CN103943306A - Magnetic element and manufacturing method of magnetic element - Google Patents

Magnetic element and manufacturing method of magnetic element Download PDF

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Publication number
CN103943306A
CN103943306A CN201410091056.2A CN201410091056A CN103943306A CN 103943306 A CN103943306 A CN 103943306A CN 201410091056 A CN201410091056 A CN 201410091056A CN 103943306 A CN103943306 A CN 103943306A
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China
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magnetic core
conductive layer
accepting groove
magnetic
substrate
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CN201410091056.2A
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CN103943306B (en
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郭权
朱勇发
骆孝龙
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XFusion Digital Technologies Co Ltd
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Huawei Technologies Co Ltd
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Abstract

The invention discloses a magnetic element. The magnetic element comprises resin padding, a base plate and a magnetic core. The resin padding covers the magnetic core and is buried in a containing groove in the base plate. The base plate is provided with a first conductive hole, a second conductive hole, a first conductive layer and a second conductive layer. The first conductive layer is provided with a first conductive wire, the second conductive layer is provided with a second conductive wire, and the first conductive wire, the first conductive hole, the second conductive wire and the second conductive hole are connected to form a coil winding the magnetic core. The invention further provides a manufacturing method of the magnetic element. The magnetic element is buried in the containing groove of the base plate, the resin padding wraps the magnetic core to protect the magnetic core, material cost is saved, and the reliability and consistency of the magnetic element are enhanced.

Description

The manufacture method of magnetic element and magnetic element
Technical field
The present invention relates to magnetic element, relate in particular to and a kind ofly will in magnetic core, be embedded in magnetic element in circuit board and preparation method thereof.
Background technology
Traditional magnetic element is to adopt hand winding to make, by artificial coiling, then carry out epoxy resin gluing and encapsulation, main form has the QFN encapsulation of quad flat non-pin, the BGA encapsulation of aerofoil profile or ball grid array forms corresponding magnetic element, and the magnetic element consistency of performance that hand winding is made is lower, simultaneously, in recent years along with the increase of human cost, its cost also can increase accordingly.
So automated production becomes the focus of this area research, automation SMD type magnetic device goes out thereupon.Adopt automation SMD generally to adopt UI magnetic core combined magnetic circuit, by the Automated winding that carries out U-shaped, by pin thermal compression welding, be then bonded into I sheet.The magnetic element of UI magnetic core combined magnetic circuit has leakage field risk, its crosstalk and EMI performance be subject to element individuality and layout designs differentia influence larger, the poor reliability of magnetic element.
Summary of the invention
Embodiment of the present invention technical problem to be solved is, provides in a kind of magnetic core and is embedded in magnetic element in circuit board and preparation method thereof.
To achieve these goals, embodiment of the present invention provides following technical scheme:
On the one hand, the invention provides a kind of magnetic element, comprise magnetic core, described magnetic element also comprises substrate and resin extender, described substrate is provided with accepting groove and the first conductive hole and the second conductive hole, described accepting groove comprises the first side wall and the second sidewall, described the first side wall is in the face of described the second sidewall, described the first conductive hole is near described the first side wall and be positioned at the periphery of described accepting groove, described the second conductive hole is near the periphery of described the second sidewall and close described accepting groove, described resin extender and described magnetic core are contained in described accepting groove, and described resin extender is coated described magnetic core, described substrate also comprises the first conductive layer and the second conductive layer, described magnetic core is between described the first conductive layer and described the second conductive layer, on described the first conductive layer, establish the first conductor wire, described the first conductor wire is electrically connected between described the first conductive hole and described the second conductive hole, on described the second conductive layer, establish the second conductor wire, described the second conductor wire is electrically connected between described the first conductive hole and described the second conductive hole, described the first conductor wire, described the first conductive hole, described the second conductor wire and described the second conductive hole are connected to form the coil that is wound around described magnetic core jointly.
Wherein, the quantity of described coil is one, magnetic core described in described coil continuous winding.
