CN103982432A - Pump rotor and manufacturing method thereof - Google Patents
Pump rotor and manufacturing method thereof Download PDFInfo
- Publication number
- CN103982432A CN103982432A CN201310049771.5A CN201310049771A CN103982432A CN 103982432 A CN103982432 A CN 103982432A CN 201310049771 A CN201310049771 A CN 201310049771A CN 103982432 A CN103982432 A CN 103982432A
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- blade body
- ribs
- rotor
- pump
- pump rotor
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- Structures Of Non-Positive Displacement Pumps (AREA)
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Abstract
The invention relates to a pump rotor and a manufacturing method thereof, the pump rotor comprises a blade main body and a plurality of support ribs, and the plurality of support ribs and the blade main body are integrally formed, wherein the plurality of rib supports are in the blade main body, and are respectively separated by a plurality of space units; the pump rotor can be manufactured by extrusion forming or injection forming, and has the advantages of high processing and forming speed, and less material use amount, light weight and small rotational inertia and the like due to the structural strength of the rotor, and the energy required to rotate the rotor can be reduced.
Description
Technical field
The present invention relates to a kind of pump rotor and manufacture method thereof, particularly relate to a kind of pump rotor for positive exhaust pump, similarly is blower rotor or dry type vacuum pump rotor, is that the mode of extruding or penetrating is shaped.
Background technique
In semiconductor foundry manufacturing process, often need to deposit certain material and move apart certain material on semiconductor crystal wafer or from semiconductor crystal wafer, wherein, the material that these making semiconductor crystal wafers use is relevant with the electrical properties of semiconductor crystal wafer.In order to deposit or remove these certain materials, multiple gases can be used to impact semiconductor crystal wafer, for example, for the depollution thing that gets on from semiconductor crystal wafer, processes gas and can be used for contact semiconductor wafer, with its pollutant reaction, to reach the effect of removal.Specifically, herein in reason program, semiconductor crystal wafer need be placed in an environment under low pressure can operation, and therefore, vacuum flush system is for producing an environment under low pressure in the manufacturing process that removes semiconductor crystal wafer.
So-called vacuum flush system at least needs a vacuum chamber and multiple vacuum pump, when operation, semiconductor crystal wafer is first placed in vacuum chamber, then, the gas of vacuum pump extracting vacuum chamber reaches a preassigned, reach after standard, semiconductor crystal wafer in an environment under low pressure, and can be further processed subsequently.
As from the foregoing, dry vacuum pump can be used for vacuum chamber to be evacuated to a low pressure, substantially, below five variablees can affect the cost vacuumizing: the gas flow that (1) wants to find time; (2) be written into the interior surface area of vacuum chamber; (3) be written into required low pressure in vacuum chamber; (4) resistance in pipeline and dry vacuum pump between loading vacuum chamber; And (5) are for loading the time required while providing low pressure in vacuum chamber.
Dry vacuum pump comprises rotor blade, by rotor blade, and extrusion fluid, to take fluid out of vacuum chamber; Generally speaking, the generation type of rotor blade utilizes cast iron casting method to make, and the made rotor blade intensity of cast iron casting method reaches, and is easy to volume production, therefore, is used in a large number; But, the rotor blade that cast iron casting method is made, its solid construction causes preponderance, and rotary inertia is large, need to expend a large amount of energy except driving to rotate, and rotary bearing and other Component are also more fragile, and its weight also causes the degree of difficulty of assembling.
For this reason, forefathers improve, and design the rotor blade that weight is lighter, please refer to Fig. 1, it is a kind of vacuum pump in U.S. Patent number US616945, wherein, this vacuum pump comprises roll-shell A11, comprises two rotation space A111 that are connected, two rotor blade A12 of the each placement of this rotation space A111, this rotor blade A12 is with panel beating bending, then process is welded and formation rotor case, then has been connected assembling with rotating shaft A13; Although the designed rotor blade weight of U.S. Patent number US616945 is lighter, a little less than but the made rotor blade of strength ratio past cast iron casting method is also wanted, easily torsional deformation in use of rotor blade, and manufacture process is complicated, need to pass through curved metal plate, cut out metal plate, location, welding smoothing, vacuumize etc., quite expend man-hour, quality is also difficult to control.
