CN103985687B - Silver alloy solder wire for semiconductor package - Google Patents

Silver alloy solder wire for semiconductor package Download PDF

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Publication number
CN103985687B
CN103985687B CN201410040467.9A CN201410040467A CN103985687B CN 103985687 B CN103985687 B CN 103985687B CN 201410040467 A CN201410040467 A CN 201410040467A CN 103985687 B CN103985687 B CN 103985687B
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silver alloy
additive
welding lead
percentage
silver
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CN103985687A (en
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黄威智
洪子翔
彭政展
郑惠文
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Solar Applied Material Technology Corp
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Solar Applied Material Technology Corp
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/0002Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

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Abstract

A silver alloy solder wire for semiconductor packaging comprises a silver alloy component including silver, palladium, and a first additive, wherein the weight percentage of palladium is greater than 0 and not greater than 2wt% based on 100wt% of the weight percentage of the silver alloy component, the weight percentage of the first additive is not less than 0.001wt% and not greater than 2wt%, and the first additive is selected from indium, tin, scandium, bismuth, antimony, manganese, zinc, and a combination thereof. According to the invention, through the palladium and the first additive in a preset proportion, the stability of an arc formed by the silver alloy welding wire after wire bonding is effectively improved, and the arc is not easy to topple.

Description

Silver alloy welding lead for semiconductor packages
Technical field
The present invention relates to a kind of welding lead, more particularly to a kind of silver alloy welding lead for semiconductor packages.
Background technology
In technical field of semiconductor encapsulation, packaging technology mainly by way of welding, by a welding lead (or Lead) to electrically connect the pad of semiconductor chip (or IC chip) (pad), and the conducting wire of printed circuit board (PCB) (PCB), and Into a packaging semi-finished product;Then, the packaging semi-finished product is arranged to an accommodation space of an enclosed seat, then filled out in the accommodation space A potting resin is filled, and the potting resin is coated the packaging semi-finished product so that the packaging semi-finished product is isolated from the outside, into one Packaging part.
Because the conductance of golden (Au) is high and good stability, be not easy with other kinds of metal reaction, so conventional weldering It is typically based on gold thread to connect wire.However, well known, gold is the metal to worth a jew's eye, and printing is welded in when required The semiconductor chip quantity of circuit board is big or when required welding lead circuit is more, will cause the with high costs of overall package part.
Accordingly, the researcher of art transfers relatively low welding lead for development cost gold relatively to, because The conductance of silver is high, and as the main material of the golden welding lead of replacement.TaiWan, China patent publication the 201001652nd is just A kind of silver alloy wire is disclosed, mainly 0.05~5wt.% platinum, rhodium, osmium, gold, palladium is made an addition to high humidity environment is improved in silver Under reliability, suppress the solder side between argentiferous alloy lead wire and semiconductor chip connection pad and form oxide-film and galvanic corrosion occurs, with Prevent solder side from die crack occurs and improve weld strength, and further add the improvement such as calcium, barium welding containing silver alloy and lead The workability and tensile strength of line.
However, continue, with Moore ' s law micro sizes, relatively, to be welded in half in technology of semiconductor chips field The footpath of the welding lead of the pad of conductor chip is wide also smaller.Inventor find, although silver alloy wire occur, reduce wire rod into This and solve the problems, such as silver wire plasticity difference;However, wire diameter width must it is less and less in the case of, how to control conjunction Gold element and content make silver alloy welding lead be not easy to topple over after filling potting resin after wire bonding or wire bonding and tieed up The problem of holding loop height stability (namely arc stability), and then avoiding short circuit, it is important and urgently solve to turn into one Problem certainly.
The content of the invention
The silver alloy welding lead for semiconductor packages of the present invention, includes a silver alloy component, the silver alloy component Including silver, palladium, and one first additive, the percentage by weight based on the silver alloy component is in terms of 100wt%, the weight percent of palladium Than more than 0 and being not more than 2wt%, the percentage by weight of first additive is not less than 0.001wt%, and is not more than 2wt%, and this One additive is selected from indium, tin, scandium, bismuth, calcium halophosphate activated by antimony andmanganese, zinc, and wherein one combination.