Wherein, the quantity of described coil is at least two, the described magnetic core of the staggered winding of described at least two coils.
Wherein, the quantity of described coil is at least two, and described magnetic core comprises the first paragraph magnetic core and the second segment magnetic core that are oppositely arranged, described at least two coils be wrapped in respectively on institute's first paragraph magnetic core and described second segment magnetic core on.
Wherein, the distance between the second sidewall of the distance between described magnetic core and the first side wall of described accepting groove and described magnetic core and described accepting groove has one at least and is greater than 2mil(mil).
Wherein, described magnetic element also comprises resin insulating barrier, and described resin insulating barrier is between described resin extender and described the first conductive layer.
Wherein, described resin extender in abutting connection with the surface of described resin insulating barrier and the surface co-planar of described substrate.
Wherein, described resin insulating barrier in abutting connection with the surface of described the first conductive layer and the surface co-planar of described substrate.
Wherein, the initial permeability of described magnetic core is not less than 100, and the coefficient of expansion of described substrate is not higher than 300ppm, and the hardness of described resin extender 30 is not higher than Shao Shi 90D.
Wherein, the material of described magnetic core is MnZn or nickel zinc or amorphous or metal-powder-core.
On the other hand, the present invention also provides a kind of manufacture method of magnetic element, comprising:
Mill out accepting groove at substrate, the shape of described accepting groove and the shape of magnetic core match;
Resin extender is filled in described accepting groove;
Described magnetic core is imbedded in described accepting groove, and described resin extender is coated described magnetic core;
Solidify described resin extender;
On described substrate, hole and electroplate described substrate, form the first conductive hole and the second conductive hole, and formation the first conductive layer and the second conductive layer, described magnetic core is between described the first conductive layer and described the second conductive layer, described accepting groove comprises the first side wall and the second sidewall, described the first side wall is in the face of described the second sidewall, described the first conductive hole is near described the first side wall and be positioned at the periphery of described accepting groove, described the second conductive hole near described the second sidewall and be positioned at the periphery of described accepting groove;
On described the first conductive layer and described the second conductive layer, make circuit, on described the first conductive layer, form the first conductor wire, on described the second conductive layer, form the second conductor wire, described the first conductor wire, described the first conductive hole, described the second conductor wire and described the second conductive hole are connected to form the coil that is wound around described magnetic core jointly.
Wherein, the quantity of described coil is one, magnetic core described in described coil continuous winding.
Wherein, the quantity of described coil is at least two, the described magnetic core of the staggered winding of described at least two coils.
Wherein, the quantity of described coil is at least two, and described magnetic core comprises the first paragraph magnetic core and the second segment magnetic core that are oppositely arranged, described at least two coils be wrapped in respectively on institute's first paragraph magnetic core and described second segment magnetic core on.
Wherein, solidify after described resin extender, also comprise:
If the described resin extender after solidifying is higher than described substrate surface, carry out nog plate processing, make the resin extender in described accepting groove solidify rear coplanar with described substrate;
If the described resin extender after solidifying is lower than described substrate surface, at the surface-coated resin insulating barrier of described resin extender, described the first conductive layer is electroplated the surface at described resin insulating barrier.
Wherein, described resin insulating barrier is liquid resin material, after applying, solidifies.
Wherein, described resin insulating barrier is semi-solid preparation insulating material, adopts the form of pressing to be formed between described resin extender and described the first conductive layer.
Wherein, the distance between the second sidewall of the distance between described magnetic core and the first side wall of described accepting groove and described magnetic core and described accepting groove has at least one to be greater than 2mil.
Wherein, the initial permeability of described magnetic core is not less than 100, and the coefficient of expansion of described substrate is not higher than 300ppm, and the hardness of described resin extender 30 is not higher than Shao Shi 90D.
Wherein, the viscosity of described resin extender 30 is no more than 20000cps.