Therefore, because the above-mentioned existing vacuum pump of commonly using all has shortcoming with not enough, therefore the inventor of this case does one's utmost design, finally designs a kind of pump rotor of the present invention and manufacture method thereof.
Summary of the invention
Main purpose of the present invention is to provide a kind of pump rotor, and its weight is lighter, therefore, under same size, pump rotor of the present invention has lower rotary inertia, and the power of the required consumption of turning round is also lower, meanwhile, bearing is not fragile, reduces the degree of difficulty of assembling.
Secondary objective of the present invention is to provide a kind of manufacture method of pump rotor, and with the mode forming rotor blade of extruding or penetrating, production process is simple, and the pump rotor forming has enough intensity, can reduce manufacturing time, and workmanship is also more easy to control.
The object of the invention to solve the technical problems realizes by the following technical solutions.A kind of pump rotor proposing according to the present invention, for positive exhaust pump, it includes: blade body; Multiple ribs, one-body molded with this blade body, wherein, the plurality of ribs, in this blade body, and is separated by multiple space cells respectively; And rotating shaft, be formed at the central authorities of this blade body, and be connected with the plurality of ribs; Wherein, when this rotating shaft is rotated, can drive this blade body and the plurality of ribs to rotate.
The object of the invention to solve the technical problems also can be applied to the following technical measures to achieve further.
Aforesaid pump rotor, wherein, this blade body and the plurality of ribs can following any material be made: metallic material and plastic material.
Aforesaid pump rotor, wherein, this blade body and the plurality of ribs can following any mode be made: extrusion forming and ejection formation.
Aforesaid pump rotor, wherein, this space cell can be following any shape: triangle, square, honeycomb, ellipse and circular or its combination.
Aforesaid pump rotor, wherein, this space cell can filling plastic material.
Aforesaid pump rotor, wherein, this rotating shaft connects with the plurality of ribs in following any mode: hot jacket coordinates, bolt is locked admittedly, latch is combined and drive fit.
Aforesaid pump rotor, wherein this blade body 11 at least can be following any shape: Lu Shi and pawl formula.
The object of the invention to solve the technical problems also realizes by the following technical solutions.The manufacture method of a kind of pump rotor proposing according to the present invention, manufactures a kind of pump rotor for positive exhaust pump, and it comprises the following step: (01) confirms the shape of blade body and multiple space cells; (02) make this blade body, and in the multiple ribs of the inner formation of this blade body, and the plurality of ribs is separated by the plurality of space cell respectively; (03) judge whether to fill plastic material in space cell, if so, execution step (04), if not, execution step (05); (04) in this space cell, fill plastic material; (05) rotating shaft is assemblied in this blade body, and when this rotating shaft is rotated, can drives this blade body and the plurality of ribs to rotate.
The object of the invention to solve the technical problems also can be applied to the following technical measures to achieve further.
The manufacture method of aforesaid pump rotor, wherein, in step (02), more comprises following thin portion step: (21) select the shaping material of blade body and multiple ribs; (22) if select metal material to extrude figuration manufacture blade body and multiple ribs in material, if select plastic material can extrude or ejection forming method manufacture blade body and multiple ribs; And (23) form multiple space cells, and the plurality of ribs is separated by the plurality of space cell respectively.
The manufacture method of aforesaid pump rotor, wherein, in step (02), this space cell can be following any shape: triangle, square, honeycomb, ellipse and circular.
The manufacture method of aforesaid pump rotor, wherein, in step (05), this rotating shaft connects with the plurality of ribs in following any mode: hot jacket coordinates, bolt is locked admittedly, latch is combined and drive fit.
The manufacture method of aforesaid pump rotor, wherein, in step (01), this blade body at least can be following any shape: Lu Shi and pawl formula.
The manufacture method of aforesaid pump rotor, wherein, this rotor profile can be according to user demand or specification, and selecting does not need processing, or is worked into desired precision, meets various user demands.
The manufacture method of aforesaid pump rotor, wherein, after completing steps (5), can utilize cutting or other processing method that rotor blade is processed into the different multipiece rotor of thickness.
