made of concrete |
| CN110044537A (en) * | 2019-03-27 | 2019-07-23 | 西人马联合测控（泉州）科技有限公司 | Pressure sensor and its manufacturing method |
| CN112834084A (en) * | 2020-12-29 | 2021-05-25 | 襄阳臻芯传感科技有限公司 | Ceramic capacitive pressure sensor core and manufacturing method thereof |
| CN113884225A (en) * | 2021-10-09 | 2022-01-04 | 广州九思科技有限公司 | Transient response ceramic capacitance pressure sensor and manufacturing method thereof |
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| CN113884225A (en) * | 2021-10-09 | 2022-01-04 | 广州九思科技有限公司 | Transient response ceramic capacitance pressure sensor and manufacturing method thereof |
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