The present invention also provides a kind of manufacture method of magnetic element, comprising:
Mill out accepting groove at substrate, the shape of described accepting groove and the shape of magnetic core match;
Resin extender is filled in described accepting groove;
Described magnetic core is imbedded in described accepting groove;
Solidify described resin extender, described resin extender is coated described magnetic core;
Surface at described substrate and described resin extender increases resin insulating barrier;
On described substrate, hole;
Electroplate described substrate, form the first conductive hole and the second conductive hole, and formation the first conductive layer and the second conductive layer, described magnetic core is between described the first conductive layer and described the second conductive layer, described accepting groove comprises the first side wall and the second sidewall, described the first side wall is in the face of described the second sidewall, and described the first conductive hole is near described the first side wall and be positioned at the periphery of described accepting groove, and described the second conductive hole is near described the second sidewall and be positioned at the periphery of described accepting groove;
On described the first conductive layer and described the second conductive layer, make circuit, on described the first conductive layer, form the first conductor wire, on described the second conductive layer, form the second conductor wire, described the first conductor wire, described the first conductive hole, described the second conductor wire and described the second conductive hole are connected to form the coil that is wound around described magnetic core jointly.
The present invention, by by being embedded in the accepting groove of substrate in magnetic element and utilizing the coated magnetic core protection of resin extender magnetic core, has saved Material Cost, has promoted reliability and the consistency of magnetic element.
Brief description of the drawings
In order to be illustrated more clearly in the embodiment of the present invention or technical scheme of the prior art, to the accompanying drawing of required use in embodiment or description of the Prior Art be briefly described below, apparently, accompanying drawing in the following describes is only some embodiments of the present invention, for those of ordinary skill in the art, do not paying under the prerequisite of creative work, can also obtain according to these accompanying drawings other accompanying drawing.
Fig. 1 is the generalized section of magnetic element provided by the invention;
Fig. 2 is the schematic diagram of the accepting groove of offering on substrate of magnetic element provided by the invention;
Fig. 3 is the schematic diagram that the magnetic core of magnetic element provided by the invention arranges coil around;
Fig. 4 is the schematic diagram of the first execution mode of the mode of the coil winding of magnetic element provided by the invention;
Fig. 5 is the schematic diagram of the second execution mode of the mode of the coil winding of magnetic element provided by the invention;
Fig. 6 is the schematic diagram of the third execution mode of the mode of the coil winding of magnetic element provided by the invention;
Fig. 7 A to Fig. 7 F is the schematic diagram of each step of the manufacture method of magnetic element provided by the invention.
Embodiment
Below in conjunction with the accompanying drawing in the embodiment of the present invention, the technical scheme in the embodiment of the present invention is clearly and completely described, obviously, described embodiment is only the present invention's part embodiment, instead of whole embodiment.Based on the embodiment in the present invention, those of ordinary skill in the art, not making the every other embodiment obtaining under creative work prerequisite, belong to the scope of protection of the invention.
Refer to Fig. 1, Fig. 2 and Fig. 3, a kind of magnetic element 100 provided by the invention comprises magnetic core 10, substrate 20 and resin extender 30, and described substrate 20 is provided with accepting groove 22 and the first conductive hole 24 and the second conductive hole 26.Figure 2 shows that the schematic diagram of offering accepting groove 22 on substrate 20, on the substrate 20 shown in Fig. 2, establish four accepting grooves 22.Described accepting groove 22 comprises the first side wall 224 and the second sidewall 226, and the first side wall 224 is in the face of the second sidewall 226.Described the first conductive hole 24 is near described the first side wall 224 and be positioned at the periphery of accepting groove 22, described the second conductive hole 26 is near described the second sidewall 226 and be positioned at the periphery of accepting groove 22, described resin extender 30 is contained in described accepting groove 22 with described magnetic core 10, and the coated described magnetic core 10 of described resin extender 30, described substrate 20 also comprises the first conductive layer 23 and the second conductive layer 25, described magnetic core 10 is between described the first conductive layer 23 and described the second conductive layer 25, on described the first conductive layer 23, establish the first conductor wire 232, described the first conductor wire 232 is electrically connected between described the first conductive hole 24 and described the second conductive hole 26, on described the second conductive layer 25, establish the second conductor wire 252, described the second conductor wire 252 is electrically connected between described the first conductive hole 24 and described the second conductive hole 26, described the first conductor wire 232, described the first conductive hole 24, described the second conductor wire 252 and described the second conductive hole 26 are connected to form the coil that is wound around described magnetic core 10 jointly.In present embodiment, accepting groove 22 be shaped as annular.The shape of described annular accepting groove 22 can be that polygon annular can be also annular, accepting groove 22 shown in Fig. 1 and Fig. 2 is polygon annular, comprise four limits, in the time that accepting groove 22 is arranged to annular, described the first conductive hole 24 is distributed in the area that the first side wall 224 surrounds.