The manufacture method of aforesaid pump rotor wherein, can first complete the different rotor blade of various thickness when step (2), so, when step (5), different-thickness rotor blade and rotating shaft can be assembled into multi-section type rotor.
By technique scheme, a kind of pump rotor of the present invention and manufacture method thereof at least have following advantages and beneficial effect:
(1) the present invention can use lightweight material, similarly is aluminum alloy or plastic material, and so, the present invention manufactures to extrude shaping or injection molding, and speed of production is fast, can reduce manufacturing process needed time; And the rotary inertia of lightweight material is little, can reduce and rotate required energy, rotary bearing and other Component are more not fragile yet, in addition, the degree of difficulty also can reduce assembling time.
(2) the present invention uses lightweight material, then the ribs of the present invention of arranging in pairs or groups, and can increase the intensity of pump rotor of the present invention, can be applied in positive exhaust pump, neither can produce malformation for the variation of pressure reduction and the load of running.
Above-mentioned explanation is only the general introduction of technical solution of the present invention, in order to better understand technological means of the present invention, and can be implemented according to the content of specification, and for above and other object of the present invention, feature and advantage can be become apparent, below especially exemplified by preferred embodiment, and coordinate accompanying drawing, be described in detail as follows.
Brief description of the drawings
Fig. 1 is a kind of vacuum pump in U.S. Patent number US616945;
Fig. 2 A is that the first embodiment's of a kind of pump rotor of the present invention master looks schematic diagram;
Fig. 2 B is the first embodiment's of a kind of pump rotor of the present invention schematic side view;
Fig. 3 A is the schematic diagram of the pump rotor of tool triangle space of the present invention unit;
Fig. 3 B is the schematic diagram of the pump rotor of tool circular space of the present invention unit;
Fig. 3 C is the schematic diagram of the pump rotor of tool square space of the present invention unit;
Fig. 4 is that the second embodiment's of a kind of pump rotor of the present invention master looks schematic diagram;
Fig. 5 A is that blade body of the present invention is the schematic diagram of pawl formula structure;
Fig. 5 B is that blade body of the present invention is the schematic diagram of Shandong formula structure;
Fig. 6 is the 3rd embodiment's of a kind of pump rotor of the present invention schematic side view;
Fig. 7 is the manufacturing step flow chart of a kind of pump rotor of the present invention;
Fig. 8 is the thin portion step of the manufacturing process step (S02) of a kind of pump rotor of the present invention.
10: pump rotor 11: blade body
12: ribs 13: space cell
14: rotating shaft 15: plastic materials
A11: roll-shell A111: rotation space
A12: rotor blade A13: rotating shaft
Step (S01) to (S05) is the manufacturing step flow process of a kind of pump rotor of the present invention;
Step (S21) to (S023) is the thin portion step of the manufacturing process step (S02) of a kind of pump rotor of the present invention.
Embodiment
Technological means and effect of taking for reaching predetermined goal of the invention for further setting forth the present invention, below in conjunction with accompanying drawing and preferred embodiment, to a kind of pump rotor and its embodiment of manufacture method, structure, manufacture method, step, feature and effect thereof of proposing according to the present invention, be described in detail as follows.
First, introducing primary component of the present invention, refer to Fig. 2 A and Fig. 2 B, is respectively that the first embodiment's of a kind of pump rotor of the present invention master looks schematic diagram, and the first embodiment's of a kind of pump rotor of the present invention schematic side view.As shown in Figure 2 A and 2 B, a kind of pump rotor 10 of the present invention, includes: blade body 11; Multiple ribs 12, one-body molded with this blade body 11, wherein, the plurality of ribs 12, in this blade body 11, and is separated by multiple space cells 13 respectively; And rotating shaft 14, be formed at the central authorities of this blade body 11, and be connected with the plurality of ribs 12; Wherein, when this rotating shaft 14 is rotated, can drive this blade body 11 and the plurality of ribs 12 to rotate; In the present invention, this blade body 11 and the plurality of ribs 12 can be iron, aluminum material and plastic material are made, wherein, while selecting iron or aluminum material, can extrusion forming pump rotor 10 of the present invention, and select when plastic material, can extrude or ejection formation pump rotor 10 of the present invention; In addition, this rotating shaft 14 can hot jacket coordinates, bolt is locked admittedly, latch in conjunction with and any mode such as drive fit be connected with the plurality of ribs 12.