The silver alloy welding lead for semiconductor packages of the present invention, the silver alloy component also include one second addition Agent, in terms of 100wt%, the percentage by weight of the Second addition is not less than the percentage by weight based on the silver alloy component 0.001wt%, no more than 2wt%, and the Second addition is selected from copper, nickel, cobalt, niobium, titanium, vanadium, and wherein one combination.
The silver alloy welding lead for semiconductor packages of the present invention, the weight of first additive and the Second addition Amount percentage summation is not more than 2wt%.
The silver alloy welding lead for semiconductor packages of the present invention, first additive are selected from indium, tin, zinc, and its In one combination.
The silver alloy welding lead for semiconductor packages of the present invention, the Second addition are selected from copper, nickel, and its group Close.
The beneficial effects of the present invention are:The palladium of the silver alloy component of silver alloy welding lead, first additive, and should When Second addition has specific percentage by weight, the tensile strength of the silver alloy wire can be made, stretch line outage, and weldering Loop height stability after conjunction is splendid, and is well suited for the packaging technology of the semiconductor chip of very small dimensions.
Brief description of the drawings
Nothing
Embodiment
About of the invention foregoing and other technology contents, feature and effect, in following two preferred embodiments specifically In bright, can clearly it present.
The present invention be used for semiconductor packages silver alloy welding lead purposes be in packaging technology in a welding manner A pad of semiconductor chip and the conducting wire of a circuit board are electrically connected, into a packaging semi-finished product (not shown).It is more detailed Carefully say, in technical field of semiconductor encapsulation, the mode of welding is based on wire bonding.And by the envelope after wire bonding Dress semi-finished product are arranged in an accommodation space of an enclosed seat, are refilled a potting resin, into a packaging part, and are completed to encapsulate The key step of technique.
One first preferred embodiment that the present invention is used for the silver alloy welding lead of semiconductor packages includes a silver alloy group Part, the silver alloy component includes silver, palladium, and one first additive, and first additive is selected from indium, tin, scandium, antimony, bismuth, manganese, zinc, And wherein one combination.In terms of 100wt%, the percentage by weight of palladium is more than 0 and is not more than percentage by weight by the silver alloy component 2wt%, the percentage by weight of first additive is not less than 0.001wt%, and is not more than 2wt%.It is it should be noted that preferable at this In embodiment, in addition to the palladium and first additive of the silver alloy component, remaining content for silver, and not using only containing silver as Limit, if the other kinds of physical property of the silver alloy welding lead need to be promoted, such as conductance, it also can optionally add predetermined ratio Suitable element.
The addition of wherein first additive is few, and learns the first additive and silver-colored solid solubility height, easy shape by phasor Into solution strengthening, and first additive is also equipped with the oxidation resistant characteristic of Assisted Ag so that silver alloy welding lead of the present invention leads to Cross the first additive of the predetermined ratio and improve toughness and loop height stability, and then make wire bonding in the semiconductor core The pad of piece and the arc that the silver alloy welding lead after the wire circuit of the printed circuit board (PCB) is formed are stable, solve afterwards The problem of potting resin is easily toppled over is filled in packaging technology.
When the percentage by weight of first additive is higher than 2wt%, although the loop height that can be improved after wire bonding is steady Qualitative (namely arc stability), is but easily caused that to stretch line outage too high;When the percentage by weight of first additive is less than During 0.001wt%, the content easily due to first additive in the silver alloy welding lead is too low and can not improve welding lead Toughness and wire bonding after loop height stability.
It is first preferably real with this that the present invention is used for one second preferred embodiment of the silver alloy welding lead of semiconductor packages It is similar to apply example, its difference is in also includes a Second addition in the silver alloy component, the Second addition be selected from copper, nickel, cobalt, Niobium, titanium, vanadium, and wherein one combination.Percentage by weight based on the silver alloy component is counted for 100wt%, and the percentage by weight of palladium is big In 0 and being not more than 2wt%, the percentage by weight of first additive is not less than 0.001wt%, and is not more than 2wt%, and this second adds Add the percentage by weight of agent to be not less than 0.001wt%, and be not more than 2wt%.