Figure 3 shows that the schematic diagram that coil is set around magnetic core 10, the first conductor wire 232 spaces are arranged in the first conductive layer 23, the second conductor wire 252 spaces are arranged in the second conductive layer 25, the first conductor wire 232 and the second conductor wire 252 form by the mode of circuit printed line cabling, on substrate 20, copper facing forms the first conductive layer 23 and the second conductive layer 25, etch away part copper by etched mode again, thereby form the first conductor wire 232 and the second conductor wire 252.
The present invention is by being embedded in the accepting groove 22 of substrate 20 and utilizing the coated magnetic core 10 of resin extender 30 to protect magnetic core 10 in magnetic element 100; resin extender 30 is the coated protective layer that forms around magnetic core 10; in manufacturing process, resin extender 30 can avoid magnetic core 10 to occur crackle as buffer protection layer.The present invention is by the coil that is wound around magnetic core 10 that is connected to form between the first conductor wire 232, the second conductor wire 252 and the first conductive hole 24 and the second conductive hole 26 that arrange on substrate 20, save Material Cost, meanwhile, reliability and the consistency of magnetic element 100 have been promoted.
The arrangement mode between quantity and the varying number coil of coil is determined in the coiling of magnetic core 10 coil around according to different demands.Fig. 4-Figure 6 shows that mode of three kinds of coil windings.
In execution mode as shown in Figure 4, the quantity of described coil W is one, magnetic core 10 described in described coil W continuous winding.
In execution mode shown in Fig. 5 and Fig. 6, include two coil W1, W2.Wherein, Figure 6 shows that: described two coil W1, the described magnetic core 10 of the staggered winding of W2, that coil configuration in the schematic diagram of coil is around set is identical with the magnetic core 10 shown in Fig. 3.Wherein, Figure 5 shows that: described magnetic core 10 comprises the first paragraph magnetic core 12 and the second segment magnetic core 14 that are oppositely arranged, described two coil W1, W2 be wrapped in respectively on institute's first paragraph magnetic core 12 and described second segment magnetic core 14 on.Make the coil of varying number on substrate 20 time, can be produced on the same layer of substrate 20, also can be produced on the different layers of substrate 20.The quantity of described coil can be also more than two, in Fig. 5 and Fig. 6 with two coils for illustrating, when the quantity of coil is when more than two, the mode of its winding is identical with the canoe of two coils, and the staggered meaning of plural coil is exactly that plural coil is wrapped in magnetic core 10 around simultaneously.
In present embodiment, the distance between the distance between described magnetic core 10 and the first side wall 224 of described accepting groove 22 and the second sidewall 226 of described magnetic core 10 and described accepting groove 22 has at least one to be greater than 2mil.
As shown in Figure 1, described magnetic element 100 also comprises resin insulating barrier 40, and described resin insulating barrier 40 is between described resin extender 30 and described the first conductive layer 23.
In a kind of execution mode, the surface in abutting connection with described resin insulating barrier 40 of described resin extender 30 and the surface co-planar of described substrate 20.
In another kind of execution mode, the surface in abutting connection with described the first conductive layer 23 of described resin insulating barrier 40 and the surface co-planar of described substrate 20.