In Fig. 2 A, this space cell 13 be shaped as honeycomb, in fact, in the present invention, the shape of space cell can be changeable, please refer to Fig. 3 A to Fig. 3 C, is respectively the schematic diagram of the pump rotor of tool triangle of the present invention, circle and square space unit.As shown in Fig. 3 A to Fig. 3 C, in the present invention, the space cell 13 of this pump rotor 10 can be triangle, circle and square, triangle and square, and its direction and shape can be adjusted on demand, there is no and limit at this, in fact,, except shape provided by the present invention, space cell also can be made into other polygonal, as long as can meet extruding method, or ejection forming method.
Next please see Figure 4, is that the second embodiment's of a kind of pump rotor of the present invention master looks schematic diagram.As shown in Figure 4, in the present invention, user, according to demand, controls rotary inertia below default value, suitably in this space cell 13, inserts plastic material 15, this plastic material be can thermoplastic or the heating of thermosetting forming mode be shaped, in second embodiment of the invention, this plastic material 15 can be industrial epoxy glue (Epoxy), but, this is only a wherein embodiment of the present invention, not for limiting the scope of the claims of the present invention; Filling suitably after plastic material 15, due to not intercommunication of end face, can improve pumping efficiency, and reduce gas leakage doubt, meanwhile, because plastic material weight is lighter, quality is less, and therefore, the variation of rotary inertia is little.
Blade body of the present invention can be applicable to Shandong formula blower, also can be applicable to pawl formula pump, please refer to Fig. 5 A and Fig. 5 B, be respectively that blade body of the present invention is the schematic diagram of pawl formula structure, and blade body of the present invention is the schematic diagram of Shandong formula structure.As shown in Fig. 5 A and Fig. 5 B, blade body 11 of the present invention can be made into pawl formula (Claw) structure or Shandong formula (Roots) structure according to demand, can be because of shape difference, and affect manufacturing technology steps, or the intensity of pump rotor; Blade body 11 in Fig. 5 A is applied in pawl formula pump, its space cell 13 is designed to honeycomb shape, blade body 11 in Fig. 5 B is cloverleaf, can be applicable to Shandong formula blower or vacuum pump, its space cell 13 is designed to honeycomb shape equally, certainly, space cell 13 can be designed to other shape, for example circular, square, oval etc.In addition, please refer to Fig. 6, is the 3rd embodiment's of a kind of pump rotor of the present invention schematic side view, and this structure is multipiece rotor structure, can be used for positive exhaust pressure miniature pump.The production method of this rotor can have two kinds, and the first is shaped or injection molding one rotor blade for using to extrude, and after be combined, recycles cutting or rotor blade is processed into the different multipiece rotor of thickness by other processing method with rotating shaft; The second is first to utilize to extrude or penetrate to produce the different rotor blade of thickness, utilize that hot jacket coordinates, bolt locks admittedly, latch in conjunction with or drive fit and rotating shaft carry out combination, reached the object of multipiece rotor.
In addition, according to the Environmental Conditions of rotor and the difference of specification requirement, the profile of this rotor can not need processing, or is worked into specification precision according to demand, can meet various different application process requirements.
Please refer to Fig. 7, is the manufacturing technology steps flow chart of a kind of pump rotor of the present invention.In order to reach above-mentioned purpose, the invention provides a kind of manufacture method of pump rotor, as shown in Figure 7, comprise the following step: the shape ok that (S01) confirms blade body and multiple space cells; (S02) make this blade body, and in the multiple ribs of the inner formation of this blade body, and the plurality of ribs is separated by the plurality of space cell respectively; (S03) judge whether to fill plastic material in space cell, if so, execution step (S04), if not, execution step (S05); (S04) in this space cell, fill plastic material; (S05) rotating shaft is assemblied in to this blade body, and when this rotating shaft is rotated, can drive this blade body and the plurality of ribs to rotate: in step (S01), this blade body at least can be Shandong formula (Roots) and pawl formula (Claw); Wherein, in step (S02), this space cell can be triangle, square, honeycomb, ellipse or circular; In step (S05), this rotating shaft can hot jacket coordinates, bolt is locked admittedly, latch in conjunction with or the mode such as drive fit is connected with the plurality of ribs.