The atomic size of the Second addition is less than the atomic size of silver, and is difficult to form displaced type solid solution;Therefore, should The gap that Second addition be able to should be inserted between silver atoms forms intermittence solid solution, and then produces gap and strengthen and be dissolved with silver, both And the tensile strength of the silver alloy wire is lifted, while lift loop height stability after welding.However, work as the Second addition Percentage by weight when being more than 2wt%, though the tensile strength for improving silver alloy wire can not shape when can cause lead key closing process Into the welding lead of the arc of stable and high camber dispersion ratio;When the percentage by weight of the Second addition is less than 0.001wt% When, because its content is too low, and it can not effectively lift tensile strength.
It is preferred that the percentage by weight summation of first additive and the Second addition is not more than 2wt%.
More preferably, first additive is selected from indium, tin, zinc, and wherein one combination, and the Second addition is selected from copper, nickel, and It is combined.
It should be noted that current raw metal is mainly made through refining, so being just fine silver, with carrying now Refining technology, contain the micro trace impurity that can not be separated with being still difficult to avoid that, so silver-colored purity referred to herein is More than 99.99%, and ignore trace impurity therein;In addition, palladium, first additive, and the purity of the Second addition is also More than 99.99%.
<Concrete example and its test result>
Table 1 below is used in the concrete example 1~14 and comparative example 1~6 of the silver alloy welding lead of semiconductor packages for the present invention Component ratio and the test event that is carried out.Wherein, concrete example 1~5 hereby belongs to first preferred embodiment, concrete example 6~14 Hereby belong to second preferred embodiment, and carry out stretching line outage, tensile strength, and the test of loop height stability.
The preparation method of concrete example and comparative example be mainly first with purity more than 99.99% silver, palladium, and the first additive, Second addition is raw material.
First, the weight percent of each raw material listed by table 1 is first prepared;Then, it is cast into footpath a width of 8~ 10mm silver alloy bus;Continue, then continuous and rough Wiring technology for several times and middle bracing wire technique imposed to the silver alloy bus, So that the footpath area of the silver alloy bus reduces 97% compared with the silver alloy bus before bracing wire technique.
Then, annealing heat-treats are carried out to the silver alloy bus, then the silver alloy bus after the annealing is imposed it is continuous and Thin bracing wire technique and ultra-fine bracing wire technique for several times forms a silver alloy welding lead;Finally, then to the silver alloy welding lead Annealing heat-treats are carried out, and turn into silver alloy welding lead of the present invention.Wherein, to silver alloy bus or silver after bracing wire technique It is due to rough Wiring technology, middle bracing wire technique, thin bracing wire technique and ultra-fine that alloy welding lead, which carries out the reason for annealing heat-treats, Bracing wire technique belongs to continuous processing technology, when a silver alloy wire rod is after constantly deforming and being pullled, will gather in wire internal The substantial amounts of stress of product, and the bus pullled also hardens because dislocation (dislocation) is formed, at heat of annealing Reason rearranges for the atom of silver alloy wire rod, and discharges stress, softens the silver alloy welding lead afterwards.
Illustrate the method for testing of concrete example and comparative example below.It mainly shows silver-alloy brazing of the present invention with tensile strength The engineering properties of wire is connect, the quality of silver alloy welding lead of the present invention is shown to stretch line outage and loop height stability.
[method of testing of tensile strength]
Prepare the welding lead to be measured that length is 10cm, by the welding lead to be measured with 0.1~1 centimetre per minute of speed Rate is pulled down to broken string in atmospheric environment, and uses the tensile strength of the JIS Z2201 standard testing criterions welding lead.
[method of testing for stretching line outage]
Measure broken string frequency of the silver alloy bus of annealed heat treatment in thin bracing wire technique.The silver alloy is female Line carries out thin bracing wire technique and the fine rule length is pulled to more than 5000m, and measures the number that broken string occurs.