The initial permeability of described magnetic core 10 provided by the invention is not less than 100, and the coefficient of expansion of described substrate 20 is not higher than 300ppm, and the hardness of described resin extender 30 is not higher than Shao Shi 90D.
The material of described magnetic core 10 is MnZn or nickel zinc or amorphous or metal-powder-core.
On the other hand, the present invention also provides a kind of manufacture method of magnetic element 100, refers to Fig. 7 A to Fig. 7 F, and the manufacture method of magnetic element 100 comprises the steps:
Mill out accepting groove 22 at substrate 20, the shape of the shape of described accepting groove 22 and magnetic core 10 matches, as shown in Fig. 7 A, Fig. 7 B and Fig. 2.In present embodiment, accepting groove 22 be shaped as annular.The shape of described annular accepting groove 22 can be that polygon annular can be also annular, accepting groove 22 shown in Fig. 1 and Fig. 2 is polygon annular, comprise four limits, in the time that accepting groove 22 is arranged to annular, described the first conductive hole 24 is distributed in the area that the first side wall 224 surrounds.
As shown in Fig. 7 C, resin extender 30 is filled in described accepting groove 22; Described magnetic core 10 is imbedded in described accepting groove 22 to the coated described magnetic core 10 of described resin extender 30; Solidify described resin extender 30.
In other execution mode, also can first magnetic core 10 be imbedded in described accepting groove 22, then resin extender 30 is filled in described accepting groove 22 and makes described resin extender 30 be coated described magnetic core 10.
As shown in Fig. 7 D and Fig. 7 E, on described substrate 20, hole and electroplate described substrate 20, form the first conductive hole 24 and the second conductive hole 26, and formation the first conductive layer 23 and the second conductive layer 25, described magnetic core 10 is between described the first conductive layer 23 and described the second conductive layer 25, described accepting groove 22 comprises the first side wall 224 and the second sidewall 226, and the first side wall 224 is in the face of the second sidewall 226.Described the first conductive hole 24 is near described the first side wall 224 and be positioned at the periphery of accepting groove 22, and described the second conductive hole 26 is near described the second sidewall 226 and be positioned at the periphery of accepting groove 22.
As shown in Figure 7 F, on described the first conductive layer 23 and described the second conductive layer 25, make circuit, on described the first conductive layer 23, form the first conductor wire 232, on described the second conductive layer 25, form the second conductor wire 252, described the first conductor wire 232, described the first conductive hole 24, described the second conductor wire 252 and described the second conductive hole 26 are connected to form the coil that is wound around described magnetic core 10 jointly.
Particularly, in a kind of execution mode, substrate 20 is for covering the sheet material of copper in two sides, magnetic core 10 is imbedded after accepting groove 22 cured resin filler 30 to first boring, re-plating substrate 20, after plating, the hole of boring just forms described the first conductive hole 24 and the second conductive hole 26, forms the first conductive layer 23 and the second conductive layer 25, then on the first conductive layer 23 and the second conductive layer 25, form the first conductor wire 232 and the second conductor wire 252 by etched mode on the surface of substrate 20 simultaneously.In another kind of execution mode, substrate 20 covers the sheet material of copper for one side, make accepting groove 22 on the surface of not covering copper, magnetic core 10 is imbedded after accepting groove 22 cured resin filler 30, on the first individual surface of offering accepting groove 22 on substrate 20, increase insulating resin layer, insulating resin layer covered substrate 20 and resin extender 30, hole again, next carry out electroplating substrate 20, after plating, the hole of boring just forms described the first conductive hole 24 and the second conductive hole 26, form the first conductive layer 23 and the second conductive layer 25 simultaneously on the surface of substrate 20, on the first conductive layer 23 and the second conductive layer 25, form again the first conductor wire 232 and the second conductor wire 252 by etched mode.