In step of the present invention (S02), also can segment again following steps, please refer to Fig. 8, it is the thin portion step of the manufacturing process step (S02) of a kind of pump rotor of the present invention, wherein, the thin portion step of the manufacturing process step (S02) of a kind of pump rotor of the present invention comprises: the material of (S21) selecting blade body and multiple ribs; (S22) if select metal material to extrude figuration manufacture blade body and multiple ribs in material, if select plastic material can extrude or ejection forming method manufacture blade body and multiple ribs; (S23) form multiple space cells, and the plurality of ribs is separated by the plurality of space cell respectively.
The above, it is only preferred embodiment of the present invention, not the present invention is done to any pro forma restriction, although the present invention discloses as above with preferred embodiment, but not in order to limit the present invention, any those skilled in the art, do not departing within the scope of technical solution of the present invention, when can utilizing the method for above-mentioned announcement and technology contents to make a little change or being modified to the equivalent embodiment of equivalent variations, in every case be the content that does not depart from technical solution of the present invention, any simple modification of above embodiment being done according to technical spirit of the present invention, equivalent variations and modification, all still belong in the scope of technical solution of the present invention.
Claims (15)
1. a pump rotor, for positive exhaust pump, is characterized in that it includes:
Blade body;
Multiple ribs, one-body molded with this blade body, wherein, the plurality of ribs, in this blade body, and is separated by multiple space cells respectively; And
Rotating shaft, is formed at the central authorities of this blade body, and is connected with the plurality of ribs;
Wherein, when this rotating shaft is rotated, can drive this blade body and the plurality of ribs to rotate.
2. pump rotor according to claim 1, is characterized in that this blade body and the plurality of ribs can following any material make: metallic material and plastic material.
3. pump rotor according to claim 1, is characterized in that this blade body and the plurality of ribs can following any mode make: extrusion forming and ejection formation.
4. pump rotor according to claim 1, is characterized in that this space cell can be following any shape: triangle, square, honeycomb, ellipse and circular or its combination.
5. pump rotor according to claim 1, is characterized in that this space cell can filling plastic material.
6. pump rotor according to claim 1, is characterized in that this rotating shaft connects with the plurality of ribs in following any mode: hot jacket coordinates, bolt is locked admittedly, latch is combined and drive fit.
7. pump rotor according to claim 1, is characterized in that this blade body 11 at least can be following any shape: Lu Shi and pawl formula.
8. a manufacture method for pump rotor, manufactures a kind of pump rotor for positive exhaust pump, it is characterized in that it comprises the following step:
(01) shape of confirmation blade body and multiple space cells;
(02) make this blade body, and in the multiple ribs of the inner formation of this blade body, and the plurality of ribs is separated by the plurality of space cell respectively;
(03) judge whether to fill plastic material in space cell, if so, execution step (04), if not, execution step (05);
(04) in this space cell, fill plastic material;
(05) rotating shaft is assemblied in this blade body, and when this rotating shaft is rotated, can drives this blade body and the plurality of ribs to rotate.
9. the manufacture method of pump rotor according to claim 8, is characterized in that in step (02), more comprises following thin portion step:
(21) the shaping material of selection blade body and multiple ribs;
(22) if select metal material to extrude figuration manufacture blade body and multiple ribs in material, if select plastic material can extrude or ejection forming method manufacture blade body and multiple ribs; And
(23) form multiple space cells, and the plurality of ribs is separated by the plurality of space cell respectively.
10. the manufacture method of pump rotor according to claim 8, is characterized in that, in step (02), this space cell can be following any shape: triangle, square, honeycomb, ellipse and circular.
The manufacture method of 11. pump rotors according to claim 8, is characterized in that, in step (05), this rotating shaft connects with the plurality of ribs in following any mode: hot jacket coordinates, bolt is locked admittedly, latch is combined and drive fit.
The manufacture method of 12. pump rotors according to claim 8, is characterized in that, in step (01), this blade body at least can be following any shape: Lu Shi and pawl formula.
