CN103993267A - 一种镀膜机中补正板的设置修正方法 - Google Patents
一种镀膜机中补正板的设置修正方法 Download PDFInfo
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- CN103993267A CN103993267A CN201410182323.7A CN201410182323A CN103993267A CN 103993267 A CN103993267 A CN 103993267A CN 201410182323 A CN201410182323 A CN 201410182323A CN 103993267 A CN103993267 A CN 103993267A
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- 238000012937 correction Methods 0.000 title claims abstract description 43
- 238000000034 method Methods 0.000 title abstract description 20
- 238000007747 plating Methods 0.000 title abstract 2
- 238000001704 evaporation Methods 0.000 claims abstract description 105
- 230000008020 evaporation Effects 0.000 claims abstract description 104
- 238000000576 coating method Methods 0.000 claims description 37
- 239000011248 coating agent Substances 0.000 claims description 33
- 230000000903 blocking effect Effects 0.000 claims description 27
- 238000012986 modification Methods 0.000 claims description 20
- 230000004048 modification Effects 0.000 claims description 20
- 238000002715 modification method Methods 0.000 claims description 16
- 230000008901 benefit Effects 0.000 abstract description 2
- 238000002360 preparation method Methods 0.000 abstract 1
- 230000003595 spectral effect Effects 0.000 description 24
- 239000010408 film Substances 0.000 description 16
- 230000008569 process Effects 0.000 description 12
- 238000004611 spectroscopical analysis Methods 0.000 description 9
- 230000008859 change Effects 0.000 description 7
- 230000000875 corresponding effect Effects 0.000 description 7
- 238000005259 measurement Methods 0.000 description 7
- 238000001228 spectrum Methods 0.000 description 7
- 239000000758 substrate Substances 0.000 description 6
- 239000000463 material Substances 0.000 description 5
- 238000000151 deposition Methods 0.000 description 4
- 230000008021 deposition Effects 0.000 description 4
- 238000009826 distribution Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 230000004075 alteration Effects 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 229910009815 Ti3O5 Inorganic materials 0.000 description 1
- 239000011247 coating layer Substances 0.000 description 1
- 230000001276 controlling effect Effects 0.000 description 1
- 230000002596 correlated effect Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
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- 239000011521 glass Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
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- 230000010287 polarization Effects 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 238000000427 thin-film deposition Methods 0.000 description 1
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Abstract
Description
标记号 | 光谱特征点 |
1 | 499 |
2 | 509 |
3 | 515 |
4 | 519 |
5 | 519 |
6 | 535 |
7 | 515 |
标记号 | 夹角值 |
1 | △θ1 |
2 | △θ2 |
3 | △θ3 |
4 | △θ4 |
5 | △θ5 |
6 | △θ6 |
7 | △θ7 |
标记号 | 光谱特征点差 |
1 | △λ1 |
2 | △λ2 |
3 | △λ3 |
4 | △λ4 |
5 | △λ5 |
6 | △λ6 |
7 | △λ7 |
标记号 | 光谱特征点的差值与夹角差值的比值 |
1 | △λ1/△θ1 |
2 | △λ2/△θ2 |
3 | △λ3/△θ2 |
4 | △λ4/△θ3 |
5 | △λ5/△θ4 |
6 | △λ6/△θ5 |
7 | △λ7/△θ6 |
标记号 | 修正后的光谱特征点分布 |
1 | 515 |
2 | 515 |
3 | 514 |
4 | 512 |
5 | 512 |
6 | 513 |
7 | 512 |
Claims (4)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201410182323.7A CN103993267B (zh) | 2014-04-30 | 2014-04-30 | 一种镀膜机中补正板的设置修正方法 |