The manufacture method of magnetic element 100 provided by the invention is by being embedded in the accepting groove 22 of substrate 20 and utilizing the coated magnetic core 10 of resin extender 30 to protect magnetic core 10 in magnetic element 100; resin extender 30 is the coated protective layer that forms around magnetic core 10; in manufacturing process, resin extender 30 can avoid magnetic core 10 to occur crackle as buffer protection layer.The present invention is by the coil that is wound around magnetic core 10 that is connected to form between the first conductor wire 232, the second conductor wire 252 and the first conductive hole 24 and the second conductive hole 26 that arrange on substrate 20, save Material Cost, meanwhile, reliability and the consistency of magnetic element 100 have been promoted.
The arrangement mode between quantity and the varying number coil of coil is determined in the coiling of magnetic core 10 coil around according to different demands.Fig. 4-Figure 6 shows that the mode of three kinds of coil windings, is respectively: the quantity of described coil W is one, magnetic core 10 described in described coil W continuous winding; The quantity of described coil is two, described two coil W1, the described magnetic core 10 of the staggered winding of W2.The quantity of described coil is two, and described magnetic core 10 comprises the first paragraph magnetic core 12 and the second segment magnetic core 14 that are oppositely arranged, described two coil W1, W2 be wrapped in respectively on institute's first paragraph magnetic core 12 and described second segment magnetic core 14 on.The quantity of described coil can be also more than two, in Fig. 5 and Fig. 6 with two coils for illustrating, when the quantity of coil is when more than two, the mode of its winding is identical with the canoe of two coils.
The manufacture method of magnetic element 100 provided by the invention, solidifying after described resin extender 30, also comprises the steps:
If the described resin extender 30 after solidifying is higher than described substrate 20 surfaces, carry out nog plate processing, make the resin extender 30 in described accepting groove 22 solidify rear coplanar with described substrate 20;
If the described resin extender 30 after solidifying is lower than described substrate 20 surfaces, at the surface-coated resin insulating barrier 40(of described resin extender 30 as shown in Figure 1), described the first conductive layer 23 is electroplated on the surface of described resin insulating barrier 40, the surface co-planar of the surface of described resin insulating barrier 40 and described substrate 20.
The method of particularly, making described resin insulating barrier 40 comprises following two kinds of modes according to the difference of the material of resin insulating barrier 40.Described resin insulating barrier 40 is liquid resin materials, after applying, solidifies, and namely first liquid resin insulating barrier 40 is coated in to the step that resin extender 30 surfaces are cured again.Described resin insulating barrier 40 is semi-solid preparation insulating material, adopts the form of pressing to be formed between described resin extender 30 and described the first conductive layer 23.
On substrate 20, make in the process of accepting groove 22, with reference to the size of magnetic core 10, make the size of accepting groove 22 be greater than the size of magnetic core 10, in present embodiment, the distance between the distance between described magnetic core 10 and the first side wall 224 of described accepting groove 22 and the second sidewall 226 of described magnetic core 10 and described accepting groove 22 has at least one to be greater than 2mil.
The initial permeability of described magnetic core 10 is not less than 100, and the coefficient of expansion of described substrate 20 is not higher than 300ppm, and the hardness of described resin extender 30 is not higher than Shao Shi 90D.The viscosity of described resin extender 30 is no more than 20000cps.
The present invention, by by being embedded in the accepting groove 22 of substrate 20 in magnetic element 100 and utilizing the coated magnetic core 10 of resin extender 30 to protect magnetic core 10, has saved Material Cost, has promoted reliability and the consistency of magnetic element 100.
Above-described execution mode, does not form the restriction to this technical scheme protection range.The amendment done within any spirit at above-mentioned execution mode and principle, be equal to and replace and improvement etc., within all should being included in the protection range of this technical scheme.