The manufacture method of 13. pump rotors according to claim 8, is characterized in that this rotor profile can be according to user demand or specification, and selecting does not need processing, or is worked into desired precision, meets various user demands.
The manufacture method of 14. pump rotors according to claim 8, is characterized in that after completing steps (5), can utilize cutting or other processing method that rotor blade is processed into the different multipiece rotor of thickness.
The manufacture method of 15. pump rotors according to claim 8, it is characterized in that can first completing the different rotor blade of various thickness when step (2), so, when step (5), different-thickness rotor blade and rotating shaft can be assembled into multi-section type rotor.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310049771.5A CN103982432B (en) | 2013-02-07 | 2013-02-07 | A kind of pump rotor and manufacture method thereof |
| TW102106361A TWI496991B (en) | 2013-02-07 | 2013-02-23 | A pump rotor and manufacturing method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310049771.5A CN103982432B (en) | 2013-02-07 | 2013-02-07 | A kind of pump rotor and manufacture method thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103982432A true CN103982432A (en) | 2014-08-13 |
| CN103982432B CN103982432B (en) | 2016-09-28 |
Family
ID=51274543
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310049771.5A Expired - Fee Related CN103982432B (en) | 2013-02-07 | 2013-02-07 | A kind of pump rotor and manufacture method thereof |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN103982432B (en) |
| TW (1) | TWI496991B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111810403A (en) * | 2019-04-10 | 2020-10-23 | 亚台富士精机股份有限公司 | Rotor and Lu's pump |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6466488A (en) * | 1987-09-05 | 1989-03-13 | Daihatsu Motor Co Ltd | Composite rotor for supercharger |
| CN101033747A (en) * | 2007-04-23 | 2007-09-12 | 马容 | Pawl-type dry vacuum pump rotor |
| CN201007276Y (en) * | 2007-02-13 | 2008-01-16 | 聂如国 | Roter used for rotary type displacement pump |
| CN201196148Y (en) * | 2008-04-15 | 2009-02-18 | 聂如国 | Rotor used for cam type rotor pump |
| CN101655089A (en) * | 2009-08-25 | 2010-02-24 | 山东理工大学 | Ceramic rotor of energy recovery pump and preparation method thereof |
| CN202157958U (en) * | 2011-07-06 | 2012-03-07 | 宁波得利时泵业有限公司 | Rotors of bi-rotor pump |
| CN202451426U (en) * | 2012-01-09 | 2012-09-26 | 山东长青金属表面工程有限公司 | Roots blower rotor with anti-corrosion spraying coating |
-
2013
- 2013-02-07 CN CN201310049771.5A patent/CN103982432B/en not_active Expired - Fee Related
- 2013-02-23 TW TW102106361A patent/TWI496991B/en not_active IP Right Cessation
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6466488A (en) * | 1987-09-05 | 1989-03-13 | Daihatsu Motor Co Ltd | Composite rotor for supercharger |
| CN201007276Y (en) * | 2007-02-13 | 2008-01-16 | 聂如国 | Roter used for rotary type displacement pump |
| CN101033747A (en) * | 2007-04-23 | 2007-09-12 | 马容 | Pawl-type dry vacuum pump rotor |
| CN201196148Y (en) * | 2008-04-15 | 2009-02-18 | 聂如国 | Rotor used for cam type rotor pump |
| CN101655089A (en) * | 2009-08-25 | 2010-02-24 | 山东理工大学 | Ceramic rotor of energy recovery pump and preparation method thereof |
| CN202157958U (en) * | 2011-07-06 | 2012-03-07 | 宁波得利时泵业有限公司 | Rotors of bi-rotor pump |
| CN202451426U (en) * | 2012-01-09 | 2012-09-26 | 山东长青金属表面工程有限公司 | Roots blower rotor with anti-corrosion spraying coating |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111810403A (en) * | 2019-04-10 | 2020-10-23 | 亚台富士精机股份有限公司 | Rotor and Lu's pump |
Also Published As
| Publication number | Publication date |
|---|---|
| CN103982432B (en) | 2016-09-28 |
| TWI496991B (en) | 2015-08-21 |
| TW201432147A (en) | 2014-08-16 |
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| CF01 | Termination of patent right due to non-payment of annual fee |