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Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201410182323.7A CN103993267B (zh) | 2014-04-30 | 2014-04-30 | 一种镀膜机中补正板的设置修正方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN103993267A true CN103993267A (zh) | 2014-08-20 |
CN103993267B CN103993267B (zh) | 2016-05-25 |
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CN201410182323.7A Active CN103993267B (zh) | 2014-04-30 | 2014-04-30 | 一种镀膜机中补正板的设置修正方法 |
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Country | Link |
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CN (1) | CN103993267B (zh) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109457221A (zh) * | 2019-01-23 | 2019-03-12 | 天宫真空科技(广州)有限公司 | 可调节的镀膜修正板机构 |
CN111676454A (zh) * | 2020-08-04 | 2020-09-18 | 光驰科技(上海)有限公司 | 一种节省真空镀膜室内空间的蒸发源配置结构及其设计方法 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003344647A (ja) * | 2002-05-22 | 2003-12-03 | Ulvac Japan Ltd | 薄片状または粉末状光学薄膜の製造方法及び製造装置 |
CN1840732A (zh) * | 2005-04-01 | 2006-10-04 | 亚洲光学股份有限公司 | 渐变式光学薄膜镀制装置及其冶工具套环 |
JP2008248301A (ja) * | 2007-03-30 | 2008-10-16 | Canon Inc | 蒸着装置及び蒸着方法 |
CN101407908A (zh) * | 2007-10-09 | 2009-04-15 | 鸿富锦精密工业(深圳)有限公司 | 补正板 |
JP2009079276A (ja) * | 2007-09-27 | 2009-04-16 | Showa Shinku:Kk | 真空蒸着装置 |
CN201713567U (zh) * | 2010-05-21 | 2011-01-19 | 光驰科技(上海)有限公司 | 双层膜厚均匀性修正板驱动装置 |
-
2014
- 2014-04-30 CN CN201410182323.7A patent/CN103993267B/zh active Active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003344647A (ja) * | 2002-05-22 | 2003-12-03 | Ulvac Japan Ltd | 薄片状または粉末状光学薄膜の製造方法及び製造装置 |
CN1840732A (zh) * | 2005-04-01 | 2006-10-04 | 亚洲光学股份有限公司 | 渐变式光学薄膜镀制装置及其冶工具套环 |
JP2008248301A (ja) * | 2007-03-30 | 2008-10-16 | Canon Inc | 蒸着装置及び蒸着方法 |
JP2009079276A (ja) * | 2007-09-27 | 2009-04-16 | Showa Shinku:Kk | 真空蒸着装置 |
CN101407908A (zh) * | 2007-10-09 | 2009-04-15 | 鸿富锦精密工业(深圳)有限公司 | 补正板 |
CN201713567U (zh) * | 2010-05-21 | 2011-01-19 | 光驰科技(上海)有限公司 | 双层膜厚均匀性修正板驱动装置 |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109457221A (zh) * | 2019-01-23 | 2019-03-12 | 天宫真空科技(广州)有限公司 | 可调节的镀膜修正板机构 |
CN109457221B (zh) * | 2019-01-23 | 2023-09-01 | 广州北辰工业自动化有限公司 | 可调节的镀膜修正板机构 |
CN111676454A (zh) * | 2020-08-04 | 2020-09-18 | 光驰科技(上海)有限公司 | 一种节省真空镀膜室内空间的蒸发源配置结构及其设计方法 |
CN111676454B (zh) * | 2020-08-04 | 2023-09-05 | 光驰科技(上海)有限公司 | 一种节省真空镀膜室内空间的蒸发源配置结构及其设计方法 |
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CN103993267B (zh) | 2016-05-25 |
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Effective date of registration: 20190506 Address after: Room 305, Building 2, No. 3877, Tingwei Highway, Jinshan Industrial Zone, Shanghai, 200540 Patentee after: Shanghai Fanfeng Vacuum Technology Co.,Ltd. Address before: 2004 No. 267 Yinlu, Baoshan City Industrial Park, Baoshan District, Shanghai Patentee before: Optorun (Shanghai) Co.,Ltd. |
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Address after: 233500 Jingliu Road, Economic Development Zone, Letu Town, Mengcheng County, Bozhou City, Anhui Province Patentee after: Anhui Fanfeng New Energy Technology Co.,Ltd. Address before: Room 305, Building 2, No. 3877, Tingwei Highway, Jinshan Industrial Zone, Shanghai, 200540 Patentee before: Shanghai Fanfeng Vacuum Technology Co.,Ltd. |