Claims (22)

1. a magnetic element, comprise magnetic core, it is characterized in that, described magnetic element also comprises substrate and resin extender, described substrate is provided with accepting groove and the first conductive hole and the second conductive hole, described accepting groove comprises the first side wall and the second sidewall, described the first side wall is in the face of described the second sidewall, described the first conductive hole is near described the first side wall and be positioned at the periphery of described accepting groove, described the second conductive hole is near described the second sidewall and be positioned at the periphery of described accepting groove, described resin extender and described magnetic core are contained in described accepting groove, and described resin extender is coated described magnetic core, described substrate also comprises the first conductive layer and the second conductive layer, described magnetic core is between described the first conductive layer and described the second conductive layer, on described the first conductive layer, establish the first conductor wire, described the first conductor wire is electrically connected between described the first conductive hole and described the second conductive hole, on described the second conductive layer, establish the second conductor wire, described the second conductor wire is electrically connected between described the first conductive hole and described the second conductive hole, described the first conductor wire, described the first conductive hole, described the second conductor wire and described the second conductive hole are connected to form the coil that is wound around described magnetic core jointly.
2. magnetic element as claimed in claim 1, is characterized in that, the quantity of described coil is one, magnetic core described in described coil continuous winding.
3. magnetic element as claimed in claim 1, is characterized in that, the quantity of described coil is at least two, the described magnetic core of the staggered winding of described at least two coils.
4. magnetic element as claimed in claim 1, it is characterized in that, the quantity of described coil is at least two, and described magnetic core comprises the first paragraph magnetic core and the second segment magnetic core that are oppositely arranged, described at least two coils be wrapped in respectively on institute's first paragraph magnetic core and described second segment magnetic core on.
5. magnetic element as claimed in claim 1, is characterized in that, the distance between the distance between described magnetic core and the first side wall of described accepting groove and the second sidewall of described magnetic core and described accepting groove has at least one to be greater than 2mil.
6. magnetic element as claimed in claim 1, is characterized in that, described magnetic element also comprises resin insulating barrier, and described resin insulating barrier is between described resin extender and described the first conductive layer.
7. magnetic element as claimed in claim 6, is characterized in that, described resin extender in abutting connection with the surface of described resin insulating barrier and the surface co-planar of described substrate.
8. magnetic element as claimed in claim 6, is characterized in that, described resin insulating barrier in abutting connection with the surface of described the first conductive layer and the surface co-planar of described substrate.
9. magnetic element as claimed in claim 1, is characterized in that, the initial permeability of described magnetic core is not less than 100, and the coefficient of expansion of described substrate is not higher than 300ppm, and the hardness of described resin extender 30 is not higher than Shao Shi 90D.
10. magnetic element as claimed in claim 9, is characterized in that, the material of described magnetic core is MnZn or nickel zinc or amorphous or metal-powder-core.
11. magnetic elements as claimed in claim 1, is characterized in that, described accepting groove be shaped as polygon annular or annular.
The manufacture method of 12. 1 kinds of magnetic elements, is characterized in that, comprising:
Mill out accepting groove at substrate, the shape of described accepting groove and the shape of magnetic core match;
Resin extender is filled in described accepting groove;
Described magnetic core is imbedded in described accepting groove;
Solidify described resin extender, described resin extender is coated described magnetic core;
On described substrate, hole and electroplate described substrate, form the first conductive hole and the second conductive hole, and formation the first conductive layer and the second conductive layer, described magnetic core is between described the first conductive layer and described the second conductive layer, described accepting groove comprises the first side wall and the second sidewall, described the first side wall is in the face of described the second sidewall, described the first conductive hole is near described the first side wall and be positioned at the periphery of described accepting groove, and described the second conductive hole is near described the second sidewall and be positioned at the periphery of described accepting groove;
On described the first conductive layer and described the second conductive layer, make circuit, on described the first conductive layer, form the first conductor wire, on described the second conductive layer, form the second conductor wire, described the first conductor wire, described the first conductive hole, described the second conductor wire and described the second conductive hole are connected to form the coil that is wound around described magnetic core jointly.
The manufacture method of 13. magnetic elements as claimed in claim 12, is characterized in that, the quantity of described coil is one, magnetic core described in described coil continuous winding.