In table 1, broken string is represented 0 time with " ◎ ";Broken string is represented 1 time with "○";Broken string is represented 2~3 times with " △ ";With "×" represents that broken string is not less than 4 times;Wherein, break 0 time and represent that outage is extremely low;1 expression outage of broken string is relatively low;Broken string 2 ~3 times expression outage is O-level;Broken string represents that outage is high not less than 4 times.
[method of testing of loop height stability]
The silver alloy welding lead is welded on a pad and forms a bonding wire, is repeatedly formed 100 bonding wires altogether, and maintain The camber of each bonding wire is 100 μm.Especially, in this method of testing, the camber for being the unified bonding wire is 100 μm, certainly, Also the bonding wire that 100 camber are 200 μm, or the bonding wire test loop that camber usual in art is formed can be passed through High stability.
Then, using label as OLYMPUS, model BX51M light microscope (OpticalMicroscope, abbreviation OM the appearance difference of the bonding wire) is detected.
In table 1, the bonding wire that 0 appearance differs greatly is indicated with " ◎ ";Indicate that 1 appearance differs greatly with "○" Bonding wire;The bonding wire that 2 appearance differ greatly is indicated with " △ ";Indicate what not less than 3 appearance differed greatly with "×" Bonding wire;Wherein, the bonding wire for having 0 appearance to differ greatly represents that loop height stability is splendid;There is the weldering that 1 appearance differs greatly Line represents that loop height stability is preferable;The bonding wire for having 2 appearance to differ greatly represents that loop height stability is common;Have not small Loop height stability extreme difference is represented in the bonding wire that 3 appearance differ greatly.
Table 1
By the concrete example 1~6 of table 1, it will be seen that, when the percentage by weight of palladium is more than 0 and is not more than 2wt%, this first adds When adding the percentage by weight of agent not less than 0.001wt% and being not more than 2wt%, its tensile strength is all more than 17g, and stretches line outage And loop height stability also has common extremely splendid degree;Comparative example 4 is reviewed, when without first additive, its Stretch line outage, tensile strength and loop height stability and all do not reach preferable degree;Referring again to comparative example 2~3, when palladium Percentage by weight is more than 2wt%, or during without palladium, even if the first additive with 1wt%, its tensile strength also less than 16g, and Its loop height stability extreme difference;Referring again to comparative example 5~6, when the percentage by weight of first additive is more than 2wt%, just Calculator has 1.5wt% palladium, and its tensile strength stretches the degree that line outage is difference less than 15g.
Secondly, by concrete example 6~14 it will be seen that, when silver alloy welding lead of the present invention also includes the Second addition, The percentage by weight of the Second addition is not less than 0.001wt%, and when being not more than 2wt%, can lift loop height stability and arrive Degree up to " preferable " to " splendid ";By comparative example 6 it is known that when the Second addition is more than 2wt%, instead result in and stretch Line outage, tensile strength and loop height stability are all bad.
Although the test result of comparative example 1 shows that it still belongs to the scope for being suitable as welding lead, because gold is expensive Metal material, if containing gold welding lead cost certainly will be significantly increased in welding lead, and one of purpose of the present invention It is wire component ratio of the research and development substitution containing gold, so 1 use for reference only of comparative example.
Finally, it was found from concrete example 12, when first additive is tin and indium, the Second addition is copper, and this first When the summation of additive and the Second addition is not more than 2wt%, there is optimal test result, no matter represent in mechanical strength Or for welding quality, there is more prominent performance.
In summary, the palladium of the silver alloy component of silver alloy welding lead of the invention, first additive, and this second When additive has specific percentage by weight, the tensile strength of the silver alloy wire can be made, stretch line outage, and after soldering Loop height stability it is splendid, and the packaging technology of the semiconductor chip of very small dimensions is well suited for, so can reach really Into the purpose of the present invention.
Only just the specific configuration embodiment of the present invention adds and gives explanation above, without disobey the construction of the present invention with it is spiritual under, it is all It is skillful in those skilled in the art scholar, still does a variety of change and modification, this all change is still considered as with modification is covered under this case In row claim.