The manufacture method of 14. magnetic elements as claimed in claim 12, is characterized in that, the quantity of described coil is at least two, the described magnetic core of the staggered winding of described at least two coils.
The manufacture method of 15. magnetic elements as claimed in claim 12, it is characterized in that, the quantity of described coil is at least two, described magnetic core comprises the first paragraph magnetic core and the second segment magnetic core that are oppositely arranged, described at least two coils be wrapped in respectively on institute's first paragraph magnetic core and described second segment magnetic core on.
The manufacture method of 16. magnetic elements as claimed in claim 12, is characterized in that, solidifies after described resin extender, also comprises:
If the described resin extender after solidifying is higher than described substrate surface, carry out nog plate processing, make the resin extender in described accepting groove solidify rear coplanar with described substrate;
If the described resin extender after solidifying is lower than described substrate surface, at the surface-coated resin insulating barrier of described resin extender, described the first conductive layer is electroplated the surface at described resin insulating barrier.
The manufacture method of 17. magnetic elements as claimed in claim 16, is characterized in that, described resin insulating barrier is liquid resin material, after applying, solidifies.
The manufacture method of 18. magnetic elements as claimed in claim 16, is characterized in that, described resin insulating barrier is semi-solid preparation insulating material, adopts the form of pressing to be formed between described resin extender and described the first conductive layer.
The manufacture method of 19. magnetic elements as claimed in claim 12, is characterized in that, the distance between the distance between described magnetic core and the first side wall of described accepting groove and the second sidewall of described magnetic core and described accepting groove has at least one to be greater than 2mil.
The manufacture method of 20. magnetic elements as claimed in claim 12, is characterized in that, the initial permeability of described magnetic core is not less than 100, and the coefficient of expansion of described substrate is not higher than 300ppm, and the hardness of described resin extender 30 is not higher than Shao Shi 90D.
The manufacture method of 21. magnetic elements as claimed in claim 12, is characterized in that, the viscosity of described resin extender 30 is no more than 20000cps.
The manufacture method of 22. 1 kinds of magnetic elements, is characterized in that, comprising:
Mill out accepting groove at substrate, the shape of described accepting groove and the shape of magnetic core match;
Resin extender is filled in described accepting groove;
Described magnetic core is imbedded in described accepting groove;
Solidify described resin extender, described resin extender is coated described magnetic core;
Surface at described substrate and described resin extender increases resin insulating barrier;
On described substrate, hole;
Electroplate described substrate, form the first conductive hole and the second conductive hole, and formation the first conductive layer and the second conductive layer, described magnetic core is between described the first conductive layer and described the second conductive layer, described accepting groove comprises the first side wall and the second sidewall, described the first side wall is in the face of described the second sidewall, and described the first conductive hole is near described the first side wall and be positioned at the periphery of described accepting groove, and described the second conductive hole is near described the second sidewall and be positioned at the periphery of described accepting groove;
On described the first conductive layer and described the second conductive layer, make circuit, on described the first conductive layer, form the first conductor wire, on described the second conductive layer, form the second conductor wire, described the first conductor wire, described the first conductive hole, described the second conductor wire and described the second conductive hole are connected to form the coil that is wound around described magnetic core jointly.
CN201410091056.2A 2014-03-12 2014-03-12 Magnetic element and manufacturing method of magnetic element Active CN103943306B (en)

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CN111145996A (en) * 2018-11-02 2020-05-12 台达电子企业管理(上海)有限公司 Method for manufacturing magnetic element and magnetic element
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CN109496083A (en) * 2018-11-16 2019-03-19 西安微电子技术研究所 A kind of production method of buried inductance printed circuit board
CN113053642A (en) * 2019-12-26 2021-06-29 深南电路股份有限公司 Filter, manufacturing method thereof and electromagnetic element
CN113053642B (en) * 2019-12-26 2024-06-07 深南电路股份有限公司 Filter, manufacturing method thereof and electromagnetic element
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