Claims (5)

  1. A kind of 1. silver alloy welding lead for semiconductor packages, it is characterised in that:The silver alloy welding lead is without gold, bag Containing a silver alloy component, the silver alloy component includes silver, palladium, and one first additive, the weight hundred based on the silver alloy component Divide than being counted for 100wt%, the percentage by weight of palladium is more than 0 and is not more than 2wt%, and the percentage by weight of first additive is not small In 0.001wt%, and it is not more than 2wt%, first additive is selected from indium, scandium, antimony, bismuth, manganese, zinc, and wherein one combination.
  2. 2. it is used for the silver alloy welding lead of semiconductor packages according to claim 1, it is characterised in that:The silver alloy component Also include a Second addition, the percentage by weight based on the silver alloy component is counted for 100wt%, the weight of the Second addition Percentage is not less than 0.001wt%, and no more than 2wt%, and the Second addition is selected from copper, nickel, cobalt, niobium, titanium, vanadium, and wherein One combination.
  3. 3. it is used for the silver alloy welding lead of semiconductor packages according to claim 2, it is characterised in that:First additive It is not more than 2wt% with the percentage by weight summation of the Second addition.
  4. 4. it is used for the silver alloy welding lead of semiconductor packages according to claim 1, it is characterised in that:First additive For indium, zinc, or its combination.
  5. 5. it is used for the silver alloy welding lead of semiconductor packages according to claim 2, it is characterised in that:The Second addition Selected from copper, nickel, and combinations thereof.
CN201410040467.9A 2013-02-07 2014-01-27 Silver alloy solder wire for semiconductor package Active CN103985687B (en)

Applications Claiming Priority (2)

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TW102104864A TWI536396B (en) 2013-02-07 2013-02-07 Silver alloy soldered wire for semiconductor packages

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CN108062991B (en) * 2016-11-08 2021-01-26 光洋应用材料科技股份有限公司 Silver alloy wire
CN108183075B (en) * 2017-12-27 2020-05-19 汕头市骏码凯撒有限公司 Silver alloy bonding wire and manufacturing method thereof
CN109763015A (en) * 2019-03-25 2019-05-17 杭州辰卓科技有限公司 A kind of damp type high thermal conductivity silver of resistance to brittle failure bonding line material used for electronic packaging
CN113906559A (en) * 2019-11-22 2022-01-07 日铁化学材料株式会社 Ag alloy bonding wire for semiconductor device
CN111599783B (en) * 2020-04-03 2022-05-17 广东佳博电子科技有限公司 Silver-platinum bonding wire utilizing silver-platinum coating and preparation process thereof
WO2022085365A1 (en) * 2020-10-20 2022-04-28 日鉄マイクロメタル株式会社 Ag ALLOY BONDING WIRE FOR SEMICONDUCTOR DEVICE

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JPWO2006132410A1 (en) * 2005-06-10 2009-01-08 田中貴金属工業株式会社 Silver alloy for electrode, wiring and electromagnetic shielding
KR101001700B1 (en) * 2007-03-30 2010-12-15 엠케이전자 주식회사 Ag-base alloy for semiconductor package
US8101123B2 (en) * 2009-03-23 2012-01-24 Lee Jun-Der Composite alloy bonding wire and manufacturing method thereof
JP5616165B2 (en) * 2010-08-24 2014-10-29 タツタ電線株式会社 Silver bonding wire
CN102154574A (en) * 2010-10-18 2011-08-17 东莞市正奇电子有限公司 Alloy wire for connecting semiconductor components

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TWI536396B (en) 2016-06-01
TW201432716A (en) 2014-08-16

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